• Proceedings of the KIEE Conference
• /
• 1999.11d
• /
• pp.848-850
• /
• 1999

In this study, PZT etching was performed using planar inductively coupled Ar(20)/$Cl_2/BCl_3$ plasma, The etch rate of PZT film was 2450 $\AA/min$ at Ar(20)/$BCl_3$(80) gas mixing ratio and substrate temperature of $80^{\circ}C$. X-ray photoelectron spectroscopy (XPS) analysis for film composition was utilized. The chemical bond of PbO is broken by ion bombardment, and the peak of metal Pb in a Pb 4f peak begins to appear upon etching, decreasing Pb content faster than Zr and Ti. As increase content of additive $BCl_3$, the relative content of oxygen decreases rapidly. We thought that abundant Band BCl radicals made volatile oxy-compound such as $B_{x}O_{y}$ and/or $BClO_x$ bond. To understand etching mechanism, Langmuir probe and optical emission spectroscopy (OES) analysis were utilized for plasma diagnostic.

• Journal of the Korean Society of Propulsion Engineers
• /
• v.12 no.1
• /
• pp.16-22
• /
• 2008

The effect of two-phase spray injected into subsonic cross-flow was studied experimentally. External-mixing of two-phase spray from orifice nozzle with L/d of 3 was tested with various air-liquid ratio that ranges from 0 to 59.4%. Trajectory of spray and breakup phenomena were investigated by shadowgraph photography. Detailed spray structure was characterized in terms of SMD, droplet velocity, and volume flux using PDPA. Experimental results indicate that penetration length was increased and collision point of liquid jets approached to nozzle exit and distributions of mist-like spray were obtained by increasing air-liquid ratio.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.26 no.1
• /
• pp.125-132
• /
• 2002

An experimental study on the characteristics of stability of propane turbulent nonpremixed jet flames discharged normal to air free-streams with uniform velocity profile is conducted. Experimental observations are focused on the flame shape, the stability considering two kinds of flame, lift-off distance, and the flame length according to velocity ratio. In order to investigate the mixing structure of the flame base at the lower limit, we employ the RMS technique and measure the species concentration by a gas chromatography. In the results of the stability curve and lifted flame, it is fecund that the dependency of nozzle diameter is closely related to the large-scale vortical structure representing counter-rotating vortices pair. Also, the detailed discussion on the phenomenon of blowout due to this large vortical motion, is provided.

• New & Renewable Energy
• /
• v.16 no.2
• /
• pp.47-53
• /
• 2020

The amount of food waste and its water content depends on both the season and region. In particular, the water content typically varies between 73.8 wt.% and 83.3 wt.%, depending on the proportion of vegetables. Current food waste drying technologies are capable of reducing the water content to less than 10 wt.%, while increasing the heating value. Ongoing studies aim to utilize dried food waste as fuel. Food waste can be used to produce solid refuse fuel (SRF) by mixing it with various solid fuels or other types of waste. The analysis of specimens is very important when considering the direct combustion of food waste or its co-firing with solid fuels. In this study, the weight reduction of specimens after burning them in a small combustor, and compared with the results of thermogravimetric analysis (TGA). The concentration of various chemicals was also measured to define the characteristics of waste generation. Performed proximate analysis, elemental analysis, TGA, combustion experiment, the heating value, and derivative thermogravimetry (DTG).

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.54-54
• /
• 2011

The demand for low-friction, wear and corrosion resistant components, which operate under severe conditions, has directed attentions to advanced surface engineering technologies. The Filtered Vacuum Arc Cathode Deposition (FVACD) process has demonstrated atomically smooth surface at relatively high deposition rates over large surface areas. Preparation of Ti-Si-C-N nanocomposite coatings on (100) Si and stainless steel substrates with tetramethylsilane (TMS) gas pressures to optimize the film preparation conditions. Ti-S-C-N coatings were characterized using X-ray diffraction, X-ray photoelectron spectroscopy, transmission electron microscopy, nanoindentation, Rockwell C indentation and ball-on-disk wear tests. The XRD results have confirmed phase formation information of TiSiCN coatings, which shows mixing of TiN and TiC structure, corresponding to (111), (200) and (220) planes of TiCN. The chemical composition of the film was investigated by XPS core level spectra. The binding energy of the elements present in the films was estimated using XPS measurements and it shows present of elemental information corresponding to Ti2p, N1s, Si 2p and C1. Film hardness and elastic modulus were measured with a nano-indenter, and film hardness reached 40 GPa. Tribological behaviors of the films were evaluated using a ball-on-disk tribometer, and the films demonstrated properties of low-friction and good wear resistance.

