• Journal of the Korean Vacuum Society
• /
• v.8 no.4A
• /
• pp.465-469
• /
• 1999

In this paper, spacer process for FED (Field Emission Display ) was developed with the glass to glass anodic bonding technology using Al film as an interlayer. Characteristics, current density-time curves and force of the anodic boding were measured on various thickness of Al film; 1000$\AA$, 2000$\AA$, 3000$\AA$, 4000$\AA$ and 500$\AA$. Holders for spacer were fabricated with photosensitive glass and (110) Si wafer by bulk micromachining. Spacers was formed on glass substrate by spacer glass to glass anodic bonding and an evacuated panel was fabricated to prove the potential of application for FED.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2008.10a
• /
• pp.957-960
• /
• 2008

The influences of silicon and MgO seed particle on the reconstruction characteristics of MgO protective layer were investigated to clarify the mechanism of reconstruction and exaggerated grain growth (EGG) in AC-PDP. The reconstruction and EGG are closely correlated with the driving force for nucleation and growth, interface energy and initial size distribution of MgO protective layer in plasma space during discharge in AC-PDP.

• Journal of the Korean Ceramic Society
• /
• v.47 no.2
• /
• pp.146-150
• /
• 2010

Because the plasma display panel has used red, green and blue(RGB) phosphors, it has suffer from two intrinsic problems; 1) the cell defect due to the lack of binding force between phosphor particles and 2) mis-discharge because of difference of electrical characteristics among RGB phosphors. In order to control the mechanical and electrical properties of RGB phosphors, frit with $ZnOB_2O_3-SiO_2-Al_2O_3$ system was added to RGB phosphor as sintering additive. The mechanical properties were increased by the amount of frit. The amount of frit under 5 wt% rarely affected dielectric constant. However, there was the limit of amount because of decreasing optical properties seriously; over 3 wt% in red, over 10 wt% in green and blue.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2006.08a
• /
• pp.1378-1381
• /
• 2006

The CNTs are the most extensively studied material which are characterized by the complete property of matter, structure, and the large thermal conductivity (Thermal conductivity of $CNTs\;{\sim}>2000W/mK$ vs. Thermal conductivity of Aluminum ${\sim}\;>204W/mK$). Thus, they are successfully applied to the various fields. However, due to the strong agglomeration caused by the van der waal's force, their applications are limited. In the present study, a new method for CNTs dispersion was developed by using the mechanical dispersion, acid treatment, and then Cu was coated. This process produces CNTs/Cu nanocomposite powders, whereby the CNTs are homogeneously located within the Cu powders. The thermal properties of the CNTs/Cu nanocomposite were investigated.

• Transactions on Electrical and Electronic Materials
• /
• v.11 no.5
• /
• pp.222-225
• /
• 2010

The preparation of tin oxide thin films by atomic layer deposition (ALD), using a tetrakis (ethylmethylamino) tin precursor, and the effects of a seed layer on film growth were examined. The average growth rate of tin oxide films was approximately 1.2 to 1.4 A/cycle from $50^{\circ}C$ to $150^{\circ}C$. The rate rapidly decreased at the substrate temperature at $200^{\circ}C$. A seed effect was not observed in the crystal growth of tin oxide. However, crystallinity and the growth of seed material were detected by XPS after thermal annealing. ALD-grown seeded tin oxide thin films, as-deposited and after thermal annealing, were characterized by X-ray diffraction, atomic force microscopy and XPS.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.26 no.9
• /
• pp.1888-1896
• /
• 2002

This study presents a new type of CNC interpolator that is capable of generating cutter paths for ball-end milling of NURBS surfaces. The proposed surface interpolator comprises real-time algorithms for cutter contact (CC) path scheduling and CC path interpolator. Especially in this study, a new interpolator module to regulate cutting forces is developed. This propose algorithm utilizes variable-feedrate commands along the CC path according to the curvature of machined surfaces during the interpolation process. Additionally, it proposes an OpenGL graphic library for computer graphics and animation of interpolated tool-position display. The proposed interpolator is evaluated and compared with the existing method based on constant feedrates through computer simulations.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1997.04a
• /
• pp.371-376
• /
• 1997

A 100*100.mu.m$^{2}$ aluminum micro mirror is designed and fabricated using a thick photoresist as a sacrificial layer andas a mold for nickel electroplating. The micro mirror is composed of aluminum mirror plate, two nickel support posts, two aluminum hinges, two address eletrodes, and two landing electrodes. The aluminum mirror plate,which is supported by two nickel support posts, is overhung about 10.mu.m from the silicon substrate. THe aluminum mirror plate is actuated like a seesaw by electrostatic force generated by electic potential difference applied between the mirror plate and the address electrode. This paper presents some methods to measure the optical and the dynamic characteristics of the fabricated micro mirror.

• Laser Solutions
• /
• v.11 no.3
• /
• pp.1-4
• /
• 2008

A selective laser micro bonding process using liquid glass (methylsilsesquioxane) was developed and the results are analysed. The liquid glass can be solidified with Nd:YAG laser irradiation and it can be applied for joining two glass substrates. A bonding thickness of a few micrometers can be achieved. The appropriate laser power density (or this process is around 40-60 $kW/cm^2$ and its bonding force is 1000-1200 $gf/mm^2$. This process can be applied for bonding micro devices such as micro bio-sensors or display products. Its advantages and limitations are presented and discussed.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.33 no.11
• /
• pp.886-893
• /
• 2009

To develop glass panel vacuum lift system for the post process in module line of FPD(Flat panel display) such as LCD and PDP, new vacuum adsorption parts of this system are proposed. These parts are composed of variable geometry configurations utilizing ceramic porous medium for variable size of glass panels. In order to design this device, detail understanding of flow phenomena in the flow path of vacuum adsorption system is essential. Thus, CFD analysis and designs are performed for several configurations in terms of pressure drop and balancing force at the adsorption side. From the result, new configuration is recommended for optimum design and manufacturing purpose.

• Proceedings of the KSME Conference
• /
• 2008.11a
• /
• pp.1594-1599
• /
• 2008

Haptic rendering is a process that provides force feedback during interactions between a user and an object. This paper presents a haptic rendering technique for a telemanipulation system of deformable objects using image processing and physically based modeling techniques. The interaction forces between an instrument driven by a haptic device and a deformable object are inferred in real time based on a continuum mechanics model of the object, which consists of a boundary element model and ${\alpha}$ priori knowledge of the object's mechanical properties. Macro- and micro-scale experimental systems, equipped with a telemanipulation system and a commercial haptic display, were developed and tested using silicone (macro-scale) and zebrafish embryos (micro-scale). The experimental results showed the effectiveness of the algorithm in different scales: two experimental systems applied the same algorithm provided haptic feedback regardless of the system scale.