• Design & Manufacturing
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• 제16권3호
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• pp.22-27
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• 2022

The demand for new processing technology that can improve productivity is increasing in industries that require large-scale and various products. In response to this demand, a robot machining system with flexibility is required. Because of the low rigidity of the robot, the robot machining system has a large error during machining and is vulnerable to vibration generated during machining. Vibration generated during machining deteriorates machining quality and reduces the durability of the machine. To solve this problem, a stage for fixing the spindle during machining is required. In order to compensate for the robot's low rigidity, a system combining a piezoelectric actuator for generating a large force and a guide mechanism to actuate with a desired direction is required. Since the rigidity of flexible hinges varies depending on the structure, it is important to optimal design the flexible hinge and high-rigidity system. The purpose of this research is to make analytic model and optimize a flexible hinge and to design a high rigidity stage. In this research, to design a flexible hinge stage, a concept design of system for high rigidity and flexure hinge modeling is carried out. Based on analytic modeling, the optimal design for the purpose of high rigidity is finished and the optimal design results is used to check the error between the modeling and actual simulation results.

• 한국정밀공학회지
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• 제20권2호
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• pp.168-175
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• 2003

In this research, a bridge-type flexure hinge mechanism is developed and optimized to amplify the displacement of a multilayer piezostack. Developed hinge mechanism has three-dimensional structure to reduce link size, so it have high amplification ratio with respect to small size. A flexure hinge is assumed to be 6 degree-of-freedom spring elements and matrix methods are used to model a hinge mechanism. To verify derived matrix model, a displacement and frequency experiments are performed. The analysis result shows that the displacemental error between matrix model and experiments is below 10 percents and the deformation of hinge in parasitic direction should be considered In hinge modeling. Using developed matrix model, an optimal design is performed to maximize the performance of hinge mechanism.

• 한국추진공학회지
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• 제10권3호
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• pp.73-81
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• 2006

추력시험대는 로드셀을 이용하여 추진시스템의 추력을 계측하는 장치로 추진시스템 특성에 따라 다양한 방식이 적용된다. 본 논문에서는 연소관 변형에 의한 로드셀 중심과 추력 벡터의 어긋남이 추력시험대에 적용된 체결방식에 따라 추력오차에 어떤 영향을 미치는지 이론적으로 분석하였으며 수치해석 결과와 서로 일치함을 확인하였다. 그리고 플렉셔 성능을 결정하는 매개변수를 정의하고 이에 따른 플렉셔 성능을 분석함으로써 계측 신뢰도 뿐 만 아니라 시험 안전성이 우수한 추력시험대 운영개념을 제시하였다.

• 한국군사과학기술학회지
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• 제26권3호
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• pp.205-213
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• 2023

An optimal design of a simple beam-shaped flexure hinge mount supporting an optical mirror is presented. An optical mirror assembly is an opto-mechanically coupled system as the optical and mechanical behaviors interact. This side-supporting mount is flexible in the radial direction and rigid for the remaining degrees of freedom to support the mirror without transferring thermal load. Through thermo-elastic, optical and eigenvalue analysis, opto-mechanical performance was predicted to establish the objective functions for optimization. The key design parameters for this flexure are the thickness and length. To find the optimal values of design parameters, response surface analysis was performed using the design of experiment based on nested FCD. Optimal design candidates were derived from the response surface analysis, and the optimal design shape was confirmed through Opto-mechanical performance validation analysis.

