Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.02a
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- Pages.102-103
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- 1994
Monte-Carlo simulation of Focused Ion Beam Lithograpph (II)
(a-$Se_{75}Ge_{25}$ 박막의 $Ga^+$ 이온 산란 및 노출특성)
Abstract
Keywords