• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.74-74
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• 2009

Titanium nitride has been used as hardmask for semiconductor process, capacitor of MIM type and diffusion barrier of DRAM, due to it's low resistivity, thermodynamic stability and diffusion coefficient. Characteristics of the TiN film are high intensity and chemical stability. The TiN film also has compatibility with high-k material. This study is an experimental test for better condition of TiN film etching process. The etch rate of TiN film was investigated about etching in $BCl_3/Ar/O_2$ plasma using the inductively coupled plasma (ICP) etching system. The base condition were 4 sccm $BCl_3$ /16 sccm Ar mixed gas and 500 W the RF power, -50 V the DC bias voltage, 10 mTorr the chamber pressure and $40\;^{\circ}C$ the substrate temperature. We added $O_2$ gas to give affect etch rate because $O_2$ reacts with photoresist easily. We had changed $O_2$ gas flow rate from 2 sccm to 8 sccm, the RF power from 500 W to 800 W, the DC bias voltage from -50 V to -200 V, the chamber pressure from 5 mTorr to 20 mTorr and the substrate temperature from $20\;^{\circ}C$ to $80\;^{\circ}C$.

• Journal of Korean Society of Transportation
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• v.27 no.2
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• pp.57-71
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• 2009

Due to increasing interest in dispersion of traffic flows through providing traffic information, there has been much research of driver behavior and effectiveness of diversion. In this paper the authors intend to analyze how a diversion was determined and its effects through correlation analysis between diversion rates estimated by actual surveys and the traffic conditions. Through speed-flow analysis, the diversion mechanism was found. When travel speed decreased, detour volume increased. Then when the traffic volume was decreased through an increase of diversion and traffic conditions got better, the detour volume decreased again. In addition, the authors found negative correlation between the diversion rate and travel speed through correlation analysis. It shows that there were various relationships between diversion rates and traffic conditions according to congestion level and direction of traffic. Finally, it is suggested that the regression equation for calculating the diversion rate with the traffic flows, travel speed, and travel time as variables has a coefficient of determination of 38.5%. It means that traffic conditions on expressways take about 40% of driver's decision-making for diversion.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.159-159
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• 2011

Among the semiconductor ternary compounds in the I-III-$VI_2$ series, $CulnS_2$ ($CulnSe_2$) are one of the promising materials for photovoltaic applications because of the suitability of their electrical and optical properties. The $CuInS_2$ thin film is one of I-III-$VI_2$ type semiconductors, which crystallizes in the chalcopyrite structure. Its direct band gap of 1.5 eV, high absorption coefficient and environmental viewpoint that $CuInS_2$ does not contain any toxic constituents make it suitable for terrestrial photovoltaic applications. A variety of techniques have been applied to deposit $CuInS_2$ thin films, such as single/double source evaporation, coevaporation, rf sputtering, chemical vapor deposition and chemical spray pyrolysis. This is the first report that $CuInS_2$ thin films have been prepared by Aerosol Jet Deposition (AJD) technique which is a novel and attractive method because thin films with high deposition rate can be grown at very low cost. In this study, $CuInS_2$ thin films have been prepared by Aerosol Jet Deposition (AJD) method which employs a nozzle expansion. The mixed fluid is expanded through the nozzle into the chamber evacuated in a lower pressure to deposit $CuInS_2$ films on Mo coated glass substrate. In this AJD system, the characteristics of $CuInS_2$ films are dependent on various deposition parameters, such as compositional ratio of precursor solution, flow rate of carrier gas, stagnation pressure, substrate temperature, nozzle shape, nozzle size and chamber pressure, etc. In this report, $CuInS_2$ thin films are deposited using the deposition parameters such as the compositional ratio of the precursor solution and the substrate temperature. The deposited $CuInS_2$ thin films will be analyzed in terms of deposition rate, crystal structure, and optical properties.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.11 no.3
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• pp.369-376
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• 1999

Experiments were carried out to study the heat transfer characteristics of a disrober for 150 RT LiBr-water absorption heat pump. An experimental apparatus was divided into four sections, a combustion chamber area, two bare-tube areas, and finally a finned-tube area to quantify the heat transfer rate of each section by measuring the generation rate of vapor. Dividing plates was installed at the upper inside part of deserter to prohibit the moving of vapor generated at heating tubes of a section to another section near. In the first bare-tube area, the generation rate of vapor was the largest among the four sections. The finned-tube area only contributed to give sensible heat increase of solution to the saturation temperature. The heat transfer area of the finned-tube area was 52.2%, which absorbed only 9.2% of the total heat from the combustion gas. On the contrary, the heat transfer area of the first bare-tube area was 16.6%, but it absorbed 52.4% of the total absorbed heat. The temperature of the solution at upper part at the finned-tube area was lower than that of the lower part, because weak solution came in upper part of the finned-tube area. But, this tendency was changed at the first and second bare-tube area due to the vigorous heat transfer and fluid flow enhanced by vapor generation through heating tubes. The overall heat transfer coefficient and heat flux were the largest at the first bare-tube area among the other sections.

• Journal of Hydrogen and New Energy
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• v.32 no.4
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• pp.205-211
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• 2021

Recently, it is necessary for study on renewable energy due to environmental pollution and fossil fuel depletion. Therefore, in this study, the filling temperature according to the nozzle geometry was evaluated based on the limit temperature specified in SAEJ2601 for charging hydrogen, a new energy. There are three types of nozzles, normal, angle and round, fixed the average pressure ramp rate at 52.5 MPa/min, and the injection temperature was set at 293.4 K. As a result, the lowest temperature distribution was found in the round type, although the final temperature did not differ significantly in the three types of nozzles. In addition, Pearson's coefficient was calculated to correlate the mass flow rate with the heat transfer rate at the inner liner wall, which resulted in a strong linear relationship of 0.98 or higher.

