• Title/Summary/Keyword: Flow Control System

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Statistical Analysis on Process Variables in Linear Roll-CMP (선형 Roll-CMP에서 공정변수에 관한 통계적 분석)

  • Wang, Han;Lee, Hyunseop;Jeong, Haedo
    • Tribology and Lubricants
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    • v.30 no.3
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    • pp.139-145
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    • 2014
  • Nowadays, most micro-patterns are manufactured during flow line production. However, a conventional rotary chemical mechanical polishing (CMP) system has a limited throughput for the fabrication of large and flexible electronics. To overcome this problem, we propose a novel linear roll-CMP system for the planarization of large-area electronics. In this paper, we present a statistical analysis on the linear roll-CMP process of copper-clad laminate (CCL) to determine the impacts of process parameters on the material removal rate (MRR) and its non-uniformity (NU). In the linear roll-CMP process, process parameters such as the slurry flow rate, roll speed, table feed rate, and down force affect the MRR and NU. To determine the polishing characteristics of roll-CMP, we use Taguchi's orthogonal array L16 (44) for the experimental design and F-values obtained by the analysis of variance (ANOVA). We investigate the signal-to-noise (S/N) ratio to identify the prominent control parameters. The "higher is better" for the MRR and "lower is better" for the NU were selected for obtaining optimum CMP performance characteristics. The experimental and statistical results indicate that the down force and roll speed mainly affect the MRR and the down force and table feed rate determine the NU in the linear roll-CMP process. However, over 186.3 N of down force deteriorates the NU because of the bending of substrate. Roll speed has little relationship to the NU and the table feed rate does not impact on the MRR. This study provides information on the design parameter of roll-CMP machine and process optimization.

Performance Analysis of a Multi-type Inverter Heat Pump (멀티형 인버터 열펌프의 냉방성능해석에 관한 연구)

  • Kim, Y. C.;Park, G. W.;Youn, Y.;Min, M. K.;Choi, Y, D,
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.13 no.3
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    • pp.153-159
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    • 2001
  • A system simulation program was developed for a multi-type inverter heat pump. Electronic expansion valve(EEV) was used to extend the capacity modulating range of the heat pump as expansion device. The program was also developed to calculate actual system performance with the building load variation with climate during a year. The performance variation of a multi-type hat pump with two EEV and an inverter compressor was simulated with compressor speed, capacity, and flow area of the EEV. As a result, the optimum operating frequency of the compressor and openings of the expansion device were decided at a given load. As compressor speed increased, he capacity of heat pump increased, the capacity of heat pump increased. Therefore flow area of EEV should be adjusted to have wide openness. Thus the coefficient of performance(COP) of the heat pump decreased due to increasement of compressor power input. The maximum COP point at a given load was decided according to the compressor speed. And under the given specific compressor speed and the load, the optimum openings point of EEV was also decided. Although the total load of indoor units was constant, the operating frequency increased as the fraction of load in a room increased. Finally ad the compressor power input increased, the coefficient of performance decreased.

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FPGA Modem Platform Design for eHSPA and Its Regularized Verification Methodology (eHSPA 규격을 만족하는 FPGA모뎀 플랫폼 설계 및 검증기법)

  • Kwon, Hyun-Il;Kim, Kyung-Ho;Lee, Chung-Yong
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.46 no.2
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    • pp.24-30
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    • 2009
  • In this paper, the FPGA modem platform complying with 3GPP Release 7 eHSPA specifications and its regularized verification flow are proposed. The FFGA platform consists of modem board supporting physical layer requirements, MCU and DSP core embedded control board to drive the modem board, and peripheral boards for RF interfacing and various equipment interfaces. On the other hand, the proposed verification flow has been regularized into three categories according to the correlation degrees of hardware-software inter-operation, such as simple function test, scenario test call processing and system-level performance test. When it comes to real implementations, the emulation verification strategy for low power mobile SoC is also introduced.

