• 센서학회지
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• 제24권6호
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• pp.379-384
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• 2015

An infrared image sensor is a core device in a thermal imaging system. The fabrication method of a focal plane array (FPA) is a key technology for a high resolution infrared image sensor. Each pixels in the FPA have $Si_3N_4/SiO_2$ membranes including legs to deposit bolometric materials and electrodes on Si readout circuits (ROIC). Instead of polyimide used to form a sacrificial layer, the feasibility of an amorphous silicon (${\alpha}-Si$) was verified experimentally in a $8{\times}8$ micro-bolometer array with a $50{\mu}m$ pitch. The elimination of the polyimide sacrificial layer hardened by a following plasma assisted deposition process is sometimes far from perfect, and thus requires longer plasma ashing times leading to the deformation of the membrane and leg. Since the amorphous Si could be removed in $XeF_2$ gas at room temperature, however, the fabricated micro-bolomertic structure was not damaged seriously. A radio frequency (RF) sputtered nickel oxide film was grown on a $Si_3N_4/SiO_2$ membrane fabricated using a low stress silicon nitride (LSSiN) technology with a LPCVD system. The deformation of the membrane was effectively reduced by a combining the ${\alpha}-Si$ and LSSiN process for a nickel oxide micro-bolometer.

• 대한원격탐사학회지
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• 제14권3호
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• pp.223-231
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• 1998

해양생물학 연구를 위해 전세계 바다색 관측을 수행하게 될 아리랑 1호 위성(Korean Multi-Purpose SATellite. KOMPSAT)의 탑재체 Ocean Scanning Multispectral Imager(OSMI)를 개발하였다. OSMI는 관측폭 800km 이내에서 1km 이하의 지상해상도를 갖고 whisk-broom 주사 기법으로 해양표면의 영상을 얻는다. OSMI는 3년의 수명 동안 20%의 궤도 운영 duty cycle을 갖으며 궤도 운영 중 영상 자료의 gain/offset 조정이 가능하고 영상자료 저장 기능이 내장되도록 설계되었다. 궤도 운영 중 센서 보정을 위해 OSMI는 태양 보정과 암흑 보정을 수행한다. OSMI는 2차원 Charge Coupled Device(CCD) Focal Plane Array(FPA)를 사용하는 다중 분광 촬영기로서 400nm에서 900nm가지의 파장 대역에 대한 결상이 가능하다. 이 파장대역 중에서 궤도 운영 중 지상명령을 통해 선택되는 6개 분광 채널을 사용하여 해양표면이 관측된다. 센서 성능은 지상 특성 시험 단계에서 412, 443, 490, 510, 555, 670, 765 그리고 865nm의 8개 분광 대역에 대해 측정되었다. 이 지상 특성 시험 결과와 더불어 태양/암흑 보정이 궤도 분광 채널 선택 및 보정에 사용될 것이다. 운영중 분광 채널 선택 기능은 바다색 관측 및 해양생물학 연구에 큰 유연성을 줄 것이다.

• 한국광학회지
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• 제24권4호
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• pp.176-183
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• 2013

본 논문에서는 3차원 영상 획득을 위한 LADAR(LAser Detection And Ranging)용 광수신기 모듈을 설계-제작하고 측정한 결과를 보고한다. 광수신기 모듈은 1 km 이상의 거리에서도 신호를 측정할 수 있도록 디지털모드(Geiger Mode)에서 동작하는 InGaAs APD(Avalanche Photodiode)로 설계하였으며, $16{\pm}16$ FPA(Focal Plane Array)로 설계-제작하였다. 디지털모드(Geiger Mode)는 항복전압 이상의 영역에서 동작하여 작은 광에 대해 반응 할 수 있게 큰 증폭률을 가지게 된다. 1ns의 FWHM(Full Width at Half Maximum)을 갖는 펄스를 수광할 수 있고, 배열 크기는 $16{\pm}16$, Geiger Mode 동작 등의 특성을 만족하도록 광수신기를 구성하기 위해 ROIC(Read Out Integrated Circuit)를 자체적으로 설계-제작하였다. 제작된 광수신기 모듈은 원거리 표적정보 획득이 가능하며, PDE(Photon Detection Efficiency)는 28%, DCR(Dark Count Rate)은 140 kHz 이하의 특성을 보였으며, LADAR 시스템에서 3차원 영상을 획득하였다. 이는 $16{\pm}16$ FPA APD를 이용한 광수신기에서 가장 우수한 특성을 나타낸 것이다.

