• 제목/요약/키워드: Gas monitoring system

검색결과 463건 처리시간 0.029초

Chamber Monitoring with Residual Gas Analysis with Self-Plasma Optical Emission Spectroscopy

  • 장해규;이학승;박정건;채희엽
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
    • /
    • pp.262.2-262.2
    • /
    • 2014
  • Plasma processing is an essential process for pattern etching and thin film deposition in nanoscale semiconductor device fabrication. It is necessary to maintain plasma chamber in steady-state in production. In this study, we determined plasma chamber state with residual gas analysis with self-plasma optical emission spectroscopy. Residual gas monitoring of fluorocarbon plasma etching chamber was performed with self-plasma optical emission spectroscopy (SPOES) and various chemical elements was identified with a SPOES system which is composed of small inductive coupled plasma chamber for glow discharge and optical emission spectroscopy monitoring system for measuring optical emission. This work demonstrates that chamber state can be monitored with SPOES and this technique can potentially help maintenance in production lines.

  • PDF

Gas Turbine Data Acquisition and Monitoring System for Combined Cycle Power Plant

  • Kang, Feel-Soon
    • Journal of information and communication convergence engineering
    • /
    • 제6권4호
    • /
    • pp.405-410
    • /
    • 2008
  • This paper presents a data acquisition and monitoring system for a gas turbine. The proposed system entitled C-Tune DAS plays an important role to make an analysis of the real-time operation of the gas turbine under maintenance. The designed LabVIEW based software is divided into three parts according to their original functions, i.e., data acquisition, data analysis with display, and data storage. The data acquisition part receives data from a PMS (Plant Management System) server and two cFPs (Compact-Field Point). To verify the validity of the developed system, it is applied to gas turbines in the combined cycle power plant in Korea.

세라믹 가스센서를 이용한 토양증기추출공정의 배출가스 모니터링 기법 연구

  • 양지원;조현정;이재영;곽무영
    • 한국지하수토양환경학회:학술대회논문집
    • /
    • 한국지하수토양환경학회 2002년도 추계학술발표회
    • /
    • pp.250-252
    • /
    • 2002
  • The goals of environmental monitoring are to locate and quantify the significant contamination, estimate the fate and transport, estimate the potential exposure and risks to humans and the environment, and track the performance of various remedial technologies. In this study, ceramic gas sensor system is proposed to enhance the effectiveness of soil vapor extraction (SVE) process by monitoring the effluent gas. SVE is a technique that is widely used to remediate unsaturated soils contaminated with volatile organic contaminants. The sensor response for benzene, toluene, and xylene, the representative effluent gas compositions of SVE process, was evaluated using the proposed sensor system. As a result, it was verified that the response of sensor was increased or decreased very sensitively according to the change of the effluent gas concentration. Besides, the sensor could detect the difference over a wide range of concentration and it was more sensitive in order of xylene, toluene, and benzene. It is expected that this VOC analysis method results in field monitoring costs saying and appropriate immediate action for process control. More detailed experiments are being conducted in our research group.

  • PDF

가스절연개폐장치의 감시 및 진단을 위한 시스템 설계 및 구현 (System design and realization of Gas Insulator Switchgear for monitoring and diagnostic)

  • 이혁진;김윤서;양오
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2002년도 합동 추계학술대회 논문집 정보 및 제어부문
    • /
    • pp.391-394
    • /
    • 2002
  • In this paper, we describe the implementation of a monitoring and diagnostic system for Gas Insulator Switchgear(GIS). This system monitors operation status of GIS and transmits data from GIS to host. With this system, a operator can monitor a operating condition and judge the aging of each device, and prevent the failure or breakdown in advance.

  • PDF

수소충전소 실시간 이중 모니터링 시스템 운영을 통한 안전성 향상 (Status of the Real-time Safety Monitoring System of Hydrogen Refueling Station According to the Operation)

  • 이진우;박종희;김대현;탁송수;양병조
    • 한국가스학회지
    • /
    • 제25권6호
    • /
    • pp.92-97
    • /
    • 2021
  • 2021년 2월 '고압가스 안전관리법 시행규칙' 개정에 따라 2021년 8월27일부터 수소자동차 충전소에 설치한 가스누출검지경보장치, 긴급차단장치 및 화염검지기 등 안전장치 작동상태를 실시간으로 한국가스안전공사에서 관리하는 전산시스템으로 전송하여 운영하고 있다. 모니터링 시스템 구축결과와 함께 그동안 발생한 이상신호 통계분석 결과를 공유하여 수소충전소 안전관리에 활용토록 하고, 향후 안전관리 방향을 모색하고자 한다.

가스계 소화시스템용 소화약제 저장용기 누설 검출 무선 시스템 개발 (Development of Monitoring RF System on Leakage of Gas Cylinder in Gaseous Fire Extinguishing System)

  • 소수현;오주환;차철웅;이대근
    • 한국화재소방학회:학술대회논문집
    • /
    • 한국화재소방학회 2008년도 추계학술논문발표회 논문집
    • /
    • pp.7-10
    • /
    • 2008
  • In our study, Monitoring RF System in real-time on leakage of gas cylinder is developed. The system is consisted of Pressure Transmitting part, Main Controller and Operating program. The pressure data of gas cylinder are transmitted to the modem of main controller part by RF module of Pressure Transmitting part and the data received through the modem are recorded in real-time and showed the situation of gas cylinder on the PC monitor. Through the test on the case of the artificial pressure-reduction, the detecting performance. of the developed system is conformed.

