• 제목/요약/키워드: Fourier transform IR

검색결과 552건 처리시간 0.028초

Fourier transform infrared spectroscopy를 이용한 SiNx박막의 수소농도 연구 (Study of the hydrogen concentration of SiNx film by Fourier transform infrared spectroscopy)

  • 이석열;최재하;제지홍;이임수;안병철
    • 한국진공학회지
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    • 제17권3호
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    • pp.215-219
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    • 2008
  • 실리콘 웨이퍼 위에 Plasma Enhanced Chemical Vapor Deposition (PECVD) 방법으로 증착 된 SiNx 박막의 수소 함량을 측정하였다. 제작된 SiNx 박막은 Fourier Transform Infrared Spectroscopy (FT-IR) 사용하여 박막의 수소함량과 결합상태를 확인하였으며, Atomic Force Microscopy (AFM) 측정을 통하여 박막의 표면 거칠기를 비교, 시료의 조성비 평가를 위하여 Rutherford Backscattering Spectrometry (RBS)을 사용하였다. 또한 SiNx박막의 조성확인을 위하여 Photoluminescence(PL)를 이용하여 FT-IR spectrum의 결과와 비교 해석하였다. FT-IR에서 NH의 수소함량(at%)이 0.92 %에서 0.64 %로 낮아질 수록 AFM을 이용한 표면 거칠기는 12.8 $\AA$에서 10.8 $\AA$로 낮아지고, Si양이 상대적으로 많아지는 것을 PL에서 확인하였으며, RBS에서도 시뮬레이션을 통해 비슷한 결과를 얻을 수 있었는데, 이는 FT-IR을 사용함으로써 SiNx 박막의 수소 함량의 측정이 가능하다는 것을 보여주므로 단위공정에서 신속하게 SiNx 박막 분석이 가능함을 알 수 있었다.

반도체 사진공정에서 실리콘 웨이퍼 위의 Silylated Resist의 Fourier 변환 적외선 분광분석 (Fourier Transform Infrared Spectroscopic Analysis of the Silylated Resist on Silicon Wafers in Semiconductor Lithographic Process)

  • 강성철;김수종;손민영;박춘근
    • 분석과학
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    • 제5권4호
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    • pp.455-464
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    • 1992
  • 본 논문에서는 FT-IR 분광분석법을 이용하여 여러 가지 반응조건에서 기체상 silylation 반응에 의해 생성된 silylated layer의 depth를 비파괴적으로 정량하는 방법을 제안하였다. Silylated layer의 depth는 FT-IR 스펙트럼의 특성 봉우리들(Si-O-ph, Si-C, Si-H)의 흡광도를 바탕 스펙트럼 공제법으로 측정하여 SEM의 두께 측정치와 비교하여 정량하였다. FT-IR 분광분석법을 이용한 Silylated layer의 depth 분석은 비파괴적이고 정량적인 방법으로, 이 방법은 silylation process window를 설정하는 데 적합하다는 것을 알았다.

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Infrared Spectroscopic Study of Molecular Hydrogen Bonding in Chiral Smetic Liquid Crystal

  • Jang, Won-Gun
    • Journal of Information Display
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    • 제2권3호
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    • pp.18-31
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    • 2001
  • We utilize Fourier transform infrared (IR) spectroscopy to probe intramolecular hydrogen bonding in $smectic-C^{\ast}$ liquid crystal phases. Infrared spectra of aligned smectic liquid crystal materials vs. temperature and of isotropic liquid crystal mixtures vs. concentration were measured in homologs, both with and without hydrogen bonding. Hydrogen bonding significantly changes the direction and magnitude of the vibrational dipole transition moments, causing marked changes in the IR dichroic absorbance profiles of hydrogen bonded molecular subfragments. A GAUSSIAN94 computation of the directions, magnitudes, and frequencies of the vibrational dipole moments of molecular subfragments shows good agreement with the experimental data. The results show that IR dichroism can be an effective probe of hydrogen bonding in liquid crystal phases.

