• Progress in Superconductivity and Cryogenics
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• v.14 no.4
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• pp.50-53
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• 2012

This paper describes experimental study on GM-type pulse tube refrigerator (PTR). In a PTR, the pulse tube is only filled with working gas and there exists secondary flow due to a large temperature difference between cold-end and warm-end. The stability of secondary flow is affected by orientation of cold-head and thus, the cooling performance is deteriorated by gas mixing due to secondary flow. In this study, a single stage GM-type pulse tube refrigerator is fabricated and tested. The cooing performance of the fabricated PTR is measured as varying cold-head orientation angle and the results are used as reference data. Then, we divided interior space of pulse tube into three segments, and fixed the various size of screen mesh at interface of each segment to suppress the performance degradation due to secondary flow. For various configuration of pulse tube, no-load test and heat load test are carried out with the fixed experimental condition of charging pressure, operating frequency and orifice valve turns. From experimental results, the fine screen mesh shows the effective suppression of performance degradation for the large orientation angle, but the use of screen mesh cause the loss of cooling capacity rather than the case of no insertion into pulse tube. It should be compromised whether the use of screen mesh in consideration of the installation limitation of a GM-type pulse tube refrigerator.

• Progress in Superconductivity and Cryogenics
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• v.14 no.3
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• pp.48-52
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• 2012

This paper describes experimental study on the orientation dependence of GM-type pulse tube refrigerator with helium and neon as working gas. A pulse tube refrigerator generates refrigeration work with gas expansion by gas displacer in the pulse tube. The pulse tube is only filled with working gas and there exists secondary flow due to large temperature difference between cold-end and warm-end. The stability of secondary flow is affected by orientation of cold-head and thus cooling performance is deteriorated by gas mixing due to secondary flow. In this study, a single stage GM-type pulse tube with orifice valve as a phase control device is fabricated and tested. The fabricated pulse tube refrigerator is tested with two different working gases of helium and neon. First, optimal valve opening and operating frequency are determined with experimental results of no-load test. And then, the variation of no-load temperature as orientation angle of cold-head is measured for two different working gases. Effect of orientation dependence of cold-head as working gas is discussed with experimental results.

• Progress in Superconductivity and Cryogenics
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• v.13 no.3
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• pp.31-35
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• 2011

This paper describes experimental study on GM-type pulse tube refrigerator with neon as a working fluid instead of helium. Neon gas has similar compression characteristics with helium gas because it is a monoatoimc gas. In experiments, a cooling performance test was performed with same compressor and pulse tube refrigerator for neon and helium as working gas. From experimental results, a PTR with neon show the improved cooling performance than a PTR with helium. Cooling performance and operating characteristics of a PTR were discussed and compared for two different working gas.

• Progress in Superconductivity and Cryogenics
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• v.12 no.2
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• pp.29-33
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• 2010

The experimental results of the 2 stage Gifford-McMahon(GM) type pulse tube refrigerator (PTR) or cryopump are presented in this paper. The objectives of his study are to develop design technology of the integral type 2 stage PTR which rotary valve is directly connected to he hot end of the regenerator and acquire its improved performance. Design of the 2 stage PTR is conducted by FZKPTR(Forschungs Zentrum Karlsruhe Pulse Tube Refrigerator) program for the design of pulse tube refrigerators. The fabricated PTR has U-type configuration and incorporates orifice valve, double-inlet valve and reservoir as phase control mechanism. Rotary valve is used to make pulsating pressure and is directly connected to inlet of $1^{st}$ stage regenerator. From experiments, cooling performance map and pressure waveform at each point were measured for different operating frequencies. Experimental results show the best cooling performance with 2 Hz operation in spite of small pressure amplitude. The lowest temperatures of the 2 stage PTR were 16.9 K at the second stage and 58.0 K at the first stage. The cooling capacities achieved were 14.4 W at 79 K, the first stage and 3.6 W at 29 K, the second stage.

• Progress in Superconductivity and Cryogenics
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• v.9 no.2
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• pp.35-38
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• 2007

A single-stage and two-stage pulse tube refrigerators have been designed for cryopump application. The different diameters of pulse tube and regenerator have been investigated at single-stage pulse tube refrigerator(PTR). Experiments have been performed on single-stage PTR to reach minimum temperature with optimum valve opening at a few frequencies. And the two-stage pulse tube refrigerators have been assembled with tested single-stage pulse tube and tested. When orifice turn is opened to 9 and double inlet is opened to 3 at a single-stage, the lowest temperature of 33.7 K is achieved. The cooling capacity at single-stage is 38 W at temperature of 80 K. A two-stage pulse tube refrigerator has 16.3K at the second stage and 59.7K at the first stage. The cooling capacity achieved is 16.5 W at 80 K, the first stage and 0.6 W at 20 K, the second stage. Some details on the design of pulse tube refrigerator and the experimental apparatus are given.

• Progress in Superconductivity and Cryogenics
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• v.13 no.4
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• pp.30-35
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• 2011

This paper describes experimental study and performance improvement of 2 stage Gifford-McMahon (G-M) type pulse tube cryocooler for cryopump. The objective of this study is to improve the efficiency of 2 stage pulse tube cryocooler for substituting 2 stage G-M cryocooler used in cryopump. The target cooling capacities are 5 W at 20 K and 35 W at 80 K for the $1^{st}$ and the $2^{nd}$ stage, respectively. These values are good cooling capacities for vacuum level in medium size ICP 200 cryopump. Design of the 2 stage pulse tube cryocooler is conducted by FZKPTR(Forschungs Zentrum Karlsruhe Pulse Tube Refrigerator) program. In order to improve the performance of 2 stage pulse tube cryocooler, U-type pulse tube cryocooler is fabricated and connecting tubes are minimized for reducing dead volumes and pressure losses. Also, to get larger capacities, orifice valves and double inlet valves are optimized and the compressor of 6 kW is used. On the latest unit, the lowest temperatures of 2 stage pulse tube cryocooler are 42 K ($1^{st}$ stage) and 8.3 K ($2^{nd}$ stage) and the cooling capacities are 40 W at 82.9 K ($1^{st}$ stage) and 10 W at 20.5 K ($2^{nd}$ stage) with 6.0 kW of compressor input power. This pulse tube cryocooler is suited for commercial medium size cryopump. In performance test of cryopump with 2 stage pulse tube cryocooler, pumping speed for gaseous nitrogen is 4,300 L/s and the ultimate vacuum pressure is $7.5{\times}10^{-10}$ mbar.

• Journal of the Korean Vacuum Society
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• v.20 no.4
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• pp.243-251
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• 2011

An apparatus for measuring the refrigeration capacity of cryopump refrigerators including the pulse tube type being developed domestically and the GM type has been designed, manufactured, and tested. The refrigeration capacity of a commercial refrigerator was evaluated for confirming the measurement procedure and the operation performance of the apparatus. The measured 2-D refrigeration capacity chart showed the intrinsic characteristics of the refrigerator model used in the experiment. In this paper, design specifications and test results of the refrigeration capacity measurement system is reported and discussed.