• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 추계학술대회 논문집
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• pp.180-181
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• 2015

본 논문에서는 ICP Poly Etcher를 이용한 Dry Etch에서 몇가지 공정조건의 변화에 따른 Etching 특성 변화를 연구하였다. 주요 가스유량들이 증가 할 때, Poly-Si 의 Etch rate는 증가 하였으며 Uniformity는 나빠진 것을 확인 할 수 있었고 다른 특성들은 특별한 변화를 보이지 않았다. 주요 Gas인 HBr의 증가는 PR(Photo Resist)와 Uniformity에 영향을 주었다. 이 논문을 통해 HBr의 유량이 Poly-Si Etching에 영향을 주는 결과를 알아 볼 수 있었고 HBr 가스의 유량 증가가 Polymer의 생성에 영향을 줘 Selectivity와 Uniformity를 증가 시킨다는 것도 확인 해 볼 수 있었다.

• 한국결정성장학회지
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• 제14권6호
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• pp.236-243
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• 2004

The oxide etching process was characterized in a magnetically enhanced reactive ion etching (MERIE) reactor with a $CHF_3CF_4$ gas chemistry. A statistical experimental design plus one center point was used to characterize relationships between process factors and etch response. The etch response modeled are etch rate, etch selectivity to TiN and uniformity. Etching uniformity was improved with increasing $CF_4$ flow ratio, increasing source power, and increasing pressure depending on source power. Characterization of via etching in $CHF_3CF_4$ MERIE using neural networks was successfully executed giving to highly valuable information about etching mechanism and optimum etching condition. It was found that etching uniformity was closely related to surface polymerization, DC bias, TiN and uniformity.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2006년도 제26회 춘계학술대회논문집
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• pp.130-134
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• 2006

분사면 냉각성능을 개선하기 위한 액체로켓 엔진 연료 매니폴드내의 분리판 설치에 따른 분사균일성 변화를 관찰하였다. 3차원 전산유동해석으로 5개 후보 설계에 대하여 분사균일성을 비교하였으며 최적설계에 대하여 측정결과와 비교함으로써 해석방법을 검증하였다. case I과 II는 매니폴드로 공급되는 유량 전체가 분리판 아래로만 흘러 유속이 크게 증가한다. 하지만 분리판이 끝나는 지점에서의 유속변화와 분사면 중심에서의 유량의 집중으로 분사균일성이 크게 저하된다. 이에 비해 분리판이 입구에서 떨어져 장착된 case III와 IV는 유동이 분리판 위, 아래로 흐를 수 있어 유량집중이 완화되므로 균일한 분사특성을 가진다. 비교한 5가지 설계 중 냉각성능과 분사균일성 측면에서 case IV가 최적으로 판단된다.

• Journal of Biosystems Engineering
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• 제31권6호
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• pp.482-488
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• 2006

Application of precision farming technology to rice cultivation could be an effective measure for rice quality improvement and environment-friendly agriculture. This study was conducted to develope a variable rate pneumatic granule applicator. Previous study reported that application uniformity of the prototype machine (C.V. = 23.3%) was not satisfactory. To improve the uniformity, increase of blow-head number from 12 to 16 was suggested. Analysis of the pneumatic conveying system showed that increase of number of blow-head was possible. Three-way variance analysis of the modified applicator showed that inserting length should be changed according to granule metering rate. The range of metering rate from 27.3 to 417.9 g/s were divided into 4 levels and 4 sets of inserting lengths were determined to ensure CV values less than 15%. The revised applicator showed satisfactory C.V. values of 9.4 to 14.6% in the metering rate. Granule conveying pattern was observed using a high speed camera and judged as the homogeneous flow pattern.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 1998년도 추계 학술대회논문집
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• pp.121-126
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• 1998

A numerical optimization procedure is developed to find the inlet velocity profile that yields the most uniform epitaxial layer in a vertical MOCVD reactor. It involves the solution of fully elliptic equations of motion, temperature, and concentration; the finite volume method based on SIMPLE algorithm has been adopted to solve the Navier-Stokes equations. The overall optimization process is highly nonlinear and has been efficiently treated by the sequential linear programming technique that breaks the non-linear problem into a series of linear ones. The optimal profile approximated by a 6th-degree Chebyshev polynomial is very successful in reducing the spatial non-uniformity of the growth rate. The optimization is particularly effective to the high Reynolds number flow. It is also found that a properly constructed inlet velocity profile can suppress the buoyancy driven secondary flow and improve the growth-rate uniformity.

