• Title/Summary/Keyword: Gas number density

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Reactive Ion Etching of InP Using $CH_4/H_2$ Inductively Coupled Plasma ($CH_4/H_2$유도결합 플라즈마를 이용한 InP의 건식 식각에 관한 연구)

  • 박철희;이병택;김호성
    • Journal of the Korean Vacuum Society
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    • v.7 no.2
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    • pp.161-168
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    • 1998
  • Reactive ion etching process for InGaAs/InP using the CH4/H2 high density inductively coupled plasma was investigated. The experimental design method proposed by Taguchi was utilized to cover the whole parameter range while maintaining reasonable number of actual experiments. Results showed that the ICP power mainly affects surface roughness and verticality of the sidewall, bias power does etch rate and verticality, CH4 gas concentraion does the verticality and etch rate, and the distance between the induction coil and specimen mostly affects the surface roughness. It was also observed that the chamber pressure is the dominant parameter for the etch rate and verticality of the sidewall. The optimum condition was ICP power 700W, bias power 150 W, 15% $CH_4$, 7.5 mTorr, and 14 cm distance, resulting in about 3 $\mu\textrm{m}$/hr etch rate with smooth surfaces and vertical mesa sidewalls.

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A DFT Study on the Polarizability of Di-substituted Arene (o-, m-, p-) Molecules used as Supercharging Reagents during Electrospray Ionization Mass Spectrometry

  • Abaye, Daniel A.;Aniagyei, Albert;Adedia, David;Nielsen, Birthe V.;Opoku, Francis
    • Mass Spectrometry Letters
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    • v.13 no.3
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    • pp.49-57
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    • 2022
  • During electrospray ionization mass spectrometry (ESI-MS) analysis of proteins, the addition of supercharging agents allows for adjusting the maximal charge state, affecting the charge state distribution, and increases the number of ions reaching the detector thus, improving signal detection. We postulate that in di-substituted arene isomers, molecules with higher polarizability values should generate greater interactions and hence elicit higher signal intensities. Polarizability is an electronic parameter which has been demonstrated to predict many chemical interactions. Many properties can be predicted based on charge polarization. Molecular polarizability is a vital descriptor for explaining intermolecular interactions. We employed DFT (density functional/Hartree-Fock hybrid model, B3LYP)-derived descriptors and computed molecular polarizability for ten disubstituted arene reagents, each set made up of three (ortho, meta, para) isomers, with reported use as supercharging reagents during ESI experiments. The atomic electronic inputs were ionization potential (IP), electron affinity (EA), electronegativity (𝛘), hardness (η), chemical potential (µ), and dipole moment (D). We determined that the para isomers showed the highest polarizability values in nine of the ten sets. There was no difference between the ortho and meta isomers. Polarizability also increased with increasing complexity of the substituents on the benzene ring. Polarizability correlated positively with IP, EA, 𝛘, η, and D but correlated negatively with chemical potential. This DFT study predicts that the para isomers of di-substituted arene isomers should elicit the strongest ESI responses. An experimental comparison of the three isomers, especially of larger supercharging molecules, could be carried out to establish this premise.

Habitability evaluation considering various input parameters for main control benchboard fire in the main control room

  • Byeongjun Kim ;Jaiho Lee ;Seyoung Kim;Weon Gyu Shin
    • Nuclear Engineering and Technology
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    • v.54 no.11
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    • pp.4195-4208
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    • 2022
  • In this study, operator habitability was numerically evaluated in the event of a fire at the main control bench board (MCB) in a reference main control room (MCR). It was investigated if evacuation variables including hot gas layer temperature (HGLT), heat flux (HF), and optical density (OD) at 1.8 m from the MCR floor exceed the reference evacuation criteria provided in NUREG/CR-6850. For a fire model validation, the simulation results of the reference MCR were compared with existing experimental results on the same reference MCR. In the simulation, various input parameters were applied to the MCB panel fire scenario: MCR height, peak heat release rate (HRR) of a panel, number of panels where fire propagation occurs, fire propagation time, door open/close conditions, and mechanical ventilation operation. A specialized-average HRR (SAHRR) concept was newly devised to comprehensively investigate how the various input parameters affect the operator's habitability. Peak values of the evacuation variables normalized by evacuation criteria of NUREG/CR-6850 were well-correlated as the power function of the SAHRR for the various input parameters. In addition, the evacuation time map was newly utilized to investigate how the evacuation time for different SAHRR was affected by changing the various input parameters. In the previous studies, it was found that the OD is the most dominant variable to determine the MCR evacuation time. In this study, however, the evacuation time map showed that the HF is the most dominant factor at the condition of without-mechanical ventilation for the MCR with a partially-open false ceiling, but the OD is the most dominant factor for all the other conditions. Therefore, the method using the SAHRR and the evacuation time map was very useful to effectively and comprehensively evaluate the operator habitability for the various input parameters in the event of MCB fires for the reference MCR.