  • PDF

전력기기 이상 진단을 위한 가스 센싱 기술 검토 (Gas Sensing Technologies for Power System Diagnosis)

  • 이재덕;류회석;최상봉;남기영;정성환;김대경;최돈수
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2004년도 하계학술대회 논문집 A
    • /
    • pp.622-624
    • /
    • 2004
  • To reduce the effect of fault on power systems, like GIS and transformers, power system authorities are using various technologies to monitor and diagnose there facilities. Developing On-Line monitoring systems by using IT technology is main issue of nowadays for power system authorities. Among various monitoring and diagnosis technologies, gas sensing technologies can be most useful candidate because large power systems are using gas and oils for there insulation and analyzing density of gases that are included in the gas and oils for insulation purpose tell us what kind of reaction were arisen. In this paper, we describe on the gas sensing technology that are used for power systems monitoring and diagnosis.

  • PDF

하폐수의 재사용 및 방류를 위한 폭기조 내 표준산소전달 효율 모니터링 시스템에 관한 연구 (Study on the Standard Oxygen Transfer Efficiency Monitoring System in the Aeration Tank for Reuse and Discharge of Wastewater)

  • 김홍석;김용범;고경한;김상우;심환보
    • 자원리싸이클링
    • /
    • 제28권6호
    • /
    • pp.73-78
    • /
    • 2019
  • 본 연구에서는 활성 슬러지 하수처리장에서 배출되는 off-gas에 대한 포집 및 측정 모니터링을 통해 폭기조의 산소전달효율을 측정하고 청수와 비교하여 시스템의 신뢰성을 검증하는 연구를 수행하였다. 먼저, 청수를 기반으로 용존산소, 산소전달계수 및 표준산소전달효율을 측정하였으며 각각 8.60 mg/L, 9.49/hr, 23.96%의 값이 얻어졌다. 한편, 하수처리장 현장에서 진행한 off-gas 시험 결과 표준산소전달효율이 22.81%로 계산되어 청수와의 차이가 거의 없는 것으로 나타났다. 이는 현장에 설치된 산기관의 성능 및 폭기조의 상황을 모니터링 시스템을 이용해 실시간으로 확인함으로써 신뢰성있는 데이터를 확보할 수 있음을 의미한다.

TIG클래딩 공정에 대한 품질 모니터링기법의 개발 (Development of Welding Quality Monitoring Method for TIG Cladding)

  • 조상명;박정현;손민수
    • Journal of Welding and Joining
    • /
    • 제31권6호
    • /
    • pp.90-95
    • /
    • 2013
  • Pipe inside clad welding is mainly used to the flow pipe of sub-sea or chemical plant. For the inside clad welding to the medium pipe with the diameter of about 12", TIG welding is frequently applied with filler metal. In this case, the clad welding has the very broad weld area over $10m^2$. And, the non-destructive test (NDT) such as ultrasonic test (UT) or radiographic testing (RT) should be conducted on the broad weld area, and it costs very high due to the time-consuming work. Therefore, the present study investigated the variation of arc voltage to develop the in-line quality monitoring system for the pipe inside TIG cladding. The 4 experimental parameters (current, arc length, wire feed position, and shield gas flow rate) varied to observe the change of arc voltage and to establish the model for the monitoring. The arc voltage was decreased when the wire was fed to the backward eccentric position(over 2mm), and the shield gas flow rate was insufficient under 10L/min. In the case of the backward eccentric position over 2mm, the bead appearance was not good and the dilution ratio was increased due to deep penetration. When the shield gas flow rate was lower than 10L/min, the bead surface was oxidized.

Trend Monitoring of A Turbofan Engine for Long Endurance UAV Using Fuzzy Logic

  • Kong, Chang-Duk;Ki, Ja-Young;Oh, Seong-Hwan;Kim, Ji-Hyun
    • International Journal of Aeronautical and Space Sciences
    • /
    • 제9권2호
    • /
    • pp.64-70
    • /
    • 2008
  • The UAV propulsion system that will be operated for long time at more than 40,000ft altitude should have not only fuel flow minimization but also high reliability and durability. If this UAV propulsion system may have faults, it is not easy to recover the system from the abnormal, and hence an accurate diagnostic technology must be needed to keep the operational reliability. For this purpose, the development of the health monitoring system which can monitor remotely the engine condition should be required. In this study, a fuzzy trend monitoring method for detecting the engine faults including mechanical faults was proposed through analyzing performance trends of measurement data. The trend monitoring is an engine conditioning method which can find engine faults by monitoring important measuring parameters such as fuel flow, exhaust gas temperatures, rotational speeds, vibration and etc. Using engine condition database as an input to be generated by linear regression analysis of real engine instrument data, an application of the fuzzy logic in diagnostics estimated the cause of fault in each component. According to study results. it was confirmed that the proposed trend monitoring method can improve reliability and durability of the propulsion system for a long endurance UAV to be operated at medium altitude.