• Journal of the Korean Applied Science and Technology
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• v.31 no.2
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• pp.231-237
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• 2014

The supercritical fluids (SCFs) have been widely used for material synthesis and processing due to their remarkable properties including low viscosity, high diffusivity and low surface tension. Carbon dioxide is one of the suitable solvents in SCFs processes in terms of its advantages such as easy processibility (with low critical temperature and pressure), inexpensive, nonflammable, nontoxic, and readily available. However, it has generally low solubility for high molecular weight polymers with the exception of fluoropolymers and siloxane polymers. Therefore, hydrocarbon solvents and hydrochlorofluorocarbons have been used for various SCFs process by its high solubility for high molecular weight polymers. In this report, a PMMA/clay nanocomposites were fabricated by using supercritical fluid process. The $Na^+$-MMT(montmorillonites)was modified by a fluorinated surfactant which is able to enhance compatibility with the chlorodifluoromethane(HCFC-22) and thus, improve dispersability of the clay in the polymer matrix. The PMMA/fluorinated surfactant modified clay nanocomposite shows enhanced mechanical and thermal properties which characterized by X-raydiffraction(XRD), Thermo gravimetric analysis(TGA), Dynamic mechanical analysis (DMA) and Transmission electron microscopy (TEM).

• Korean Journal of Materials Research
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• v.30 no.10
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• pp.522-532
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• 2020

Conductive polymer composites with high electrical and mechanical properties are in demand for bipolar plates of phosphoric acid fuel cells (PAFC). In this study, composites based on natural graphite/fluorinated ethylene propylene (FEP) and different ratios of carbon black are mixed and hot formed into bars. The overall content of natural graphite is replaced by carbon black (0.2 wt% to 3.0 wt%). It is found that the addition of carbon black reduces electrical resistivity and density. The density of composite materials added with carbon black 3.0 wt% is 2.168 g/㎤, which is 0.017 g/㎤ less than that of non-additive composites. In-plane electrical resistivity is 7.68 μΩm and through-plane electrical resistivity is 27.66 μΩm. Compared with non-additive composites, in-plane electrical resistivity decreases by 95.7 % and through-plane decreases by 95.9 %. Also, the bending strength is about 30 % improved when carbon black is added at 2.0 wt% compared to non-additive cases. The decrease of electrical resistivity of composites is estimated to stem from the carbon black, which is a conductive material located between melted FEP and acts a path for electrons; the increasing mechanical properties are estimated to result from carbon black filling up pores in the composites.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.308-308
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• 2011

최근 초발수성 표면은 자동차 표면을 비롯해 안경 렌즈 등 여러 분야에서 사용되고 점차 그 필요성이 대두되고 있다. 이러한 초발수성 표면 제작은 주로 자연 상태에서 초발수 특성을 보이는 연 잎을 모방하는 방법으로 이루어지고 있다. 연 잎의 표면을 살펴보면 표면에 마이크로-나노 구조의 돌기가 존재하고 그 위에 표면에너지가 낮은 물질이 코팅되어 있는 구조이다. 본 연구에서는 이를 응용하여 금속 표면에 마이크로-나노 구조물을 형성하고 그 위에 발수 특성을 지닌 물질을 코팅하는 방법을 이용하여 초발수성 금속 표면을 개발하였다. 이는 건축 외장재, 자동차 및 내연 기관 부품, 모바일 기기 등의 가전제품 외장재 등 발수 특성을 필요로 하는 분야에 적용 가능하고, 이에 대한 수요가 급증하고 있다. 마이크로-나노 구조 형성은 기계적 가공 및 이온 빔 식각 방법을 이용하였다. 그리고 그 위에 plasma enhanced chemical vapor deposition (PECVD) 방법을 이용하여 표면에너지가 낮은 fluorinated carbon 혹은 diamond-like-carbon (DLC)를 코팅하였다. 본 연구의 결과, 표면 처리 이전 물과의 접촉각이 $60^{\circ}$ 정도를 보이는 steel 기판이 표면 처리 이후에는 $140^{\circ}$ 이상의 접촉각을 보임으로써 초발수 특성의 표면이 형성되었음을 확인할 수 있었다.

