• Journal of Advanced Marine Engineering and Technology
• /
• v.38 no.1
• /
• pp.48-55
• /
• 2014

These Xenon flashlamp power supply for Ultra Violet has converter with high voltage conversion ratio. General model is composed of transformer with high voltage conversion ratio and voltage doubler rectifier circuit. Purpose of power supply leads dielectric breakdown of Xenon flashlamp and passes current rapidly. When passing current, it has to limit current to avoid over-heat, damage of electrode and acceleration of gas oxidation which are cause of performance degradation of lamps. Generally, inductors and resistors, which are called as "Ballast," are used to limit currents. Generally, Transformer has high turn ratio to make high voltages. But we can get high voltages using the transformer with low turn ratio which is driven with self resonance. Also, an advantage of self resonance is to make a circuit simply through impedance of transformer in resonance frequency which filters output voltage. As using an unique impedance of transformer, the circuit does not need other impedance elements like the ballast. So the power supply assures high efficiency of the arc discharge.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.11a
• /
• pp.122-122
• /
• 2008

Recently, Metal/Alumina/Silicon-Nitride/Silicon-Oxide/Silicon (MANOS) structures are one of the most attractive candidates to realize vertical scaling of high-density NAND flash memory [1]. However, as ANO layers are miniaturized, negative and positive bias temperature instability (NBTI/PBTI), such as the flat band voltage shift, ${\Delta}V_{FB}$, the interfacial trap density increase, ${\Delta}D_{it}$, the gate leakage current, ${\Delta}I_G$. and the retention characteristics, in MONOS capacitors, becomes an important issue in terms of reliability. It is well known that tunnel oxide degradation is a result of the oxide and interfacial traps generation during FN (Fowler-Nordheim) stress [2]. Because the bias temperature stress causes an increase of both interfacial-traps and fixed oxide charge could be a factor, witch can degrade device reliability during the program and erase operation. However, few studies on NBTI/PBTI have been conducted on improving the reliability of MONOS devices. In this work, we investigate the effect of post-annealing gas on bias temperature instability (BTI), such as the flat band voltage shift, ${\Delta}V_{FB}$, the interfacial trap density shift, ${\Delta}I_G$ retention characteristics, and the gate leakage current characteristics of MANOS capacitors. MANOS samples annealed at $950^{\circ}C$ for 30 s by a rapid thermal process were treated via additional annealing in a furnace, using annealing gases $N_2$ and $N_2-H_2$ (2 % hydrogen and 98 % nitrogen mixture gases) at $450^{\circ}C$ for 30 min. MANOS samples annealed in $N_2-H_2$ ambient had the lowest flat band voltage shift, ${\Delta}V_{FB}$ = 1.09/0.63 V at the program/erase state, and the good retention characteristics, 123/84 mV/decade at the program/erase state more than the sample annealed at $N_2$ ambient.

• Journal of Energy Engineering
• /
• v.25 no.3
• /
• pp.18-26
• /
• 2016

Mineral oil is the most widely used for electrical transformer, though some factors should be considered such as their environmentally harmfulness when it spill and low flash point. To cover these disadvantages, vegetable oil has developed because of its high biodegradability and thermal stability. However, it is necessary that many studies should conduct to reveal the detailed impacts of long-term operation as transformer oil. In this paper, we applied the accelerated aging test which simulate the real transformer circumstances using insulation paper, coil, steel at $150^{\circ}C$, which is higher than normal operation, for 2 weeks. To figure out the oxidation characteristics between mineral oil and vegetable oil test major properties and components such as total acid number, dielectric breakdown and dissolved gas components during that period. As a result of these tests, we found that vegetable oil has higher electric insulation ability than mineral oil though poor total acid number by hydrophile property. Vegetable oil also kept its thermal stability under the given circumstances.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.02a
• /
• pp.200-200
• /
• 2013

