• Title/Summary/Keyword: Fine ceramics

Search Result 244, Processing Time 0.022 seconds

Silicon Wafering Process and Fine Grinding Process Induced Residual Mechanical Damage (반도체 실리콘의 웨이퍼링 및 정밀연삭공정후 잔류한 기계 적 손상에 관한 연구)

  • O, Han-Seok;Lee, Hong-Rim
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.19 no.6
    • /
    • pp.145-154
    • /
    • 2002
  • CMP (Chemical mechanical polishing) process was used to control the fine grinding process induced mechanical damage of Cz Silicon wafer. Characterization of mechanical damage was carried out using Nomarski microscope, magic mirror and also using angle lapping and lifetime scanner evaluation after heat treatment. Magic mirror and lifetime scanner were very useful for the residual damage pattern characterization and CMP process was effective on the reduction of fine grinding induced mechanical damage.

Computer Simulation for Microstructure Development in Porous Sintered Compacts (다공질 소결체의 조직형성에 관한 컴퓨터 시뮬레이션)

  • Shin, Soon-Ki;Matsubara, Hideaki
    • Journal of the Korean Ceramic Society
    • /
    • v.43 no.4 s.287
    • /
    • pp.213-219
    • /
    • 2006
  • A Monte Carlo simulation based on Potts model in a three dimensional lattice was studied to analyze and design microstructures in porous sintered compacts such as porosity, pore size, grain (particle) size and contiguity of grains. The effect of surface energy of particles and the content of additional fine particles to coarse particles on microstructure development were examined to obtain fundamentals for material design in porous materials. It has been found that the larger surface energy enhances sintering (necking) of particles and increases contiguity and surface energy does not change pore size and grain size. The addition of fine particles also enhances sintering of particles and increases contiguity, but it has an effect on increment of pore size and grain size. Such a simulation technique can give us important information or wisdom for design of porous materials, e.g., material system with high surface energy and fine particle audition are available for higher strength and larger porosity in porous sintered compacts with applications in an automobile.

Al2TiO5-machinable Ceramics Made by Reactive Sintering of Al2O3 and TiO2 (Al2O3와 TiO2의 반응소결로 제조한 Al2TiO5-기계가공성 세라믹스)

  • Park, Jae-Hyun;Lee, Won-Jae;Kim, Il-Soo
    • Journal of the Korean Ceramic Society
    • /
    • v.47 no.6
    • /
    • pp.498-502
    • /
    • 2010
  • Aluminium titanate($Al_2TiO_5$) has extremely anisotropic thermal expansion properties in single crystals, and polycrystalline material spontaneously microcracks in the cooling step after sintering process. These fine intergranular cracks limit the strength of the material, but provide an effective mechanism for absorbing strain energy during thermal shock and preventing catastrophic crack propagation. Furthermore, since machinable BN-ceramics used as an insulating substrate in current micro-electronic industry are very expensive, the development of new low-cost machinable substrate ceramics are consistently required. Therefore, cheap $Al_2TiO_5$-machinable ceramics was studied for the replacement of BN ceramics. $Al_2O_3-Al_2TiO_5$ ceramic composite was fabricated via in-situ reaction sintering. $Al_2O_3$ and $TiO_2$ powders were mixed with various mol-ratio and sintered at 1400 to $1600^{\circ}C$ for 1 h. Density, hardness and strength of sintered ceramics were systematically measured. Phase analysis and microstructures were observed by XRD and SEM, respectively. Machinability of each specimens was tested by micro-hole machining. The results of research showed that the $Al_2TiO_5$-composites could be used for low-cost machinable ceramics.

Effect of Abnormal Grain Growth and Heat Treatment on Electrical Properties of Semiconducting BaTiO3Ceramics

  • Lee, Joon-Hyung;Cho, Sang-Hee
    • Journal of the Korean Ceramic Society
    • /
    • v.39 no.1
    • /
    • pp.21-25
    • /
    • 2002
  • Effect of abnormal grain growth and heat treatment time on the electrical properties of donor-doped semiconductive BaTiO$_3$ceramics was examined. La-doped BaTiO$_3$ceramics was sintered at 134$0^{\circ}C$ for different times from 10 to 600 min in order to change the volume fraction of the abnormal grains in samples. As a result, samples with different volume fraction of abnormal grain growth from 22 to 100% were prepared. The samples were annealed at 120$0^{\circ}C$ for various times. The resistivity of the sam-ples at room and above Curie temperature was examined. The complex impedance measurement as functions of the volume fraction of abnormal grains and annealing time was conducted. Separation of complex impedance semicircle was observed in a sample in which abnormal and fine grains coexist. The results are discussed from a viewpoint of microstructure-property relationship.

Basalt Glass-Ceramics (현무암을 이용한 Glass-Ceramics)

  • 장승현;정형진
    • Journal of the Korean Ceramic Society
    • /
    • v.17 no.3
    • /
    • pp.151-157
    • /
    • 1980
  • Crystallization phenomena of glasses of fused natural basalt rocks were studied by DTA, X-ray phase analysis, electron microscopy, and other techniques. Crystallization was catalyzed by the addition of either chromite ore or $P_2O_5$, both up to 5 wt %. Various heat treatments were used, and their influences on controlling the microstructures and properties of the products were studied to develop high strength glass-ceramic material of the $CaO-Al_2O_3(Fe_2O_3)-MgO(FeO)-SiO_2$ system from the domestic basalts. Magnetite precipitates were found to be a nucleation initiator in every case of the crystallization. Diopside, anorthite, clinoenstatite and monticellite were identified as silicate crystalline phases contained in the crystallized products. The crystallite size was in the range of 0.1-2.5$\mu\textrm{m}$. The fine crystallites were approximately cubic, but large crystallites were either plate or needle shape. The thermal expansion coefficient, microhardness and modulus of rupture of glass-ceramics were ranged from 78.5 to 81.8$\times$10-7 cm/cm/$^{\circ}C$, from 820 to 930kg/$\textrm{mm}^2$, and from 1800 to 2800kg/$\textrm{cm}^2$, respectively.

