• 한국진공학회지
• /
• 제12권3호
• /
• pp.168-173
• /
• 2003

유리 기판 위에 증착된 비정질 실리콘 박막의 고상 결정화에 대한 새로운 방법을 제시하였다. 비정질 실리콘 박막의 하부에 패턴 된 다양한 크기의 $TiSi_2$ 박막을 전기저항 가열 방식으로 가열함으로서 비정질 실리콘이 고상 결정화 되도록 하였다. 박막히터를 이용한 열처리는 매우 빠른 열처리 공정으로써, 일반적인 로에 의한 열처리에 비해 매우 낮은 thermal budget을 가지므로, 유리기판 위에서도 고온 열처리가 가능하다는 장점을 가진다. 본 연구에서는 500 $\AA$의 비정질 실리콘 박막을 약 $850^{\circ}C$ 이상의 높은 온도에서 수 초 내에 결정화 할 수 있음을 보였으며, 열처리 조건의 변화에 따른 영향과 지역선택성의 장점을 보였다.

• 한국전기전자재료학회논문지
• /
• 제18권8호
• /
• pp.714-719
• /
• 2005

NiCr thin film was deposited by DC magnetron sputtering on $A;_2O_3$/Si substrate with NiCr (80:20) alloy target. NiCr thin films were annealed at $300^{\circ}C,\;400^{\circ}C,\;500^{\circ}C,\;600^{\circ}C,\;and\;700^{\circ}C$ for 6 hr in $H_2$ after annealing at $500^{\circ}C$ for 6hr in air atmosphere, respectively. To analyze NiCr thin film properties, the changes of its micro structure were Investigated through field emission scanning electron microscope (FESEM). X-ray photoelectron spectroscopy (XPS) was used to analyze a surface of NiCr thin film. Resistance of NiCr thin film was measured by 4-point probe technique. The generated heats were measured by infrared thermometer through the application of DC voltage (5 V/l2 V). NiCr thin film treated by gradational double annealing process had uniform and small grains. Maximum temperature generated heat by NiCr micro heater was $173^{\circ}C$. We expect that our results will be a useful reference in the realization of NiCr micro heater.

• 한국전기전자재료학회논문지
• /
• 제13권7호
• /
• pp.612-616
• /
• 2000

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the Si membrane in which MgO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$layer. The MgO layer improved adhesion of Pt thin-film to SiO$_2$layer without any chemical reactions to Pt thin-film under high annealing temperatures. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 82 mV at $N_2$flow rate of 2000 sccm/min heating power of 1.2 W. The response time($\tau$:63%) was about 50 msec when input flow was stepinput

• 센서학회지
• /
• 제13권4호
• /
• pp.292-297
• /
• 2004

Carbon nanotubes (CNT) were synthesized by arc-discharge method. To fabricate CNT sensor, CNT powder was dispersed in ${\alpha}$-Terpinol($C_{10}H_{17}OH$) solution. The CNT tilms were fabricated by screen printing method on the interdigitated Pt/Pd alloy electrode. The microstructure of CNT film was observed by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). In order to investigate the gas sensing characteristics of the film, the CNT film was experimented to measure NO response and recovery time. The CNT sensor with a heater was compared to that without a heater. And this sensor shows better reproductibility and faster recovery time than another CNT sensors. We suggest the possibility to utilize a CNT as new sensing materials for environmental monitoring.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2004년도 추계학술대회 논문집
• /
• pp.69-72
• /
• 2004

There are an electronic and a manual type in Bidet. The electronic bidet has some advantages. it supplies multiple functions and is up easily. However, it has frequent defects and a high price. The manual bidet is not need to supply electric and is cheaper than the electronic type. However, it is needed to supply hot water and is hard to set up. In order to solve these defects, this study designed a bidet heating unit using an electric instantaneous water heating method. To get a proper heating elements, experiments were performed about a Ni-Cr heater and a film heater.

• 반도체디스플레이기술학회지
• /
• 제16권3호
• /
• pp.36-40
• /
• 2017

In this paper, a new method of laser trimming of thick film heater is studied. Various laser waves (IR, Green, UV) are used to ablation the heater and the process parameters are also presented. For given initial printed resisters, the cutting length should be prepared to obtain the target resister value in advance. Therefore, the cutting model is very important. The well-known model was tested and proven that it is valid only within a certain range of cutting length. A new model is proposed for a wide range of resister laser trimming. The cutting lengths and resister variation was obtained and formulated. To verify the presented method, the cutting lengths of each resister are calculated for various target resister value and laser trimming using UV is conducted.

• 한국전기전자재료학회논문지
• /
• 제14권8호
• /
• pp.658-662
• /
• 2001

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the SOI(Si-on-insulator) membrane and trench structures, in which MGO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$ layer. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 250 nV at N$_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time($\tau$:63%) was about 42 msec when input flow was step-input. The results indicated that micro-flowsensors with the SOI membrane and trench structures have properties of a high-resolution and ow consume power.

• Progress in Superconductivity
• /
• 제5권2호
• /
• pp.118-123
• /
• 2004

We investigated quench distribution in AU/YBCO thin film meander lines with a heater. Quench distribution during faults is important for superconducting fault current limter applications, because uniform quench allows application of higher voltages across the meander lines. AU/YBCO thin films grown on sapphire substrates were patterned into meander lines by photolithography. Gold films grown on the rear sides of the substrates were also patterned into meander lines, and used as heaters. Meander lines on the front and the rear sides were connected in parallel. The meander lines were subjected to simulated AC fault currents for quench measurements during faults. They were immersed in liquid nitrogen during the experiment for effective cooling. Resistance of the AU/YBCO meander lines initially increased more rapidly with the rear heater than without, and consequently the fault current was limited more. The resistance subsequently became similar, The resistance distribution was more uniform with the heater, especially during the initial quench. Quench was completed more uniformly and significantly earlier. This resulted in uniform distribution of dissipated power. These results could be explained with the concept of quench propagation, which was accelerated by heat transfer across the substrate from the rear heater.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2001년도 춘계학술대회논문집D
• /
• pp.624-629
• /
• 2001

An experimental study was performed to investigate adiabatic wall temperature and heat transfer coefficient around on a module with longitudinal fin heat sink cooled by forced air flow. In the first method, inlet air flow(1-7m/s) and input power(3-5W) was varied after a heated module were placed on an adiabatic floor($320{\times}550{\times}1mm^{3}$). An adiabatic wall temperature was determinated to use liquid crystal film(LCF). In the second method to determinate heat transfer coefficient, inlet air flow(1-7m/s) and the heat flux of rubber heater($0.031-0.062\;W/cm^{2}$) was varied after an adiabatic module was placed on rubber heater covering up an adiabatic floor. In addition, surface oil-film visualization were performed to characterize the macroscopic flow-field around a module.

• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2001년도 춘계학술발표강연 및 논문개요집
• /
• pp.121-121
• /
• 2001