• 제목/요약/키워드: Flash gas

검색결과 135건 처리시간 0.025초

Inductively Coupled Plasma Reactive Ion Etching of MgO Thin Films Using a $CH_4$/Ar Plasma

  • Lee, Hwa-Won;Kim, Eun-Ho;Lee, Tae-Young;Chung, Chee-Won
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
    • /
    • pp.77-77
    • /
    • 2011
  • These days, a growing demand for memory device is filled up with the flash memory and the dynamic random access memory (DRAM). Although DRAM is a reasonable solution for current demand, the universal novel memory with high density, high speed and nonvolatility, needs to be developed. Among various new memories, the magnetic random access memory (MRAM) device is considered as one of good candidate memories because of excellent features including high density, high speed, low operating power and nonvolatility. The etching of MTJ stack which is composed of magnetic materials and insulator such as MgO is one of the vital process for MRAM. Recently, MgO has attracted great interest in the MTJ stack as tunneling barrier layer for its high tunneling magnetoresistance values. For the successful realization of high density MRAM, the etching process of MgO thin films should be investigated. Until now, there were some works devoted to the investigations on etch characteristics of MgO thin films. Initially, ion milling was applied to the etching of MgO thin films. However, ion milling has many disadvantages such as sidewall redeposition and etching damage. High density plasma etching containing the magnetically enhanced reactive ion etching and high density reactive ion etching have been employed for the improvement of etching process. In this work, inductively coupled plasma reactive ion etching (ICPRIE) system was adopted for the improvement of etching process using MgO thin films and etching gas mixes of $CH_4$/Ar and $CH_4$/$O_2$/Ar have been employed. The etch rates are measured by a surface profilometer and etch profiles are observed using field emission scanning emission microscopy (FESEM). The effects of gas concentration and etch parameters such as coil rf power, dc-bias voltage to substrate, and gas pressure on etch characteristics will be systematically explored.

  • PDF

이중 콘형 부분 예혼합 GT 노즐의 다단 연소특성 (Characteristics of Multi staged Combustion on a Double-cone Partial Premixed Nozzle)

  • 김한석;조주형;김민국;황정재;이원준
    • 한국가스학회지
    • /
    • 제24권1호
    • /
    • pp.49-55
    • /
    • 2020
  • 산업용 혹은 발전용 가스터빈에 사용되는 이중 콘형 예혼합 연소기의 다단 연소 특성을 이해하기 위하여 실험적연구를 수행하였다. 이를 위하여 기존에 모두 경사면에 공급되는 연료를 콘부분으로 일부 할애하는 방식으로 다단연소 방식을 구성하였으며 콘에서 분사되는 연료공급은 축방향과 콘 경사면 방향으로 하였다. 다단연소 연소특성을 이해하기 위하여 콘에서의 연료 분사 방향과 연료 분배율 변화에 대한 NOx와 CO의 배출 농도 그리고 벽면 온도분포를 측정하였다. 그 결과 총 연료에 대한 콘으로의 분배율이 3%인 경우 콘에서의 연료 분사방향에 관계없이 노즐내의 예혼합 영역에서 연료가 공기와 균일하게 혼합됨으로서 연소영역의 고온점 감소에 의하여 NOx 배출 농도가 감소된다. 그러나 콘에서 축방향으로 분사되는 연료분배율이 8%로 증가하는 경우 노즐 내부 예혼합 영역으로의 화염 역화로 인하여 NOx의 배출농도가 오히려 증가하게 된다.

강한 압력 교란에 구속된 고압 액적의 천이 기화 (Droplet Vaporization in High Pressure Environments with Pressure Oscillations)

  • 김성엽;윤웅섭
    • 한국추진공학회:학술대회논문집
    • /
    • 한국추진공학회 2003년도 제21회 추계학술대회 논문집
    • /
    • pp.157-163
    • /
    • 2003
  • A systematic numerical experiment has been conducted to study droplet gasification in high pressure environments with pressure oscillations. The general frame of previous rigorous model[1] is retained but tailored for flash equilibrium calculation of vapor-liquid interfacial thermodynamics. Time-dependent conservation equations of mass, momentum, energy, and species concentrations are formulated in axisymmetric coordinate system for both the droplet interior and ambient gases. In addition, a unified property evaluation scheme based on the fundamental equation of state and empirical methods are used to find fluid thermophysical properties over the entire thermodynamic domain of interest. The governing equations with appropriate physical boundary conditions are numerically time integrated using an implicit finite-difference method with a dual time-stepping technique. A series of calculation have been carried out to investigate the gasification of an isolated n-pentane droplet in a nitrogen gas environment over a wide range of ambient pressures and frequencies. Results show that the mean pressures and frequencies of the ambient gas have strong influences on the characteristics of the droplet gasification. The amplitude of the response increases with increasing pressure, and the magnitude of the vaporization response increases with the frequency.