• 센서학회지
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• 제27권5호
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• pp.300-305
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• 2018

The uncooled microbolometer thermal sensor for low cost and mass volume was designed to target the new infrared market that includes smart device, automotive, energy management, and so on. The microbolometer sensor features 80x60 pixels low-resolution format and enables the use of wafer-level vacuum packaging (WLVP) technology. Read-out IC (ROIC) implements infrared signal detection and offset correction for fixed pattern noise (FPN) using an internal digital to analog convertor (DAC) value control function. A reliable WLVP thermal sensor was obtained with the design of lid wafer, the formation of Au80%wtSn20% eutectic solder, outgassing control and wafer to wafer bonding condition. The measurement of thermal conductance enables us to inspect the internal atmosphere condition of WLVP microbolometer sensor. The difference between the measurement value and design one is $3.6{\times}10-9$ [W/K] which indicates that thermal loss is mainly on account of floating legs. The mean time to failure (MTTF) of a WLVP thermal sensor is estimated to be about 10.2 years with a confidence level of 95 %. Reliability tests such as high temperature/low temperature, bump, vibration, etc. were also conducted. Devices were found to work properly after accelerated stress tests. A thermal camera with visible camera was developed. The thermal camera is available for non-contact temperature measurement providing an image that merged the thermal image and the visible image.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 2004년도 Proceedings of ISRS 2004
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• pp.601-603
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• 2004

Multi-Spectral Camera(MSC) is a payload on the KOMPSAT -2 satellite to perform the earth remote sensing. The instrument images the earth using a push-broom motion with a swath width of 15 km and a ground sample distance (GSD) of 1 m over the entire field of view (FOV) at altitude 685 Km. The instrument is designed to have an on-orbit operation duty cycle of $20\%$ over the mission lifetime of 3 years with the functions of programmable gain! offset and onboard image data compression/storage. MSC instrument has one(1) channel for panchromatic Imaging and four(4) channel for multi-spectral Imaging covering the spectral range from 450nm to 900nm using TDI CCD Focal Plane Array (FPA). In this paper, the configuration, the interface of MSC hardware and the MSC operation concept are described. And the method of the MSC calibration are described and the design of MSC calibration operation to measure the change of MSC after Launch & Early Operation(LEOP) and normal mission operations are discussed and analyzed.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 2003년도 Proceedings of ACRS 2003 ISRS
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• pp.825-827
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• 2003

Multi-Spectral Camera(MSC) is a payload on the KOMPSAT-2 satellite to perform the earth remote sensing. The instrument images the earth using a push-broom motion with a swath width of 15 km and a ground sample distance (GSD) of 1 m over the entire field of view (FOV) at altitude 685 Km. The instrument is designed to have an on-orbit operation duty cycle of 20% over the mission lifetime of 3 years with the functions of programmable gain/ offset and on-board image data compression/storage. The MSC instrument has one(1) channel for panchromatic imaging and four(4) channel for multi-spectral imaging covering the spectral range from 450nm to 900nm using TDI CCD Focal Plane Array (FPA). In this paper, the architecture and function of MSC hardware including electrical interface and the operation concept which have been established based on the mission requirements are described. And the design and the preparation of MSC system operation are analyzed and discussed.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 1999년도 Proceedings of International Symposium on Remote Sensing
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• pp.375-380
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• 1999

Ocean Scanning Multispectral Imager (OSMI) is a payload on the KOMPSAT satellite to perform worldwide ocean color monitoring for the study of biological oceanography. The instrument images the ocean surface using a wisk-broom motion with a swath width of 800 km and a ground sample distance (GSD) of<1km over the entire field of view (FOV). The instrument is designed to have an on-orbit operation duty cycle of 20% over the mission lifetime of 3 years with the functions of programmable gain/offset and on-board image data compression/storage. The instrument also performs sun and dark calibration for on-board instrument calibration. The OSMI instrument is a multi-spectral imager covering the spectral range from 400nm to 900nm using CCD Focal Plane Array (FPA). The ocean colors are monitored using 6 spectral channels that can be selected via ground commands. KOMPSAT satellite with OSMI was integrated and the satellite level environment tests and instrument aliveness/functional test as well, such as launch environment, on-orbit environment (Thermal/vacuum) and EMl/EMC test were performed at KARI. Test results met the requirements and the OSMI data were collected and analyzed during each test phase. The instrument is launched on the KOMPSAT satellite in the late 1999 and the image is scheduled to start collecting ocean color data in the early 2000 upon completion of on-orbit instrument checkout.