Development and spectroscopic characteristics of the high-power wave guide He Plasma (도파관식 고출력 헬륨 플라즈마의 개발과 분광학적 특성 연구)

  • Lee, Jong-Man;Cho, Sung-Il;Woo, Jin-Chun;Pak, Yong-Nam
    • Analytical Science and Technology
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    • v.25 no.5
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    • pp.265-272
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    • 2012
  • Okamoto cavity was modified to generate high power (2.45 GHz, 2 kW) He, N2 and Ar plasmas with WR-340 waveguide. Many factors which influence to the plasma generation were optimized and investigated for the spectroscopic properties of the He plasma generated. Some of the important factors are the diameter of the inner conductor, the distance between the inner and outer conductors and the distance between the tip of the inner conductor and the torch. After optimization for the He, two torches (a commercial mini torch for ICP and a tangential flow torch made locally) were compared and showed similar results for the helium plasma gas flow of 25 L/min~30 L/min. A tall torch (extended) was used to block the air in-flow and reduced the background intensity at 340 nm region (NH band). Emission intensity was measured for determination of halogen element in the aqueous solution with power and carrier gas flow rate. Electron number density and the excitation temperature were on the order of $3.67{\times}10^{11}/cm^3$ and 4,350 K, respectively. These values are similar or a bit smaller than other microwave plasmas. It has been possible to analyze aqueous samples. The detection limit for Cl (479.45 nm) was obtained to be 116 mg/L and needs analytical optimization for the better performance.

A Review on Major Factors for Microalgae Biofuel Commercialization (미세조류 바이오연료 상용화를 위한 주요 인자 연구)

  • Kang, Do-Hyung;Heo, Soo-Jin;Oh, Chulhong;Ju, Se-Jong;Jeon, Seon-Mi;Choi, Hyun-Woo;Noh, Jae Hoon;Park, Se Hun;Kim, Tae-Young
    • Ocean and Polar Research
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    • v.34 no.4
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    • pp.365-384
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    • 2012
  • Microalgae are photosynthetic microorganisms that are highly productive in the presence of basic renewable natural sources (light, $CO_2$, water and nutrients). They can synthesize lipids, carbohydrates and proteins in a small number of days. Subsequently, these carbon-captured products can be processed into both biofuels and valuable co-products. Additionally, microalgae would be an ideal feedstock for replacing land-based food crops with cellular products as high energy density transportation fuels. These microscopic organisms could contribute a significant amount of renewable energy on a global scale. In Korea, microalgae biofuel research was common in the early 1990s. The research activities were unfortunately stopped due to limited governmental funds and low petroleum prices. Interest in algal biofuels in Korea has been growing recently due to an increased concern over oil prices, energy security, greenhouse gas emissions, and the potential for other biofuel feedstock to compete for limited agricultural resources. The high productivity of microalgae suggests that much of the Korean transportation fuel requirements can be met by biofuels at a production cost competitive with the increasing cost of petroleum seen in early 2008. At this time, the development of microlalgal biomass production technology remains in its infancy. This study reviewed microalgae culture systems and biomass production, harvesting, oil extraction, conversion, and technoeconomical bottlenecks. Many technical and economic barriers to using microalgal biofuels need to be overcome before mass production of microalgal-derived fuel substitutes is possible. However, serious efforts to overcome these barriers could become a large-scale commercial reality. Overall, this study provides a brief overview of the past few decades of global microalgal research.

Polydeoxyribonucleotide Improves Peripheral Tissue Oxygenation and Accelerates Angiogenesis in Diabetic Foot Ulcers