기존 메모리 반도체에 비교해 빠른 재생속도와 높은 집적도, 비휘발성 등의 특성을 가지는 MRAM (Magnetic Random Access Memory)은 DRAM, flash memory 등을 대체할 수 있는 차세대 기억 소자로서 CoFeB/MgO/CoFeB로 구성된 한 개의 MTJ (Magnetic Tunnel Junction)를 단위 메모리로 사용한다. 이 MTJ 물질들은 고밀도 플라즈마를 이용한 건식 식각공정시 Cl2, BCl3 등과 같은 chlorine 을 포함한 가스를 이용하여 왔으나 식각 후 sidewall에서 발생하는 부식과 식각 선택비 확보의 어려움 등으로 마스크 물질에 제약을 받고 소자 특성이 감소하게 되는 등의 문제가 있다. 따라서 이러한 식각 문제점을 해결하기 위한 대안으로 noncorrosive 가스인 CO/NH3, CH3OH, CH4 등을 이용한 MTJ 식각 연구가 진행되어 오고 있으며 이중 CO/NH3 혼합가스는 부식성이 없고 hard mask와의 높은 선택비를 가지는 기체로 CO gas에 NH3 gas를 첨가하게 되면 etch rate이 증가하는 특성을 보인다. 또한 rf pulse-biased power를 이용하여 이온의 입사를 시간에 따라 제어함으로써 pulse off time 때 etch gas와 MTJ 물질간의 chemical reaction을 향상시킬 수 있다. 따라서 본 연구에서는 CO/NH3 혼합가스를 이용하여 다양한 rf pulse-biased power 조건에서 MTJ 물질인 CoFeB, MgO와 hard mask 물질인 W을 식각 한 뒤 식각특성을 분석하였으며 MTJ surface의 chemical binding state, surface roughness 측정을 진행하였다. 식각 샘플의 측정은 Alpha step profiler, XPS (X-ray Photoelectron Spectroscopy), AFM (Atomic Force Microscopy)를 통해 진행되었다. Time-averaged pulse bias에서는 duty ratio가 감소할수록 etch rate의 큰 감소 없이 CoFeB/W, MgO/W 물질의 etch selectivity가 향상됨을 확인할 수 있었으며 pulse off time 구간에서의 chemical reaction 향상으로 인해 식각부산물의 재증착이 감소하고 CoFeB의 surface roughness가 감소하는 것을 확인하였다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.436-437
• /
• 2012

Double patterning technology (DPT) has been suggested as a promising candidates of the next generation lithography technology in FLASH and DRAM manufacturing in sub-40nm technology node. DPT enables to overcome the physical limitation of optical lithography, and it is expected to be continued as long as e-beam lithography takes place in manufacturing. Several different processes for DPT are currently available in practice, and they are litho-litho-etch (LLE), litho-etch-litho-etch (LELE), litho-freeze-litho-etch (LFLE), and self-aligned double patterning (SADP) [1]. The self-aligned approach is regarded as more suitable for mass production, but it requires precise control of sidewall space etch profile for the exact definition of hard mask layer. In this paper, we propose etch end point detection (EPD) in spacer etching to precisely control sidewall profile in SADP. Conventional etch EPD notify the end point after or on-set of a layer being etched is removed, but the EPD in spacer etch should land-off exactly after surface removal while the spacer is still remained. Precise control of real-time in-situ EPD may help to control the size of spacer to realize desired pattern geometry. To demonstrate the capability of spacer-etch EPD, we fabricated metal line structure on silicon dioxide layer and spacer deposition layer with silicon nitride. While blanket etch of the spacer layer takes place in inductively coupled plasma-reactive ion etching (ICP-RIE), in-situ monitoring of plasma chemistry is performed using optical emission spectroscopy (OES), and the acquired data is stored in a local computer. Through offline analysis of the acquired OES data with respect to etch gas and by-product chemistry, a representative EPD time traces signal is derived. We found that the SE-EPD is useful for precise control of spacer etching in DPT, and we are continuously developing real-time SE-EPD methodology employing cumulative sum (CUSUM) control chart [2].

• Journal of the Korean Society of Marine Environment & Safety
• /
• v.13 no.1 s.28
• /
• pp.39-45
• /
• 2007

Recently it is a tendency that the heavy fuel oil is considered to be used on board even middle or small sized vessels in order to reduce the operating cost of vessel mused by a rise in international oil prices. In this study, analyzed the physical & chemical properties and examined the effect of refining treatment and a fuel oil additive for MF30 fuel oil which is a mixture fuel oil mixed M.G.O and the heavy oil MF380 use to be possible in the middle&small class vessel. As a results, the effects of two of pre-refinery treatment methods as centrifugal purifier and heating & homogenizing system(M.C.H) are some feeble, but the pour point and the flash point came to be low more or less. The effect of property improvement which is mused by the fuel oil additive did not appear positively.

