• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.917-921
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• 2000

One of the major limitations of productivity and quality in machining is machining accuracy of the machine tools. The machining accuracy is affected by geometric, volumetric errors of the machine tools. This paper suggests the enhancement method of machining accuracy for precision machining of high quality metal reflection mirror or optics lens, etc. In this paper, we study 1) the compensation of linear pitch error with NC controller compensation function using laser interferometer measurement, 2) the method for enhancing the accuracy of NC milling machining by modeling and compensation of volumetric error, 3) the generation of the parabolic face profile. And the method is verified by the parabolic face machining experiment with a vertical three axes NC milling machine. After this study, we will inspect using On-machine measurement and study the repetitive machining by a compensated path

• Journal of the Korean Society for Precision Engineering
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• v.16 no.10
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• pp.45-52
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• 1999

The online realtime positioning error compensation system 'SKY-PACS' is developed to correct geometric errors, thermal errors and tool deflection errors induced by cutting forces on the vertical machining center. 'SKY-PACS' communicates position commands and position compensation signals with the CNC controller at 100Hz, which is CNC control frequency. So the compensation procedure can be applied during axis movement. Using 'SKY-PACS', Maximum 1 axis positioning accuracy was corrected from 5{\mu}m$ to 2{\mu}m$and the squareness error of X-Y table was corrected from 51{\mu}m$/m to below 4{\mu}m$/m. The error compensation under the cutting condition is carried out by ISO10791-7. And the measurement of test-pieces shows that the roundness is corrected rom 8{\mu}m$ to below 5{\mu}m$.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.4
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• pp.97-103
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• 2001

Accuracy of a machined part is determined by the relative motion between the cutting tool and the workpiece. One of the important factors which affects the relative motion is the geometric errors of a machine tool. In this study, firstly, geometric errors are measured by laser interferometer, and the positioning error of each control point selected uniformly on the control surface CAD model can be estimated from th oirm shaping model and geometric error data base. Where a form shaping function is derived from the link of homogeneous transformation matrix. Secondly, control points are shifted to the estimated amount of positioning errors. A new control surface is modeled with NURBS(Non Uniform Rational B-Spline) surface approximation to the shifted control points. By generating tool paths to the redesigned control surface, we reduce the machining error quite.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1352-1357
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• 2004

Thermal error compensation has been developed for CNC (Computer Numerical Control) machining center with moving heat sources. The thermal error in CNC machining center has an effect on machining accuracy more than the geometric error does. Thus, temperature distributions of a spindle unit have been analyzed numerically by a Finite Differential Method and experimentally by an infrared (IR) camera in this study. A multiple variable method has been derived to estimate the thermal deformation of the machine origin stably and effectively after measuring deformation and temperature data. The experimental results for a vertical machining center have shown that the thermal errors of the machine origins were reduced more than 30% by the developed method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1994.10a
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• pp.748-754
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• 1994

This paper deals with a geometric error simulator, measurement and inspection of workpiece errors on the machine tools, and identification and compensation methodology of thermal errors in machining centers. In order to raise the machining accuracy of workpieces a measurement and inspection system on the machine tool is developed. By using MPPGT module Manual and CNC type CMMs are realized on the machining centers. To compensate for geometric and thermal deformation errors of machining centers, a real time and an off line geometric adaptive control system were developed on the machining centers. A vertical and a horizontal machining center equipped with FANUC 0MC were used for experiments. Performance of the systems were confirmed with a large amount of experiment.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.6
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• pp.1545-1553
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• 1995

For general geometry of Coordinate Measuring Machine (CMM), volumetric error equation including 21 systematic error components was showed using vector expression. Different types of CMM listed on an international standard (BS 6808) were classified according to their geometry, and the general volumetric error equation was used for the CMMs. Application of volumetric error equation was also introduced, such as position error compensation, error equation of CNC-machine and parametric error analysis, etc.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.376-381
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• 2001

This paper presents a methodology of machining error compensation by using Artificial Neural Network(ANN) model based on the inspection database of On-Machine-Measurement(OMM) system. First, the geometric errors of the machining center and the probing errors are significantly reduced through compensation processes. Then, we acquire machining error distributions from a specimen workpiece. In order to efficiently analyze the machining errors, we define two characteristic machining error parameters. These can be modeled by using an ANN model, which allows us to determine the machining errors in the domain of considered cutting conditions. Based on this ANN model, we try to correct the tool path in order to effectively reduce the errors by using an iterative algorithm. The iterative algorithm allows us to integrate changes of the cutting conditions according to the corrected tool path. Experimentation is carried out in order to validate the approaches proposed in this paper.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.50-58
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• 2009

Micro laser fabrication techniques can potentially be used for the manufacture of microstructures on the thin flat surfaces with large diameter that are frequently used in semiconductor industries. However, the large size of wafers can cause the degraded machining accuracy of the surface because it can be tilted or distorted by geometric errors of machines or the holding fixtures, etc. To overcome these errors the off-line focusing error compensation method is proposed. By using confocal autofocus system, the focusing error profile of machined surface is measured along the pre-determined path and can be compensated at the next machining process by making the corrected motion trajectories. The experimental results for silicon wafers and invar flat surfaces show that the proposed method can compensate the focusing error within the level of below $6.9{\mu}m$ that is the depth of focus required for the laser micromachining process.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.4 no.3
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• pp.39-47
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• 1995

This paper suggests generalize mathematica mode for the benefit of volumetric error analysis of a multi-axis machine tool machining a sculptured surfaces. The volumetric error, in this paper, is defined as a three dimensional error at the cutting point, which is caused by the geometric errors and the kinematic errors of each axis and alignment errors of the cutting tool. The actual cutting position is analyzed based on the form shaping model including a geometric error of the moving carriage, where a form shaping model is derived from the homogeneous transformation matrix. Then the volumetric error is obtained by calculating the position difference between the actual cutting position and the ideal one calculated from a Nonuniform Rational B-Spline named as NURES. The simulation study shows the effectiveness for predicting the behavior of machining error and for the method of error compensation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1186-1189
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• 2005

Focused Ion Beam machining is an attractive approach to produce nano-scale 3D structures. However, like other beam-based manufacturing processes, the redeposition of the sputtered material during the machining deteriorates the geometric accuracy of ion beam machining. In this research a new approach to reduce the geometric error in FIB machining is introduced. The observed redeposition phenomena have been compared with existing theoretical model. Although the redeposition effect has good repeatability the prediction of exact amount of geometric error in ion beam machining is difficult. Therefore, proposed method utilizes process control approach. Developed algorithm measures the redeposition amount after every production cycle and modifies next process plan. The method has been implemented to a real FIB machine and the experimental results demonstrated considerable improvement of five micrometer-sized pocket machining.