Identification of operating parameters in auto-discharging filter system for treatment of urban storm water (자동방류가 가능한 여과형 비점오염처리장치의 운전인자 도출)

  • Kim, Sun-Hee;Gwon, Eun-Mi;Pak, Sung-Soon;Joh, Seong-Ju;Lim, Chea-Hoan;Kang, Seon-Hong
    • Journal of Korean Society of Water and Wastewater
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    • v.24 no.4
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    • pp.377-386
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    • 2010
  • To identify operating parameters of the up-flow filtering system, which is available to discharge filtering residue after the rain, developed for treatment of urban storm runoff, lab scale test was carried out. Removal efficiency of SS was 68.7%, 62.2%, and 58.6% at the area roading rate of 2.46m/h, 4.68m/h, and 10m/h, respectively, filtering device is desirable to operate at the lower than 4.68m/h of area roading rate to get higher level of 60% SS removal efficiency. The removal efficiency of SS was 57.1% ~ 68.7% at the raw water SS of 100mg/L ~ 600mg/L, and the SS in treated water was maintained at the constant level through the elapsed time. It is indicate that filtering device can guarantee a certain level of effluent water quality at various raw water quality. The removal efficiency of SS to the depth of filter media was 68.3%, 78.6% at the filter depth of 10 cm, 20cm respectively. The final treated water quality was showed 30.2mg/L of CODMn, 1.60mg/L of TN and 0.25mg/L of TP. The average removal efficiencies by filtering device developed in this research were recorded slightly lower levels than other research. The main reason of these results were the first, the filter depth of the media used in this test was shallow, the second, the kind of filter media in discharge port of residue. More research to kind of filter media, filter packing rate, select of media for residue discharge port should be go on to produce optimum operating condition. The result of this study would be valuable for the application of filtration device to control of urban storm water.

Effects of Korean Traditional Medicine on Murine Hematopiesis (Regulation of Hematopoietic Cytokine & $CD34^{+}$ cell Expression) (수 종의 한약제제가 조혈작용에 미치는 영향)

  • 전재현;김영철;이장훈;우흥정
    • The Journal of Korean Medicine
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    • v.22 no.3
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    • pp.156-168
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    • 2001
  • Objectives : To evaluate the diverse actions of stimulation on the hematopoietic system, 4 formulas (KH I, KH 2, KH 3, KH 4) were studied. Method and Result : RT-PCR was performed to measure the gene expression of hematopoietic cytokines (TPO, GM-CSF, SCF, IL-3). When bone marrow cells were treated with KH 1, 2, 3, 4, the gene expressions of TPO, SCF, IL-3, and GM-CSF were increased. Flow cytometric analysis was performed to measure the expression of CD34+ cell activity. After 72 hrs culture supplemented with KH 1, 2, 3, 4, the percent of CD34+ cell of KH 2, 3, 4 were increased. To measure the expression of colony forming units - granulocyte erythrocytes, macrophages, megakaryocytes (CFU-GEMM) and burst forming unit-erythroid (BFU-E), semisolid clonogenic assay was performed. After 14 days of culture the number of CFU-GEMM and BFU-E of KH I, 2, 3, 4 were significantly increased compared to those of EPO groups (KH 1 P<0.0l, KH 2 P<0.05, KH 3 P<0.001, KH 4 P<0.0l). To determine the intracelluar TPO expression by KH 3, KH 4 in bone marrow cells, intracelluar staining and flow cytometric analysis were performed. After 24 hrs cultures, the TPO expression of the KH 3 and KH 4 treated groups were increased over those of the controlled groups (control : 50%, KH 3 : 87%, KH 4 : 78%). Conclusion : These results suggest that KH I, KH 2, KH 3, KH 4 have hematopoietic effects through increasing the production of hematopoietic cytokines and stimulating the activity of $CD34^{+}$ cells. This study also shows that KH 3 has a more effective hematopoietic effect than KH 1, 2, 4. These results suggest that the formulas (KH I, 2, 3, 4) can be applied to the patients with inappropriate hematopoietic system, and that KH 3 can be the most effective formula among these 4 in treating bone marrow disease in clinics.

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A Study on the Integration of Analysis Modules and the Optimization Process in the MDO Framework (MDO 프레임워크 개발을 위한 해석 코드 및 최적화 과정 통합에 관한 연구)

  • Cho, Sang-Oh;Lee, Jae-Woo;Byun, Yung-Hwan
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.30 no.7
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    • pp.1-10
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    • 2002
  • Multidisciplinary Design Optimization (MDO) is a new design approach, which aims to reduce the design cycle and the development cost, while improving the performance of the product. In order to develop a framework software where the multidisciplinary design is possible, several methods about the analysis codes integration, the analysis and optimization process management, and the software architecture, are proposed in this study. Centralized DataBase Management System (DBMS) is adopted. Both the Dynamic Link Library(DLL) and the File Interface are suggested and implemented as analysis codes integration methods. To efficiently manage the optimization process and the data flow, the Graphic Programming approach is introduced. The proposed integration methods are verified by two test case examples: Simple house design example and the aircraft wing design problem using three dimensional Panel Code.

