• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.81-81
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• 2013

반도체, LCD, MEMs 등 미세 전자소자의 제작과 깊은 관련이 있는 IT 산업은 자동차 산업과 함께 세계 경제를 이끌고 있는 핵심 산업이며, 그 발전 가능성이 크다고 할 수 있다. 이 중 반도체, LCD 공정 기술에 관해서 대한민국은 세계를 선도하여 시장을 이끌어 나가고 있는 실정이다. 이들의 공정기술은 주로 높은 수율(yield)을 기반으로 한 대량 생산 기술에 초점이 맞추어져 있기 때문에, 현재와 같은 첨예한 가격 경쟁력이 요구되는 시대에서 공정 기술 개발을 통해 수율을 최대한으로 이끌어 내는 것이 현재 반도체를 비롯한 미세소자 산업이 직면하고 있는 하나의 중대한 과제라 할 수 있다. 특히 반도체공정에 있어 발전을 거듭하여 현재 20 nm 수준의 선폭을 갖는 소자들의 양산이 계획 있는데 이와 같은 나노미터급 선폭을 갖는 소자 양산과 관련된 CD (critical dimension)의 감소는 공차의 감소를 유발시키고 있으며, 패널의 양산에 있어서 생산 효율 증가를 위한 기판 크기의 대형화가 이루어지고 있다. 또한, 소자의 집적도를 높이기 위하여 높은 종횡비(aspect ratio)를 요구하는 공정이 일반화됨에 따라 단일 웨이퍼 내에서의 공정의 균일도(With in wafer uniformity, WIWU) 및 공정이 진행되는 시간에 따른 균일도(Wafer to wafer uniformity)의 변화 양상에 대한 파악을 통한 공정 진단에 대한 요구가 급증하고 있는 현실이다. 반도체 및 LCD 공정에 있어서 공정 균일도의 감시 및 향상을 위하여 박막, 증착, 식각의 주요 공정에 널리 사용되고 있는 플라즈마의 균일도(uniformity)를 파악하고 실시간으로 감시하는 것이 반드시 필요하며, 플라즈마의 균일도를 파악한다는 것은 플라즈마의 기판 상의 공간적 분포(radial direction)를 확인하여 보는 것을 의미한다. 현재까지 플라즈마의 공간적 분포를 진단하는 대표적인 방법으로는 랭뮤어 탐침(Langmuir Probe), 레이저 유도 형광법(Laser Induced Fluorescence, LIF) 그리고 광섬유를 이용한 발광분광법(Optical Emission Spectroscopy, OES)등이 있으나 랭뮤어 탐침은 플라즈마 본연의 상태에서 섭동(pertubation) 현상에 의한 교란, 이온에너지 측정의 한계로 인하여 공정의 실시간 감시에 적합하지 않으며, 레이저 유도 형광법은 측정 물질의 제한성 때문에 플라즈마 내부에 존재하는 다양한 종의 거동을 살필 수 없다는 단점 및 장치의 설치와 정렬(alignment)이 상대적으로 어려워 산업 현장에서 사용하기에 한계가 있다. 본 연구에서는 최소 50 cm에서 최대 400 cm까지 플라즈마 내 측정 거리에서 최대 20 mm 공간 분해가 가능한 광 수광 시스템 및 플라즈마 공정에서의 라디칼의 상태 변화를 분광학적 비접촉 방법으로 계측할 수 있는 발광 분광 분석기를 접목하여 플라즈마 챔버 내의 라디칼 공간 분포를 계측할 수 있는 진단 센서를 고안하고 이를 실 공정에 적용하여 보았다. 플라즈마 증착 및 식각 공정에서 형성된 박막의 두께 및 식각률과 공간 분해발광 분석법을 통하여 계측된 결과와의 매우 높은 상관관계를 확인하였다.

• Korean Journal of Ecology and Environment
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• v.49 no.4
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• pp.245-257
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• 2016

Although rivers cover only 0.5% of the total land area on the Earth, they are windows that show the integrated effects of watershed biogeochemistry. Studies on the loads and properties of riverine carbon have been conducted because they are directly linked with drinking water quality, and because regional or global net ecosystem production (NEP) can be overestimated, unless riverine carbon loads are subtracted. Globally, ${\sim}0.8-1.5Pg\;yr^{-1}$ and ${\sim}0.62-2.1Pg\;yr^{-1}$ of carbon are transported from terrestrial ecosystems to the ocean via rivers and from inland waters to the atmosphere, respectively. Concentrations, ${\delta}^{13}C$, and fluorescence spectra of riverine carbon have been investigated in South Korea to understand the spatiotemporal changes in the sources. Precipitation as well as land use/land cover can strongly influence the composition of riverine carbon, thus shifting the ratios among DIC, DOC, and POC, which could affect the concentrations, loads, and the degradability of adsorbed organic and inorganic toxic materials. A variety of analyses including $^{14}C$ and high resolution mass spectroscopy need to be employed to precisely define the sources and to quantify the degradability of riverine carbon. Long-term data on concentrations of major ions including alkalinity and daily discharge have been used to show direct evidence of ecosystem changes in the US. The current database managed by the Korean government could be improved further by integrating the data collected by individual researchers, and by adding the major components ions including DIC, DOC, and POC into the database.

