• 연구논문집
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• 통권22호
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• pp.85-96
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• 1992

A mass flow controller(MFC) is commonly used in the semiconductor industries to control the flow rate of various process gases. The measurement and precise control of the of flow rate the gas are the key for a succesful IC fabrication. To eventually design a reliable MFC, a pre-proto type MFC was built and its flow characteristics were investigated. Most of the functional components of the pre-proto type were built for the present study, but the remainder were adopted from a commercial unit. The flow control characteristics were compared with that of a standard MFC. Major dimensions of an MFC for 0-10 SLM capacity were suggested.

• 대한기계학회논문집B
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• 제33권11호
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• pp.834-839
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• 2009

A three-dimensional computational fluid dynamics (CFD) analysis is performed to investigate flow characteristics in the anode channels and manifold of the internal reforming type molten carbonate fuel cell (MCFC). Considering the computational difficulties associated with the size and geometric complexity of the MCFC system, the polyhedral meshes that can reduce mesh connectivity problems at the intersection of the channel and the manifold are adopted and chemical reactions inside the MCFC system are not included. Through this study, the gas flow rate uniformity of the anode channels is mainly analyzed to provide basic insights into improved design parameters for anode flow channel design. Results indicate that the uniformity in flow-rate is in the range of ${\pm}$1% between the anode channels. Also, the mal-distributed inlet flow-rate conditions and the change in the size of the manifold depth have no significant effect on the flow-rate uniformity of the anode channels.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.3120-3124
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• 2008

A three-dimensional computational fluid dynamics (CFD) analysis is performed to investigate flow characteristics in the anode channels and manifold of the internal reforming type molten carbonate fuel cell (MCFC). Considering the computational difficulties associated with the size and geometric complexity of the MCFC system, the polyhedral meshes that can reduce mesh connectivity problems at the intersection of the channel and the manifold are adopted and chemical reactions inside the MCFC system are not included. Through this study, the gas flow rate uniformity of the anode channels is mainly analyzed to provide basic insights into improved design parameters for anode flow channel design. Results indicate that the uniformity in flow-rate is in the range of ${\pm}1%$ between the anode channels. Also, the mal-distributed inlet flow-rate conditions and the change in the size of the manifold depth have no significant effect on the flow-rate uniformity of the anode channels.

• 한국분무공학회지
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• 제27권3호
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• pp.144-154
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• 2022

Gas injection is a technique applied to improve throttling in liquid rocket engines and atomization in effervescent injectors. When a gas is injected into a liquid, it creates a two-phase flow inside the injector. The changes (bubbly flow, slug flow, annular flow, etc.) in the two-phase flow affect the injector's spray characteristics. In this study, cold-flow tests were performed by using three injectors with different orifice diameters and four aerators with different gas injection hole diameters. The experiments were done by changing the thrust ratio (liquid mass flow rate ratio) and gas-liquid mass flow rate ratio. Two-phase flow transition, breakup length, and discharge coefficient according to the injector/aerator design and flow conditions were investigated in detail.

• 소음진동
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• 제11권1호
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• pp.57-67
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• 2001

Proposed in this paper is a method of measurement of the flow rate in a pipe. The sound waves which are propagated within a pipe are characterized by that the wavenumber in the axial direction is changed according to the flow rate, and these characteristics are used in the present method of measurement of the flow rate. The amount of change in wavenumber of sound waves according to the flow rate can be obtained from the relationship among acoustic pressure signals within a pipe, which are measured by using a microphone array. The flow rate can be obtained by using the amount of change in wavenumber of sound waves and the relational equation of the flow rate. With respect to errors that can occur during the measurement of the flow rate, the types of errors and the method of correction of those errors are presented. This method of measurement of the flow rate has application limitation conditions due to the sensor interval, assumption of sound waves as plane waves, etc. The numerical simulation and experiments for measuring the flow rate of air in a pipe are performed in order to verify the applicability of this method of measurement of the flow rate. The experimental results are shown to be similar to those of the numerical simulation. And the flow rate measured is shown to be consistent with the actual value within 5% error bound.