Electronic Tongue Composed of Mini-Electrode Array in Flow Cell (소형전극 어레이로 구성한 흐름계형 전자혀)

  • Shim, Jun Ho;Shim, Jae Hoon;Seo, Sung Seok;Oh, Hyun Joon;Han, Jong Ho;Nam, Hakhyun;Cha, Geun Sig
    • Analytical Science and Technology
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    • v.17 no.3
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    • pp.217-224
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    • 2004
  • A taste sensor system composed of mini electrode array was built in a flow cell. Potentiometric signals from 9 electrodes were collected for drinking waters and alcoholic beverages which were diluted in a low concentration buffer solution (0.005 M Tris-$H_2SO_4$ pH 7.2) for the measurement. The measured results were treated with the principal component analysis (PCA), and grouped on a two or three dimensional PCA coordinate to discriminate the tastes of each beverage. It is demonstrated that the taste sensor system of this work may be used for the quality control of beverages in production or the examination of their taste variation in the market.

Characteristics of flow field of nose-only exposure chamber for inhalation toxicity evaluation (흡입독성평가를 위한 비부노출 챔버의 유동흐름 특성)

  • Noh, Hakjae;Bong, Choonkeun;Bong, Hakyung;Kim, Yonggu;Cho, Myunghaing;Kim, Sanghwa;Kim, Daesung
    • Particle and aerosol research
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    • v.12 no.1
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    • pp.1-9
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    • 2016
  • In this work, we evaluated the characteristics of flow field and uniformity of the nose-only exposure chambers for the inhalation toxicity test. Computational fluid dynamics (CFD) modeling was carried out to demonstrate uniformity of the nose-only exposure chambers. Because it is very important in the inhalation toxicity experiments that test materials are distributed uniformly to each holder of the chamber. The test was done with these 3 types of chamber with different form to develop inhalation toxicity evaluation system, easy-to-operate system among exposure chamber used for evaluating inhalation toxicity of environmental chemical mixtures. Through CFD interpretation, nose-only exposure chamber was made with the selection of the optimal conditions. For its evaluation, one type of fragrance was selected and measured particle size distribution of each port. The gene becoming luminous to green fluorescence was combined with GPT-SPE, a type of tGFP vector, to be inhaled to the mouse. Based on this, luminous intensity was checked. As a result, total particle number concentration of each port had average value of $3.17{\times}10^6{\sharp}/cm^3$ and range of the highest and lowest concentration value was approximately ${\pm}4.8%$. Autopsy of lung tissues of mouse showed that it had clearly better delivery of gene compared to the control group.

Experimental Study on the Performance Improvement of a Simultaneous Heating and Cooling Heat Pump in the Heating-main Operating Mode (난방주체 운전모드에서의 동시냉난방 열펌프 성능향상에 관한 실험적 연구)

  • Kang, Hoon;Jung, Hyen-Joon;Joo, Young-Ju;Kim, Yong-Chan;Choi, Jong-Min
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.20 no.4
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    • pp.245-251
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    • 2008
  • The cooling load in winter is significant in buildings and hotels because of the usage of office equipments and the high efficiency of wall insulation. Hence, the development of a multi-heat pump that can cover heating and cooling simultaneously for each indoor unit is required. In this study, the operating characteristics and performance of a simultaneous heating and cooling heat pump in the heating-main operating mode were investigated experimentally. The system adopted a variable speed compressor with four indoor units and one outdoor unit with R-410A. In the heating-main mode, the cooling capacity was lower than the design cooling capacity due to the reduction of the flow rate in the indoor unit for the cooling, with the increase of the heating capacity. To solve these problems, the performance characteristics of the simultaneous heating and cooling heat pump in the heating-main mode were investigated by varying the flow rate to the indoor unit for the cooling and the compressor rotating speed. In addition, the adequate control methods were suggested to improve the system efficiency.

A Layout Comparison Study for Improving Semiconductor Fab System (반도체 공정시스템 개선을 위한 레이아웃 비교 연구)

  • Suh, Jung-Dae
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.10 no.5
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    • pp.1074-1081
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    • 2009
  • The importance of improving semiconductor fab layout has been increased with the necessity of a large-scale capital investment and the increase of manufacturing complexity of the system. For the present, most semiconductor fab takes the form of a bay type layout where the same types of machines has been laid at the same bay. The bay type layout has many disadvantages in respect of material flow control even though it has merits of flexibility. To overcome the drawbacks of the bay type layout, a new room type semiconductor layout which integrates bays without a center spine and maintains the flexibilities of the bay type has been presented and compared with existing layouts. The results of test show that the room type layout is superior to the existing layouts from standpoints of transportation number and time, foot-print, number of stocker being passed and material flow time.