• Resources Recycling
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• v.30 no.5
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• pp.38-48
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• 2021

In this study, we determine the optimal process conditions for selectively recovering Si from a solar cell surface by removal of impurities (Al, Zn, Ag, etc.). To selectively recover Si from solar cells, leaching is performed using HCl solution and an ultrasonic cleaner. After leaching, the solar cells are washed using distilled water and dried in an oven. Decompression filtration is performed on the HCl solution, and ICP-OES (Inductively Coupled Plasma Optical Emission spectroscopy) full scan analysis is performed on the filtered solution. Furthermore, XRD (X-ray powder diffraction), XRF (X-ray fluorescence), and ICP-OES are performed on the dried solar cells after crushing, and the purity and recovery rate of Si are obtained. In this experiment, the concentration of acid solution, reaction temperature, reaction time, and ultrasonic intensity are considered as variables. The results show that the optimal process conditions for the selective recovery of Si from the solar cells are as follows: the concentration of acid solution = 3 M HCl, reaction temperature = 60℃, reaction time = 120 min, and ultrasonic intensity = 150 W. Further, the Si purity and recovery rate are 99.85 and 99.24%, respectively.

• Geophysics and Geophysical Exploration
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• v.22 no.3
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• pp.149-159
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• 2019

Borehole elemental concentration logging, measuring neutron-induced gamma rays by inelastic scattering and neutron capture interactions between neutron and formation, delivers concentrations of the most common elements found in the minerals and fluids of subsurface formation. X-ray diffraction and X-ray fluorescence analysis from core samples are traditionally used to understand formation composition and mineralogy, but it represents only part of formations. Additionally, it is difficult to obtain elemental analysis over the whole intervals because of poor core recovery zones such as fractures or sand layers mainly responsible for groundwater flow. The development of borehole technique for in situ elemental analysis plays a key role in assessing subsurface environment. Although this technology has advanced consistently starting from conventional and unconventional resources evaluation, it has been considered as exclusive techniques of some major service company. As regards domestic research and development, it has still remained an unexplored field because of some barriers such as the deficiency of detailed information on tools and calibration facility for chemistry and mineralogy database. This article reviews the basic theory of spectroscopy measurements, system configuration, calibration facility, and current status. In addition, this article introduces the domestic researches and self-development status on borehole elemental concentration tools.

• Korean Journal of Heritage: History & Science
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• v.40
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• pp.413-430
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• 2007

This study analyzed the foreign substances in waterlogged archaeological woods and compounds in soil where waterlogged archaeological wood was buried, in order to examine the relationship between burial environment and foreign substances in waterlogged archaeological wood. The XRF(X-ray Fluorescence Spectroscopy) and EDX(Energy Dispersive X-ray) analysis were conducted to examine the effect of iron(Fe) to blacken the waterlogged wood. The XRF results showed that investigated soil contained Si, Al, and Fe. Wood ash contained more sulfur and Fe than any other elements in the EDX analysis. Cellulose and hemicellulose were significantly reduced at the surface of wood, which is the blackened part of waterlogged wood. Foreign substances changed the surface color. These problems could be solved by removal of foreign substances in waterlogged archaeological wood using EDTA(Ethylene Diamine Tetra Acetic acid). The optimum condition to remove Fe from waterlogged wood by EDTA was investigated. To do this, the concentration of Fe removed was measured with various concentration of EDTA-2Na. The optimum pH of EDTA-2Na was figured to be 4.1 to 4.3. As the concentration of EDTA increased, the extracted concentration of Fe also increased. In the case of 0.4 wt% of EDTA-2Na, about 60ppm of Fe was eliminated and was stabilized after 48 hours. In the case of EDTA-3Na, the optimum pH was 7 to 8, and about 10 ppm of Fe was eliminated at 0.4 wt% of EDTA-3Na. In the case of EDTA-4Na, the optimum pH was 10 to 11, and about 20 ppm of Fe was eliminated at 0.4 wt% of EDTA-4Na. In conclusion, the iron(Fe) in waterlogged archaeological wood was removed by EDTA treatment and it increased the whiteness of the surface.

