• 한국정밀공학회지
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• 제14권9호
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• pp.68-79
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• 1997

A six DOF fine manipulator based on magnetic levitation is developed. Since most of magnetic levitation system are inherently unstable, a proposed magnetically levitated fine manipulator is implemented by use of an antagonistic structure to increase stability. From mathematical modeling and experiment, the equations of motion are derived. In addition, a six DOF sensing system is implemented by use of three 2-axis PSD sensors. A model reference-$H_{\infty}$ controller is applied to the system for the position control, In application of the fine manipulator, a wafer probing system is proposed to identify nonfunctional circuts. The probing system requires compliance to avoid destruction of DUT(device under test). A feedfor- ward-PD controllers are presented by the terms of the position accuracy, the settling time and the force accuracy.y.

• 제어로봇시스템학회논문지
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• 제15권9호
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• pp.881-886
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• 2009

This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
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• pp.700-703
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• 1997

A robust controller for a 6 DOF magnetically levitated fine manipulator is presented. The proposed controller consists of following two parts : a model reference controller (MRC) and a H$_{\infty}$ controller (HIC). First, the MRC stabilizes the motion of the manipulator. Then, the motion of the manipulator follows that of the reference model. Second, the HIC minimizes errors generated from the MRC due to noise and disturbance since the HIC is a kind of robust controller. The experiments of position control and tracking control are carried out by use of the proposed controller under the conditions of free disturbances and forced disturbances. Also, the experiments using PID controller are carried out under the same conditions. The results from above two controllers are compared to investigate the control performances. As the results, it is observed that the proposed controller has similar position accuracy but better tracking performances comparing to the PID controller as well as good disturbance rejection effect due to the robust characteristics of the controller. In conclusion, it is verified that the proposed controller has the simple control structure, the good tracking performances and good disturbance rejection effect due to the robust characteristics of the controller..

• 한국정밀공학회지
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• 제16권5호통권98호
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• pp.58-65
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• 1999

A magnetic levitation system requires a robustness to overcome a dynamic instability due to disturbances. In this paper a robust controller for a magnetically levitated fine manipulator is presented. The proposed controller consists of following two parts: a model reference controller and an $H_{\infty}$ controller. First, the model reference control stabilizes the motion of the manipulator. Then, the motion of the manipulator follows that of the reference model. Second, the $H_{\infty}$ control minimizes errors generated from the model reference control due to noise and disturbance since the $H_{\infty}$ control is a kind of robust control. The experiments of position control and tracking control are carried out by use of the proposed controller under the conditions of free disturbances and forced disturbances. Also, the experiments using PID controller are carried out under the same conditions. The results from above two controllers are compared to investigate the control performances. As the results, it is observed that the proposed controller has similar position accuracy but better tracking performances comparing to the PID controller as well as good disturbance rejection effect due to the robust characteristics of the controller. In conclusion. it is verified that the proposed controller has the simple control structure, the good tracking performances and good disturbance rejection effect due to the robust characteristics of the controller.

• 전자공학회논문지B
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• 제30B권6호
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• pp.9-19
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• 1993

This paper presents a new concept of a reconfigurable manipulator system which adjusts its mechanical structure to suit the kinematic characteristics of a given task. A highly redundant manipulator designed as a general purpose manipulator needs to be reconfigured for a specific task. A general task can be decomposed of motion and force components with different control requirements: either gross motion control or fine motion control. Each of these task components are distributed to each part of the manipulator based on the control requirements and the structure of the manipulator. Through the reconfiguration, a redundant manipulator is decomposed into two local arms, and the kinematic characteristics of each local arm is adjusted to suit the assigned task. The reconfigured redundant manipulator has two local arms well-configured for the local tasks and cooperating in serial for a given task. This globally enhances the performance of a redundant manipulator to execute a specific task. The simulation results are shown.

• 한국소음진동공학회논문집
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• 제22권10호
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• pp.949-958
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• 2012

Position tracking control of a link of a slave manipulator which needed to track the corresponding link of a master manipulator was addressed in this paper. Since driving torque from motor is transmitted through a set of flexible cable to link, the motion control system is modeled by a two-mass model connected with elastic coupling which has finite stiffness. Relative vibration of two-mass resonant system is a serious problem to operate manipulator. This paper proposed sliding mode control to reduce resonant vibration and fine position tracking control. Also, a pseudo-sliding mode control which uses a saturation function instead of a signum function was discussed and showed that the pseudo-sliding mode control can improve disturbance regulation performance as well as guarantees fine command tracking without chattering which is an inherent drawback of basic sliding mode control. In addition, a disturbance observer based sliding mode control has been suggested to improve disturbance regulation performance. The feasibility of the proposed control design was verified along with some simulation results.

• 제어로봇시스템학회논문지
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• 제20권6호
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• pp.651-656
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• 2014

This paper presents a compensation method for an accelerometer to measure acceleration data accurately when a robot manipulator moves slowly. Although the accelerometer works fine under the fast movement of a robot manipulator, low cost accelerometers provide relatively inaccurate acceleration data under slow movements. In order to correct the error of the sensor data in the slow motion, correction factors are obtained experimentally. Then those corrected data are used for the disturbance observer. Experimental studies of the position control of a robot manipulator are conducted by applying the DOB (Disturbance Observer) control using corrected acceleration data.

• 한국실천공학교육학회논문지
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• 제3권1호
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• pp.193-199
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• 2011

본 논문에서는 원격조작 미세조정을 위한 매니퓰레이터를 제안한다. $2{\mu}m$정도의 정밀도를 갖는 매니퓰레이터를 설계하고 제어하기 위해 매니퓰레이터의 정밀도를 사전 계산하였고 그에 따른 각종 부품들로 실 시스템을 제작 하였다. 본 논문에서 제작된 원격조작 로봇 시스템은 여러 미세동작 제어 실험을 통해 그 정밀도가 검증하였고 원격 조작 로봇 시스템의 한 부분으로서 미세조정 매니퓰레이터의 적절성이 증명되었다. 제안된 매니퓰레이터는 아나로그적인 여러 요소로 제작 되었으며 논문에서 시스템의 장단점을 분석 하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.463-463
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• 2000

A dual-stage positioner for fast and fine robotic manipulations is presented. By adopting the merits of both coarse and fine actuator, a desirable system having the capacity of large workspace with high resolution of motion is enabled. We have constructed an ultra precision XY positioner with dual-stage mechanism where the PZT driven fine stage is mounted on the motor driven XY positioner and applied it to fine tracking controls and micro-tele operations as a slave manipulator. We describe essential merits of the compound actuation mechanism and some control strategies to successfully utilize it with proper servo system design. Through experimental results, the effectiveness of the coarse/fine manipulation by the dual-stage positioner will be shown.

• 전기전자학회논문지
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• 제3권2호
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• pp.250-258
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• 1999

본 논문에서는 각 운동축들(자유도 또는 부시스템)간의 상호연관성에도 불구하고 자기부상식 미세구동기가 주어진 경로를 가능한 정밀하게 추종하도록 하는 비집중 적응제어기 설계가 제시되었다. 본 제어기는 알고있는 부시스템을 기반으로 하는 모델기준제어와 국부적응제어로 구성된다. 전자는 매니퓰레이터의 운동을 안정화시켜 기준모델을 따라가도록 하고, 후자는 간섭작용을 무기력화시키는 수준만큼 국부이득을 조정하여 전체시스템의 안정을 도모하고 연관성에 의해 유발되는 추정오차를 줄여준다. 실험결과를 통하여 제시된 기법이 기존의 PID제어기에 비해 추종성능과 외란제거 능력면에서 우수함을 보였다.