• Title/Summary/Keyword: Film formation

Search Result 1,835, Processing Time 0.04 seconds

Film Properties of Al Thin Films Depending on Process Parameters and Film Thickness Grown by Sputter (스퍼터로 성장된 알루미늄 박막의 공정 변수와 박막 두께에 따른 물성)

  • Oh, Il-Kwon;Yoon, Chang Mo;Jang, Jin Wook;Kim, Hyungjun
    • Korean Journal of Materials Research
    • /
    • v.26 no.8
    • /
    • pp.438-443
    • /
    • 2016
  • We developed an Al sputtering process by varying the plasma power, process temperature, and film thickness. We observed an increase of hillock distribution and average diameter with increasing plasma power, process temperature, and film thickness. Since the roughness of a film increases with the increase of the distribution and average size of hillocks, the control of hillock formation is a key factor in the reduction of Al corrosion. We observed the lowest hillock formation at 30 W and $100^{\circ}C$. This growth characteristic of sputtered Al thin films will be useful for the reduction of Al corrosion in the future of the electronic packaging field.

Experimental Studies on Liquid Film Thickness Measurement and the Formation of Air Core in a Swirl Injector (스월 인젝터에서 액막두께 측정과 Air Core의 구조에 관한 실험적 연구)

  • Kim, Sung-Hyuk;Kim, Dong-Jun;Yoon, Young-Bin
    • Journal of ILASS-Korea
    • /
    • v.11 no.3
    • /
    • pp.147-154
    • /
    • 2006
  • A specially designed injector using electric conductivity was used to measure the liquid film thickness accurately. The measurement conducted through the precise calibration, accuracy is demonstrated in comparison with the previous theory and the results using other measurement method. The tendency of liquid film thickness for geometric parameters was examined by the precise measurement. The variation of air core and stability are examined through the visualization of the formation of air core in swirl chamber and the variation of liquid film thickness by the time.

  • PDF

The Formation Technique of Thin Film Heaters for Heat Transfer Components (열교환 부품용 발열체 형성기술)

  • 조남인;김민철
    • Journal of the Semiconductor & Display Technology
    • /
    • v.2 no.4
    • /
    • pp.31-35
    • /
    • 2003
  • We present a formation technique of thin film heater for heat transfer components. Thin film structures of Cr-Si have been prepared on top of alumina substrates by magnetron sputtering. More samples of Mo thin films were prepared on silicon oxide and silicon nitride substrates by electron beam evaporation technology. The electrical properties of the thin film structures were measured up to the temperature of $500^{\circ}C$. The thickness of the thin films was ranged to about 1 um, and a post annealing up to $900^{\circ}C$ was carried out to achieve more reliable film structures. In measurements of temperature coefficient of resistance (TCR), chrome-rich films show the metallic properties; whereas silicon-rich films do the semiconductor properties. Optimal composition between Cr and Si was obtained as 1 : 2, and there is 20% change or less of surface resistance from room temperature to $500^{\circ}C$. Scanning electron microscopy (SEM) and Auger electron spectroscopy (AES) were used for the material analysis of the thin films.

  • PDF

Flow-Accelerated Corrosion Behavior of SA106 Gr.C Steel in Alkaline Solution Characterized by Rotating Cylinder Electrode

  • Kim, Jun-Hwan;Kim, In-Sup
    • Nuclear Engineering and Technology
    • /
    • v.32 no.6
    • /
    • pp.595-604
    • /
    • 2000
  • Flow-Accelerated Corrosion Behavior of SA106 Gr.C steel in room temperature alkaline solution simulating the CANDU primary water condition was studied using Rotating Cylinder Electrode. Systems of RCE were set up and electrochemical parameters were applied at various rotating speeds. Corrosion current density decreased up to pH 10.4 then it increased rapidly at higher pH. This is due to the increasing tendency of cathodic and anodic exchange half-cell current. Corrosion potential shifted slightly upward with rotating velocity. Passive film was formed from pH 9.8 by the mechanism of step oxidation and the subsequent precipitation of ferrous species into hydroxyl compound. Above pH 10.4, the film formation process was active and the film became stable. Corrosion current density showed increment in pH 6.98 with the rotating velocity, while it soon saturated from 1000 rpm above pH 9.8. This seems that activation process which represents formation of passive film on the bare metal surface controls the entire corrosion process

  • PDF

ANTIWEAR FILM FORMATION BY COMPONENTS OF PASSENGER CAR MOTOR OILS

  • Yamaguchi, E.S.;Roby, S.H.;Francisco, M.M.;Ruelas, S.G.
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
    • /
    • 2002.10b
    • /
    • pp.267-268
    • /
    • 2002
  • Engine testing of new low-sulfur, low-phosphorus anti wear components is expensive and time consuming so bench testing of potential candidates is highly desirable as a first step evaluation. Electrical contact resistance (ECR) has been shown to be a convenient method to assess antiwear film formation in a ball-on-flat bench wear test. Correlation of the bench test to fired engines was demonstrated for lubricants varying only in the type of detergent. Previous papers have examined film formation by one and two component formulations of zinc dialkyldithiophosphate (ZnDTP) and detergents. In this study, the ECR technique is systematically extended to formulations including ZnDTP, detergent, and dispersant. Both type and level of components are considered and the implications for engine performance are discussed.