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A Spatial-domain Fourier Transform Infrared Spectrometer: Application for Analyte Measurement in Cell Culture Media

  • Jung, Byung-Jo
    • Journal of the Optical Society of Korea
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    • 제9권4호
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    • pp.151-156
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    • 2005
  • A spatial-domain Fourier Transform (FT) infrared (IR) spectrometer coupled with a PtSi Schottky­barrier IR detector plane was developed in the spectral range of $2.0-2.5{\mu}m$ for noninvasive measurement of analyte concentrations in cell culture media during cell culture processing. A key optical component of the spectrometer is a Savart plate which is a birefringent polarizer generating coherent two rays for interfering. The spectral resolution of the spectrometer was determined as $71cm^{-1}$ (${\~}0.05{\mu}m$ at $2.5{\mu}m$). Clear IR fringe patterns were imaged on the IR detector plane. The feasibility of the spectrometer for our application was investigated by measuring absorbance spectra of glucose and fetal bovine serum (FBS) which are important compounds in cell culture media. Experiment results show that the spectral quality of glucose and FBS was comparable with the standard spectra acquired with a commercial FT-IR spectrometer, presenting the feasibility of the spectrometer to perform analyte measurement in cell culture media.

시간-주파수 분석을 이용한 IR-UWB 안테나 임펄스 분산 특성 분석 (Analysis of Impulse Dispersion for IR-UWB Antenna Using Time-Frequency Analysis)

  • 고영목;나극환
    • 한국전자파학회논문지
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    • 제21권12호
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    • pp.1371-1379
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    • 2010
  • 본 논문에서는 시간-주파수 분석 기법을 이용하여 IR-UWB(Impulse Radio UWB) 안테나의 임펄스 분산 특성 분석에 대해 제시하였다. 최적 임펄스 신호 전송이 가능한 테이퍼 슬롯 안테나와 이동성을 고려한 무지향성 IRUWB 안테나 4종(마이크로스트립 선로 급전 구조 2종, CPW(Coplanar Waveguide) 급전 구조 2종)을 설계하였으며, 3.1~5.1 GHz UWB 대역에서 각 안테나 링크에 대해 시간-주파수 분석 기법인 STFT(Short Time Fourier Transform)을 이용하여 안테나의 분산 특성을 분석하였다. 따라서 제안된 STFT 기법을 이용할 경우, IR-UWB 안테나의 분산 특성 추출을 위한 시간 영역 임펄스 응답 측정 대안으로 사용이 가능하다.

Discrimination of cultivation ages and cultivars of ginseng leaves using Fourier transform infrared spectroscopy combined with multivariate analysis

  • Kwon, Yong-Kook;Ahn, Myung Suk;Park, Jong Suk;Liu, Jang Ryol;In, Dong Su;Min, Byung Whan;Kim, Suk Weon
    • Journal of Ginseng Research
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    • 제38권1호
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    • pp.52-58
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    • 2014
  • To determine whether Fourier transform (FT)-IR spectral analysis combined with multivariate analysis of whole-cell extracts from ginseng leaves can be applied as a high-throughput discrimination system of cultivation ages and cultivars, a total of total 480 leaf samples belonging to 12 categories corresponding to four different cultivars (Yunpung, Kumpung, Chunpung, and an open-pollinated variety) and three different cultivation ages (1 yr, 2 yr, and 3 yr) were subjected to FT-IR. The spectral data were analyzed by principal component analysis and partial least squares-discriminant analysis. A dendrogram based on hierarchical clustering analysis of the FT-IR spectral data on ginseng leaves showed that leaf samples were initially segregated into three groups in a cultivation age-dependent manner. Then, within the same cultivation age group, leaf samples were clustered into four subgroups in a cultivar-dependent manner. The overall prediction accuracy for discrimination of cultivars and cultivation ages was 94.8% in a cross-validation test. These results clearly show that the FT-IR spectra combined with multivariate analysis from ginseng leaves can be applied as an alternative tool for discriminating of ginseng cultivars and cultivation ages. Therefore, we suggest that this result could be used as a rapid and reliable F1 hybrid seed-screening tool for accelerating the conventional breeding of ginseng.

