• Title/Summary/Keyword: Gas analyzer

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Incipient Fault Detection of Reactive Ion Etching Process

  • Hong, Sang-Jeen;Park, Jae-Hyun;Han, Seung-Soo
    • Transactions on Electrical and Electronic Materials
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    • 제6권6호
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    • pp.262-271
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    • 2005
  • In order to achieve timely and accurate fault detection of plasma etching process, neural network based time series modeling has been applied to reactive ion etching (RIE) using two different in-situ plasma-monitoring sensors called optical emission spectroscopy (OES) and residual gas analyzer (RGA). Four different subsystems of RIE (such as RF power, chamber pressure, and two gas flows) were considered as potential sources of fault, and multiple degrees of faults were tested. OES and RGA data were simultaneously collected while the etching of benzocyclobutene (BCB) in a $SF_6/O_2$ plasma was taking place. To simulate established TSNNs as incipient fault detectors, each TSNN was trained to learn the parameters at t, t+T, ... , and t+4T. This prediction scheme could effectively compensate run-time-delay (RTD) caused by data preprocessing and computation. Satisfying results are presented in this paper, and it turned out that OES is more sensitive to RF power and RGA is to chamber pressure and gas flows. Therefore, the combination of these two sensors is recommended for better fault detection, and they show a potential to the applications of not only incipient fault detection but also incipient real-time diagnosis.

주파수 응답 분석(FRA)을 이용한 전력용 변압기 고장예방 진단 (A fault prevention diagnostic of power transformer using Frequency Response Analysis)

  • 조윤행;임태영;김종선;김기일;안광원;임성주
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2011년도 제42회 하계학술대회
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    • pp.463-464
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    • 2011
  • Currently, different kinds of diagnosis and inspection technologies are applied to prevent the internal mechanical transformation of transformers. For example, examination of internal Partial Discharge of transformer, analysis of transformer oil gas, and measurement Frequency Response Analyzer(FRA) are used to diagnose defect. Especially, diagnosis technique through Frequency Response Analyzer(FRA) has been used and developed from 1960, when it was first introduced, till now to become an important tool to examine presence of defect and to prove quality of machines for the most electric machine producers electric power company in the world. However, diagnosis through FRA is still in introduction level in Korea and the application method for FRA is not established yet. For that reason, study about the application of domestic electric installation according to the FRA is needed. It is expected that the study play an important part in the prevention of defect due to the internal transformation of transformer by introducing measurement theory, providing measurement method, and analyzing application cases.

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인공적혈구의 제조 및 이용 (Synthesis and Use of Artificial Red Cells)

  • 하종식;조응행;김구자
    • The Korean Journal of Physiology
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    • 제24권1호
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    • pp.15-26
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    • 1990
  • Hemoglobin was purified from the outdated human red blood cells. Phospholipids were purified from egg yolk and stored in chloroform. The artificial red blood cells (hemosome) were prepared by encapsulation of hemoglobin with phospholipid mutilayer using rotary vacuum evaporator. The shape and size of hemosomes were measured by phase contrast microscope and image analyzer. The function of hemosomes was tested by measuring oxygen dissociation curve using blood gas analyzer. In order to test whether hemosomes are useful as blood substitute they were infused into rats of which one third of total blood were drawn. The results obtained are summarized at followings. 1) Hemosomes were spherical shape and their mean diameter was 0.7 um. 2) Oxygen dissociation curve of hemosomes showed the same figure as that of normal red blood cells. 3) All rats given 1/3 transfusion with hemosomes survived until sacrificed whereas three of four rats given 1/3 transfusion with saline died within 1 hour and the rest of them died within 24 hours.