• Fire Science and Engineering
• /
• v.23 no.5
• /
• pp.72-77
• /
• 2009

In the recycling procedure of the refrigerator, the fire frequently breaks out. In this study, to clarify the exact cause of the fire, the components and concentration of the materials produced in the process are analysed as well as the problems in the process system, and the protective measure to prevent the fire and the explosion fundamentally is proposed. In this procedure, the preventive measures of fire by removing the combustible materials such as polyurethane and inflammable gases, by removing the ignition sources and by reducing the oxygen concentration to the minimum are proposed along with the protective measures to reduce the damage in the fire. In the crushing procedure where the fire or explosion can break out in diverse ways, the forced ventilation or exhaust system applied to the small partial ventilation facility are installed to reduce the concentration of inflammable gas mixture to lower than the inflammable limit by injecting and exhausting the air forcibly.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.10 no.5
• /
• pp.73-80
• /
• 2002

Dimethyl ether (DM) is one of the most attractive alternative fuel far compression ignition engine. Its main advantage in diesel engine application is high efficiency of diesel cycle with soot free combustion though conventional fuel injection system has to be modified due to the intrinsic properties of DME. Experimental study of DME and conventional diesel spray employing a common-rail type fuel injection system with a 5-holes sac type injector (hole diameter 0.168 ㎜/hole) was performed in a high pressure chamber pressurized with nitrogen gas. A CCD camera was employed to capture time series of spray images followed by spray cone angles and penetrations of DME were characterized and compared with those of diesel. Under atmospheric pressure condition, regardless of injection pressure, spray cone angles of the DME were wider than those of diesel and penetrations were shorter due to flash boiling effect. Tip of the DME spray was farmed in mushroom like shape at atmospheric chamber pressure but it was disappeared in higher chamber pressure. On the contrary, spray characteristics of the DME became similar to that of diesel under 3MPa of chamber pressure. Hole-to-hole variation of the DME spray was lower than that of diesel in both atmospheric and 3MPa chamber pressures. At 25MPa and 40MPa of DME injection pressures, regardless of chamber pressure, intermittent DME spray was observed. It was thought that vapor lock inside the injector was generated under the two injection pressures.

• 한국신재생에너지학회:학술대회논문집
• /
• 2010.11a
• /
• pp.130.2-130.2
• /
• 2010

2020년까지 대형 CCS (Carbon Capture and Storage) Demo Plant 시장 (100MW 이상) 이 형성될 전망이다. 발전 부문에서 대규모 CCS 실증 프로젝트는 총 44개이며 연소전(41%), 연소후(28%), 순산소(3%) 프로젝트가 계획되어 있다. 순산소 연소 기술은 실증진입단계, 연소후(USC) 기술은 상용화 추진단계, 연소전 (IGCC) 기술은 실증완료 이후 상용화 진입 단계이다. IGCC 발전의 석탄가스화 기술은 타 산업분야에 서 상용화 되어있어 기술신뢰성이 높다. IGCC 단위설비 기술 개발을 통한 성능개선 및 비용절감에 대한 잠재력을 가지고 있기 때문에 미래의 석탄발전기술로 고려되고 있다. IGCC 기술은 가장 상용화에 앞서있지만 아직까지 IGCC+CCS 대형 설비가 운전된 사례가 전 세계적으로 없으며 미국 EPRI 등에서 Feasibility Study 단계이다. 현재 국책과제로 수행중인 300MW급 태안 IGCC 플랜트를 대상으로 향후 CCS 설비를 적용했을 경우에 대해 기술 타당성 검증을 목적으로 IGCC+CCS 모델링을 수행하였다. 모델링은 스크러버 후단의 합성 가스를 대상으로 하였다. Water Gas Shift Reaction (WGSR) 공정 및 Selexol 공정을 구성하여 최종 단에서 수소 연료를 생산할 수 있도록 하였다. WGSR 공정은 Co/Mo 촉매반응기로 구성되었다. WGSR 모델링을 통하여 주입되는 스팀량 (1~2 mol-steam/mol-CO) 및 온도 변화 ($220-550^{\circ}C$)에 따른 CO가스의 전환율을 분석하여 경제적인 설계조건을 선정하였다. Selexol 공정은 $H_2S$ Absorber, $H_2S$ Stripper, $CO_2$ Absorber, $CO_2$ Flash Drum으로 구성된다. Selexol 공정의 $CO_2$와 $H_2S$ 선택도를 분석 하였으며 단위 설비별 설계 조건을 예측하였다. 모델링 결과 59kg/s의 합성가스($137^{\circ}C$, 41bar, 가스 조성은 $CO_2$ 1.2%, CO 57.2%, $H_2$ 23.2%, $H_2S$ 0.02%)가 WGSR Process를 통해 98% CO가 $CO_2$ 로 전환되었다. Selexol 공정을 통해 $H_2S$ 제거율은 99.9%, $CO_2$제거율은 96.4%이었고 14.9kg/s의 $H_2$(86.9%) 연료를 얻었다. 모델링 결과는 신뢰성 검증을 통해 IGCC+CCS 전체 플랜트의 성능예측과 Feasibility Study를 위한 자료로 활용될 예정이다.

