Abstract
A single-stage and two-stage pulse tube refrigerators have been designed for cryopump application. The different diameters of pulse tube and regenerator have been investigated at single-stage pulse tube refrigerator(PTR). Experiments have been performed on single-stage PTR to reach minimum temperature with optimum valve opening at a few frequencies. And the two-stage pulse tube refrigerators have been assembled with tested single-stage pulse tube and tested. When orifice turn is opened to 9 and double inlet is opened to 3 at a single-stage, the lowest temperature of 33.7 K is achieved. The cooling capacity at single-stage is 38 W at temperature of 80 K. A two-stage pulse tube refrigerator has 16.3K at the second stage and 59.7K at the first stage. The cooling capacity achieved is 16.5 W at 80 K, the first stage and 0.6 W at 20 K, the second stage. Some details on the design of pulse tube refrigerator and the experimental apparatus are given.