• Journal of Conservation Science
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• v.37 no.2
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• pp.154-166
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• 2021

The royal seal, in either gold or jade, is used to symbolize Joseon's royal family, and it is made up of a Bonu (a handle), Bosin (a body), Bomun (a letter inscribed on the seal), and Bosu (a string attached to the seal). The Bosu was designed to enhance the seal's dignity and facilitate convenient handling. Bosu consists of Kkeun-mog and Bangwool-sul (decorated with gilt paper), which are made of Bangwool, Bangwool-mog, and Sul. In this study, the form survey, color, material, and composition of 318 Bosu pieces from the Joseon Dynasty and Korean Empire produced from 1441 to 1928 were analyzed. As time passed, the strings on the seals became longer and thinner. Bangwool-mog disappeared from the mid-1800s, and a ring appeared at the end of the Sul. Most of the colors used were scarlet, but orange and purple were also identified. Although most of the Bosu are silk, five Bosu from the 1900s and one Bosu from the 1740s (likely replaced in the 1900s) are estimated to be rayon. The gilt paper's main chemical components used to decorate the Bangwool-sul vary according to age. Until the mid-1800s, gold (Au) was used for the Sul and Bangwool, but since the mid-1800s, gold (Au) and brass (Cu-Zn) were used for Sul and Bangwool, respectively, and then brass (Cu-Zn) was used for Sul and Bangwool. While the Bosu was a seal accessory, it can be used to identify changes in the manufacturing techniques and materials of the period.

• Journal of the Korean GEO-environmental Society
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• v.12 no.7
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• pp.23-29
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• 2011

The oxidation slag has been widely used in civil engineering project, whereas the reduced slag from electric furnace has yet to be applied. Consequently in order to find out the recycling method in civil engineering field, the mineral compositions of the reduced slag were analyzed and some tests on water quality were performed to estimate the potential release of toxic compounds. Slag-soil mixtures of 0, 10, 20 and 30%(dry weight) soil were prepared in lysimeter columns and the effluents were collected with the period of one, two and four week options in closed system, respectively. The result from qualitative and quantitative analysis using X-ray Diffraction(XRD) and X-ray Fluorescence(XRF) indicates that the main mineral of the reduced slag is $Ca_2(SiO_4)$, a kind of calcium silicate. Also, the leaching medium analyzed by Inductively Coupled Plasma Optical Emission Spectroscopy(ICP-OES) showed that main heavy metals such as Al, Fe and Mn are included in the reduced slag due to the effect of steel production process. It can be seen that the leachate does not violate the regulation guide line of waste material of heavy metal. Also the pH levels were increased from pH 6.9 for 0% soil to pH 10 for 30% soil. However the influence on leachate circulation period of one through four weeks was negligible.

• Korean Journal of Heritage: History & Science
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• v.55 no.2
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• pp.200-211
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• 2022

The celadon stools with an openwork ring design which consist of four items as one collection were excavated from Gaeseong, Gyeonggi-do Province. The celadon stools were designated and managed as treasures due to their high arthistorical value in the form of demonstrating the excellence of celadon manufacturing techniques and the fanciful lifestyles during the Goryeo Dynasty. However, one of the items, which appeared to have been repaired and restored in the past, suffered a decline in aesthetic value due to the aging of the treatment materials and the lack of skill on the part of the conservator, raising the need for re-treatment as a result of structural instability. An examination of the conservation condition prior to conservation treatment found structural vulnerabilities because physical damage had been artificially inflicted throughout the area that was rendered defective at the time of manufacturing. The bonded surfaces for the cracked areas and detached fragments did not fit, and these areas and fragments had deteriorated because the adhesive trickled down onto the celadon surface or secondary contaminants, such as dust, were on the adhesive surface. The study identified the position, scope, and conditions of the bonded areas at the cracks UV rays and microscopy in order to investigate the condition of repair and restoration. By conducting Fourier-transform infrared spectroscopy(FT-IR) and portable x-ray fluorescence spectroscopy on the materials used for the former conservation treatment, the study confirmed the use of cellulose resins and epoxy resins as adhesives. Furthermore, the analysis revealed the addition of gypsum(CaSO₄·2H₂O) and bone meal(Ca₁₀ (PO₄)₆(OH)₂) to the adhesive to increase the bonding strength of some of the bonded areas that sustained force. Based on the results of the investigation, the conservation treatment for the artifact would focus on completely dismantling the existing bonded areas and then consolidating vulnerable areas through bonding and restoration. After removing and dismantling the prior adhesive used, the celadon stool was separated into 6 large fragments including the top and bottom, the curved legs, and some of the ring design. After dismantling, the remaining adhesive and contaminants were chemically and physically removed, and a steam cleaner was used to clean the fractured surfaces to increase the bonding efficacy of the re-bonding. The bonding of the artifact involved applying the adhesive differently depending on the bonding area and size. The cyanoacrylate resin Loctite 401 was used on the bonding area that held the positions of the fragments, while the acrylic resin Paraloid B-72 20%(in xylene) was treated on cross sections for reversibility in the areas that provided structural stability before bonding the fragments using the epoxy resin Epo-tek 301-2. For areas that would sustain force, as in the top and bottom, kaolin was added to Epo-tek 301-2 in order to reinforce the bonding strength. For the missing parts of the ring design where a continuous pattern could be assumed, a frame was made using SN-sheets, and the ring design was then modeled and restored by connecting the damaged cross section with Wood epos. Other restoration areas that occurred during bonding were treated by being filled with Wood epos for aesthetic and structural stabilization. Restored and filled areas were color-matched to avoid the feeling of disharmony from differences of texture in case of exhibitions in the future. The investigation and treatment process involving a variety of scientific technology was systematically documented so as to be utilized as basic data for the conservation and maintenance.

