• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.4
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• pp.305-310
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• 2008

Deep trench etching of silicon was investigated as a function of RF source power, DC bias voltage, $C_4F_8$ gas flow rate, and $O_2$ gas addition. On increasing the RF source power from 300 W to 700 W, the etch rate was increased from $3.52{\mu}m/min$ to $7.07{\mu}m/min$. The addition of $O_2$ gas improved the etch rate and the selectivity. The highest etch rate is achieved at the $O_2$ gas addition of 12 %, The selectivity to PR was 65.75 with $O_2$ gas addition of 24 %. At DC bias voltage of -40 V and $C_4F_8$ gas flow rate of 30 seem, We were able to achieve etch rate as high as $5.25{\mu}m/min$ with good etch profile.

• 한국가스학회:학술대회논문집
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• 1997.09a
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• pp.133-137
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• 1997

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2012.06a
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• pp.140-140
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• 2012

• Proceedings of the KIEE Conference
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• 1988.07a
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• pp.837-840
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• 1988

We study both theoretically and experimentally the motion of fluid driven by electro-thermally ablated gas pressure in a cavity with a single exhauster. A possibility of jet propulsion engine for steamers is also discussed as an application of the fluid motion.

• Proceedings of the Korean Nuclear Society Conference
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• 1999.05a
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• pp.152-152
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• 1999

• Journal of the Korea Institute of Military Science and Technology
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• v.14 no.1
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• pp.22-29
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• 2011

Using the numerical code for the interior ballistics, the performance of the interior ballistics with the characteristic of the ignition-gas injections has been investigated. The ignition gas has been assumed to be injected into the chamber with 3 cases. As the results of analysis, when the ignition-gas has been injected into all chamber area, the pressure distributions of the chamber of the interior ballistics have been uniform and the differential pressure has been stable. The ignition-gas has been injected into the partial area of the chamber, however, the pressure distributions and the differential pressure have been unstable. The case using the longer ignition injector, therefore, seems to be more suitable to improve the stability of the interior ballistics.

• Macromolecular Research
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• v.15 no.6
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• pp.565-574
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• 2007

In this study, five representative, commercially available polymers, Ultem 1000 polyetherimide, Kapton polyimide, phenolic resin, polyacrylonitrile and cellulose acetate, were used to prepare pyrolyzed polymer membranes coated on a porous {\alpha}-alumina$ tube via inert pyrolysis for gas separation. Pyrolysis conditions (i.e., final temperature and thermal dwell time) of each polymer were determined using a thermogravimetric method coupled with real-time mass spectroscopy. The surface area and pore size distribution of the pyrolyzed materials derived from the polymers were estimated from the nitrogen adsorption/desorption isotherms. Pyrolyzed membranes from polymer precursors exhibited type I sorption behavior except cellulose acetate (type IV). The gas permeation of the carbon/{\alpha}-alumina$ tubular membranes was characterized using four gases: helium, carbon dioxide, oxygen and nitrogen. The polyetherimide, polyimide, and phenolic resin pyrolyzed polymer membranes showed typical molecular sieving gas permeation behavior, while membranes from polyacrylonitrile and cellulose acetate exhibited intermediate behavior between Knudsen diffusion and molecular sieving. Pyrolyzed membranes with molecular sieving behavior (e.g., polyetherimide, polyimide, and phenolic resin) had a $CO_2/N_2$ selectivity of greater than 15; however, the membranes from polyacrylonitrile and cellulose acetate with intermediate gas transport behavior had a selectivity slightly greater than unity due to their large pore size.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.30 no.3
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• pp.96-104
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• 2002

탄체가속기용 초기 발사장치로 사용 가능한 건국대 초고속 발사장치가 개발되었다. 이는 2단계 기포 (gas gun) 형태의 발사장치로 공기를 작동 기체로 사용하여 무게 22g의 탄체를 750m/sec로 가속할 수 있 는 성능을 보인다. 초고속 발사장치의 성능 특성을 알아보기 위하여, 구동부의 압축 특성과 작동 특성에 대한 성능 실험을 수행하였으며 실험으로부터 피스톤에 의한 압축 이득과 1,2차 구동부간에 발사장치의 성능을 최상으로 유지할 수 있는 값들이 존재함을 확인하였다. 초고속 비행체의 공력 특성 및 주위의 유동 해석에 응용 가능한 고속 탄환체에 대한 흐름의 가시화를 수행하여 수치적 계산 결과와 비교하였으며, 향후 고속유동의 물리적 현상 해석에 이용될 수 있음을 확인하였다.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2005.11a
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• pp.86-89
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• 2005

A computational work has been performed to investigate the aerodynamics of a projectile which is launched from the two-stage light gas gun. A moving coordinate method for a multi-domain technique is employed to simulate unsteady projectile flows with a moving boundary. The effect of a virtual mass is added to the axisymmetric unsteady Euler equation system. The computed results reasonably capture the major flow characteristics which we generated in launching the projectile supersonically, such as the interaction between the shock wave and the blast wave, the interaction between the vortical flow and the barrel shock, and the steady under-expanded jet. The present computational results properly predict the velocity, acceleration, and drag histories of the projectile.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.04a
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• pp.196-199
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• 2011

Subscale high-pressure injection system which use two-stage light gas gun composed with high-pressure tube, pump tube and launch tube can make supersonic liquid jet. The supersonic liquid jet enhances droplet atomization by shockwave in front of the jet. In this study, the experiments was executed to identify the atomization characteristics of the supersonic liquid jet using straight cone nozzle. SMD which presents the atomization characteristics was decreased from $151.2{\mu}m$ to $52.25{\mu}m$ by increasing of L/d.