• 제목/요약/키워드: Gantry Stage

검색결과 11건 처리시간 0.028초

요 모션 갠트리 제어 시 공기베어링 스테이지의 리플 보상 (Ripple Compensation of Air Bearing Stage upon Gantry Control of Yaw motion)

  • 안다훈;이학준
    • 한국산학기술학회논문지
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    • 제21권11호
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    • pp.554-560
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    • 2020
  • 평판 디스플레이 제조 공정에서 대상물의 위치 결정을 위해 고정밀 평면 모션 스테이지를 사용한다. 이 유형의 스테이지는 일반적으로 마찰이 없는 선형 모터와 에어 베어링을 사용하며, 고정밀 위치 센서로 레이저 간섭계를 사용한다. 스테이지의 불가피한 기생 운동에 의해 야기되는 요 모션 오차는 위치 결정 대상체의 향 변화를 의미하므로, 스테이지의 성능과 공정 정밀도 향상을 위해 요 모션 오차의 실시간 동적 보정은 매우 중요하다. 요 모션 오차 보상에는 갠트리 제어가 일반적이며, 이 방법을 공기베어링 가이드를 사용하는 스테이지에 적용하기 위해서 회전 모션을 허용하는 유연기구가 스테이지에 적용된다. 본 논문은 공기베어링과 유연기구를 갖춘 H형 XY 스테이지의 정속 구동 성능을 개선하는 방법을 제안한다. 유연기구를 포함한 스테이지의 갠트리 제어 시 선형 모터로부터 발생하는 상호 리플의 발생 원인을 분석하고, 이러한 상호 리플을 보상하는 방안으로 적응 학습 제어를 제시한다. 제시 방안의 검증을 위해 시뮬레이션을 수행하여, 보상 제어를 통해 속도 리플이 약 22 % 수준으로 감소함을 확인하였다. 그리고 요 모션 오차가 발생하는 스테이지 상태를 가정하여 리플 저감 효과를 검증하였다.

초정밀 평면 X-Y스테이지의 최적 설계 (Optimal Design of a Ultra-precision Planar X-Y Stage)

  • 조웅;고현준;김종형
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회A
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    • pp.1193-1197
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    • 2008
  • Bridge is Most from stay of Gantry structures part. In compliance with oneself weight of the bridge deflecting, this occurs drops the location precision of the work tool. Also accelerative at the time of gives a serious load to Y axial motors which transfer the bridge damages. The motor with high-speed transfer of location control which is accurate makes disrupt. The malleability of the bridge to maintain consequently and necessary to minimize a weight. This paper the structural FEM interpretations of the stone and the aluminum alloy with the material by which will be used in the bridge and static deflected and a candle precise plane X-Y stage optimal design with character the interpretation result.

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갠트리형 3축 이송계의 동특성 평가 및 개선 연구 (Evaluation and Improvement of Dynamic Characteristics of 3-axis Gantry-type Stage)

  • 박상원;;서용규;홍성욱
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2006년도 춘계학술대회논문집
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    • pp.219-223
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    • 2006
  • This paper presents a gantry type 3-axes positioning system, which is useful to test control algorithms for coordinate measuring machines and industrial cranes. The dynamic characteristics of the system have been investigated through a series of finite element analysis and experiments. In order to minimize the residual vibration during movement, this paper implements input shaping algorithms for the system with the information from the dynamic analysis. The results show that the dynamic performance of the system can be significantly improved by the dynamic analysis and implementation of input shaping

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건설용 3D 프린팅 기술의 해외 사례 조사 및 국내 상용화 방안 (Overseas Case Study of 3D Printing Technology for Construction and Commercialization Plan in Korea)

  • 승인배;백효선;박정환
    • 한국산업융합학회 논문집
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    • 제21권6호
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    • pp.273-284
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    • 2018
  • 3D printing technology in the construction field is currently being developed and commercialized actively in foreign countries, but the development of material and equipment is underway as an initial research stage in Korea. It is necessary to implement commercialization through the introduction of 3D printing technology in the construction field as soon as possible in Korea, but there is no guideline for suitable equipment and materials in Korea at present. Therefore, in order to help prepare for commercialization, it is necessary to provide data such as equipment size and materials suitable for commercialization at the initial stage. This study investigates the types, specifications, and applications of equipment that are being used overseas to provide the equipment type and material cost required in the initial stage of commercialization in Korea. Using the surveyed data, it was possible to calculate the advantages and disadvantages of the equipment type and specification, and the cost of materials used. As a result of the analysis, Gantry type is suitable for the domestic commercialization, and the standard of the output area is $100m^2$ and the extrusion amount of $250m^3/sec$ is proposed, and the material cost of the commercial product is 20thousand won. The suggestions in this study will help to plan the construction of products and equipments to commercialize 3D printing technology in construction field in the future.