• International Journal of Air-Conditioning and Refrigeration
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• 제16권4호
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• pp.117-123
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• 2008

The present study is directed at flow and heat transfer of $CO_2$ and oil mixtures in a circular tube. PAG and POE oils are considered in this study. Flow characteristics of $CO_2$ and oil mixtures have been investigated by flow visualization. Pressure drop has been measured in the range of operating mass flow rate from 0.1 to 0.4 kg/min in a circular tube. Heat transfer characteristics of $CO_2$/oil mixtures have been investigated using a counterflow heat exchanger. In case of pure liquid $CO_2$ as well as $CO_2$ and POE mixtures, flow are seen to be uniform so that $CO_2$ and POE oil are still miscible even at flowing state. However, it is found that $CO_2$ and PAG are not miscible. Pressure drop of $CO_2$/PAG mixtures are much higher than that of $CO_2$/POE mixtures as well as pure $CO_2$ at a fixed mass flow rate. As the concentration of POE oil is increased from 0 to 5 wt%, pressure drop is increased. However, heat transfer rate and heat transfer coefficient of $CO_2$/POE mixtures are much higher than that of $CO_2$/PAG mixtures. The f-factor correlation and Nusselt number correlation for $CO_2$/POE oil mixtures are suggested in this paper.

• 대한기계학회논문집
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• 제19권8호
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• pp.1940-1949
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• 1995

A numerical study for a two dimensional multi-jet with crossflow of the spent fluid has been carried out. Three different distributions of mass-flow rate at 5 jet exits were assumed to see their effects upon the flow characteristics, especially in the jet-flow region. For each distribution, various Reynolds numbers ranging from laminar to turbulent flows were considered. Results show that a fully developed laminar flow exists above a certain Reynolds number whose exact value depends upon the mass flow rate distribution. AS the Reynolds number increases, the flow becomes transitional from downstream and finally a fully developed turbulent flow forms in the jet-flow region. The critical Reynolds number where the fully developed turbulent flow forms is quite dependent upon the distribution of mass-flow rate. One interesting result is that the distribution of the skin friction coefficient along the inpingement plate in the jet-flow region shows a consistent dependency on the Reynolds number, i.e. inversely proportional to the square root of the Reynolds number, regardless of flow regime.

• 반도체디스플레이기술학회지
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• 제18권3호
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• pp.7-11
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• 2019

We have investigated the effect of the hydrogen flow rate on the characteristics of IZO thin films for the TCO (transparent conducting oxide). For this purpose, IZO thin films are deposited by RF magnetron sputtering at 300℃ with various H₂ flow rate. To investigate the influences of the ambient gases, the flow rate of hydrogen in argon was varied from 0.1 sccm to 1 sccm. The IZO thin films deposited at 300℃ show crystalline structure having an (222) preferential orientation. The electrical resistivity of the crystalline-IZO films deposited at 300℃ and hydrogen gas of 0.8sccm was 3.192×10^-4Ω cm, the lowest value. As the hydrogen gas flow rate increased, the resistivity tended to decrease. The XPS profiles showed that the number of oxygen vacancy decreased as the hydrogen flow rate increased. The transmittance of the IZO films deposited at 300℃ were showed more than 80%.

• 대한기계학회논문집B
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• 제30권11호
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• pp.1027-1034
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• 2006

In order to investigate flow characteristics of chicken blood in a micro tube of 100$\mu$m in diameter, in-vitro experiments were carried out using a micro-PIV technique. The micro-PIV system consists of a microscope, 2-head Nd:YAG laser, 12 bit cooled CCD camera and a delay generator. Chicken blood with 40% hematocrit was supplied into a micro tube using a syringe pump. The blood flow shows clearly the cell free layer near the tube wall and its thickness is increased with increasing the flow speed. The hemorheological characteristics of chicken blood, including shear rate and shear stress were estimated from the PIV velocity field data obtained. Since the aggregation index of chicken blood is less than 50% of human blood, non-Newtonian flow characteristics of chicken blood are smaller than those of human blood. As the flow rate increases, the degree of flatness in the velocity profile at the center region is decreased and the parabola-shaped shear stress distribution becomes to have a linear profile. Under the same flow rate, chicken blood shows higher shear stress, compared with human blood.

• 한국가시화정보학회지
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• 제19권2호
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• pp.63-73
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• 2021

It is essential to accurately predict the change in water level, velocity, and flow rate for each passage of the grit chamber according to the operating conditions of the pump. In this study, VOF multiphase flow analysis was performed, and the flow characteristics of the grit chamber were predicted. As a result of simulations, the sedimentation phenomenon after the entrance of the grit chamber channel is expected to occur on the side walls. When 6 channels are used, the average speed of the channels is about 52% of the design standard, and when 4 channels are used, the value increases to 74% of the design standard. The average water level in the channels tends to decrease as the flow velocity increases, and the water level in the absorption well with a larger flow rate is maintained lower than that in the absorption well with a smaller flow rate.