  • PDF

Estimation of Fuel Rate on the Galactic Disk from High Velocity Cloud (HVC) Infall

  • Sung, Kwang Hyun;Kwak, Kyujin
    • 천문학회보
    • /
    • 제41권1호
    • /
    • pp.50.2-50.2
    • /
    • 2016
  • Continuous accretion of metal-poor gas can explain the discrepancy between the number of observed G-dwarfs and the number predicted by the "simple model" of galactic evolution. The maximum accretion rate estimated based upon approaching high velocity clouds (HVCs) can be up to ${\sim}0.4M_{\odot}{\cdot}yr^{-1}$ which is comparable with the accretion rate required by many chemical evolution models that is at least ${\sim}0.45M_{\odot}{\cdot}yr^{-1}$. However, it is not clear to what extent the exchange of gas between the disk and the cloud can occur when an HVC collides with the galactic disk. Therefore, we examined a series of HVC-Disk collision simulations using the FLASH 2.5 hydrodynamics simulation code. The outcomes of our simulations show that an HVC will more likely take away substances from the galactic disk rather than adding new material to the disk. We define this as an HVC having a "negative fuel rate". Further results in our study also indicate that the process and amount of fuel rate change can have various forms depending on the density, radius and velocity of an approaching HVC. The simulations in our study covers HVCs with a neutral hydrogen volume density from $1.0{\times}10^{-2}cm^{-3}$ to $41.0cm^{-3}$, radius of 200 pc to 1000 pc and velocity in the range between $40km{\cdot}s^{-1}$ and $100km{\cdot}s^{-1}$.

  • PDF

서스펜션 진공 플라즈마 용사법을 통한 YSZ 코팅의 형성 (Formation of YSZ Coatings Deposited by Suspension Vacuum Plasma Spraying)

  • 유연우;변응선
    • 한국표면공학회지
    • /
    • 제50권6호
    • /
    • pp.460-464
    • /
    • 2017
  • As increasing thermal efficiency of the gas turbine, the performance improvement of thermal barrier coatings is also becoming important. Ytrria stabilized zirconia(YSZ) is the most popular materials for ceramic top coating because of its low thermal conductivity. In order to enhance the performance of thermal barrier coatings for hot sections in the gas turbine, suspension plasma spraying was developed in order to feed nano-sized powders. YSZ coatings formed by suspension plasma spraying showed better performance than YSZ coatings due to its exclusive microstructure. In this research, two YSZ coatings were deposited by suspension vacuum plasma spraying at 400 mbar and 250 mbar. Microstructures of YSZ coatings were analyzed by scanning electron image(SEM) on each spraying conditions, respectively. Crystalline structure transformation was not detected by X-ray diffraction. Thermal conductivity of suspension vacuum plasma sprayed YSZ coatings were measured by laser flash analysis. Thermal conductivity of suspension vacuum plasma sprayed YSZ coatings containing horizontally oriented nano-sized pores and vertical cracks showed $0.6-1.0W/m{\cdot}K$, similar to thermal conductivity of YSZ coatings formed by atmospheric plasma spraying.

슬링거 연소기의 회전형 분사장치의 분무특성 연구 (Spray Characteristics of the Rotary Atomizer for the Slinger Combustor)

  • 최현경;이동훈;유경원;최성만
    • 한국분무공학회지
    • /
    • 제13권3호
    • /
    • pp.149-155
    • /
    • 2008
  • An experimental study was performed to understand spray characteristics of the rotary atomizer for the slinger combustor. In this fuel injection system, fuel is injected and atomized in the combustor by centrifugal forces to engine shaft. The experimental apparatus consists of a high speed rotational spindle, rotary atomizer, pressure tank and acrylic case. The droplet size and velocity were measured by PDPA (phase Doppler particle analyzer), and spray was visualized by using high speed camera and Nd:Yag laser-based flash photography. From the test results, the droplet size (SMD) is largely affected by rotational speed, mass flow rate and the number of orifice. As the experimental results, we could understand the spray characteristics of the rotary atomizer for the slinger combustor and obtain the optimum shape of the rotary atomizer which is suitable for the small gas turbine engine.

