Experimental research on 2 stage GM-type pulse tube refrigerator for cryopump

The experimental results of the 2 stage Gifford-McMahon(GM) type pulse tube refrigerator (PTR) or cryopump are presented in this paper. The objectives of his study are to develop design technology of the integral type 2 stage PTR which rotary valve is directly connected to he hot end of the regenerator and acquire its improved performance. Design of the 2 stage PTR is conducted by FZKPTR(Forschungs Zentrum Karlsruhe Pulse Tube Refrigerator) program for the design of pulse tube refrigerators. The fabricated PTR has U-type configuration and incorporates orifice valve, double-inlet valve and reservoir as phase control mechanism. Rotary valve is used to make pulsating pressure and is directly connected to inlet of $1^{st}$ stage regenerator. From experiments, cooling performance map and pressure waveform at each point were measured for different operating frequencies. Experimental results show the best cooling performance with 2 Hz operation in spite of small pressure amplitude. The lowest temperatures of the 2 stage PTR were 16.9 K at the second stage and 58.0 K at the first stage. The cooling capacities achieved were 14.4 W at 79 K, the first stage and 3.6 W at 29 K, the second stage.