• 제목/요약/키워드: Fluidized-Bed CVD

검색결과 11건 처리시간 0.015초

피복입자핵연료에서 증착조건이 탄화규소층의 특성에 미치는 영향 (Effect of Deposition Parameters on the Property of Silicon Carbide Layer in Coated Particle Nuclear Fuels)

  • 김연구;김원주;여승환;조문성
    • 한국분말재료학회지
    • /
    • 제23권5호
    • /
    • pp.384-390
    • /
    • 2016
  • Tri-isotropic (TRISO) coatings on zirconia surrogate beads are deposited using a fluidized-bed vapor deposition (FB-CVD) method. The silicon carbide layer is particularly important among the coated layers because it acts as a miniature pressure vessel and a diffusion barrier to gaseous and metallic fission products in the TRISO-coated particles. In this study, we obtain a nearly stoichiometric composition in the SiC layer coated at $1400^{\circ}C$, $1500^{\circ}C$, and $1400^{\circ}C$ with 20 vol.% methyltrichlorosilane (MTS), However, the composition of the SiC layer coated at $1300-1350^{\circ}C$ shows a difference from the stoichiometric ratio (1:1). The density decreases remarkably with decreasing SiC deposition temperature because of the nanosized pores. The high density of the SiC layer (${\geq}3.19g/cm^2$) easily obtained at $1500^{\circ}C$ and $1400^{\circ}C$ with 20 vol.% MTS did not change at an annealing temperature of $1900^{\circ}C$, simulating the reactor operating temperature. The evaluation of the mechanical properties is limited because of the inaccurate values of hardness and Young's modulus measured by the nano-indentation method.