  • PDF

Non-Destructive Detection of Hertzian Contact Damage in Ceramics

  • Ahn, H.S.;Jahanmir, S.
    • Tribology and Lubricants
    • /
    • v.11 no.5
    • /
    • pp.114-121
    • /
    • 1995
  • An ultrasonic technique using normal-incident compressional waves was used to evaluate the surface and subsurface damage in ceramics produced by Hertzian indentation. Damage was produced by a blunt indenter (tungsten carbide ball) in glass-ceramic, green glass and silicon nitride. The damage was classified into two types; (1) Hertzian cone crack, in green glass and fine grain silicon nitride, and (2) distributed subsurface micro fractures, without surface damage, produced in glass ceramic. The ultrasonic technique was successful in detecting cone craks. The measurement results with the Hertzian cone cracks indicated that cracks perpendicular to the surface could be detected by the normal-incident compressional waws. Also shown is the capability of normal-incident compressional waves in detection distributed micro-sized cracks size of subsurface microfractures.

Effects of Sintering Additives on the Microstructure Development in Silicon Oxynitride Ceramics

  • Kim, Joosun;Chen, I-Wei
    • The Korean Journal of Ceramics
    • /
    • v.6 no.3
    • /
    • pp.224-228
    • /
    • 2000
  • Using a small amount of additives and amorphous Si₂N₂O powders, O-SiAlON ceramics have been hot-pressed and its microstructure and mechanical properties were investigated. Scandium oxide was demonstrated to be an effective densification additive for O-SiAlON. Amorphous Si₂N₂O was densified at relatively low temperatures and a microstructure with acicular grains was developed. Fine grains found in materials obtained from amorphous powders suggest that nucleation and crystallization of O-SiAlOH is relatively easy compared with the Si₃N₄-SiO₂reaction.

  • PDF

Effect of Grain Boundary Modification on the Microstructure and Magnetic Properties of HDDR-treated Nd-Fe-B Powders

  • Liu, Shu;Kang, Nam-Hyun;Yu, Ji-Hun;Kwon, Hae-Woong;Lee, Jung-Goo
    • Journal of Magnetics
    • /
    • v.21 no.1
    • /
    • pp.51-56
    • /
    • 2016
  • The microstructure and magnetic properties of HDDR-treated powders after grain boundary diffusion process (GBDP) with Nd-Cu alloy at different temperatures have been studied. The variation of GBDP temperature had multifaceted influences on the HDDR-treated powders involving the microstructure, phase composition and magnetic performance. An enhanced coercivity of 16.9 kOe was obtained after GBDP at $700^{\circ}C$, due to the modified grain boundary with fine and continuous Nd-rich phase. However, GBDP at lower or higher temperature resulted in poor magnetic properties because of insufficient microstructural modification. Especially, the residual hydrogen induced phenomenon during GBDP strongly depended on the GBDP temperature.

Evaluation of Fracture Behavior and Formation of Microcrack of Alumina Ceramics by Acoustic Emission (AE에 의한 알루미나 세라믹스의 Microcrack 생성과 파괴거동의 평가)

  • 장병국;우상국
    • Journal of the Korean Ceramic Society
    • /
    • v.35 no.6
    • /
    • pp.551-558
    • /
    • 1998
  • Detection of microcrack in {{{{ {Al }_{2 } {O }_{3 } }} ceramics were studided by AE(acoustic emission) technique with 4-point bending test in order to evaluate the fracture process and formation of microcrack. Fully-dense alu-mina ceramics having a different grain size were fabricated by varing the hot-pressing temperature. The grain size of alumina increased with increasing the hot-pressing temperature whereas the bending strength decreasd. The microcracks were observed by SEM and TEM. The generation of AE event increased with increasing the applied load and many AE event was generated at maximum applied load. Alumina with smaller grain size shows the generation of many AE event resulting in an increase of microcrack formation. An intergranular fracture is predominantly observed in fine-grained alumina whereas intragranular fracture occurs predominantly in coarse-grained alumina,. Analysis of micorstructure and AE prove that primary mi-crocracks occur within grain-boundaries of alumina. The larger microcracking were formed by the growth and/or coalesence of primary microcracks. Then the materials become to fracuture by main crack gen-eration at the maximum applied load.

  • PDF

Patterning of Diamond Micro-Columns

  • Cho, Hun-Suk;Baik, Young-Joon;Chung, Bo-Keon;Lee, Ju-Yong;Jeon, D.;So, Dae-Hwa
    • The Korean Journal of Ceramics
    • /
    • v.3 no.1
    • /
    • pp.34-36
    • /
    • 1997
  • We have fabricated a patterned diamond field emitter on a silicon substrate. Fine diamond particles were planted on a silicon wafer using conventional scratch method. A silicon oxide film was deposited on the substrate seeded with diamond powder. An array of holes was patterned on the silicon oxide film using VLSI processing technology. Diamond grains were grown using a microwave plasma-assisted chemical vapor deposition. Because diamond could not grow on the silicon oxide barrier, diamond grains filled only the patterned holes in the silicon oxide film, resulting in an array of diamond tips.

  • PDF