• Applied Chemistry for Engineering
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• v.25 no.5
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• pp.455-462
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• 2014

This work investigated the hydrophobic coating of silicate yellow phosphor powder in the form of divalent europium-activated strontium orthosilicate ($Sr_2SiO_4:Eu^{2+}$) by using an atmospheric pressure dielectric barrier discharge (DBD) plasma with argon as a carrier and hexamethyldisiloxane (HMDSO), toluene and n-hexane as precursors. After the plasma treatment of the phosphor powder, the lattice structure of orthosilicate was not altered, as confirmed by an X-ray diffractometer. The coated phosphor powder was characterized by scanning electron microscopy, fluorescence spectrophotometry and contact angle analysis (CAA). The CAA of the phosphor powder coated with the HMDSO precursor revealed that the water contact angle increased from $21.3^{\circ}$ to $139.5^{\circ}$ (max. $148.7^{\circ}$) and the glycerol contact angle from $55^{\circ}$ to $143.5^{\circ}$ (max. $145.3^{\circ}$) as a result of the hydrophobic coating, which indicated that hydrophobic layers were successfully formed on the phosphor powder surfaces. Further surface characterizations were performed by Fourier transform infrared spectroscopy and X-ray photoelectron spectrometry, which also evidenced the formation of hydrophobic coating layers. The phosphor coated with HMDSO exhibited a photoluminescence (PL) enhancement, but the use of toluene or n-hexane somewhat decreased the PL intensity. The results of this work suggest that the DBD plasma may be a viable method for the preparation of hydrophobic coating layer on phosphor powder.

• Clean Technology
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• v.25 no.4
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• pp.311-315
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• 2019

The cation extraction and impurity separation were studied in order to investigate the recyclability of a slag produced from the steel refinery industry. Two types of slag (Slag-A, B) were collected and characterized in this study. The initial characterization by X-ray diffraction (XRD) and X-ray fluorescence (XRF) confirmed the existence of various kinds of ions in the slag such as Ca²⁺ (30 ~ 40%), Fe³⁺ (20 ~ 30%), Si⁴⁺ (15%), Al³⁺ (10%), Mn²⁺ (7%), and Mg²⁺ (3 ~ 5%). Inductively coupled plasma atomic emission spectroscopy (ICP-AES) analysis on the extracted slag using 2 M HCl as a solvent indicated that a higher concentration of Ca²⁺ was extracted as the S/L ratio was increased. The Ca²⁺ extraction concentration were found to be 8,940 mg L^-1 (Slag-A) and 10,690 (Slag-B) mg L^-1 when the S/L ratio for Ca²⁺ extraction was 0.1. However, the extract was strongly acidic ( < pH 1) at 0.1 S/L. Also the other ions (impurities) were extracted simultaneously in addition to Ca²⁺. To increase the purity of Ca²⁺ in order to transform the slag to a high value resource, a pH-swing was conducted. The impurities tended to precipitate at higher rate as the pH was increased. Notably, the Ca²⁺ rapidly precipitated above a certain pH and at a pH of 10.5, while the selectivity of Ca²⁺ was over 99%. It is expected that the aqueous solution in which high contents of Ca²⁺ was selectively dissolved in this study would be suitable for the carbonation process for reducing CO₂ and for the production of calcium carbonate.