• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.11
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• pp.939-945
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• 2002

The rise throughput and the stability in the device fabrication can be obtained by applying chemical mechanical polishing (CMP) process in 0.18 $\mu\textrm{m}$ semiconductor device. However, it still has various problems due to the CMP equipment. Especially, among the CMP components, process variables are very important parameters in determining the removal rate and non-uniformity. In this paper, we studied the DOE (design of experiment) method in order to get the optimized CMP equipment variables. Various process parameters, such as table and head speed, slurry flow rate and down force, have investigated in the viewpoint of removal rate and non-uniformity. Through the above DOE results, we could set-up the optimal CMP process parameters.

• 한국전산유체공학회:학술대회논문집
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• 1998.11a
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• pp.121-126
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• 1998

A numerical optimization procedure is developed to find the inlet velocity profile that yields the most uniform epitaxial layer in a vertical MOCVD reactor. It involves the solution of fully elliptic equations of motion, temperature, and concentration; the finite volume method based on SIMPLE algorithm has been adopted to solve the Navier-Stokes equations. The overall optimization process is highly nonlinear and has been efficiently treated by the sequential linear programming technique that breaks the non-linear problem into a series of linear ones. The optimal profile approximated by a 6th-degree Chebyshev polynomial is very successful in reducing the spatial non-uniformity of the growth rate. The optimization is particularly effective to the high Reynolds number flow. It is also found that a properly constructed inlet velocity profile can suppress the buoyancy driven secondary flow and improve the growth-rate uniformity.

• Journal of the Semiconductor & Display Technology
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• v.21 no.4
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• pp.71-76
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• 2022

We evaluated and developed a 6th generation large-size polisher in the type of face-up and Oscar. We removed the hillocks of the low temperature poly-silicon (LTPS) thin film with this polisher. The surface roughness of LTPS was lowered from 7.9 nm to 0.6 nm after CMP(chemical mechanical polishing). The thickness of the LTPS is measured through reflectance in real time during polishing, and the polishing process is completed according to this thickness. The within glass non-uniformity (WIGNU) was 6.2% and the glass-to-glass non-uniformity (GTGNU) was 2.5%, targeting the LTPS thickness of 400Å. In addition, the residual slurry after the CMP process was removed through the Core Flow PVA Brush and alkaline chemical.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.23 no.3
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• pp.216-222
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• 2011

Recently, hybrid air-conditioning system has been proposed and applied to achieve building energy saving. One example is a system combining radiation panel with natural wind-induced cross-ventilation. However, few research works have been conducted on the non-uniformity of thermal comfort in such hybrid air-conditioning system. In this paper, both thermal environment and non-uniform thermal comfort of human thermal model under various air-conditioning system, including hybrid system, were evaluated in a typical office room using coupled simulation of computation fluid dynamics, radiation model and a human thermal model. The non-uniformity of thermal comfort was evaluated from the deviation of surface temperature of human thermal model. Flow fields and temperature distribution in each case were represented.

• The KSFM Journal of Fluid Machinery
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• v.19 no.2
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• pp.5-10
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• 2016

Gas flow measurement in a closed duct was performed using multi-point Pitot tubes. Measurement uncertainty was assessed for this measurement method. The method was applied for the measurement of air flow into a gas turbine engine in an altitude engine test facility. 46 Pitot tubes, 15 total temperature Kiel probes and 9 static pressure tabs were installed in the engine inlet duct of inner diameter of 264 mm. Five tests were done in an airflow range of 2~10 kg/s. The flow was compressible and the Reynolds numbers were between 450,000 and 2,220,000. The measurement uncertainty was the highest as 6.1% for the lowest flow rate, and lowest as 0.8% for the highest flow rate. This is because the difference between the total and static pressures, which is also related to the flow velocity, becomes almost zero for low flow rate cases. It was found that this measurement method can be used only when the flow velocity is relatively high, e.g., 50 m/s. Static pressure was the most influencing parameter on the flow rate measurement uncertainty. Temperature measurement uncertainty was not very important. Measurement of boundary layer was found to be important for this type of flow rate measurement method. But measurement of flow non-uniformity was not very important provided that the non-uniformity has random behavior in the duct.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.11
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• pp.881-887
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• 2014

This paper presents numerical study on flow and heat transfer characteristics in micro-gap plate heat exchanger. In particular, we investigate the effect of flow inertia on the flow distribution from single main channel to multiple parallel micro-gaps. The flow regime of the main channel is varied from laminar regime (Reynolds number of 100) to turbulent regime (Reynolds number of 10000) by changing the flow rate, and non-uniformity of the flow distribution and temperature field is evaluated quantitatively based on the standard deviation. The flow distribution is found to be significantly affected by not only the header design but also the flow rate of the main channel. It is also observed that the non-uniformity of the temperature field has its maximum at the intermediate flow regime.

• Proceedings of the Korean Fiber Society Conference
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• 1996.10a
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• pp.29-34
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• 1996

In the present paper, the flow distribution in the hot air drying chamber of a sizing machine was numerically analyzed with respect to the geometries of the intake duct to obtain the more uniform flow distribution in the chamber. The result shows that the velocity distribution in the inlet of the chamber was significantly dependent on the the geometry of the intake duct. The degree of the non-uniformity in the chamber was reduced as the incident angle of the intake duct became to be smaller.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.18 no.4
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• pp.328-334
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• 2006

Industrial electrostatic precipitators require a highly uniform velocity distribution in the collecting chamber. Increasing divergence angle of a diffuser makes a non-uniformity flow distribution characteristics on the diffuser exit. This paper provides CFD results of optimum positions and opening rates of perforated plates which were installed in the electrostatic precipitator. The considered divergence angels were 60 degree and 90 degree. In 90 degree diffuser, a blanking method was used.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.25 no.12
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• pp.1784-1792
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• 2001

Numerical analysis on a parallel flow heat exchanger(PFHE) is performed using 2 dimensional turbulent porous modeling. This modeling can consider three-dimensional configuration of passage (flat tube with micro-channels), and the stability and accuracy of numerical results are improved. The geometrical parameters(e.g., the position of separators, inlet/outlet, and porosity of passages of a PFHE) are varied in order to examine the flow and thermal characteristics and flow distribution of the single phase multiple passages system. The flow non-uniformities along the paths of the PFHE are observed to evaluate the thermal performance of the heat exchanger. The location of inlet affects the heat transfer, and the location of outlet affects the pressure drop. The porosity with the optimum thermal performance is around 0.53.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.2
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• pp.147-154
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• 2003

A three-dimensional numerical analysis of the flow and heat transfer characteristic of wood-flour-filled polypropylene melt in an extrusion die was carried out. Used for this analysis were Finite Concept Method based on FVM, unstructured grid and non-Newtonian fluid viscosity model. Temperature and flow fields are closely coupled through temperature dependent viscosity and viscous dissipation. With large Peclet, Nahme, Brinkman numbers, viscous heating caused high temperature belt near die housing. Changing taper plate thickness and examining some predefined parameters at die exit investigated the effect of taper plate on velocity and temperature uniformities. In the presence of taper plate, uniformity at die exit could be improved and there existed an optimum thickness to maximize it.