• 한국재료학회지
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• 제31권3호
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• pp.162-171
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• 2021

Dry etching of copper thin films is performed using high density plasma of ethylenediamine (EDA)/hexafluoroisopropanol (HFIP)/Ar gas mixture. The etch rates, etch selectivities and etch profiles of the copper thin films are improved by adding HFIP to EDA/Ar gas. As the EDA/HFIP concentration in EDA/HFIP/Ar increases, the etch rate of copper thin films decreases, whereas the etch profile is improved. In the EDA/HFIP/Ar gas mixture, the optimal ratio of EDA to HFIP is investigated. In addition, the etch parameters including ICP source power, dc-bias voltage, process pressure are varied to examine the etch characteristics. Optical emission spectroscopy results show that among all species, [CH], [CN] and [H] are the main species in the EDA/HFIP/Ar plasma. The X-ray photoelectron spectroscopy results indicate the formation of CuCN compound and C-N-H-containing polymers during the etching process, leading to a good etch profile. Finally, anisotropic etch profiles of the copper thin films patterned with 150 nm scale are obtained in EDA/HFIP/Ar gas mixture.

• International Journal of Automotive Technology
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• 제6권6호
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• pp.579-584
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• 2005

Unsteady state free natural gas jets injected from several types of injectors were numerically simulated. Simulations showed good agreements with the schlieren experimental results. Moreover, injections of natural gas in intake manifolds of a single-valve engine and a double-valve engine were predicted as well. Predictions revealed that large volumetric injections of natural gas in intake manifolds led to strong impingement of natural gas with the intake valves, which as a result, gave rise to pronounced backward reflection of natural gas towards the inlets of intake manifolds, together with significant increase in pressure in intake manifold. Based on our simulations, we speculated that for engines with short intake manifolds, reflections of the mixture of natural gas and air were likely to approach the inlets of intake manifolds and subsequently be inbreathed into other cylinders, resulting in non-uniform mixture distributions between the cylinders. For engines with long intake manifolds, inasmuch as the degrees of intake interferences between the cylinders were not identical in light of the ignition sequences, non-uniform intake charge distributions between the cylinders would occur.

• 한국미생물·생명공학회지
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• 제9권4호
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• pp.219-223
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• 1981

축산공해를 방지하고 대체에너지를 개발하기 위하여 가축분뇨로부터의 메탄가스 발효실험을 실시하여 다음의 결과를 얻었다. (1) 각 가축의 분뇨에 약 30%의 슬러지를 첨가하여 37$^{\circ}C$에서 20일간 발효시킨 결과 우분, 돈분 및 계분의 유기물 1 kg당 메탄가스 생성량은 각각 181, 248 및 235 $\ell$였으며 발효기간중 pH 변화는 발효 초기에 약간 저하하다가 점차 상승하는 경향을 보였다. (2) 우분(300g)과 물(200g)의 혼합물에 슬러지를 각각 20, 30, 40 (w/w) %씩 첨가하여 발효시킨 결과 가스생성량은 약 6.1, 14. 5, 13.4 $\ell$ 였다. (3) 우분에 톱밥과 왕겨를 각각 등량씩 혼합하여 발효시킨 결과 톱밥 첨가시가 왕겨 첨가시보다 메탄생성량이 많았다. (4) 메탄발효처리물의 N, K, P의 함량에 있어서 N, K의 함량은 계분>돈분>우분의 순서였고 P는 우분>계분>돈분의 순서였다. (5) 수중펌프발효조를 이용하여 우분으로부터 메탄가스 생산발효를 20일간 실시한 결과 유기물 1kg 당 188 $\ell$의 메탄가스가 생성되었고, 이 때 생성된 총 메탄가스의 가격과 소모된 전력요금과는 거의 비슷하였다.