  • Kim, Seoyoung;Kim, Junhyung;Choi, Jaehoon;Jeong, Woonhyeok;Kwon, Sunyoung
    • Archives of Plastic Surgery
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    • v.44 no.6
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    • pp.482-489
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    • 2017
  • Background Polydeoxyribonucleotide (PDRN) is known to have anti-inflammatory and angiogenic effects and to accelerate wound healing. The aim of this study was to investigate whether PDRN could improve peripheral tissue oxygenation and angiogenesis in diabetic foot ulcers. Methods This was a prospective randomized controlled clinical trial. Twenty patients with a non-healing diabetic foot ulcer were randomly distributed into a control group (n=10) and a PDRN group (n=10). Initial surgical debridement and secondary surgical procedures such as a split-thickness skin graft, primary closure, or local flap were performed. Between the initial surgical debridement and secondary surgical procedures, 0.9% normal saline (3 mL) or PDRN was injected for 2 weeks by the intramuscular (1 ampule, 3 mL, 5.625 mg, 5 days per week) and perilesional routes (1 ampule, 3 mL, 5.625 mg, 2 days per week). Transcutaneous oxygen tension ($TcPO_2$) was evaluated using the Periflux System 5000 with $TcPO_2/CO_2$ unit 5040 before the injections and on days 1, 3, 7, 14, and 28 after the start of the injections. A pathologic review (hematoxylin and eosin stain) of the debrided specimens was conducted by a pathologist, and vessel density (average number of vessels per visual field) was calculated. Results Compared with the control group, the PDRN-treated group showed improvements in peripheral tissue oxygenation on day 7 (P<0.01), day 14 (P<0.001), and day 28 (P<0.001). The pathologic review of the specimens from the PDRN group showed increased angiogenesis and improved inflammation compared with the control group. No statistically significant difference was found between the control group and the PDRN group in terms of vessel density (P=0.094). Complete healing was achieved in every patient. Conclusions In this study, PDRN improved peripheral tissue oxygenation. Moreover, PDRN is thought to be effective in improving inflammation and angiogenesis in diabetic foot ulcers.

Effect of F$e_2$P Addition on Microstructures of Sintered 4600 Steel (4600계 소결강의 조직에 미치는 F$e_2$P첨가의 영향)

  • Kim, Dong-Uk;Lee, Wan-Jae
    • Korean Journal of Materials Research
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    • v.2 no.6
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    • pp.428-435
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    • 1992
  • AISI 4600 Iron powder was mixed with 0~1.0% phosphor as F$e_2$P powder and/or 0~0.8% carbon as graphite powder in rotating mixer. Mixed powder was pressed 800MPa in double-punch mould. Compacts were sintered at 115$0^{\circ}C$for 30 min. in vacuum or mixed hydrogen and nitrogen gas. Sintered compacts were ground and polished, and etched by 2% nital etchant. The microstructure was observed by image analyzer and optical microscope. Density and microhardness were tested by ASTM B3l2 and Microvickers hardness tester. The results obtained were as follows : (1) As the amount of F$e_2$P powder increased, sintered microstructure showed more densified effect and the grain size was larger. (2) The shape of pore was rounded and the number of pore was decreased by F$e_2$P addition. But mean pore size was larger with F$e_2$P content. (3) Simultaneous alloying addition of F$e_2$P and graphite brought about larger grain growth than respective addition. (4) Sintering atmosphere did not affect the microstructure. (5) Hardness of sintered compact increased with phosphrous and carbon content.

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Study of FAME components and total contents on Micro-algal Biodiesel derived from Dunaliella tertiolecta (Dunaliella tertiolecta를 이용한 미세조류 유래 바이오디젤의 FAME 성분 특성 연구)

  • Lee, Don-Min;Min, Kuyung-Il;Yim, Eui-Soon;Ha, Jong-Han;Lee, Choul-Gyun;Lee, Bong-Hee
    • Journal of the Korean Applied Science and Technology
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    • v.31 no.2
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    • pp.320-328
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    • 2014
  • Biodiesel has very similar physical properties (density, kinematic viscosity) and has even higher cetane number compare with conventional diesel. There are no necessity to change or modify the infra-structure & engine system. It is known that fatty acid methyl ester (FAME) is oxygen-contained components increasing the combustibility, biodegradability and reduced the exhaust harmful gas. These things made the biodiesel more popular as an alternative diesel fuel. But biodiesel's sources are controversial issues about $CO_2$ reduction effect at this time because those mainly come from edible plants such as soy, palm, rapeseed already spent lot of $CO_2$ to cultivate. Whereas micro-algae is focused because they are inedible and has rapid growth rates & high carbon-dioxide adsorption rate per area. In this study, we analyze the each FAME components using $GC{\times}GC$-TOFMS in stead of GC-FID and verify the previous total FAME contents method's applicability through the micro algal biodiesel derived from Dunaliella tertiolecta.