• 한국신재생에너지학회:학술대회논문집
• /
• 2011.11a
• /
• pp.71.2-71.2
• /
• 2011

300MW 급 태안 IGCC 가스화 플랜트 및 기존 발전소에 CCS 를 설치할 경우에 대해 기술 타당성 검증을 목적으로 CCS 모델링을 수행하였다. CCS Case Studies 는 플랜트 운전부하에 따른 $CO_2$ 제거율, $H_2S$ 제거율, 소모동력 범위 등 플랜트 성능을 예측할 수 있다. Case Studies 결과를 활용하여 설계된 CCS 설비 용량이 운전범위에 적합한지를 판단할 수 있고 과잉 설계되었을 경우 플랜트 건설비를 절감할 수 있다. IGCC 가스화 플랜트에서 생산되는 합성가스의 $CO_2$ 분압, 목표 $CO_2$ 제거율, 경제성을 기준으로 적합한 CCS 공정을 판단한 결과 Selexol 공정이 선정되었다. Selexol 공정은 고압, 고농도의 산성가스 제거에 적합하며 다른 물리적 용매인 Rectisol 공정에 비해 건설비용이 경제적이고 화학 흡수제인 아민과 비교하여 운전 온도 범위가 넓다. CO, $H_2O$ 를 $CO_2$, $H_2$ 로 전환하는 Water Gas Shift Reaction (WGSR) 공정은 Co/Mo 촉매 반응기로 구성되었고 Selexol 공정은 $H_2S$ Absorber, $H_2S$ Stripper, $CO_2$ Absorber, $CO_2$ Flash Drum 로 구성되었다. WGSR+Selexol 모델링은 Wet Scrubber 후단의 합성가스 (40.5 bar, $136{\sim}139^{\circ}C$) 를 대상으로 하였다. WGSR+Selexol 공정 운전 조건 변화 [Process Design Case(PDC), Equipment Design Case(EDC), Turndown Design Case(TDC)] 에 따른 플랜트 모델링 결과를 비교분석 하였다. 주요 분석 내용은 WGSR 설비에서의 CO 의 $CO_2$ 전환 효율, Selexol 설비에서 $CO_2$ 제거 효율, $H_2S$ 제거 효율이다. 모델링 결과 WGSR 설비에서의 CO 의 $CO_2$ 로의 전환율 99.1% 이상, Selexol 설비에서 $CO_2$ 제거율은 91.6% 이상, $H_2S$ 제거율 100%이었다. CCS 설비 설치에 따른 플랜트 성능 영향을 분석하기 위해서 CCS 설비의 Chiller, Compressor, Pump 소비동력을 계산하였다. 모델링 결과 Chiller 는 2.6~8.5 MWth, Compressor 는 3.0~9.6 MWe, Pump 는 1.4~3.0 MWe 범위 이었다. 플랜트 로드가 50%인 TDC 소모동력은 플랜트 로드가 100%인 PDC 소모동력의 절반 수준이었다. 합성가스를 WGS+Selexol 공정을 통해 수소가스로 전환시키면 가스터빈 연료가스의 Lower Heating Value (LHV) 값이 평균 11.5% 감소하였다.