• Membrane Journal
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• v.20 no.2
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• pp.106-112
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• 2010

This study deals with the surface fluorination of poly(phenylene oxide) (PPO) with the direct contact of 100 ppm fluorine gas. To characterize the surface fluorinated membranes, the contac angle measurement, X-ray photoelectron microscopy analysis and the gas permeation experiments were performed. As the fluorination time increases, the hydrophobicity of membrane surfaces is increased by the surface characterization. In general, as expected, the overall gas permeability was reduced. Typically, the permeability reduction of 33% for nitrogen, 23% for oxygen and 3% for carbon dioxide were observed when the membranes were exposed in 100 ppm environment for 60 min., meanwhile the selectivity was increased from 3.92 to 4.47 for $O_2/N_2$ and 18.09 to 25.4 for $O_2/N_2$, respectively.

• Bulletin of the Korean Chemical Society
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• v.27 no.3
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• pp.373-375
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• 2006

$CF_4$ gas is one of the most common chemicals used for dry etching in semiconductor manufacturing processes. For application to the etching process and environmental control, the low-pressure inductively coupled plasma (LP-ICP) was employed to obtain the spectrum of $CF_4$ gas. In terms of the analysis of the spectra, trace CF radical by A-X and B-X transitions was detected. The other $CF_x$ radicals, such as $CF_2$ and $CF_3$, were not seen in this experiment whereas strong C and $C_2$ emissions, dissociation products of $CF_4$ gas, were observed.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.155-155
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• 1999

반도체 소자의 초고집적화와 고속화에 따라 최소 선폭이 급격히 줄어듬에 따라 현재 사용되고 있는 다층금속배선의 층간절연막 0.18$\mu\textrm{m}$ 급 이상의 소자에 적용할 경우 기생정전용량이 증가하여 신호의 지연 및 금속배선간에 상호간섭현상으로 반도체 소자의 동작에 심각한 문제가 대두되고 있다. 이러한 물제를 해결하기 위하여 nonoporous silica, fluorinated amorphous carbon, polyimides, poly(arylene)ether, parylene, AF4, poly(tetrafluoroethylene), divinyl siloxane bisbenzocyclobutene, Silk, 그리고 유무기 hybrid nanofoam 등이 저유전물질로 각광을 받고 있으며, 여기에 대한 연구가 우리나라를 비롯하여 미국, 일본 등에서 많은 연구가 이루어지고 있다. 따라서 본 연구에서는 2003년에 개발될 0.13$\mu\textrm{m}$급 이상의 차세대 반도체 소자에 적용될 수 있는 저유전물질 개발현황과 이들 물질 중 4GDRAM 급이상의 소자에 적용가능성이 가장 높은 유무기 hybrid nanofoam, a-C:F와 C:F-SiO2 박막에 대한 특성에 대하여 소개하고자 한다.

• Transactions of the Korean hydrogen and new energy society
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• v.28 no.5
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• pp.465-470
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• 2017

Sulfonated fluorinated block copolymers having diphenyl units were mixed with the sulfonated cationic conductive polymers at an optimum mixing ratio to form hybrid membranes for fuel cells and their characteristics were studied. 2D and 3D AFM topology analysis confirmed that the number of hydrophilic units in the hybrid membrane was improved. Through the FE-SEM, the microstructure of the hybrid membrane implied hydrogen bonding and pi-pi interactions, and EDAX confirmed carbon, oxygen, sulfur, and fluorine. The thermogravimetric analysis showed that the hybrid membrane was thermally stable and the hydrophilicity of the hybrid membrane was increased by the contact angle of water droplets. As a result, it was confirmed that the cation conductivity increased by a factor of 1.8 times as the number of acidic domains in the hybrid film increased.

