• Journal of the Korean Society for Precision Engineering
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• v.20 no.5
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• pp.29-38
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• 2003

As the design rules in semiconductor manufacturing process become more and more stringent, the higher degree of planarization of device surface is required for a following lithography process. Also, it is great challenge for chemical mechanical polishing to achieve global planarization of 12” wafer or beyond. To meet such requirements, it is essential to understand the CMP equipment and process itself. In this paper, authors suggest the velocity distribution on the wafer, direction of friction force and the uniformity of velocity distribution of conventional rotary CMP equipment in an analytical method for an intuitive understanding of variation of kinematic variables. To this end, a novel dimensionless variable defined as “kinematic number” is derived. Also, it is shown that the kinematic number could consistently express the velocity distribution and other kinematic characteristics of rotary CMP equipment.

• Journal of Biosystems Engineering
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• v.4 no.2
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• pp.46-52
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• 1979

The water delivery hose for agricultural pump is getting popular in rural areas in korea. Friction head loss, discharge, and power requirements were measured in various discharge for different material and diameter of hose to get basic data for economical use in agricultural pump. The results attained in this study were as follows ; 1. Friction head loss increased significantly as the velocity increased, and the difference of velocity between the different diameter of hose was bigger than that between materials, which was resulted in the increase of the friction head loss. 2. Friction head loss in the case of that the velocity with 2m/sec was constant was about 3.53 to 4.01 m/100m in the diameter 3" and about 2.30 to 3.10 m/100m in the diameter 4". Material A of diameter 3" showed the maximum value 8.4m/100m in Reynolds number $2.0\times10^5$, 4" got the minimum value 2.24m/100m, the difference between these values was bigger than 6m per 100 meters in the friction head loss. 3. Darcy-Weisbach formular with friction coefficient [f] calculated by Nikurades formular in the smooth pipe or with friction coefficient [f] calculated on the base of C value 125 in Hazen-Williams formular was available in friction head loss of the water discharger hose in rural areas. 4. Total head increased as friction head loss increased , meanwhile total discharge decreased, and 20 percents of energy was more saved in Material C 4″pipe than Material A 3″pipe in the view point from the discharge per unit power requirement, this phenomenon suggested that long distance pipe would be advantage in larger diameter pipe for save of energy. for save of energy.

• Journal of the korean Society of Automotive Engineers
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• v.12 no.4
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• pp.56-65
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• 1990

Wet-friction materials have been widely used for clutches and brakes of automotives over past several decades. In order to enhance its performance, its friction behaviour should be fully understood. It is, however, still not at hand and therefore an attempt was made to have some more understanding of friction behaviour of wet-friction materials. Measurements of coefficient of friction were made with the variation of lubricants, lub. temperature, sliding velocity, and contact pressure. In addition, the effects of both the viscosity of lubricants and the porosity of materials on the coefficient of friction were also investigated. It can be concluded that the coefficient of friction is decreased as the concentrations of the resin and inorganic fillers are increased, and it tends to decrease with the increase in the lubricant temperature and sliding velocity.

• Journal of Power System Engineering
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• v.14 no.6
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• pp.83-88
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• 2010

The wear behavior of epoxy matrix composites filled with nano sized silica particles is discussed in this paper. Especially, the variation of the coefficient of friction and the wear resistance according to the change of apply load and sliding velocity were investigated for these materials. Wear tests of pin-on-disc mode were carried out and the wear test results exhibited as following ; The epoxy matrix composites showed lower coefficient of friction compared to the neat epoxy through the whole sliding distance. As increasing the sliding velocity the epoxy matrix composites indicated lower coefficient of friction, whereas the neat epoxy showed higher coefficient of friction as increasing the sliding velocity. The specific friction work of both materials were increased with apply load. In case of the epoxy matrix composites, the running in periods of friction were reduced as increase in apply load. The epoxy matrix composites were improved the wear resistance by adding the nano silica particles remarkably. It is expected that the load carrying capacity of the epoxy matrix composites will be improved by increase of Pv factor.

• 한국기계연구소 소보
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• s.18
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• pp.29-35
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• 1988

When low sliding velocities in the boundary lubrication range are operating, irregular movements frequently occur which are a result of the stick-slip phenomenon. Such slide motions are undesirable in precision machine tools, particularly with feed back systems used in numerical and adaptive control machine tools. Accordingly, this paper reports analytical and experimental studies in the stick-slip characteristic of machine tool feeding system. The main conclusions of this study are as follows; The tendency towards stick-slip effects may be reduced by; 1). Reducing the drop in friction coefficient in the Stribeck curve(on the rising part of the friction characteristic at higher sliding speeds, the system is stable all the time) 2). Reducing the transition velocity by the use of a higher viscosity lubricating oil. 3). Increasing the stiffness(Damping)and reducing normal load(Sliding mass) Therefore, the Critical velocity is decided from the above conclusions and in designing of machine tool, feed rates(sliding velocity)must be design the more than critical velocity.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.10
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• pp.1062-1072
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• 2008