Rapid discrimination of commercial strawberry cultivars using Fourier transform infrared spectroscopy data combined by multivariate analysis

  • Kim, Suk Weon;Min, Sung Ran;Kim, Jonghyun;Park, Sang Kyu;Kim, Tae Il;Liu, Jang R.
    • Plant Biotechnology Reports
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    • 제3권1호
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    • pp.87-93
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    • 2009
  • To determine whether pattern recognition based on metabolite fingerprinting for whole cell extracts can be used to discriminate cultivars metabolically, leaves and fruits of five commercial strawberry cultivars were subjected to Fourier transform infrared (FT-IR) spectroscopy. FT-IR spectral data from leaves were analyzed by principal component analysis (PCA) and Fisher's linear discriminant function analysis. The dendrogram based on hierarchical clustering analysis of these spectral data separated the five commercial cultivars into two major groups with originality. The first group consisted of Korean cultivars including 'Maehyang', 'Seolhyang', and 'Gumhyang', whereas in the second group, 'Ryukbo' clustered with 'Janghee', both Japanese cultivars. The results from analysis of fruits were the same as of leaves. We therefore conclude that the hierarchical dendrogram based on PCA of FT-IR data from leaves represents the most probable chemotaxonomical relationship between cultivars, enabling discrimination of cultivars in a rapid and simple manner.

INTENSIVE OBSERVATION OF SAND AND DUST STORMS USING GROUND-BASED FOURIER TRANSFORM INFRARED SPECTROSCOPY IN ANMYEON, KOREA

  • Lee, Byung-Il;Kim, Yoon-Jae;Sohn, Eun-Ha;Kim, Mee-Ja;Lee, Kwang-Mog;Park, Joong-Hyun
    • 대한원격탐사학회:학술대회논문집
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    • 대한원격탐사학회 2007년도 Proceedings of ISRS 2007
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    • pp.142-145
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    • 2007
  • In order to analyze hyper-spectral properties of Sand and Dust Storm (SDS), dust observation experiment has been performed at the Korea Global Atmosphere Watch Center (KGAW) in Anmyeon form early March to middle of May, 2007. We measured down-welling radiances by using ground-based Fourier Transform Infrared Spectroscopy (FT-IR) at the time of overpass of AIRS. And radiative transfer model simulation has been carried out to estimate the effects of size distribution, components, and altitude of SDS over the high resolution infrared spectrum in the range of 500-1500 $cm^{-1}$ with a line-by-line radiative transfer model and compared them with FT-IR and AIRS/Aqua observing data.

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Study on Rapid Measurement of Wood Powder Concentration of Wood-Plastic Composites using FT-NIR and FT-IR Spectroscopy Techniques

  • Cho, Byoung-kwan;Lohoumi, Santosh;Choi, Chul;Yang, Seong-min;Kang, Seog-goo
    • Journal of the Korean Wood Science and Technology
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    • 제44권6호
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    • pp.852-863
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    • 2016
  • Wood-plastic composite (WPC) is a promising and sustainable material, and refers to a combination of wood and plastic along with some binding (adhesive) materials. In comparison to pure wood material, WPCs are in general have advantages of being cost effective, high durability, moisture resistance, and microbial resistance. The properties of WPCs come directly from the concentration of different components in composite; such as wood flour concentration directly affect mechanical and physical properties of WPCs. In this study, wood powder concentration in WPC was determined by Fourier transform near-infrared (FT-NIR) and Fourier transform infrared (FT-IR) spectroscopy. The reflectance spectra from WPC in both powdered and tableted form with five different concentrations of wood powder were collected and preprocessed to remove noise caused by several factors. To correlate the collected spectra with wood powder concentration, multivariate calibration method of partial least squares (PLS) was applied. During validation with an independent set of samples, good correlations with reference values were demonstrated for both FT-NIR and FT-IR data sets. In addition, high coefficient of determination (${R^2}_p$) and lower standard error of prediction (SEP) was yielded for tableted WPC than powdered WPC. The combination of FT-NIR and FT-IR spectral region was also studied. The results presented here showed that the use of both zones improved the determination accuracy for powdered WPC; however, no improvement in prediction result was achieved for tableted WPCs. The results obtained suggest that these spectroscopic techniques are a useful tool for fast and nondestructive determination of wood concentration in WPCs and have potential to replace conventional methods.