• Title/Summary/Keyword: Gas diffusion layer

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Characteristics of W-C-N Thin Diffusion Barrier for Cu Interconnection (Cu 금속배선을 위한 카본-질소-텅스텐 확산방지막 특성)

  • Lee, Chang-Woo
    • Journal of the Microelectronics and Packaging Society
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    • v.12 no.4 s.37
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    • pp.345-349
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    • 2005
  • Low resistive ($300{\mu}{\Omega}$-cm) W-C-N films have been deposited on tetraethylorthosilicate (TEOS) interlayer dielectric by atomic layer deposition (ALD) with $WF_6-N_2-CH_4$ gas. The exposure cycles of $N_2$ and $CH_4$ are synchronized with pulse plasma. The W-C-N films on TEOS layer follow the ALD mechanism and keep constant deposition rate of 0.2 nm/cycle from 10 to 100 cycles. As a diffusion barrier for Cu interconnection the W-C-N films maintain amorphous phase and Cu inter-diffusion is not occurred even at $800^{\circ}C$ for 30 min.

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Study on the Heat Treatment Characteristics and Mechanical Properties of Hot Work Tool Steel by Using Combined Heat Treating (복합열처리된 열간 가공용 금형공구강의 기계적 성질 및 열처리특성에 관한 연구)

  • Baek, S.D.;Roh, Y.S.;Choi, M.S.;Choi, J.W.;Lee, S.Y.
    • Journal of the Korean Society for Heat Treatment
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    • v.2 no.4
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    • pp.27-39
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    • 1989
  • The effect of gas mixing ratios during gas nitrocarburizing treatment on the formation of compound layer and the mechanical properties has been studied for hot work tool steel by using a combined heat treating technique. The thickness of compound and diffusion layers has been shown to grow as a parabolic relation with increasing the amount of ammonia at a given flow quantity of $CO_2$ gas. The compound layer consists mainly of ${\varepsilon}-Fe_3$(C, N) with small amounts of ${\gamma}^{\prime}-Fe_4N$ and ${\alpha}$-Fe. The combined heat treated hot work tool steel has shown that the thickness of compound layer increases with increasing nitrocarburizing time, but the rate of growth slows down as gas nitrocarburizing time goes more than two hours. Tensile properties have given a remarkable improvement. In particular, the wear resistance of combined heat treated hot work tool steel has exhibited an improvement of about 165% greater than that obtained from conventional quenching and multi-tempering treatments.

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Crack Initiation and Propagation at the Gas Turbine Blade with Antioxidation and Thermal Barrier Coating (내산화 및 열차폐 코팅처리 가스터빈 블레이드의 균열거동)

  • Kang, Myung-Soo;Kim, Jun-Sung
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.12
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    • pp.99-106
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    • 2010
  • Gas turbines operation for power generation increased rapidly since 1990 due to the high efficiency in combined cycle, relatively low construction cost and low emission. But the operation and maintenance cost for gas turbine is high because the expensive superalloy hot gas path parts should be repaired and replaced periodically This study analyzed the initiation and propagation of the crack at the gas turbine blades which are coated with MCrAIY as a bond coat and TBC as a top coat. The sample blades had been serviced at the actual gas turbines for power generation. Total 7 sets of blades were analyzed and they have different EOH(equivalent operation hour). Blades were sectioned and the cracking distribution were measured and analyzed utilizing SEM(scanning electron microscope) and optical microscope. The blades which had 52,000 EOH of operation had cracks at the substrate and the maximum depth was 0.2 mm. Most of the cracks initiated at the boundary layer between TBC and bond coat and propagated down to the bond coat. Once bond coat is cracked, the base metal is exposed to the oxidation condition and undergoes notch effect. Under this environment, the crack branched at the inter-diffusion layer and propagated to the substrate. Critical cracks affecting the blade life were analyzed as those on suction side and platform.

Corrosion Behaviors of 316L Stainless Steel Bipolar Plate of PEMFC and Measurements of Interfacial Contact Resistance(ICR) between Gas Diffusion Layer(GDL) and Bipolar Plate (고분자 전해질 연료전지 금속분리판 316L 스테인리스강의 부식거동 및 기체확산층(GDL)과의 계면접촉저항 측정)

  • Oh, In-Hwan;Lee, Jae-Bong
    • Corrosion Science and Technology
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    • v.9 no.3
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    • pp.129-136
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    • 2010
  • The corrosion behaviors of 316L stainless steel were investigated in simulated anodic and cathodic environments for proton exchange membrane fuel cell (PEMFC) by using electrochemical measurement techniques. Interfacial contact resistance(ICR) between the stainless steel and gas diffusion layer(GDL) was also measured. The possibility of 316L was evaluated as a substitute material for the graphite bipolar plate of PEMFC. The value of ICR decreased with an increase in compaction stress(20 N/$cm^2$~220 N/$cm^2$) showing the higher values than the required value in PEMFC condition. Although 316L was spontaneously passivated in simulated cathodic environment, its passive state was unstable in simulated anodic environment. Potentiostatic and electrochemical impedance spectroscopy (EIS) measurement results showed that the corrosion resistance in cathodic condition was higher and more stable than that in anodic condition. Field emission scanning electron microscopy (FE-SEM), and inductively coupled plasma(ICP) were used to analyze the surface morphology and the metal ion concentration in electrolytes.