• Journal of Korean Society for Atmospheric Environment
• /
• v.22 no.6
• /
• pp.940-953
• /
• 2006

The major source of carbon monoxide (CO) at the Earth's surface is the incomplete combustion of biomass and fossil fuels. Because the global lifetime of CO is about two months, it can be used as a tracer for pollution from anthropogenic activities and biomass hurtling. In this paper, we introduced the principle and algorithm of the Measurement of Pollution in the Troposphere (MOPITT) instrument for global CO monitoring. The MOPITT instrument, which was launched on the Satellite Terra in 1999, measures CO column and mixing ratio based on gas correlation radiometry. CO levels can be determined by a retrieval algorithm based on the maximum likelihood method minimizing the difference between observed and modeled radiances. MOPITT level 2 data (HDF format) can be downloaded through the Earth Observing System (EOS) data gateway of NASA. ASCII files of CO parameters can be extracted from HDF files, and then temporal and spatial distributions can be obtained. Finally, we showed an example of CO monitoring in April 2000. The locations of forest fires and distribution of MOPITT CO clearly indicated that not only anthropogenic emissions but also forest fires play an important role in CO levels and global CO distribution. Our introduction to MOPITT and the example of MOPITT data interpretation would be helpful for scientists who want to use the EOS data.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.52 no.10
• /
• pp.476-480
• /
• 2003

In this paper, we have performed 3-dimensional time-resolving measurement of the Ne light emitted from the cell of plasma display panel(PDP) as a function of the pressure using the scanned point detecting system. From the temporal behavior results, we could analyze the discharge behavior of panel with Ne-Xe(4%) mixing gas and 300 torr, 400 torr and 500 torr pressure. At the top view of panel, the discharge of 300 torr panel starts at the 634 ns and ends at the 722 ns. The emission duration time is about 90 ns. The discharge of 400 torr panel starts at the 682 ns and ends at the 786 ns. the emission duration time is about 100 ns. Also, the discharge of 500 torr panel starts at the 770 ns and ends at the 826 ns. the emission duration time is about 56 ns. The discharge moves from inner edge of cathode electrode to outer cathode electrode forming arc type. In the side view of 300 torr, 400 torr and 500 torr an emission shows that the light is detected up to 180${\mu}{\textrm}{m}$, 150${\mu}{\textrm}{m}$ and 70${\mu}{\textrm}{m}$ height of barrier rib and the emission distribution of the 300 torr is wider than 400 torr, 500 torr.

• Transactions on Electrical and Electronic Materials
• /
• v.11 no.4
• /
• pp.166-169
• /
• 2010

In this study, we changed the etch parameters (gas mixing ratio, radio frequency [RF] power, direct current [DC]-bias voltage, and process pressure) and then monitored the effect on the $HfAlO_3$ thin film etch rate and the selectivity with $SiO_2$. A maximum etch rate of 108.7 nm/min was obtained in $Cl_2$ (3 sccm)/$BCl_3$ (4 sccm)/Ar (16 sccm) plasma. The etch selectivity of $HfAlO_3$ to $SiO_2$ reached 1.11. As the RF power and the DC-bias voltage increased, the etch rate of the $HfAlO_3$ thin film increased. As the process pressure increased, the etch rate of the $HfAlO_3$ thin films increased. The chemical state of the etched surfaces was investigated with X-ray photoelectron spectroscopy. According to the results, the etching of $HfAlO_3$ thin film follows the ion-assisted chemical etching.

• Journal of the Korean Society of Propulsion Engineers
• /
• v.15 no.4
• /
• pp.35-40
• /
• 2011

An experimental study of the flame response in a turbulent premixed combustor has been conducted in order to investigate mechanisms for combustion instabilities in a lean premixed gas turbine combustor. A lab-scale combustor and mixing section system were fabricated to measure the flame transfer function. Measurements are made of the velocity fluctuation in the nozzle using hot wire anemometry and of the heat release fluctuation in the combustor using chemiluminescence emission. The results show that the flame transfer functions are greatly dependent on the modulation frequency as well as operating conditions such as equivalence ratio. Flame dynamics can be generalized as a function of Strouhal number which is a ratio of flame length to modulation wave length.

• Journal of the Semiconductor & Display Technology
• /
• v.11 no.1
• /
• pp.29-33
• /
• 2012

In this study, we have investigated the structural and electrical characteristics of IZO thin films deposited under hydrogen atmosphere on flexible substrate for the OLED (organic light emitting diodes) devices. For this purpose, PES was used for flexible substrate and IZO thin films were deposited by RF magnetron sputtering under hydrogen ambient gases (Ar, $Ar+H^2$) at room temperature. In order to investigate the influences of the hydrogen, the flow rate of hydrogen in argon mixing gas has been changed from 0.1sccm to 0.5sccm. All the samples show amorphous structure regardless of flow rate. The electrical resistivity of IZO films increased with increasing flow rate of $H^2$ under $Ar+H^2$. All the films showed the average transmittance over 85% in the visible range. The OLED device was fabricated with different IZO electrodes made by configuration of IZO/$\acute{a}$-NPD/DPVB/$Alq_3$/LiF/Al to elucidate the performance of IZO substrate. OLED devices with the amorphous-IZO (a-IZO) anode film show good current density-voltage-luminance characteristics. This suggests that flat surface roughness and low electrical resistivity of a-IZO anode film lead to more efficient anode material in OLED devices.