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에탄올을 첨가한 reflux법 나노 세리아 합성

  • 조민영;이재원;박선민;최헌진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.162-162
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    • 2008
  • 세리아는 고체 산화물 연료전지(SOFC, solid oxide fuel cell)의 전해질 재료와CMP( chemical mechanical polishing) 슬러리 재료, 자동차의 3원 촉매, gas sensor, UV absorbent등 여러 분야에서 사용되고 있다. 본 연구에서는 세리아의 입자의 크기와 형상을 조절하여 성능 및 물성을 향상시켜 보다 넓은 분야의 활용을 하고자 실험을 실시하였다. 세리아 합성에 사용되는 전구체인 cerium carbonate의 특성이 세리아 분말의 물리화학적 특성에 직접적인 영향을 주기 때문에 전구체의 합성 단계에서 형상과 크기를 조절하고자 하였다. 세륨염으로 cerium nitrate hexahydrate, 균일침전반응을 할 수 있는 urea를 침전제로 사용하였다. 반응 용매의 유전상수를 조절하고 반응의 과포화도 변화를 이용하기 위하여 에탄올을 첨가하여 입자의 크기 및 형상을 조절, cubic형태의 $Ce_2O(CO_3)_2{\cdot}H_2O$ 결정상을 가지는 세리아 전구체를 합성하였다. 이렇게 생성된 전구체를 $1000^{\circ}C$에서 2시간동안 하소하여 세리아를 합성하고 반응시간, 농도, 에탄올의 함량 변화에 대해 XRD, FE-SEM, particle size analyzer, micropore physisorption analyzer 분석을 통하여 입자의 결정상과 형상, 입도 분포 및 기공분포 등을 반응인자의 변화에 따라 비교 및 해석하였다.

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연료분무의 위상도플러 측정과 확률밀도함수의 도출 (Phase Doppler Measurements and Probability Density Functions in Liquid Fuel Spray)

  • 구자예
    • 대한기계학회논문집
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    • 제18권4호
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    • pp.1039-1049
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    • 1994
  • The intermitternt and transient fuel spray have been investigated from the simultaneous measurement of droplet sizes and velocities by using Phase/Doppler Particle Analyzer(PDPA). Measurement have been done on the spray axis and at the edge of the spray near nozzle at various gas-to-liquid density ratios(.rho./sub g//.rho./sub l/) that ranges from those found in free atmospheric jets to conditions typical of diesel engines. Probability density distributions of the droplet size and velocity were obtained from raw data and mathematical probability density functions which can fit the experimental distribations were extracted using the principle of maximum likelihood. In the near nozzle region on the spray axis, droplet sizes ranged from the lower limit of the measurement system to the order of nozzle diameter for all (.rho./sub g/ /.rho./sub l/) and droplet sizes tended to be small on the spray edge. At the edge of spray, average droplet velocity peaked during needle opening and needle closing. The rms intensity is greatly incresed as the radial distance from the nozzle is increased. The probability density function which can best fit the physical breakage process such as breakup of fuel drops is exponecially decreasing log-hypebolic function with 4 parameters.

증발-응축법에 의해 발생된 은(silver) 나노입자의 구조제어 및 전기적 부착 특성 연구 (Morphological control and electrostatic deposition of silver nanoparticles produced by condensation-evaporation method)

  • 김휘동;안지영;김수형
    • 한국입자에어로졸학회지
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    • 제5권2호
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    • pp.83-90
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    • 2009
  • This paper describes a condensation-evaporation method (CEM) to produce size-controlled spherical silver nanoparticles by perturbing coagulation and coalescence processes in the gas phase. Polydisperse silver nanoparticles generated by the CEM were first introduced into a differential mobility analyzer (DMA) to select a group of silver nanoparticles with same electrical mobility, which also enables to make a group of nanoparticles with elongated structures and same projected area. These silver nanoparticles selected by the DMA were then in-situ sintered at ${\sim}600^{\circ}C$, and then they were observed to turn into spherical shaped nanoparticles by the rapid coalescence process. With the assistance of modified converging-typed quartz reactor, we can also produce the 10 times higher number concentration of silver nanoparticles compared with a general quartz reactor with uniform diameter. Finally, the spherical silver nanoparticles with 30 nm were electrostatically deposited on the surface of silicon substrate with the coverage rate of ~4%/hr. This useful preparation method of size-controlled monodisperse silver nanoparticles developed in this work can be applied to the various studies for characterizing the physical, chemical, optical, and biological properties of nanoparticles as a function of their size.