• Journal of Astronomy and Space Sciences
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• 제31권2호
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• pp.177-186
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• 2014

The Immersion Grating Infrared Spectrometer (IGRINS) is a near-infrared wide-band high-resolution spectrograph jointly developed by the Korea Astronomy and Space Science Institute and the University of Texas at Austin. IGRINS employs three HAWAII-2RG Focal Plane Array (H2RG FPA) detectors. We present the design and fabrication of the detector mount for the H2RG detector. The detector mount consists of a detector housing, an ASIC housing, a Field Flattener Lens (FFL) mount, and a support base frame. The detector and the ASIC housing should be kept at 65 K and the support base frame at 130 K. Therefore they are thermally isolated by the support made of GFRP material. The detector mount is designed so that it has features of fine adjusting the position of the detector surface in the optical axis and of fine adjusting yaw and pitch angles in order to utilize as an optical system alignment compensator. We optimized the structural stability and thermal characteristics of the mount design using computer-aided 3D modeling and finite element analysis. Based on the structural and thermal analysis, the designed detector mount meets an optical stability tolerance and system thermal requirements. Actual detector mount fabricated based on the design has been installed into the IGRINS cryostat and successfully passed a vacuum test and a cold test.

• 항공우주기술
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• 제11권1호
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• pp.98-102
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• 2012

비냉각형 열상 시스템에 대한 관심이 국방 및 항공우주 분야에서 증가하고 있다. 특히, 국방분야 무기체계에서는 무인화 및 주야간 적군 탐지를 위한 요소기술로 활용되고 있다. 비냉각형 열상 시스템의 연구 분야 중 저비용, 저전력, 소형화를 위한 비냉각형 TEC(Thermal Electric Cooler)-less 열상 시스템에 대한 연구가 활발히 진행되고 있다. 그러나 TEC-less로 운영하기 위해서는 최적화된 불균일보정 계수의 추출 및 적용이 요구된다. 본 논문에서는 TEC-less로 최적화 된 보정 계수 획득 방법으로 선형 보간법을 이용한 보정 계수 추정 방법인 DCCE-LI(Dynamic Calibration Coefficient Estimation with Linear Interpolation)을 제안하고, 실험을 통해 제안 기법이 기존의 정적 보정 계수를 적용한 것에 비해 IR 영상 품질이 우수하고, 실시간 보정 계수 추정이 가능함을 보인다.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 1998년도 Proceedings of International Symposium on Remote Sensing
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• pp.319-324
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• 1998

Ocean Scanning Multispectral Imager (OSMI) is a payload on the Korean Multi-purpose SATellite (KOMPSAT) to perform worldwide ocean color monitoring for the study of biological oceanography. The instrument images the ocean surface using a whisk-broom motion with a swath width of 800 km and a ground sample distance (GSD) of < 1 km over the entire field-of-view (FOV). The instrument is designed to have an on-orbit operation duty cycle of 20% over the mission lifetime of 3 years with the functions of programmable gain/offset and on-board image data storage. The instrument also performs sun calibration and dark calibration for on-board instrument calibration. The OSMI instrument is a multi-spectral imager covering the spectral range from 400 nm to 900 nm using a CCD Focal Plane Array (FPA). The ocean colors are monitored using 6 spectral channels that can be selected via ground commands after launch. The instrument performances are fully measured for 8 basic spectral bands centered at 412nm, 443nm, 490nm, 510nm, 555nm, 670nm, 765nm and 865nm during ground characterization of instrument. In addition to the ground calibration, the on-board calibration will also be used for the on-orbit band selection. The on-orbit band selection capability can provide great flexibility in ocean color monitoring.