  • PDF

수동식 팽창밸브 조정에 의한 냉동시스템의 성능 분석 (Performance Analysis of Refrigeration System by Adjusting Manual Expansion Valve)

  • 양형석
    • 한국산업융합학회 논문집
    • /
    • 제14권3호
    • /
    • pp.113-119
    • /
    • 2011
  • This study analyzed facts affecting the performance of refrigeration systems after throttling actions, by changing the amount of refrigerant according to adjusting the opening of manual expansion valve to 80%, or 20% with vapor compressional refrigeration training equipment. At opening of 20%, the inlet and outlet temperature of compressor, subcooling and superheat, condenser heat, refrigeration effect, flash gas heat, coefficient of performance were higher, while at 80%, condensing pressure, evaporating pressure, compression work were higher, Thus, we could see changes in the amount of refrigerant affect the performance of the refrigeration system.

상용 열유동 해석 소프트웨어를 이용한 다이캐스팅 칠벤트의 성능평가 (Evaluation on Performance of Chill Vent in High Pressure Die Casting by Using a Commercial Software)

  • 강복현;김태범;김기영
    • 한국주조공학회지
    • /
    • 제32권3호
    • /
    • pp.133-137
    • /
    • 2012
  • Chill vent has a zigzag venting path which allows residual air or gases to exhaust out very quickly from the die cavity. However molten metal sometimes comes out through the gas venting surfaces causing flash. Effect of designing factors of chill vent and processing variables in high pressure die casting on the performance of chill vent was investigated through a series of calculations by using a commercial code. The most influential factor was the thickness of chill vent, followed by inlet velocity, vent width and die temperature.

Mn 첨가 고장력강 용접성 향상기술 (The advanced welding technology for high Strength steel adding Mn)

  • 이화식;심원보;이기동
    • 한국소성가공학회:학술대회논문집
    • /
    • 한국소성가공학회 2004년도 제5회 압연심포지엄 신 시장 개척을 위한 압연기술
    • /
    • pp.240-248
    • /
    • 2004
  • Recently, the customer's demands for automotive steel sheet have been diversified and sterned more. Therefore, as the tendency of auto industry light-weight, one among these requirements is the trend for high strength together with the thinness of automotive steel sheet. Because Mn added essentially in producing high strength steel sheet is bonded strongly with oxygen, the Fine oxidation layer was created at the welding face after the flash butt welding operated in entry section of pickling line. Thereby it was caused the crack or breakage of welding part in process of cold rolling. At this research, in order to protect the contact Mn with oxygen in atomosphere it was considered to fire oxygen with LNG and the related researches have been gone forward with the find out concrete and to apply them to operation.

  • PDF

A study on the developments of STCW training of seafarers on ships applying in the IGF Code

  • Han, Se-Hyun;Lee, Young-Chan
    • Journal of Advanced Marine Engineering and Technology
    • /
    • 제39권10호
    • /
    • pp.1054-1061
    • /
    • 2015
  • The International Maritime Organization (IMO) has been regulating emissions by making mandatory the compliance with institutions aimed at protecting air quality such as the Energy Efficiency Design Index (EEDI), Ship Energy Efficiency Management Plan (SEEMP) and Tier III. Under the circumstances, one of the response measures considered to be the most feasible is the replacement of existing marine fuel with Liquefied Natural Gas (LNG). The industry has been preemptively building infrastructure and developing and spreading engine technology to enable the use of LNG-fueled ships. The IMO, in turn, recently adopted the International Code of Safety for Ships Using Gases or Other Low-Flash-Point Fuels (IGF Code) as an institutional measure. Thus, it is required to comply with regulations on safety-related design and systems focused on response against potential risk for LNG-fueled ships, in which low-flash-point fuel is handled in the engine room. Especially, the Standards of Training, Certification and Watchkeeping (STCW) Convention was amended accordingly. It has adopted the qualification and training requirements for seafarers who are to provide service aboard ships subject to the IGF Code exemplified by LNG-fueled ships. The expansion in the use of LNG-fueled ships and relevant facilities in fact is expected to increase demand for talents. Thus, the time is ripe to develop methods to set up appropriate STCW training courses for seafarers who board ships subject to the IGF Code. In this study, the STCW Convention and existing STCW training courses applied to seafarers offering service aboard ships subject to the IGF Code are reviewed. The results were reflected to propose ways to design new STCW training courses needed for ships subject to the IGF Code and to identify and improve insufficiencies of the STCW Convention in relation to the IGF Code.