• Korean Journal of Materials Research
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• v.9 no.12
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• pp.1211-1215
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• 1999

Fluorinated amorphous carbon (a-C:F) films were prepared by an electron cyclotron resonance chemical vapor deposition (ECRCVD) system using a gas mixture of $C_2F_6$ and $CH_4$ over a range of deposition temperature (room temperature ~ 300$^{\circ}C$). 500$^{\AA}C$ thick DLC films were pre-deposited on Si substrate to improve the strength between substrate and a-C:F film. The chemical bonding structure, chemical composition, surface roughness and dielectric constant of a-C:F films deposited by varying the deposition temperature were studied with a variety of techniques, such as Fourier transform infrared spectroscopy(FTIR), X-ray photoelectron spectroscopy(XPS), atomic force microscopy (AFM) and capacitance-voltage(C-V) measurement. Both deposition rate and fluorine content decreased linearly with increasing deposition temperature. As the deposition temperature increased from room temperature to 300$^{\circ}C$, the fluorine concentration decreased from 53.9at.% down to 41.0at.%. The dielectric constant increased from 2.45 to 2.71 with increasing the deposition temperature from room temperature to 300$^{\circ}C$. The film shrinkage was reduced with increasing deposition temperature. This results ascribed by the increased crosslinking in the films at the higher deposition temperature.

• Applied Chemistry for Engineering
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• v.34 no.1
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• pp.15-22
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• 2023

Recent studies have actively investigated ways to improve the economic feasibility and efficiency of the Fischer-Tropsch process by increasing the yields of the monocyclic aromatic compounds (BTEX). In this study, ethylene was selected as a model of F-T-derived hydrocarbons, and the ethylene-to-aromatics (ETA) reaction was investigated according to changes in acid characteristics, mesopores, and crystallinity of HZSM-5 (HZ5). Fluorinated HZ5 was prepared by calcination followed by impregnation of an aqueous NH₄F solution having different molar concentrations in HZ5, and the structural and chemical properties of F/HZ5 were investigated through Brunauer-Emmett-Teller (BET), solid-state nuclear magnetic resonance (NMR), X-ray photoelectron spectroscopy (XPS), NH₃-temperature-programmed desorption (TPD), and pyridine-IR spectroscopy. The ETA reactions were performed at 673 K under 0.1 MPa, and fluorinating HZ5 by an aqueous NH₄F solution of 0.17 M improved ethylene conversion, BTEX selectivity, and catalytic stability due to acidity, mesopore fraction, and crystallinity.

• Korean Journal of Materials Research
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• v.33 no.4
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• pp.124-129
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• 2023

This study assessed the influences of fluorine introduced into DLC films on the structural and mechanical properties of the sample. In addition, the effects of the fluorine incorporation on the compressive stress in DLC films were investigated. For this purpose, fluorinated diamond-like carbon (F-DLC) films were deposited on cobalt-chromium-molybdenum substrates using radio-frequency plasma-enhanced chemical vapor. The coatings were examined by Raman scattering (RS), Attenuated total reflectance Fourier transform infrared spectroscopic analysis (ATR-FTIR), and a combination of elastic recoil detection analysis and Rutherford backscattering (ERDA-RBS). Nano-indentation tests were performed to measure hardness. Also, the residual stress of the films was calculated by the Stony equation. The ATR-FTIR analysis revealed that F was present in the amorphous matrix mainly as C-F and C-F₂ groups. Based on Raman spectroscopy results, it was determined that F made the DLC films more graphitic. Additionally, it was shown that adding F into the DLC coating resulted in weaker mechanical properties and the F-DLC coating exhibited lower stress than DLC films. These effects were attributed to the replacement of strong C = C by feebler C-F bonds in the F-DLC films. F-doping decreased the hardness of the DLC from 11.5 to 8.8 GPa. In addition, with F addition, the compressive stress of the DLC sample decreased from 1 to 0.7 GPa.