• Proceedings of the KIPE Conference
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• 2014.07a
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• pp.95-96
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• 2014

450mm 반도체 CVD 장비 개발 및 300mm F-CVD (Flowable CVD) 공정 개발에 있어서 공정 마진 확보 및 막질 품질 개선을 위해 주파수 가변형 RF Generator가 필수적으로 요구되고 있다. 20nm이하 STI (Shallow Trench Isolation), PMD (Pre-metal Dielectric) & IMD (Inter-Metal Dielectric) 미세공정 gap fill에 많은 문제점이 도출되고 있으며, 이유로는 Generator 고정 주파수에서 Matching Time delay 또는 Shooting에 의한 산포의 한계로 파악되었으며, 주파수 가변에 의한 고속 Tune 기능이 요구되어진다. 따라서 400kHz 주파수 가변형 RF-Generator 개발을 진행하였으며 본 논문을 통해 개발되어진 장비의 성능과 시험 평가한 결과를 소개하고자 한다.

• Proceedings of the Korean Geotechical Society Conference
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• 1999.03a
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• pp.489-496
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• 1999

The objective of this study is to present engineering properties required in use of co-mixtures of fly ash and WFS(Waste Foundry Sand)'s, which are Presently used as fill or (lovable backfill. The fly ash, generated at the Tae-An thermoelectric power plant was used in this research and was classified as Class F. Green Sand, Furane Sand, and Coated Sand, which had been used at a foundry located in Pusan, were used. Laboratory experiments were peformed to obtain the physical properties of the co-mixture of fly ash and WFS. The range of permeability for all the co-mixtures was from 3.0×10/sup -3/㎝/s to 6.0×10/sup -5/㎝/s. The unconfined strength of the 7-day cured specimens composed of Green Sand reached 94% of that of 28-day cured specimens but for the 7-day cured specimens composed of, respectively, Furnace Sand and Coated Sand, only 64% and 66% of the strength of the 28-day cured specimens were reached. Results of the consolidated-untrained triaxial test showed that the specimens composed of Furnace Sand showed a distinct increase of the internal friction angle, while the other specimens showed negligible increase. In the case of 28-day cured specimens, specimens composed of Furnace Sand showed an internal friction angle of 41.8°, while specimens of Green and Coated Sand showed those of 33.5° and 35.0°, respectively. From the shrinkage test, the shrinkage ratios of all specimens did not exceed 0.25%.

• Proceedings of the Korea Concrete Institute Conference
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• 2008.11a
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• pp.785-788
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• 2008

This study is focused on applying heavyweight concrete to ballast used to have stability of a ship. Generally, heavyweight concrete is made from a high density aggregate like magnetite or limonite. However, these materials are hard to obtain them from relevant companies and so expensive. Therefore, this study plans to product heavyweight ballast concrete which is easy to obtain by recycled iron slag. Heavyweight ballast concrete isn't required to meet some compressive strength in use, but it is required to have high flowable and 2.7t/m3 of bulk density to fill the ballast tank densely. The designed field mix proportion of concrete based on the results of pre-experiment shows it can control the temperature crack and has superior chloride corrosion resistance after conducting chloride corrosion experiment. Also, it is prefer that before airtightness voltile corrosion inhibiter(VCI) is added in airtight space of shipyard.

• Journal of the Korean Recycled Construction Resources Institute
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• v.6 no.3
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• pp.182-189
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• 2018

Controlled low strength material(CLSM), known as flowable fill is used sewer. This paper evaluates flowability, segregation, early strength and excavatability of CLSM made using standard soils such as SM, ML, CL, CH. Also, various mix proportions of CLSM containing kaolinite, red soil, Joomun Jin standard soil were developed and the mixing ratio optimized. It was considered as the flowability and early strength were severly affected by W/B, S/B, and early strength and flowability depend on standard soils which means the satisfaction conditions of CLSM were variety of standard soil conditions. Finally, not only optimal mixing proportions were deducted according to standard soil condition but confirmed effectiveness of bleeding and excavatability.