• 한국산학기술학회논문지
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• 제21권11호
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• pp.554-560
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• 2020

평판 디스플레이 제조 공정에서 대상물의 위치 결정을 위해 고정밀 평면 모션 스테이지를 사용한다. 이 유형의 스테이지는 일반적으로 마찰이 없는 선형 모터와 에어 베어링을 사용하며, 고정밀 위치 센서로 레이저 간섭계를 사용한다. 스테이지의 불가피한 기생 운동에 의해 야기되는 요 모션 오차는 위치 결정 대상체의 향 변화를 의미하므로, 스테이지의 성능과 공정 정밀도 향상을 위해 요 모션 오차의 실시간 동적 보정은 매우 중요하다. 요 모션 오차 보상에는 갠트리 제어가 일반적이며, 이 방법을 공기베어링 가이드를 사용하는 스테이지에 적용하기 위해서 회전 모션을 허용하는 유연기구가 스테이지에 적용된다. 본 논문은 공기베어링과 유연기구를 갖춘 H형 XY 스테이지의 정속 구동 성능을 개선하는 방법을 제안한다. 유연기구를 포함한 스테이지의 갠트리 제어 시 선형 모터로부터 발생하는 상호 리플의 발생 원인을 분석하고, 이러한 상호 리플을 보상하는 방안으로 적응 학습 제어를 제시한다. 제시 방안의 검증을 위해 시뮬레이션을 수행하여, 보상 제어를 통해 속도 리플이 약 22 % 수준으로 감소함을 확인하였다. 그리고 요 모션 오차가 발생하는 스테이지 상태를 가정하여 리플 저감 효과를 검증하였다.

• 한국정밀공학회지
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• 제32권3호
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• pp.263-268
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• 2015

This paper describes lost motion analysis for a novel 6-DOF ultra-precision positioning stage. In the case of flexure hinge based precision positioning stage, lost motion is generated when the displacement of actuator is not delivered completely to the end-effector because of the elasticity of flexure hinge. Consequently, it is need to compute amount of lost motion to compensate the motion or to decide appropriate control method for precision positioning. Lost motion analysis for the vertical actuation unit is presented. The analysis results are presented in two ways: analytic and numerical analyses. It is found that they closely coincide with each other by 1% error. In finite element analysis result, the amount of lost motion is turned out to be about 3%. Although, the amount is not so large, it is necessary procedure to check the lost motion to establish the control method.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1438-1441
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• 2005

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100um\times{100um}$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. Using this AFM system, 3um pitch specimen was measured. As a result, the uncertainty of total system has been evaluated.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.539-542
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• 1997

We present a micro-positioning stage that has minimized geometrical error and can drive in the 4-axis. This stage divided into two parts: $Z\theta_x$ $\theta_y$, motion stage and$\theta_z$ motion stage. These stages are constructed in flexure hinges, piezoelectric actuators and displacement scnsors. The dynamic model for each stage is obtained and their FE (finite element) models are made. Using the Lagrange's equation, the motion of equation is found. Through the parametric analysis and FE analysis, sensitiv~ty of the design parameters is executed. Finally, fundamental frequencies, maximum stress, and displacement sensitivity for each stage are obtained. We expect that this micro-positioning stage be a useful micro-alignment device for various applications.

• 제어로봇시스템학회논문지
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• 제7권4호
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• pp.369-373
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• 2001

This paper is concerned with a transfer alignment of SDINS under ship motions. To reduce alignment errors induced by the ship body flexure, an error compensation method is suggested based on velocity and DCM partial matching, and by interpreting the simulation results and comparing with the conventional velocity and quaternion partial matching, it is shown that the proposed method is effective enough to improve the azimuth alignment performance.

• 제어로봇시스템학회논문지
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• 제7권11호
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• pp.953-957
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• 2001

This paper is concerned with a transfer alignment method for the SDINS under ship motions. Major error sources of transfer alignment are data transfer time-delay, lever-arm velocity and ship body flexure. Specifically, to reduce alignment errors induced by measurement time-delay effects, the error compensation method through delay state augmentation is suggested. A linearized error model for the velocity and attitude matching transfer alignment system is first derived by linearizing the nonliner measurement equation with respect to its time delay and augmenting the delay state into the conventional linear state equations. And then it is shown via observability analysis and computer simulations that the delay state can be estimated and compensated during ship motions resulting in considerably less alignment errors.