• Korean Chemical Engineering Research
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• v.59 no.3
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• pp.379-392
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• 2021

In this study, an improved acetone-water fractional precipitation process for paclitaxel using ultrasonic cavitation bubbles and gas bubbles was developed. Compared to the conventional method, the time required for precipitation has been reduced by 20~25 times. In addition, the particle size of paclitaxel decreased by 3.5~5.5 times and the diffusion coefficient of paclitaxel increased by 3.5~6.7 times. In the case of precipitation using ultrasonic cavitation bubbles, as the ultrasonic power increased and the temperature decreased, the precipitation rate constant increased. In the case of precipitation using gas bubbles, as the gas flow rate increased and the temperature decreased, the precipitation rate constant increased. Thermodynamic parameters revealed the exothermic, irreversible, and nonspontaneous nature of the improved fractional precipitation.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.5
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• pp.1082-1090
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• 2009

Peak expiratory flow rate(PEF) is a very important diagnostic parameter obtained from the forced vital capacity(FVC) test. The expiratory flow rate increases during the short initial time period and may cause measurement error in PEF particularly due to non-ideal dynamic characteristic of the transducer. The present study evaluated the initial rise slope($S_r$) on the flow rate signal to compensate the transducer output data. The 26 standard signals recommended by the American Thoracic Society(ATS) were generated and flown through the velocity-type respiratory air flow transducer with simultaneously acquiring the transducer output signal. Most PEF and the corresponding output($N_{PEF}$) were well fitted into a quadratic equation with a high enough correlation coefficient of 0.9997. But only two(ATS#2 and 26) signals resulted significant deviation of $N_{PEF}$ with relative errors>10%. The relationship between the relative error in $N_{PEF}$ and $S_r$ was found to be linear, based on which $N_{PEF}$ data were compensated. As a result, the 99% confidence interval of PEF error was turned out to be approximately 2.5%, which was less than a quarter of the upper limit of 10% recommended by ATS. Therefore, the present compensation technique was proved to be very accurate, complying the international standards of ATS, which would be useful to calibrate respiratory air flow transducers.

• Journal of Advanced Marine Engineering and Technology
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• v.30 no.4
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• pp.463-473
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• 2006

The effect of tube diameter on heat and mass transfer characteristics of absorber in absorption chiller/heater using LiBr solution as a working fluid has been investigated by both of numerical and experimental study to develop a high performance and compact absorber. The diameter of the heat exchanger tube inside absorber was changed from 15.88mm to 12.70mm and 9.52mm. In numerical study a model of vapor pressure drop inside tube absorber based on a commercial 20RT absorption chiller/heater was performed. The effect of tube diameter, longitudinal pitch, vapor Reynolds number, longitudinal pitch to diameter ratio on vapor pressure drop across the heat exchanger tube banks inside absorber have been investigated and found that vapor pressure drop decreases as tube diameter increases, longitudinal pitch increases, vapor Reynolds number decreases and longitudinal pitch to diameter ratio increases. In experimental study, a system includes a tube absorber, a generator, solution distribution system and cooling water system was set up. The experimental results shown that the overall heat transfer coefficient, mass transfer coefficient. Nusselt number and Sherwood number increase as solution flow rate increases. In both of study cases, the heat and mass transfer performance increases as tube diameter decreases. Among three different tube diameters the smallest tube diameter 9.52mm has highest heat and mass transfer performance.

• Transactions of the Korean Society of Mechanical Engineers
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• v.15 no.6
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• pp.2171-2180
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• 1991

An analysis model for off-design performance of radial inflow turbines with or without variable area guide vane is developed, where two important factors in loss models, total pressure ratio between variable area guide vane exit and scroll casing inlet and rotor loss coefficient are determined without experimental data. The analysis results show that the predicted trends with or without variable area guide vane are consistent with the experimental observations. The comparison of present method with the well-known NASA off-design performance analysis program shows that the mass flow rate and static efficiency by present analysis are in good agreement with those by the NASA program. Therefore, this method can be used to predict off-design performance of radial inflow turbines with validity of the loss models used by present analysis.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.10
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• pp.1940-1954
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• 1992

Fine grid computations were attempted to analyze the turbulent flows in the near wall low Reynolds number region and the numerical analyses were incorporated by a finite-volume discretization with full find grid system and low Reynolds number k-.epsilon. model was employed in this region. For the improvement of low Reynolds number k-.epsilon. model, modification coefficient of eddy viscosity $f_{\mu}$ was derived as a function of turbulent Reynolds number $R_{+}$ and nondimensional length $y^{+}$ from the concept of two length scales of dissipation rate of turbulent kinetic energy. The modification coefficient $f_{\epsilon}$ in .epsilon. transport equation was also derived theoretically. In the turbulent kinetic energy equation, pressure diffusion term was added in order to consider low Reynolds number region effect. The main characteristics of this low Reynolds number k-.epsilon. model were founded as : (1) In high Reynolds number region, the present model has limiting behavior which approaches to the high Reynolds number model. (2) Present low Reynolds number k-.epsilon. model dose not need additional empirical constants for the transport equations of turbulent kinetic energy and dissipation of turbulent kinetic energy in order to consider wall effect. Present low Reynolds number turbulence model was tested in the pipe flow and obtained improved results in velocity profiles and Reynolds stress distributions compared with those from other k-.epsilon. models.s.s.