Effect of Hexafluoroisopropanol Addition on Dry Etching of Cu Thin Films Using Organic Material
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Park, Sung Yong
(Department of Chemical Engineering, Inha University)
Lim, Eun Teak (Department of Chemical Engineering, Inha University) Cha, Moon Hwan (Department of Chemical Engineering, Inha University) Lee, Ji Soo (Department of Chemical Engineering, Inha University) Chung, Chee Won (Department of Chemical Engineering, Inha University) |
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