Investigation on the Liquid Water Droplet Instability in a Simulated Flow Channel of PEMFC (고분자전해질형 연료전지의 유로 채널 모사를 통한 단일 액적의 불안정성 관찰)

  • Kim, Bo-Kyung;Kim, Han-Sang;Min, Kyung-Doug
    • Transactions of the Korean Society of Automotive Engineers
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    • v.16 no.2
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    • pp.93-98
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    • 2008
  • To investigate the characteristics of water droplet on the gas diffusion layer from both top-view and side-view of the flow channel, a rig test apparatus was designed and fabricated with prism attached plate. This experimental device is used to simulate the growth of single liquid water droplet and its transport process with various air flow velocity and channel height. The contact angle hysteresis and height of water droplet are measured and analyzed. It is found that droplet tends towards to be instable by decreasing channel height, increasing flow velocity or making GDL more hydrophobic. Also, the simplified force balance model matches with experimental data only in a restricted range of operating conditions and shows discrepancy as the air flow velocity and channel height increases.

Experimental Analysis of GDL Degradation in PEM Fuel Cell (고분자전해질형 연료전지 가스확산층의 내구 성능 저하에 관한 실험적 분석)

  • Ha, Tae-Hun;Park, Jae-Man;Cho, Jun-Hyun;Min, Kyoung-Doug;Lee, Eun-Suk;Jung, Ji-Young;Kim, Do-Hun;Jin, Yong-Won;Lee, Dae-Han
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.11a
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    • pp.132-132
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    • 2009
  • To achieve the commercialization of PEM fuel cell, the durability problem must be solved. Recently, many researchers have focused on this durability problem and degradation studies about membrane and electrode have been reported. But durability characteristics of gas diffusion layer is not much reported yet. Durability of GDL is very important to maintain the performance of PEM fuel cell because the main function of GDL is a path of fuel and water and the GDL degradation causes the loss of the GDL function. In this study, the degradation of GDL, especially, the mechanical degradation process was investigated with the leaching test. The effect of water dissolution was observed through the test and the amount of GDL degradation was measured with various measurement methods such as weight measurement, static contact angle measurement, scanning electron microscope. After 2,000 hours test, the GDL showed structural damage and loss of hydrophobicity.

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Freezing of Micro-size Water Droplet on Micro Porous Surface (박판형 미세다공 표면에서의 미소액적의 동결)

  • Park, Chun-Wan;Lee, Dong-Gyu;Peck, Jong-Hyeon;Kang, Chae-Dong
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.23 no.3
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    • pp.173-178
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    • 2011
  • Gas diffusion layer(GDL) in PEMFC performs the discharge of water vapor smoothly. When GDL is revealed to cold environment, the freezing of the water droplet or water net in GDL occurs. The purpose of this work is to observe the cooling and freezing behavior of the water droplet which meets to the microporous surface and air under the various low temperature conditions. GDL was coated with waterproof material, which has three types of coating rate, 0, 40 and 60%. Water droplets in series of sizes on GDL were supercooled, frozen and crystalized orderly by circulating low temperature brine. The process of cooling was investigated with the temperature and the snapshot of the water droplet.

Radiation-Induced Oscillatory Instability in Diffusion Flames (복사 열손실로 인한 확산 화염의 맥동 불안정에 관한 연구)

  • Sohn, Chae Hoon;Kim, Jong Soo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.23 no.9
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    • pp.1185-1191
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    • 1999
  • Radiation-induced oscillatory instability in diffusion flames is numerically investigated with nonlinear dynamics considered. As the simplest flame model, a diffusion flame established in the stagnant mixing layer is employed with optically thin gas-phase radiation and unity Lewis numbers for all species. Attention is focused on the radiation-induced extinction regime, which occurs at large $Damk\ddot{o}hler$ number. Once the steady flame structure is obtained for a prescribed value of the initial $Damk\ddot{o}hler$ number, transient solution of the flame is calculated after a finite amount of the $Damk\ddot{o}hler$-number perturbation is imposed on the steady flame. Transient evolution of the flame exhibits three types of flame-evolution behaviors, namely decaying oscillatory solution, diverging solution to extinction and stable limit-cycle solution. A dynamic extinction boundary is identified for laminar flamelet library.

Investigations of the Boron Diffusion Process for n-type Mono-Crystalline Silicon Substrates and Ni/Cu Plated Solar Cell Fabrication

  • Lee, Sunyong;Rehman, Atteq ur;Shin, Eun Gu;Lee, Soo Hong
    • Current Photovoltaic Research
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    • v.2 no.4
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    • pp.147-151
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    • 2014
  • A boron doping process using a boron tri-bromide ($BBr_3$) as a boron source was applied to form a $p^+$ emitter layer on an n-type mono-crystalline CZ substrate. Nitrogen ($N_2$) gas as an additive of the diffusion process was varied in order to study the variations in sheet resistance and the uniformity of doped layer. The flow rate of $N_2$ gas flow was changed in the range 3 slm~10 slm. The sheet resistance uniformity however was found to be variable with the variation of the $N_2$ flow rate. The optimal flow rate for $N_2$ gas was found to be 4 slm, resulting in a sheet resistance value of $50{\Omega}/sq$ and having a uniformity of less than 10%. The process temperature was also varied in order to study its influence on the sheet resistance and minority carrier lifetimes. A higher lifetime value of $1727.72{\mu}s$ was achieved for the emitter having $51.74{\Omega}/sq$ sheet resistances. The thickness of the boron rich layer (BRL) was found to increase with the increase in the process temperature and a decrease in the sheet resistance was observed with the increase in the process temperature. Furthermore, a passivated emitter solar cell (PESC) type solar cell structure comprised of a boron doped emitter and phosphorus doped back surface field (BSF) having Ni/Cu contacts yielding 15.32% efficiency is fabricated.