• Title/Summary/Keyword: Flow deviation

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Effects of Change of Wafer Shape through Heating on Chemical Mechanical Polishing Process (가열에 의한 웨이퍼 형상 변화가 CMP에 미치는 영향)

  • 권대희;김형재;정해도
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.1
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    • pp.85-90
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    • 2003
  • Removal rate and Within Wafer Non-Uniformity (WIWNU), the most critical issues in Chemical Mechanical Polish (CMP) process, are related to the pressure distribution, wafer shape, slurry flow, mechanical property of pad and etc. Among them, wafer warp generated by other various manufacturing process of wafer may induce the deviation of pressure distribution on the backside of wafer. In the convex shaped wafer the pressure onto the backside of wafer is higher than that of perfectly flat shaped wafer. Besides, such an added pressure is in proportion to the curvature of wafer. That is, the bigger the curvature of wafer becomes the higher the removal rate goes. And the WIWNU is known to be directly related to the pressure distribution on the wafer as well. In other words, the deviation of pressure distribution is in proportion to the WIWNU. In this paper, it is found that the wafer shape may be modified through heating the backside of it and thus properly changed pressure onto the backside of it may improve the WIWNU.

Development of Fuel Economy Measurement Technology for Fuel Cell Electric Vehicle (수소연료전지차 연비 평가기술 개발)

  • Jung, Young-Woo;Park, Jeong-Kyu;Ye, Chang-Hwan;Park, Jong-Jin;Oh, Hyung-Seuk
    • 한국신재생에너지학회:학술대회논문집
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    • 2007.11a
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    • pp.152-155
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    • 2007
  • Fuel cell electric vehicles (FCEVs) using hydrogen gas are zero emission vehicles, thus emission measurement for combustion vehicles is not applicable. The hydrogen gas consumption for fuel economy will be measured by the stabilized pressure/temperature method, mass flow method and electrical current method, etc. In this research, weight method with a newly manufactured test equipment is applied to measure the hydrogen consumption because above 3-methods have a deviation. The hydrogen consumption is directly calculated by the weight differences of the external hydrogen tank before and after the chassis dynamometer test. Ultimately the fuel economy for FCEVs is obtained with a deviation less than 1% in all chassis dynamometer tests.

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Compatibility inspection for the way for Decision about Bight Flow Profile of Standard River Design (하천설계기준의 만곡부 수면형 결정 방법에 대한 적용성 검증)

  • Choi, Han-Kuy;Che, Hong-Gi;Baek, Hyo-Sun
    • Journal of Industrial Technology
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    • v.26 no.B
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    • pp.43-51
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    • 2006
  • Through the result of calculating the deviation between the value calculated from two-dimensional number formula, one-dimensional number interpretation, and curving part water surface type calculation method, we could confirmed that the deviation is reduced more than 50% when we use curving part water surface type calculation method. Also it was confirmed that there occurs the reduction rate of maximum 59% as the result of comparing with one-dimensional number interpretation since the reduction rate of safe room height was 20%, in 500 CMS of flood water quantity when we planted the construction of levee by curving part water surface type calculation method. And therefore, we have confirmed that the curving water surface type calculation method can be used as a simple formula in rivers with water quantity less than 500 CMS that flows in and out in Jess than 90 degree angle.

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Design and Simulation of Heating Rubber Roller for Laminating Process

  • Hur, Shin;Woo, Chang Su
    • Elastomers and Composites
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    • v.51 no.4
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    • pp.280-285
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    • 2016
  • The purpose of this study is to get optimum design and operation conditions of the heating rubber roller for laminating process. The cause of performance degradation of heating rubber roller is delamination of rubber on metal tube, rubber aging due to high temperature. We measured the material properties of thermal expansion, thermal conductivity, specific heat and density and analyzed thermal distributions of rubber layer using finite element method. As a result of heat/flow analysis, the density distribution of heating coil must shorten the stabilization time by reducing the temperature deviation on the length direction at the temperature rising section after increasing the density of the area contacting with the laminate film at the center part which is an opposite of the current composition while enabling to maintain the temperature of heater to be consistent while maintaining the temperature deviation to be low when heat loss is created. Finally, we determined optimum heating method of heating rubber roller.

