• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.842-845
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• 2002

We report on the properties of ITO thin films prepared by dc and pulse magnetron sputtering at low temperature. The electrical, optical, and surface properties of the films prepared by dc and pulse magnetron sputtering were compared. We discuss the role the pulse power plays in determining ITO thin film properties that are important in flat panel applications.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.299-302
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• 2002

Vacuum microelectronics has been expected to provide a number of advanced devices such as flat panel displays, high-frequency devices etc., and rapidly showing tremendous and attractive aspects toward nanotechnology. Nowadays, nanomachining and nanomaterials are coming to new targets in the development for new generation devices. Transfer Mold technique has been developed for the vacuum nanotechnology. Carbon nanotubes (CNTs) are emerging as nanomaterials and expecting the new electron sources for FED. Recent progress of vacuum microelectronics toward vacuum nanotechnology in Japan are described.

• 진공이야기
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• 제1권3호
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• pp.9-13
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• 2014

Vacuum growth of thin films via chemical vapor deposition (CVD) methods has been extensively used in modern semiconductor and flat panel display industries. The CVD processes have a wide range of variation and are categorized according to their working conditions, power sources, precursor materials, and so forth. Basic components and process steps common to all CVD branches are discussed. In addition, characteristics and applications of two major CVD techniques - LPCVD and PECVD - are reviewed briefly.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2007년도 춘계학술발표회 초록집
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• pp.20-21
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• 2007

FPD 투명 도전막의 제조에 핵심소재로 사용되는 타겟재의 개발동향을 TCO 물질 중에서 현재 가장 널리 사용되고 있는 ITO 타겟 개발의 관점으로 살펴보았다. ITO 투명 도전막은 다른 TCO 물질에 비해 높은 전기 전도도 및 높은 투과율로 인해 지속적인 사용이 예상되며, 이에 대응 가능한 고밀도 및 고효율 ITO 타겟의 개발이 진행 중이다. 또한 ITO 투명도전막의 우수한 특성에 따라 지속적인 인듐 자원의 수요증가와 이에 따른 인듐 자원의 고갈우려로 ITO 타겟을 대체할 수 있는 대체제의 개발이 진행 중에 있다.

• 한국광학회지
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• 제28권6호
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• pp.339-345
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• 2017

기준 평면의 평면도는 간섭계 교정에서부터 반도체, 플랫 패널 디스플레이, 실리콘 기판에 필요한 기준면 제공 등에 매우 중요한 역할을 한다. 특히 기준 평면의 평면도 측정을 해외에서 수행해 올 경우 시간적인 지연과 함께 금전적인 손해가 크므로 국내에서 측정 기술을 구축할 필요가 있다. 본 논문에서는 국내에서 처음으로 절대 측정 방법인 three-flat test 방법을 사용해 기준 평면의 평면도를 정확하게 구하고 측정불확도를 계산하였다. Three-flat test는 간섭계를 사용하여 세 개의 기준 평면을 상호 비교 측정하여 얻은 결과에서 각 평면의 평면도를 정확하게 구하는 방법이다. Three-flat test 방법들 중 실험실에 구축된 장비로 실험 가능하며 간단한 계산 과정으로 낮은 측정불확도를 얻을 수 있는 Griesmann 방법을 적용하여 실험하였다. 그 결과, 세 광학 평면에 대한 평면도를 얻을 수 있었고, 측정불확도는 각 광학 평면에 대해 0.5 nm rms 이내의 신뢰 수준임을 확인하여 높은 수준으로 자체 평면도 측정이 가능함을 확인하였다.

• 대한디지털의료영상학회논문지
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• 제9권2호
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• pp.17-21
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• 2007

The purpose to recognize change of average pixel value of acquisition image by control panel's density and right set up method of speed (sensitivity) and exposure dose(mAs) change that dose in purpose digital flatpanel-detector. X -ray generator DHF-158H2(Hitachi, Japan). Detector CXDI 4OG(Canon, Japan), 12 : 1 grid and exposure ray 135 kVp, 250 mA, 10 ms. focus-detector distance 180 cm and used AEC mode. DICOM reflex analysis program used image J that is digital reflex analysis program that offer in United States America National Health Center(National Institutes of Health : NlH) phantom used chest phantom(Anthromorphic : Flukebrome.medicaI USA). An experiment chest phantom that consist by formation equivalence material use because density value( -3${\sim}$+3) in X-ray control panel and seep that is speed step(slow, medium, fast) each control experimentalize. image analysis reflex neted through an experiment using image j each image compare. These was change in dose according to slow, medium, fast and density's change in an experiment result. According to detector sensitivity and density condition set, dose was relationship dissimilarity 500% from 200%. The dose came highest when is density +3 to slow. and dose more increases gray scale's extent could know that rise. Could know whether how equipment set is important through this experiment. cause of disease which change by digital radiography system forward is thought to increase more, it is considered that suitable education by this and continuous interest about equipment need absolutely.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.417-417
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• 2009

