• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1309-1314
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• 2003

The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.2
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• pp.228-233
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• 2009

An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.

• Journal of the Semiconductor & Display Technology
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• v.2 no.2
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• pp.31-37
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• 2003

This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.244-247
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• 2002

The performance of the precision micro-positioning 4-dof stage is presented. The compact design utilizes the monolithic mechanism to achieve the translation in the Z axis and rotation in the $\theta$ z, $\theta$ x and $\theta$ y axes with high stiffness and high damping. Hysteresis, nonlinearity, and drift of the piezoelectric effects are improved by incorporating the sensors in a feedback control. Experiments demonstrate that the micro-positioning stage is capable of 2nm resolution over the travel range of 25$\mu\textrm$ m in the Z axis, 0.0l7 $\mu\textrm$ rad resolution over the 170$\mu\textrm$ rad in the $\theta$ z and 0.011 $\mu\textrm$ rad resolution over the $\mu\textrm$ rad in the $\theta$ x and $\theta$ y axes. The cross-axis interferences among the axes are at a noise range. This stage is available for positioning error compensation of the XY stage with large stroke.

• Journal of the Korean Society for Precision Engineering
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• v.34 no.1
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• pp.53-58
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• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.3
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• pp.277-283
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• 2014

This paper presents the design, optimization and fabrication of a piezo driven micro-positioning stage constructed using a 3D-printer. 3D printing technology provides many advantageous aspects in comparison to traditional manufacturing techniques allowing more rapid prototyping freedom in design, etc. Micro-positioning stages have traditionally been made using metal materials namely aluminum. This paper investigates the possibility of fabricating stages using ABS material with a 3D printer. CAE simulations show that equivalent motion amplification can be achieved compared to a traditional aluminum fabricated stage while the maximum stress is 30 times less. This leads to the possibility of stages with higher magnification factors and less load on the driving piezo element. Experiment results agree with the simulation results. A micro-position stage was fabricated using a 3D printer with ABS material. The motion amplification is very linear and 50 nm stepping was demonstrated.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.1
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• pp.97-103
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• 2013

A new precision positioning mechanism for stage was been developed by Displacement Magnification Device(DMD) in this paper. The DMD was composed of the beam and multilayer piezoelectric actuators. The theoretical and experimental analysis of DMD to enlarge displacement more then 50times were discussed. And the 2-axis stage by using displacement amplification apparatus was added in the new DMD, and it was able to do it through finite element analysis and experiment. As the results, the magnification of DMD can be obtained about $100{mu}m$ displacement to the 10V input voltage($1.5{mu}m$). And the about 50nm of linearity error in the $30{mu}m$ measurement range and 20times of the amplification in displacement can be measured. In addition, the experimental results are confirmed the possibility of millimeter displacement characteristics and correspond to finite element analysis results.

• Journal of Aerospace System Engineering
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• v.12 no.4
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• pp.75-80
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• 2018

The working principle of a satellite camera involves a focusing mechanism for controlling the focus of the optical system, which is essential for proper functioning. However, research on focusing mechanisms of satellite optical systems in Korea is in the beginning stage and developed technology is limited to a thermal control type. Therefore, in this paper, we propose a motor-driven focusing mechanism applicable to small satellite optical systems. The proposed mechanism is designed to generate z-axis displacement in the secondary mirror by a motor. In addition, three flexure hinges have been installed on the supporter for application of preload on the mechanism resulting in minimization of the alignment error arising due to manufacturing tolerance and assembly tolerance within the mechanism. After fabrication of the mechanism, the alignment errors (de-space, de-center, and tilt) were measured with LVDT sensors and laser displacement meters. Conclusively, the proposed focusing mechanism could achieve proper alignment degree, which can be applicable to small satellite optical system.