• Journal of the Semiconductor & Display Technology
• /
• v.9 no.4
• /
• pp.39-43
• /
• 2010

According to recent changes in industry for the semiconductor device, a gap between patterns in wafer is getting narrow. And this narrow gap makes a failure of uniform deposition between center and edge on the wafer. In this paper, for solving this problem, we analyze and manipulate the gas flow inside of the HDP CVD chamber by using CFD(Computational Fluid Dynamics). This simulation includes design manipulations in heights of the chamber and shape of center nozzle in the upper side of the chamber. The result of simulation shows 1.28 uniformity which is lower 3% than original uniformity.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.7 no.8
• /
• pp.43-54
• /
• 1999

The effects of equivalence ratio and pressure on burnt gas temperature in premixed fuel rich propane-oxygen-inert gas combustion are investigated over the wide ranges of equivalence ration from 1.5 to 2.7 and pressure from 0.1 to 7 MPa by using a specially designed disk -type constant-voume combustion chamber, The premixtures are simultaneously ignited by eight spark plugs located on the circumference of combustion chamber with 45 degree interals. The eight converging flames compress the end gases to high pressures. The burnt gas temperature is meausured by the nmodifie dtow-colr pyrometry method. The transmissivity in the chamber center during the final stage of combustion at the hightest pressure is meausred by in situ laser extinction method. It is found that a temperature difference between the burnt gas temperature measured by mofidied and conventrational two-color method is 10 to 20 K, but the accuracy of the modified two-color methdo is higher if the local transmissivity in observed region is uniform , and the combustion at higher pressures results gas density conditions and the burnt gas temperature increases as the volume fraction of argon is increased because the specific heat of argon is lower compared to that of nitrogen with a constant equivalence ratio.

• 한국연소학회:학술대회논문집
• /
• 2015.12a
• /
• pp.233-235
• /
• 2015

This study is to investigate the combustion instability of the variation of combustion chamber length in dual swirl gas turbine model combustor. When equivalence ratio was fixed at 1.1, as the length of the combustion chamber increases the value of the frequency decreased in 7kW while the value of the frequency was constant in 4kW. The analysis of flame behaviors by high speed camera was conducted to identify such trend.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2010.05a
• /
• pp.793-794
• /
• 2010

• Proceedings of the Korean Vacuum Society Conference
• /
• 2009.08a
• /
• pp.308-308
• /
• 2009

• Journal of the Korean Society of Safety
• /
• v.8 no.4
• /
• pp.107-113
• /
• 1993

Small rectangular explosion chamber of its size 25cmX25cmX32cm with a circular bursting diaphram at the top was used to study the mechanism of gas explosion to fire transition phenomena, the process of ignition of solid combustibles during a gas explosion. To visulize the explosion to fire transition phenomena, transparent acryl window and high speed camera system were used. The test piece of solid combustible in this experiments was a 5cm$\times$5cm square sheet of newspaper which was placed in the explosion chamber filled with a LPG-air mixture. The mixture was ignited by an electric spark at the center of the chamber. Explosion to fire transition phenomena and the behavior of out flow and in flow of gas through the opening yielded by bursting the diaphram was visualized with shlieren system and without shlieren system. Diameter of a bursting dlaphram at the top of the explosion chamber was varied 5cm, 10cm, and 15cm, and the position of test piece were varied with 6 point. Explosion pressure was measured with strain type pressure transducer, and the weight difference of the test piece before and after each experimental run was measured. By comparing the weight difference of solid combustibles before and after the experiment and the behavior of out flow and inflow of gas after explosion, it was found that the possibility of ignition was depends on the LPG-air mixture concentration and the exposure period of test piece to the burnt gas. Test result of this experiments it was found that the main factor of this phenomena are that heat transfer to the test piece, and the pyrolysis reaction of test piece. Based on the results, the mechanism of the explosion to fire transition phenomena were inferred ; gas explosion- heat transfer to solid combustibiles ; pyrolysis reaction of solid combutibles : air inflow ; mixing of the pyroly gas with air ignition.

• Proceedings of the Korean Society of Propulsion Engineers Conference
• /
• 2008.05a
• /
• pp.121-124
• /
• 2008

This paper presents experimental results of dynamic characteristics of fuel-rich gas generators. Pressure fluctuation measurements in the chamber and manifolds have been analyzed. Gas-generator-alone tests revealed stable combustion regardless of a chamber pressure but low-frequency combustion instabilities occurred for cases of turbine-manifold tests at chamber pressure conditions below 50 bar. The instabilities are considered as an axial resonant mode and acoustic intensity increases along with a chamber pressure.

• Journal of the Semiconductor & Display Technology
• /
• v.22 no.4
• /
• pp.72-75
• /
• 2023

Carbon neutrality has been emerged as important mission for all the manufacturing industry to reduce energy usage and carbon emission equivalent. Korean semiconductor and display manufacturing industries are also in huge interest by minimize the energy usage as well as to find a less global warming product gases in both etch and cleaning. In addition, Korean government is also investing long term research and development plan for the safe environment in various ways. In this paper, we revisit previous research activities on carbon emission equivalent and current research activities performed in semiconductor process diagnosis research center at Myongji University with respect to the reduction of NF3 usage for the PECVD chamber cleaning, and we present the analytical result of the exhaust gas with residual gas analysis in both 6 inches and 12 inches PECVD equipment. The presented result can be a reference study of the development of new substitution gas in near future to compare the cleaning rate of the silicon oxide deposition chamber.

• Journal of Korean Society for Atmospheric Environment
• /
• v.21 no.E3
• /
• pp.75-85
• /
• 2005

A mathematical sensitivity analysis of the flow-through dynamic flux chamber technique, which has been utilized usually for various trace gas flux measurement from soil and water surface, was performed in an effort to provide physical and mathematical understandings of parameters essential for the NO flux calculation. The mass balance equation including chemical reactions was analytically solved for the soil NO flux under the steady state condition. The equilibrium concentration inside the chamber, $C_{eq}$, was found to be determined mainly by the balance between the soil flux and dilution of the gas concentration inside the chamber by introducing the ambient air. Surface deposition NO occurs inside the chamber when the $C_{eq}$ is greater than the ambient NO concentration ($C_{0}$) introducing to the chamber; NO emission from the soil occurs when the $C_{eq}$ is less than the ambient NO concentration. A sensitivity analysis of the significance of the chemical reactions of NO with the reactive species (i.e. $HO_{2},/CH_{3}O_{2},/O_{3}$) on the NO flux from soils was performed. The result of the analysis suggests that the NO flux calculated in the absence of chemical reactions and wall loss could be in error ranges from 40 to $85\%$ to the total flux.

• Journal of Radiation Protection and Research
• /
• v.31 no.3
• /
• pp.149-153
• /
• 2006

An ionization chamber is still widely used in many fields by virtue of its' simple operational characteristics and the possibility of its' various shapes. A parallel type of an ionization chamber for a steel sheet thickness measurement was designed and fabricated. High pure xenon gas, which was pressurized up to 6 atm, was chosen as a filling gas to increase the current response and sensitivity for a radiation. A high pressure gas system was also constructed. The active volume and the incident window size of the fabricated ionization chamber were $30\;cm^3\;and\;12\;cm^2$, respectively. Preliminary tests with a 25 mCi $^{241}Am$ gamma-ray source and evaluation tests in a standard X-ray field were performed. The optimal operation voltage was set from the results of the collection efficiency calculation by using an experimental two-voltage method. Linearity for a variation of the steel sheet thickness, which is the most important factor for an application during a steel sheet thickness measurement, was 0.989 in this study.