Although a transparent conductive film (TCF) belongs to essential supporting materials for many device applications such as touch screens, flat panel displays, and sensors, a conventional transparent conductive material, indium-tin oxide (ITO), suffers from considerable drawback because the price of indium has soared since 2001. Despite a recent falloff, a demand of ITO is expected to increase sharply in the future due to the trend of flat panel display technologies toward flexible, paper-like features. There have been recently extensive studies to replace ITO with new materials, in particular, carbon nanotubes (CNTs) since CNTs possess excellent properties such as flexibility, electrical conductivity, optical transparency, mechanical strength, etc., which are prerequisite to TCFs. This study fabricated TCFs with single-walled carbon nanotubes (SWCNTs) produced by arc discharge. The SWCNTs were dispersed in water with a surfactant of sodium dodecyl benzene sulfonate (NaDDBS) under sonication. Carbon black and fullerene nanoparticles were added to the SWCNT-dispersed solution to enhance contact resistance between CNTs. TCFs were manufactured by a filtration and transfer method. TCFs added with carbon black and fullerene nanoparticles were characterized by scanning electron microscopy (SEM), UV-vis spectroscopy (optical transmittance), and four-point probe measurement (sheet resistance).

• 소성∙가공
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• 제15권3호
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• pp.213-219
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• 2006

To improve the strength of glass is being studied in order to contribute to weight saving of flat panel displays. Generally, the strength achieved of glass-ceramics is higher as is the fracture toughness by the formation of a heterogeneous phase inside glass. In this study, Ag-doped $45SiO_2-24CaO-24Na_2O-4P_2O_5\;and\;70SiO_2-10CaO-24Na_2O-10TiO_2$ glasses were irradiated to strengthen by crystallization using femto-second laser pulse. XRD, Nano-indenter and SEM etc., irradiation of laser pulse without heat-treated samples was analyzed. Samples irradiated by laser had higher value($4.4{\sim}4.56^*10-3Pa$) of elastic modulus which related with strength of glass than values heat-treated samples and these are $1.2{\sim}1.5$ times higher values than them of mother glass. This process can be applicable to the strengthening of thinner glass plate, and it has an advantage over traditional heat-treatment and ion-exchange method.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 추계학술대회 논문집
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• pp.171-174
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• 2005

To improve the strength of glass is being studied in order to contribute to weight saving of flat panel displays. Generally, the strength achieved of glass-ceramics is higher as is the fracture toughness by the formation of a heterogeneous Phase inside glass. In this study, Ag-doped $45SiO_2-24CaO-24Na_2O-4P_2O_5$ glasses were irradiated to strengthen by crystallization using femto-second laser pulse. UV/VIS, Spectroscope, XRD, nano-indenter and SEM etc. irradiation of laser pulse without heat-treated samples was analyzed. Samples irradiated by laser had higher value$(4.4\~4.56{\ast}10-3Pa)$ of elastic modulus which related with strength of glass than values heat-treated samples and these are $1.2\~1.5$ times higher values than them of mother glass. This process can be applicable to the strengthening of thinner glass plate, and it has an advantage over traditional heat-treatment and ion-exchange method.

• Macromolecular Research
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• 제14권1호
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• pp.1-33
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• 2006

Polyimides (PIs) exhibit excellent thermal stability, mechanical, dielectric, and chemical resistance properties due to their heterocyclic imide rings and aromatic rings on the backbone. Due to these advantageous properties, PIs have found diverse applications in industry. Most PIs are insoluble because of the nature of the high chemical resistance. Thus, they are generally used as a soluble precursor polymer, which forms complexes with solvent molecules, and then finally converts to the corresponding polyimides via imidization reaction. This complexation with solvent has caused severe difficulty in the characterization of the precursor polymers. However, significant progress has recently been made on the detailed characterization of PI precursors and their imidization reaction. On the other hand, much research effort has been exerted to reduce the dielectric constant of PIs, as demanded in the microelectronics industry, through chemical modifications, as well as to develop high performance, light-emitting PIs and liquid crystal (LC) alignment layer PIs with both rubbing and rubbing-free processibility, which are desired in the flat-panel display industry. This article reviews this recent research progresses in characterizing PIs and their precursors and in developing low dielectric constant, light-emitting, and LC alignment layer PIs.