Browse > Article
http://dx.doi.org/10.3807/KJOP.2017.28.6.339

Absolute Test for a 4-inch Flat and Its Measurement Uncertainty  

Kim, Su-Young (Department of Science of Measurement, University of Science and Technology)
Song, Jae-Bong (Korea Research Institute of Standards and Science)
Yang, Ho-Soon (Department of Science of Measurement, University of Science and Technology)
Rhee, Hyug-Gyo (Department of Science of Measurement, University of Science and Technology)
Publication Information
Korean Journal of Optics and Photonics / v.28, no.6, 2017 , pp. 339-345 More about this Journal
Abstract
The flatness of a reference flat plays an important role, from the calibration of an interferometer to the reference for a semiconductor or flat-panel display, etc. Especially if we order the flatness measurement outside Korea, we may spend more time and money. In this paper, we measured the flatness of a reference flat using a three-flat test, which is one of the absolute measurement methods, and calculated its measurement uncertainty. In the three-flat test we adopted, each flat is tested against another flat, with three unknown flats, using an interferometer. Among several three-flat tests, we adopted Griesmann's method which has a low measurement uncertainty and is less dependent on the experimental equipment. As a result, the measurement uncertainty was found to be less than 0.5 nm rms, which is very accurate for high-tech industrial applications.
Keywords
Interferometry; Absolute test; Measurement uncertainty;
Citations & Related Records
연도 인용수 순위
  • Reference
1 A. Davies, C. J. Evans, R. Kestner, and M. Bremer, "The NIST X-ray optics CALIBration InteRferometer (XCALIBIR)," in Proc. Optical Fabrication and Testing (Quebec, Canada 2000), OSA Technical Digest, paper OWA5.
2 G. Schulz and J. Schwider, "Precise measurement of planeness," Appl. Opt. 6, 1077-1084 (1967).   DOI
3 R. E. Parks, "Removal of test optics errors," Proc. SPIE 153, 56-63 (1978).
4 J. Grzanna and G. Schulz, "Absolute testing of flatness standards at square-grid points," Opt. Commun. 77, 107-112 (1990).   DOI
5 C. Ai and J. C. Wyant, "Absolute testing of flats decomposed to even and odd functions," Proc. SPIE 1776, 73-83 (1992).
6 C. Ai and J. C. Wyant, "Absolute testing of flats by using even and odd functions," Appl. Opt. 32, 4698-4705 (1993).   DOI
7 C. J. Evans and R. N. Kestner, "Test optics error removal," Appl. Opt. 35, 1015-1021 (1996).   DOI
8 R. E. Parks, L-Z. Shao, and C. J. Evans, "Pixel-based absolute topography test for three flats," Appl. Opt. 37, 5951-5956 (1998).   DOI
9 U. Griesmann, "Three-flat test solutions based on simple mirror symmetry," Appl. Opt. 45, 5856-5865 (2006).   DOI
10 M. F. Kuchel, "A new approach to solve the three-flat problem," Optik 112, 381-391 (2001).   DOI
11 U. Griesmann, Q. Wang, and J. Soons, "Three-flat tests including mounting-induced deformations," Opt. Eng. 46, 093601 (2007).   DOI
12 B. S. Fritz, "Absolute calibration of an optical flat," Opt. Eng. 23, 379-383 (1984).
13 Korea Research Institute of Standards and Science, "4" Flat rotary stage," in Certificate of Calibration (KRISS, Daejeon, Korea, 2017).
14 W. Song, F. Wu, and X. Hou, "Method to test rotationally symmetric surface deviation with high accuracy," Appl. Opt. 51, 5567-5572 (2012).   DOI
15 L. Yong, L. Xu, J. Hongzhen, H. Yuhang, R. Huan, Y. Yi, Z. Lin, S. Zhendong, and Y. Quan, "Principal and error analysis of mirror symmetry method in three-flat test," Proc. SPIE 9297, 929710 (2014).
16 International Organization for Standardization, ISO/IEC Guide 98-3:2008, Guide to the Expression of Uncertainty in Measurement (GUM: 1995)(ISO 2008), Part 3.
17 G. Moona, R. Sharma, U. Kiran, and K. P. Chaudhary, "Evaluation of measuremnt uncertainty for absolute flatness measurement by using fizeau interferometer with phaseshifting capability," MAPAN-J. Metrol. Soc. India 29, 261-267 (2014).
18 H. Liu, S. Liu, W. Gao, and Q. Fang, "Research of absolute testing based on N-position rotations," Proc. SPIE 9796, 97960P (2016).
19 W. Wang, B. Wu, P. Liu, J. Liu, and J. Tan, "Position error correction in absolute surface measurement based on a multi-angle averaging method," Meas. Sci. Technol. 28, 045009 (2017).   DOI