Development of an Improved Numerical Methodology for Design and Modification of Large Area Plasma Processing Chamber

  • Kim, Ho-Jun;Lee, Seung-Mu;Won, Je-Hyeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.221-221
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    • 2014
  • The present work proposes an improved numerical simulator for design and modification of large area capacitively coupled plasma (CCP) processing chamber. CCP, as notoriously well-known, demands the tremendously huge computational cost for carrying out transient analyses in realistic multi-dimensional models, because electron dissociations take place in a much smaller time scale (${\Delta}t{\approx}10-8{\sim}10-10$) than time scale of those happened between neutrals (${\Delta}t{\approx}10-1{\sim}10-3$), due to the rf drive frequencies of external electric field. And also, for spatial discretization of electron flux (Je), exponential scheme such as Scharfetter-Gummel method needs to be used in order to alleviate the numerical stiffness and resolve exponential change of spatial distribution of electron temperature (Te) and electron number density (Ne) in the vicinity of electrodes. Due to such computational intractability, it is prohibited to simulate CCP deposition in a three-dimension within acceptable calculation runtimes (<24 h). Under the situation where process conditions require thickness non-uniformity below 5%, however, detailed flow features of reactive gases induced from three-dimensional geometric effects such as gas distribution through the perforated plates (showerhead) should be considered. Without considering plasma chemistry, we therefore simulated flow, temperature and species fields in three-dimensional geometry first, and then, based on that data, boundary conditions of two-dimensional plasma discharge model are set. In the particular case of SiH4-NH3-N2-He CCP discharge to produce deposition of SiNxHy thin film, a cylindrical showerhead electrode reactor was studied by numerical modeling of mass, momentum and energy transports for charged particles in an axi-symmetric geometry. By solving transport equations of electron and radicals simultaneously, we observed that the way how source gases are consumed in the non-isothermal flow field and such consequences on active species production were outlined as playing the leading parts in the processes. As an example of application of the model for the prediction of the deposited thickness uniformity in a 300 mm wafer plasma processing chamber, the results were compared with the experimentally measured deposition profiles along the radius of the wafer varying inter-electrode gap. The simulation results were in good agreement with experimental data.

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Effect on the Growth of Pllioblastus pygmaed and Soil Characteristics as Affected by Difference of Soil Thickness and Soil Mixture Ratio in the Shallow-Extensive Green Roof Module System (저관리 옥상녹화 모듈에서 토심, 배합비의 차이가 토양의 특성 및 흰줄무늬사사의 생육에 미치는 영향)

  • Park, Je-Hea;Ju, Jin-Hee;Yoon, Yong-Han
    • Journal of Environmental Science International
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    • v.19 no.7
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    • pp.871-877
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    • 2010
  • The objectives of this study were to compare growth of Pllioblastus pygmaed and soil characteristics as affected by difference of soil thickness and mixture ratio in shallow-extensive green roof module system, and to identify the level of soil thickness and mixture as suitable growing condition to achieve the desired plants in green roof. Different soil thickness levels were achieved under 15cm and 25cm of shallow-extensive green roof module system that was made by woody materials for $500{\times}500{\times}300mm$. Soil mixture ratio were three types for perlit: peatmoss: leafmold=6:2:2(v/v/v, $P_6P_2L_2$), perlit: peatmoss: leafmold=5:3:2(v/v/v, $P_5P_3L_2$) and perlit: peatmoss: leafmold=4:4:2(v/v/v, $P_4P_4L_2$). On June 2006, Pllioblastus pygmaed were planted directly in a green roof module system in rows. All treatment were arranged in a randomized complete block design with three replication. The results are summarized below. In term of soil characteristics, Soil acidity and electric conductivity was measured in pH 6.0~6.6 and 0.12dS/m~0.19dS/m, respectively. Organic matter and exchangeable cations desorption fell in the order: $P_4P_4L_2$ > $P_5P_3L_2$ > $P_6P_2L_2$. $P_6P_2L_2$ had higher levels of the total solid phase and liquid phase, and $P_4P_4L_2$ had gas phase for three phases of soil in the 15cm and 25cm soil thickness. Although Pllioblastus pygmaed was possibled soil thickness 15cm, there was a trend towards increased soil thickness with increased leaf length, number of leaves and chlorophyll contents in 25cm. The growth response of Pllioblastus pygmaed had fine and sustain condition in order to $P_6P_2L_2$ = $P_5P_3L_2$ > $P_4P_4L_2$. However, The results of this study suggested that plants grown under $P_4P_4L_2$ appear a higher density ground covering than plants grown under $P_6P_2L_2$. Collectively, our data emphasize that soil thickness for growth of Pllioblastus pygmaed were greater than soil mixture ratio in shallow-extensive green roof module system.