When mobile robots perform the mission in the rough terrain, the traversability depended on the terrain characteristic is useful information. In the traversabilities, wheel-terrain maximum friction coefficient can indicate the index to control wheel-terrain traction force or whether mobile robots to go or not. This paper proposes estimating wheel-terrain maximum friction coefficient. The existing method to estimate the maximum friction coefficient is limited in flat terrain or relatively easy driving knowing wheel absolute velocity. But this algorithm is applicable in rough terrain where a lot of slip occurred not knowing wheel absolute velocity. This algorithm applies the tire-friction model to each wheel to express the behavior of wheel friction and classifies slip-friction characteristic into 3 major cases. In each case, the specific algorithm to estimate the maximum friction coefficient is applied. To test the proposed algorithm's feasibility, test bed(ROBHAZ-6WHEEL) simulations are performed. And then the experiment to estimate the maximum friction coefficient of the test bed is performed. To compare the estimated value with the real, we measure the real maximum friction coefficient. As a result of the experiment, the proposed algorithm has high accuracy in estimating the maximum friction coefficient.

• Tribology and Lubricants
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• v.31 no.2
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• pp.50-55
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• 2015

This study investigates the effects of a pattern of 200 μm dimples in a hexagonal array on tribological characteristics. A textured surface might reduce the friction coefficient and wear caused by third-body abrasion and thus improve the tribological performance. There are three friction conditions based on the Stribeck curve: boundary friction, mixed friction, and fluid friction conditions. In this experiment, we investigate the friction characteristics by carrying out the friction tests at sliding speeds ranging from 0.06 to 0.34 m/s and normal load ranging from 10 to 100 N. We create dimple surfaces for texturing by using the photolithography method. There are three kinds of specimens with different dimple densities ranging from 10% to 30%. The dimple density on the surface area is the one of the important factors affecting friction characteristics. Friction coefficient generally decreases with an increase in the velocity and load, indicating that the lubrication regime changes depending on the load and velocity. The fluid friction regime is fully developed, as indicated by the duty number graph. Fluid friction occurs at a velocity of 0.14-0.26 m/s. The best performance is seen at 10% dimple density and 200 μm dimple circle in the hexagonal array.

• Journal of Korean Tunnelling and Underground Space Association
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• v.20 no.2
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• pp.405-421
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• 2018

In most of cases, the wall friction coefficients applied for local tunnel design are quoted directly from foreign data or local design guideline. In the previous studies, the wall friction coefficient was estimated using the velocity decay method. However, it is difficult to estimate the wall friction coefficient when the convergence wind velocity in the tunnel is negative (-) or if there is a change in the natural wind. Therefore, in this study, the wall friction coefficient is estimated by applying the dynamic simulation technique in addition to the conventional the velocity decay method. As a result of the analysis, the coefficient of wall friction in the tunnels for the total of 9 tunnels (18 tubes both directions) was 0.011~0.025, and the mean value was estimated to be 0.020. In addition, the wall friction coefficient obtained quantitatively through this study was compared with the current design criteria.

• Korean Journal of Materials Research
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• v.31 no.5
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• pp.286-295
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• 2021

This study attempts to find optimal conditions of the friction coefficient using a discrete element method (DEM) simulation with various friction coefficient conditions and three different grinding media with various ball sizes in a traditional ball mill (TBM). Using ball motion of the DEM simulation are obtained using the optimal friction coefficient compared with actual motion; photographs are taken by the digital camera and the snapshot images are analyzed. In the simulation, the rotation speed of the mill, the materials and velocity of the grinding media, and the friction coefficient between the balls and the wall of the pot are fixed as the actual experimental conditions. We observe the velocity according to the friction coefficient from the DEM simulation. The friction coefficient is found to increase with the velocity. Milling experiments using a traditional ball mill with the same experimental conditions as those of the DEM simulation are conducted to verify the simulated results. In addition, particle morphology change of copper powder is investigated and analyzed using scanning electron microscopy (SEM) for the milling experiment.

• Transactions on Control, Automation and Systems Engineering
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• v.3 no.2
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• pp.111-116
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• 2001

A neural network compensator for stick-slip friction phenomena in meashartonics servo systems is practically proposed to supplement the traditionally available position and velocity control loops for precise motion control. The neural network compensa-tor plays the role of canceling the effect of nonlinear slipping friction force. It works robustly and effectively in a real control system. This enables the mechatronics servo systems to provide more precise control in the digital computer. It was confirmed that the con-trol accuracy is improved near zero velocity and points of changing the moving direction through numerical simulation. However, asymptotic property on the steady state error of the normal operation points is guaranteed by the integral term of traditional velocity loop controller.