• Proceedings of the Korean Institute of Communication Sciences Conference
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• 1992.06a
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• pp.607-613
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• 1992

• Proceedings of the Korean Vacuum Society Conference
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• 1994.02a
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• pp.102-103
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• 1994

• The Science & Technology
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• v.34 no.2 s.381
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• pp.90-92
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• 2001

• Proceedings of the Korean Vacuum Society Conference
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• 1993.07a
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• pp.73-74
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• 1993

• Proceedings of the Korean Vacuum Society Conference
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• 1999.02a
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• pp.78-78
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• 1999

• Proceedings of the Korean Vacuum Society Conference
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• 2008.08a
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• pp.227-227
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• 2008

• Proceedings of the Korean Vacuum Society Conference
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• 2009.08a
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• pp.320-320
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• 2009

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.617-620
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• 1999

In this study, the polarization e(fecal and the birefringence effect of amorphous germanium (a-Ge) thin films were investigated by using linearly polarized He-Ne laser beam. The a-7e thin films were deposited on the quarts substrate by plasma enhanced chemical vapor deposition (PECVD) and thermal vacuum evaporation In order to obtain the optimum grating arrays, inorganci resists such as Si$_3$N$_4$ and a-Se$_{75}$ Ge$_{25}$ , were prepared with the optimized thickness by Monte Carlo (MC) simulation. As the results of MC simulation, the thickness ofa-Se$_{75}$ Ge$_{25}$ resist was determined with Z$_{min}$ of 360$\AA$ . The resists were exposed to Ga$^{+}$-FIB with accelerating energies of 50 keV, developed by wet etching, and a-Ge thin film was etched by reactive ion-etching (RIE). Finally, we were obtained grating arrays which grating width and linewidth are 0.8${\mu}{\textrm}{m}$, respectively and we studied the polarization and birefringence effect in transmission grating array made of high refractive amorphous material, and the applicability as waveplates and polarizers in optical device.e.e.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.5
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• pp.69-74
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• 2010

An increasing interest towards the investigations of chalcogenide glasses has been observed in the past years. This interest is due to their specific properties, as well as to the possibilities for their application in different fields of science. The optical devices, working on the basis of photoinduced phase transition between amorphous and crystalline state in the chalcogenide glasses, are a perspective for the micro- and nano-electronics. Here we were analysis basic physical properties for Ge-As-Se and As-Se chalcogenide glasses samples for characteristic for a planning of chalcogenide aspheric lens. From differential DTA/TG results, activation energies of the crystallizations of $Ge_{10}As_{40}Se_{50}$ and $As_{40}Se_{60}$ were approximately 3.6 eV and 3.3 eV, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.4
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• pp.204-209
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• 2017

Thermal and structural stability in the glass transition region of chalcogenide glasses has been investigated in terms of thermodynamics for application to various optoelectronic devices. In this study, the compositions of $Ge_xSb_{20}Se_{80-x}$ (x = 10, 15, 20, 25, and 30) were selected to investigate the glass stability according to germanium ratios. The chalcogenide bulks were fabricated by using a traditional melt-quenching method. Thin films were deposited by a thermal evaporation system, maintaining the deposition ratio of $3{\sim}5{\AA}$ in order to have uniformity. The thermal and structural properties were measured by a differential scanning calorimeter (DSC) and X-ray diffraction (XRD). The DSC analysis provided thermal parameters and theoretical glass region stabilities. The XRD analysis supported the theoretical stabilities because of where the crystallization peak data occurred.