LCD 대평판 고정밀 얼라인먼트를 위한 비전 시스템 연구 (A Study on Vision System for High Precision Alignment of Large LCD Flat Panel Display)

  • 조성만;송춘삼;김준현;김종형
    • 제어로봇시스템학회논문지
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    • 제15권9호
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    • pp.909-915
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    • 2009
  • This work is to develop a vision system for high precision alignment between upper and lower plates required at the imprinting process of the large LCD flat panel. We compose a gantry-stage that has highly repeated accuracy for high precision alignment and achieves analysis about thermal transformations of stage itself. Position error in the stage is corrected by feedback control from the analysis. This system can confirm alignment mark of upper and lower plates by using two cameras at a time for the alignment of two plates. Pattern matching that uses geometric feature is proposed to consider the recognition problem for alignment mark of two plates. It is algorithm to correct central point and angle for the alignment from the recognized mark of upper and lower plates based on the special characteristics. At the alignment process, revision for error position is performed through Look and Move techniques.

CHIP MOUNTER 구동부의 동적 거동 해석 (Dynamic Behavior Analysis of Driving Part in CHIP MOUNTER)

  • 박원기;박진무
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2001년도 춘계학술대회 논문집
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    • pp.471-474
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    • 2001
  • Recently, due to demands of faster speed and extra features for the chip mounters, there has been ever-demanding needs for the basic technology. Until four or five years ago, chip mounters placing 0.3sec/chip were considered to be in the high speed category, but since then it has become a borderline for categorizing high speed machines capable of placing 0.1sec/chip. In this study, in order to analyze the vibration of head generated by the dynamic behavior of x-frame, FEM model is composed and modal analysis is performed to identify the dynamic characteristics of the structure. Those results are compared with the modal test in order to verify the model. In this paper, Several other factors, such as definition of dynamic accuracy, static accuracy and tolerance of the axis settling range, that might affect the dynamic behavior the head are discussed.

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Study on The Development of A New Whole Body Fame

  • Chung, Jin-Bum;Suh, Tae-Suk;Chung, Won-Kyun;Choe, Bo-Young;Lee, Hyoung-Koo
    • 한국의학물리학회:학술대회논문집
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    • 한국의학물리학회 2002년도 Proceedings
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    • pp.136-137
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    • 2002
  • We have been researching upgrade version of a stereotactic whole body frame, used for evaluating daily setup accuracy of the patient positioning during fractionated extra-cranial stereotactic radiotherapy. Currently, we are focusing on the development of a new stereotactic whole body frame, and then will handle organ movement produced by breathing at the next stage. MeV-Green is chosen for the best immobilizer possible and the epoxy board is for the frame with the dimension of 110 em in length, 50 cm in width in order to maximize transmission rate of the beam from lateral or posterior direction and to fit CT and PET scanners with an aperture of 55 cm at least. The key point of an upgraded stereotactic whole body frame will be set on the collision-free rotation of the gantry with the frame, and the development of the checking structure for the daily patient repositioning regarding internal target.

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고정밀 대형 부품가공용 복합가공기 원천기술 개발 (Development of Core Technologies of Multi-tasking Machine Tools for Machining Highly Precision Large Parts)

  • 장성현;최영휴;김수태;안호상;최학봉;홍종승
    • 한국정밀공학회지
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    • 제29권2호
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    • pp.129-138
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    • 2012
  • In this study, three types of large scale multi-tasking machine tools together with core technologies involved have been developed and introduced; a multi-tasking machine tool for large scale marine engine crankshafts, a multi-tasking vertical lathe for windmill parts, and a large scale 5-axis machine tool of gantry type. Several special purpose devices has been necessarily developed for the purpose of handling and machining big and heavy workpieces accurately, such as PTD (Pin Turning Device) with revolving ring spindle for machining eccentric crankshaft pins, hydrostatic rotary table and steady rest for supporting and resting heavy workpieces, and 2-axis automatic swiveling head for high-quality free surface machining. Core technologies have been also developed and adopted on their detail design stage; 1) structural design optimization with FEM structural analysis, 2) theoretical hydrostatic analysis for the PTD and rotary table bearings, 3) box-in-box type cross-rail and octagonal ram design to secure machine rigidity and accuracy, 4) constant spindle rpm control against gravitational torque due to unbalanced workpiece.