• Journal of Welding and Joining
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• 제27권3호
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• pp.38-43
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• 2009

The optimization of the welding parameters was studied to maximize the weldability and minimize the amount of spatter in the MAG welding of automotive steel sheets under different shielding gas composition ratio. JS-EFSC, JS-SPHC steel plates and Ar mixture gases were used as a substrate and shielding gas for welding respectively. The five welding parameters were selected through preliminary experiments and their effects on the weldability were analyzed. Experiments were performed using the Taguchi experimental method. As results, appropriate range for welding could be achieved. Amount of spatter in 80%Ar+20%$CO_2$ shielding gas was 20% of that of $CO_2$welding. Therefore, in terms of high productivity and welding cost, Ar mixture gas(80%Ar+20%$CO_2$) was recommended as a shielding gas for application of MAG process, indicating the low spatter and good weld quality.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2008년도 춘계학술대회 논문집
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• pp.591-594
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• 2008

지구 온난화 문제의 심각성이 대두되면서 이산화탄소 저감 기술에 대한 관심이 증폭되고 있다. 가장 이상적인 방법은 탄소가 포함되지 않은 청정 재생 에너지원이지만, 에너지 공급 규모 면에서 보면 근미래에도 화석 연료가 에너지 수요에 대한 주요 공급원으로 남아있을 것이라는 의견이 지배적이다. 많은 화석 연료 중 천연가스는 탄소 배출량이 가장 적은 청정 연료로 지난 10년간 수요가 폭발적으로 증가해왔다. 이를 고려해볼 때 탄소 배출량이 적은 천연가스를 생산하면서 이산화탄소를 격리 시킬 수 있는 기술은 매우 매력적이다. 본 연구에서는 심해저의 메탄 하이드레이트로 부터 천연가스를 생산하는 기술로서 이산화탄소와 질소의 혼합 가스를 사용하는 기술 개발의 일환으로 혼합 가스에 의한 메탄 하이드레이트 해리 속도를 $^{13}C$ NMR을 이용해 측정한 결과를 제시하고자 한다.

• 전기학회논문지
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• 제59권10호
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• pp.1850-1855
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• 2010

The application field of the pulse power is very wide. Recently, Pulse power technologies take a large place in several applications. Then, many civil and military applications proceed. Marx generator is widely used in high voltage applications. Marx generator is widely used in high voltage applications, such as eletromagnetic wave and power lasers. This paper, we described about the high voltage pulse generator. A compact size high voltage pulse generator with nanosecnd rise time has been fabricated and investigated experimentally. The marx generator has 2 stages. Each stage was constructed one charging capacitor, two electrodes and one charging resistor. A inductance structure is used in order to improve the switching performances fo the whole generator. The experiments of rise time in pure gas and mixtures of gases were described. We tested the Marx generator at different insulation gas. the results show that the dielectric strength of the $N_2-SF_6$ mixture was significantly increased compared with pure nitrogen gas. The experimental results show that the rise time characteristics of the Marx generator can be controlled through varying insulation gas.

• 한국전기전자재료학회논문지
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• 제13권2호
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• pp.114-119
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• 2000

Etch characteristics of SF6/CI2 electron cyclotron resonance (ECR) plasmas have been investigated. Surface reaction of gas plasma with polysilicon was also analysed using X-ray photoelectron spectroscopy (XPS). At the same time, the relationship between surface reaction and the etched profile of polysilicon was examined using XPS. The etch rate of polysilicon and oxide increases with increasing flow rate of SF6 in the SF6/CI2 gas mixture, and tis selectivity also increase also increase. It was also found that as increasing flow rate of SF6 in the SF6/CI2 gas mixture, the atomic% of chlorine detected at surface region decrease, but F and S contents increase. At the same time, when the mixing ratio of SF6 gas increases, the anisotropy of etched polysilicon is sharply decreased in the 0%~10% range of the SF6 mixing ratio, but is rarely varied in the range over 10%, in spite of the large variations in flow rates. It can be explained that the bonding of S-Si due to SiSx(x$\leq$2) compound formed on the etched surface suppress the formation of Si-Cl and 'or Si-F bonding in the silicon etching.