• 한국태양에너지학회:학술대회논문집
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• 한국태양에너지학회 2009년도 춘계학술발표대회 논문집
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• pp.150-154
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• 2009

Flow distribution characteristics with varying inlet flow-rate in mega collector risers have been investigated, using commercial code FLUENT. The heat transfer in mega collector was not considered in this numerical study. Through the simulation, the following results were found. First, flow distribution characteristics in mega collector risers show the similar tendency in all cases. Secondly, with increased inlet flow-rate, flow distribution uniformity was getting worse.

• 한국염색가공학회지
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• 제25권2호
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• pp.134-139
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• 2013

A tenter is very important to dry and heat-set fabrics in textile dyeing and finishing industry. However, the tenter machine typically utilizes more than 80% of all the power in dyeing system, and yet is one of the primary machine which affects quality of fabrics. Therefore, performance optimization of the tenter machine is required to reduce energy consumption and enhance quality of fabrics. To optimize the tenter machine, it is important to maintain the uniform flow rate, which can be obtained by optimizing a nozzle geometry. In this study, emboss hole angle was investigated as main parameter in flow rate uniformity and heat flux efficiency. The analysis results were compared with those acquired from bench-scale dryer test in the laboratory. The tenter machine performance simulated by Computational Fluid Dynamics(CFD) was optimized by controlling emboss hole angle.

• Advances in Computational Design
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• 제5권2호
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• pp.111-125
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• 2020

The flow behavior of polymer melts within a slit die is an important consideration when designing a die geometry. The quality of the extruded polymer product can be determined through an evaluation of the flow homogeneity, wall shear rate and pressure drop across the central height of the die. However, mathematical formulations cannot fully determine the behavior of the flow due to the complex nature of fluid dynamics and the nonlinear physical properties of the polymer melts. This paper examines two slit die geometries in terms of outlet velocity uniformity, shear rate uniformity at the walls and pressure drop by using the licensed computational fluid dynamics package, Ansys POLYFLOW, based on the finite element method. The Carreau-Yasuda viscosity model was used for the rheological properties of the polypropylene. Comparative analysis of the simulation results will conclude that the modified die design performs better in all three aspects providing uniform exit velocity, uniform wall shear rates, and lower pressure drop.

• 한국정밀공학회지
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• 제19권8호
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• pp.92-99
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• 2002

This work investigated the optimal condition for an uniform deposition growth rate in the vertical cylindric CVD chamber. Heat transfer, surface chemical reaction and mass diffusion in the flow field of CVD chamber h,id been computed using Fluent v5.3 code. A SIMPLE based finite Volume Method (FVM) was adopted to solve the fully elliptic equations for momentum, temperature and concentration of a chemical species. The numerical analysis results show good agreements with the measurements obtained by N. Yoshikawa. The results obtained by the numerical analysis showed that the film growth rate in the center of a susceptor is increasing, as the inner flow approaches to the forced convection. To the contrast, as it approaches to the natural convection, that in the outside of a susceptor is increasing. As the Reynolds number increases, the uniformity may not hold due to the larger temperature gradient at a susceptor surface. Therefore, when the temperature gradient on the surface of a susceptor is zero, the film growth rate becomes uniform on most surface.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 일렉트렛트 및 응용기술
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• pp.228-232
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• 2002

The rise throughput and the stability in the device fabrication can be obtained by applying chemical mechanical polishing(CMP) process in 0.18 ${\mu}m$ semiconductor device. However it does have various problems due to the CMP equipment. Especially, among the CMP components, process variables are very important parameters in determining removal rate and non-uniformity. In this paper, We studied the DOE(design of experiment) method for the optimized CMP process. Various process variations, such as table and head speed, slurry flow rate and down force, have investigated in the viewpoint of removal rate and non-uniformity. Through the above DOE results, we could set-up the optimal process parameters.