A Study on the Fuzzy-Neural Network Controller for Load Frequency Control (부하주파수제어를 위한 퍼지-신경망 제어기에 관한 연구)

  • 정형환;김상효;주석민;정문규
    • Proceedings of the Korean Institute of Intelligent Systems Conference
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    • 1998.10a
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    • pp.137-144
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    • 1998
  • This paper proposed a optimal scale factors technique of a fuzzy-neural network for a load frequency control of two areas power system. The optimal scale factors control technique is optimize from an initial fuzzy logic control rule, and then is learned with an error back propagation learning algorithm of the fuzzy-neural network. In application two areas the load frequency control of the power system, it hopes to have response characteristic better than optimal control technique which is the conventional control technique and to show to minimize a frequency deviation and reaching and settling time of a tie line power flow deviation

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The Effects of Panax ginseng and P. quinquefolium on Hemodynamics and Body Temperature in Healthy Young Men (III)

  • Lee, Jee-Hwan;Cho, Jung-Ah;Ki, Chan-Young;Son, Yeon-Kyoung;Park, Jeong-Hill;Park, Man-Ki;Han, Yong-Nam
    • Proceedings of the Korean Society of Applied Pharmacology
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    • 2003.11a
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    • pp.108-108
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    • 2003
  • The current study was performed to observe the effects of Panax ginseng (PG) and P. quinquefolia (PQ) on hemodynamics such as blood flow rate (BF), blood flow velocity (BV), heart rate (HR), systolic blood pressure (SBP) and diastolic blood pressure (DBP, and body temperature (BT) in healthy young men. After testing equality of variance, Student's t-test using PROC TTEST was examined to. prove statistical differences between control and ginseng conditions at each time point. It was found that the BF data were fluctuated by personal deviation. In order to minimize the deviation, the results obtained for 6 hrs were reconstituted after dividing them into two periods of the first half from 1 to 3 hrs and of the latter half from 3.5 to 6 hrs. And then the reconstitution data and dose-response curves were obtained. Blood flow such as BF and BV shows significant increases both two periods in the dose of PG 2.25 and PG 9.0, whereas significant decrease in the dose of PG 4.5. However, in the PQ groups, the middle dose PQ 4.5 shows the highest significant increase among the three doses. Except for PG 2.25 in HR, other doses show significant decreases both in the first half and latter half. SBP of PQ 9.0 shows only a significant decrease in the first half; on the other hand, in the latter half, PG 4.5, PG 9.0 and PQ 9.0 significantly increase SBP. In addition, DBP of PG 2.25 and PG 4.5 show significant increase in the both periods. In the BT, PQ groups show gradual decrease from PQ 2.25 to PQ 9.0; however, PG groups show differently. PG 4.5 shows significant decrease, but PG 9.0 shows a increase without statistical meanings. In summary, PG is more effective in respect to keeping homeostasis of hemodynamics.

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Analysis of Flow Regimes by Using Chaos Parameters in Gas-Solid Fluidized Beds (기체-고체 유동층에서 Chaos 파라메타에 의한 흐름영역의 해석)

  • Song, Pyung-Seob;Choi, Wang-Kye;Jung, Chong-Hun;Oh, Won-Zin;Kang, Suk-Hwan;Son, Sung-Mo;Kang, Yong
    • Applied Chemistry for Engineering
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    • v.17 no.1
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    • pp.93-99
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    • 2006
  • Methods to distinguish flow regimes in gas-solid fluidized bed have been investigated by adopting the concept of chaos theory. Pressure fluctuations have been chosen as a state variable for the analysis of the system. Pressure fluctuations obtained from differential pressure transducer have been investigated using the chaos analysis (Correlation dimension and Kolmogorov entropy) as well as the average and standard deviation. As a result, fluidization regimes in gas-solid fluidized bed can be distinguished by statistics methods as the average and standard deviation. Also, Correlation dimension and Kolmogorov entropy could be used to classify the fluidization regimes.

