• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.548-551
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• 2004

Magnetostrictive actuators have seen increasing use in fine positioning system because it has many advantages such as friction free, resolution of ${\mu}{\textrm}{m}$ or nm scale, and powerful output force. Usually, the magnetic circuit of magnetostrictive actuator has components which are flux return path, coil, and magnetostrictive material. It is classified in two types according to existence of the permanent magnet. The magnetic circuit having optimal performances transfer magnetic field which is obtained by providing input current at coil without energy loss. This paper described mathematical model of magnetic circuit for getting design variables. The modeling equation is obtained from the relations between flux and reluctance of the magnetic equivalent circuit. Also, finite element analysis has been used to study the performance of magnetic circuit according to change of design variables such as existence and shape of the permanent magnet, flux return path etc. The modification of dimensions enables us to optimize magnetic circuit.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.2285-2289
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• 2005

Robot is composed of various devices but, those are incompatible with each other and hardly developing reusable control software. This study suggests standard abstract interface for robot software component to make portable device and reusable control software of robot, based on familiar techniques to abstract device in operating systems. This assures uniform abstracted interface to the device driver software like sensor and actuator and, control program can be transparent operation over device. This study can separately and independently develop devices and control software with this idea. This makes it possible to replace existing devices with new devices which have an improved performance.

• 한국공작기계학회논문집
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• 제11권5호
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• pp.65-72
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system(100mm stroke and $\pm$ l0nm positioning accuracy) with single plane X-Y stage are materialized.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.419-424
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• 1996

As track density increases, the effects of nonlinearity in pivot bearing of hard disk drive on the servo performance are becoming more important in considering the range of inertia force and the input torque during settling and tracking mode. Recently, an increasing attention is given to more precise experimental observations and modelings of pivot nonlinearity for achieving higher performance of servo control. In this paper, we propose a new model that shows an improved prediction of the pivot nonlinearity than existing preload-plus-two-slope model at matching simulations and experimental results in both time and frequency domains. Experimental measurements are carried out to validate and identify the specific nonlinearity presents in the pivot bearing when its in fine motion. Using the experimental results new model along with the existing one are characterized and compared for relevancies.

• 정보저장시스템학회:학술대회논문집
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• 정보저장시스템학회 2005년도 추계학술대회 논문집
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• pp.59-63
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• 2005

Nowadays, various approaches are performed to increase the storage capacity of optical storage device. One of the promising candidates is using the high NA lens. By using high NA lens, the beam spot size can be reduced which will lead to increase the storage density. This paper proposes a double cantilever beam type bimorph PZT actuator for fine motion that can control the gap between the flexible media and optical pickup which uses high NA lens. Mathematical model is derived by using Hamilton's principle and the model is verified by finite element analysis and experiment. Position controller is designed and its performance is evaluated by experiment.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.875-878
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• 2005

This paper presents active control of aperture type near-field storage head. In order to achieve fast and accurate control, dual servo control algorithm is applied. Based on the big difference in time constant, we seperate two actuator and control independently. With the combination of fine and coarse actuator, gap is controlled within 100nm until the disk rotates upto 10 rpm speed. From the experimental results, the feasibility and performance of active gap control is proved.

• Geomechanics and Engineering
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• 제19권3호
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• pp.229-240
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• 2019

The physical models are useful to understand the soil behaviour. Hence, these tools allow validating analytical theories and numerical data. This paper addresses the design, construction and implementation of a physical model able to simulate the soil liquefaction under different cyclic actions. The model was instrumented with a piezoelectric actuator and a set of transducers to measure the porewater pressures, displacements and accelerations of the system. The soil liquefaction was assessed in three different grain size particles of a natural sand by applying a sinusoidal signal, which incorporated three amplitudes and the fundamental frequencies of three different earthquakes occurred in Colombia. In addition, such frequencies were scaled in a micro shaking table device for 1, 50 and 80 g. Tests allowed identifying the liquefaction susceptibility at various frequency and displacement amplitude combinations. Experimental evidence validated that the liquefaction susceptibility is higher in the fine-grained sands than coarse-grained sands, and showed that the acceleration of the actuator controls the phenomena trigging in the model instead of the displacement amplitude.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1309-1314
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• 2003

The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 춘계학술대회논문집
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• pp.1521-1527
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• 2000

A micromirror actuated by piezoelectric unimorph cantilevers is proposed as a tine-tracking device for high-density optical data storage. Bending motions of the metal/PZT/metal unimorphs translate an integrated micromirror along the out-of-plane vertical direction. The micromirror alters the optical path of the incident laser beam and linearly steers the reflected laser beam by its out-of-plane parallel actuation. Numerical analysis shows that the actuated micromirror can satisfy the tracking speed imposed by the requirement on the access time for the high-density optical data storage up to few tens Gbitlin2 owing to the light mass of the micromirror. In this paper, preliminary characteristics of the micro-machined PZT actuated micromirror (PAM) are reported. Only a 360 nm-thick PZT film deposited by sol-gel process shows both good electrical and mechanical characteristics for the fine-tracking actuator. The micromirror can be easily actuated up to several micrometers under low voltage operation condition well below 10 volts.