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PILS-TOC 및 GC/MS-TD를 이용한 서울시 대기 중 초미세먼지(PM2.5) 유기탄소의 특성 분석 (Characteristics of PM2.5 Carbonaceous Aerosol using PILS-TOC and GC/MS-TD in Seoul)

  • 박다정;안준영;신혜정;배민석
    • 한국대기환경학회지
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    • 제30권5호
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    • pp.461-476
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    • 2014
  • Continuous Water-Soluble Organic Carbons (WSOC) by the Particle Into Liquid Sampler - Total Organic Carbon (PILS-TOC) analyzer were measured at the Seoul intensive monitoring site from June 17 through July 5 in 2014. In addition, the 24 hour integrated PM2.5 collected by Teflon and Quartz filters were analyzed for water soluble ions by Ion chromatography (IC), WSOC by TOC from water extracts, organic carbon (OC), elemental carbon (EC) by carbon analyzer using the thermal optical transmittance (TOT) method, and mass fragment ions (m/z) related to alkanes and PAHs (Poly Aromatic Hydrocarbons) by Gas Chromatography-Mass Spectrometer-Thermal Desorption (GC/MS-TD). Based on the statistical analysis, four different Carbonaceous Thermal Distributions (CTDs) from OCEC thermal-gram were identified. This study discusses the primary and secondary sources of WSOC based on the Classified CTD, organic mass fragments, and diurnal patterns of WSOC. The results provide knowledge regarding the origins of WSOC and their behaviors.

유해배기가스 저감을 위한 Hole형 노즐의 미립화 특성실험 (Atomization Characteristics Experiment of Hole Type Nozzle for the Reduction of Harmful Exhausted Gas)

  • 정진도;유병구
    • 한국분무공학회지
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    • 제2권3호
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    • pp.17-24
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    • 1997
  • A simplified experiment was performed to figure out the atomization characteristics of rice-bran oil which it is highly viscous liquid by applying ultrasonic energy. A spray system, an ultrasonic system, and three kinds of hole-type nozzles(hole diameter: 0.31, 0.34, 0.37mm) were manufactured. To investigate the effects of ultrasonic energy on the atomization of a highly viscous liquid, a phase doppler particle analyzer was used for measurement and calculation of spray droplets data. Nozzle opening pressures were chosen of 3 levels, i.e, 16, 20, and 24MPa. As a result, it could be concluded that the ultrasonic energy was effective to improve the spray atomization when it applied to the fuel by means of 3 different nozzles because of the effects of the liquid fuel cavitation and relaxation between molecules caused by ultrasonic energy. The improvement rate of the spray atomization by the ultrasonic method compared with the conventional spray increased about 15% in the case of hole type nozzles. By increasing of the nozzle opening pressure and decreasing of the hole diameter, the atomization of spray droplets was improved.

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이중공기공급 속도비에 따른 이류체 선회분무 특성 연구 (A Study of Two-Phase Swirl Spray Characteristics on Dual Airblast Velocity Ratio)

  • 강신재;오제하;송기정;노병준
    • 한국분무공학회지
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    • 제5권3호
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    • pp.27-36
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    • 2000
  • In this study, spray characteristics of a dual airblast atomizer are addressed. Three dimensional characteristics of a dual airblast atomizer with air swirl are measured to provide the significant data. The liquid flow rate was fixed at 0.06 kg/min, and atomizing air was controlled at the liquid-air mass ratio of 4.0. The performance of the spray with co-swirl and counter-swirl flow was investigated at each point in the developed spray region using a three-component phase Doppler particle analyzer. This instrument was also used to evaluate the concentration profiles. The three dimensional mean velocity were investigated of present flow characteristics of the dual airblast atomizer. In addition, drop size distributions, mean droplet size profile, and droplet concentration were analyzed to understand atomization characteristics. This experimental results can be conveniently utilized for the preliminary design of gas turbine engines for aircraft.

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작동 유체에 따른 단순 압력식 연료노즐의 분무특성 (Spray Characteristics of the Simplex Atomizer with Working Fluids)

  • 최채홍;임병준;최성만
    • 한국추진공학회지
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    • 제13권6호
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    • pp.41-47
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    • 2009
  • 작동 유체에 따른 APU 가스터빈에 적용되는 연료노즐의 분무특성을 확인하였다. 액체연료에 따라 점도, 표면장력 및 비중 등이 상이하여 분무특성이 변화될 수 있다. 본 연구에서는 연료 물성치 변화에 따른 분무특성을 이해하기 위하여 케로신과 유사한 특성을 갖는 보정 유체 2와 일반적으로 연료노즐의 분무특성을 시험하는데 사용하는 물을 이용하여 분무 시험을 수행하였다. 분무가시화와 분무입자 크기 및 분포를 ND-Yag 레이저 및 PDPA(Phase Doppler Particle Analyzer)를 이용하여 측정하였다. 분무시험 결과, 두 작동유체의 분무형태는 유사하게 나타났으며 주 분무영역에서의 SMD 또한 유사하게 분포됨을 확인할 수 있었다.