• Nuclear Engineering and Technology
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• 제54권11호
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• pp.4348-4358
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• 2022

The thermal-hydraulics phenomena in a containment during an accident will necessarily include radiative heat transfer (i) within the gas mixture due to the high radiative absorption and emission of steam and (ii) between the gas mixture and the surrounding structures. The analysis of some previous PANDA experiments (PSI, Switzerland) demonstrated the importance of the proper modelling of radiation for the benefit of numerical simulations. These results together with dedicated scoping calculations conducted for the present experiments indicated that the radiative heat transfer is considerable, even for a very low amount of steam (≈2%). The H2P2 series conducted in the large-scale PANDA facility at the Paul-Scherrer-Institut (PSI) in the framework of the OECD/NEA HYMERES-2 project is intended to enhance the understanding of thermal radiation phenomena and to provide a benchmark for corresponding numerical simulations. Thus, the test matrix was tailored around the two opposite extremes: either gas compositions with small steam content such that radiative heat transfer phenomena can be neglected. Or gas mixtures containing larger amounts of steam, so that radiative heat transfer is expected to play a dominant role. The H2P2 series consists of 5 experiments designed to isolate the radiation phenomena from convective and diffusive effects as much as possible. One vessel with a diameter of 4 m and a height of 8 m was preconditioned with different mixtures of air / steam at room and elevated temperatures. This was followed by the build-up of a stable helium stratification at constant pressure in the upper part of the vessel. After that, helium was injected from the top into the vessel which leads to an increase of the vessel pressure and a corresponding elevation-dependent and transient rise of the gas temperature. It is shown that even the addition of small amounts of steam in the initial gas atmosphere considerably impacts the radiative heat transport throughout all phases of the experiments and markedly influences i) the monitored gas peak temperature, ii) the temperature history during the compression and iii) the following relaxation phase after the compression was stopped. These PANDA experiments are the first of its kind conducted in a large scale thermal-hydraulic facility.

• Journal of Biosystems Engineering
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• 제29권2호
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• pp.151-158
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• 2004

This research was conducted to study the offensive odor adhesion efficiency of filter bed materials using the experimental column that was designed and constructed in this work. The offensive odor adhesion experiment was conducted using mixture of high physical adhesion efficiency material, and the fixity of deodorization microorganism of selected filter bed material was tested using ammonia exclude microorganism A4-2 and sulfur oxidation microorganism S5-5.2 those were cultured at the Agricultural Chemical Department of Chungnam National University, and deodorization efficiency of selected filter bed material mixture was tested. Followings are summary of these tests results. 1) Amount of elimination of the offensive odor gas ammonia and hydrogen sulfide per unit volume were 0.054 and 0.016 $\ell$/㎤ in rice hull, 0.01 and 0.004 $\ell$/㎤ in rice straw, 0.158 and 0.01 $\ell$/㎤ in coconut, 0.014 and 0.02 $\ell$/㎤ in perlite, 0.004 and 0.003 $\ell$/㎤ in high road ball, and 0.112 and 0.015 $\ell$/㎤ chaff of pine, respectively. 2) Amount of elimination of offensive odor gas of ammonia and hydrogen sulfide per unit vloume were 0.079 and 0.016 $\ell$/㎤ in mixture 1, 0.045 and 0.014 $\ell$/㎤ in mixture 2, 0.123 and 0.017 $\ell$/㎤ in mixture 3, 0.055 and 0.016 $\ell$/㎤ in mixture 4, 0.031 and 0.015 $\ell$/㎤ in mixture 5, and 0.111 and 0.020 $\ell$/㎤ in mixture 6, respectively. 3) The offensive odor elimination microoraganism inoculated to the mixture of chaff of pine (70%) and pert (30%) showed the elimination efficiency of 99.06% and 96.61% against the ammonia and hydrongen sulfide, respectively, during 24 hours period.

• 한국자동차공학회논문집
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• 제2권5호
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• pp.121-134
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• 1994

Shock tube investigation of ethylene oxide-$0_{2}-N_{2}$ mixture have been performed to reveal detonation characteristics of the mixture in terms of detonation pressure and speed. Theoretical calculation of thermodynamic parameters at the Chapmann-Jouguet detonation of the mixture has been also performed. A comparision of the observed results with the calculated ones can lead us to predict the detonation parameters of ethylene oxide in an artificial air. In addition, we have observed ignition delay times of ethylene oxide mixtures. The best fit of the observed delay times to Arrhenius gas kinetic relation gives : ${\tau}=10^{-144}{e{xp}}(E_a/RT)[C_{2}H_{4}O]^{-4.8}[O_{2}]^{-12.4}[N_{2}]^{-14.1}$ $E_a=3.67kcal/mole$ The observed activation energy is markedly reduced, compared with the case of ethylene oxide diluted in Ar. It could be due to the factor that $N_2$ play a role as detonation promoter yielding very reactive NOx radicals.