Analysis of Flow Visualization Results Using Fourier Transform (퓨리에 변환을 활용한 유동 가시화 비교 분석)

  • Koo, Bon-guk;Park, Jun-mo;Kang, Yong-Duck
    • Journal of the Institute of Convergence Signal Processing
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    • v.20 no.4
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    • pp.199-204
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    • 2019
  • In the boundary layer, vortical system has been analyzed by the statistical methods to identify the vortex interaction. However, there are the limitations in explaining vortices by the mean velocity or the standard deviation. This paper proposed a method to establish a frequency analysis by Fourier transform in order to simultaneously investigate various scale vortices. For this purpose, the flow visualization conducted to reveal a standing vortex, a hairpin vortex and a wake region around a hemisphere attached on a flat plate in a water channel. In addition, the velocity where the hairpin vortex was being generated in the wake region was measured by a hot-film anemometer. To observe changes in the vortex interaction, suction was applied through a hole in front of the hemisphere. For the evaluation of the proposed frequency analysis, the existing statistical results were compared to the frequency analysis that corresponds to the qualitative results of the flow visualization.

Boiling Heat Transfer of Ammonia inside Horizontal Smooth Small Tube (수평미세관내 NH3 비등열전달 특성)

  • Choi, Kwang-Il;Oh, Jong-Taek
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.25 no.2
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    • pp.101-108
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    • 2013
  • This paper is presented an experimental study of flow boiling heat transfer characteristics of ammonia, and is focused on pressure gradient and heat transfer coefficient of the refrigerant flow inside horizontal small tube with inner diameter of 3.0 mm and length of 2000 mm. The direct heating method is applied for supplying heat to the refrigerant, where the test tube is uniformly heated by electric current. The local heat transfer coefficients were obtained over a heat flux range of 20 to $80kW/m^2$, a mass flux range of 50 to $500kg/m^2s$, a saturation temperature range of 0 to $10^{\circ}C$, and quality up to 1.0. The pressure drops increase with increasing mass flux and heat flux, and with decreasing saturation temperature. The heat transfer coefficients increase with increasing mass flux and saturation temperature in middle and high quality region. And the local heat transfer coefficient increase with increasing heat flux in low quality region. The heat transfer coefficient of the experimental result was compared with six existing heat transfer coefficient correlation. A new boiling heat transfer coefficient correlation based on the superposition model for ammonia in small tubes is developed average deviation of -0.17% and mean deviation of 10.85%.

Boiling Heat Transfer Characteristics of R-290 in Horizontal Smooth Minichannel (수평미세관내 R-290의 비등열전달 특성)

  • Choi, Kwang-Il;Pamitran, A.S.;Oh, Jong-Taek
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.18 no.11
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    • pp.906-914
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    • 2006
  • The present paper dealt with an experimental study of boiling heat transfer characteristics of R-290. Pressure gradient and heat transfer coefficient of the refrigerant flow inside horizontal smooth minichannel were obtained with inner tube diameter of 3.0 mm and length of 2,000 mm. The direct electric heating method was applied for supplying a heat to the refrigerant uniformly. The experiments were conducted with R-290 purity of 99.99%, at saturation temperature of 0 to $10^{\circ}C$, a mass flux range of $50{\sim}250kg/m^2s$, and a heat flux range of $5{\sim}20kW/m^2$. The heat transfer coefficients of R-290 increased with increasing mass flux and saturation temperature, wherein the effect of mass flux was higher than that of the saturation temperature. Heat flux has a low effect on the increasing of heat transfer coefficient. The heat transfer coefficient was compared with six existing heat transfer coefficient correlations. The Zhang et al.'s correlation (2004) gave the best prediction of heat transfer coefficient. A new correlation to predict the two-phase flow heat transfer coefficient was developed based on the Chen correlation. The new correlation predicted the experimental data well with a mean deviation of 11.78% and average deviation of -0.07%.