  • PDF

A Study on the High-Efficiency Atomisation Molten Materials (PART 2 : A Study on the Mechanism of Liquid Supplying and Film Formation by Applying the Ejector Principle) (Atomize법에 의한 용융소재의 고효율 미세화에 관한 연구(제2보 : 이젝터의 원리를 이용한 액체노즐의 액체공급 및 액막생성 기구와 특성))

  • Oh, J.G.;Cho, I.Y.
    • Journal of ILASS-Korea
    • /
    • v.3 no.2
    • /
    • pp.14-23
    • /
    • 1998
  • The negative pressure as much as 10's mmHg is demanded at nozzle inside, in case of atomizing the large density molten materials. by conventional air jet nozzle. In this study, suction type fluid nozzle is designed by applying the ejector principle in order to clarify the air flow of nozzle inside, mechanism of liquid suction and liquid film formation. The results of this experimental study areas follows. Suction force of liquid is magnified by using liquid nozzle, and it is able to supply the liquid stable. Negative pressure at nozzle inside is varied by throttle angle of liquid nozzle, position and outer diameter of air jet nozzle, and have a influence on liquid suction quantity and liquid film formation.

  • PDF

Ni Silicide Formation and the Crystalline Silicion Film Growth

  • Kim, Jun-Dong;Ji, Sang-Won;Park, Yun-Chang;Lee, Jeong-Ho;Han, Chang-Su
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.08a
    • /
    • pp.219-219
    • /
    • 2010
  • Silicides have been commonly used in the Si technology due to the compatibility with Si. Recently the silicide has been applied in solar cells [1] and nanoscale interconnects [2]. The modulation of Ni silicide phase is an important issue to satisfy the needs. The excellent electric-conductive nickel monosilicide (NiSi) nanowire has proven the low resistive nanoscale interconnects. Otherwise the Ni disilicide (NiSi2) provides a template to grow a crystalline Si film above it by the little lattice mismatch of 0.4% between Si and NiSi2. We present the formation of Ni silicide phases performed by the single deposition and the co-deposition methods. The co-deposition of Ni and Si provides a stable Ni silicide phase at a reduced processing temperature comparing to the single deposition method. It also discusses the Schottky contact formation between the Ni silicide and the grown crystalline Si film for the solar cell application.

  • PDF

Effects of Charge-discharge Rate on Morphology and Resistance of Surface Film on a Graphite Negative Electrode in an Ethylene Carbonate-based Solution (탄산 에틸렌계 용액 중에서 생성되는 흑연 음극 표면피막의 형상 및 저항에 미치는 충방전 속도의 영향)

  • Jeong, Soonki;Kim, Pogyom
    • Transactions of the Korean hydrogen and new energy society
    • /
    • v.24 no.2
    • /
    • pp.179-185
    • /
    • 2013
  • The behavior of surface film formation was greatly dependent on the speed of potential cycling. In $LiClO_4$ / EC + DEC, cyclic voltammetry results showed that the peaks originated from surface film formation on graphite electrode at the high charge-discharge rate was shifted to the lower potentials as the charge-discharge rate decrease. This indicates that surface films with different morphology and thickness were formed by different charge-discharge rate. Transmission electron microscopy (TEM) results indicated that the properties such as thickness and morphology of the surface film were greatly affected by the charge-discharge rate. Electrochemical impedance spectroscopy (EIS) showed that the resistance of surface film was affected by the speed of potential cycling. In addition, the charge transfer resistance was also dependent on the charge-discharge rate indicating that the charge transfer reaction was affected by the nature of surface film. TEM and EIS results suggested that the chemical property as well as the physical property of the surface film was affected by the charge-discharge rate.

A Study on the Factors of Fuel-Film Formation in an EGI Gasoline Engine (전자 제어식 가솔린 엔진의 벽류 생성 요인에 관한 연구)

  • Kim, Bong-Gyu;Lee, Ki-Hyung;Lee, Chang-Sik
    • Transactions of the Korean Society of Mechanical Engineers B
    • /
    • v.22 no.11
    • /
    • pp.1530-1537
    • /
    • 1998
  • Mixture formation is one of the significant factors to improve combustion performance of an spark ignition engine. This is affected by spray and atomization characteristics of injector. In the case of EGI system, air-fuel mixing period is so short that a lot of fuel-film and liquid-fuel flow into cylinder. Since this fuel-film is not burnt perfectly in cylinder, it is exhausted in the form of HC emission. In this paper, three measurement techniques were utilized to measure spray characteristics and the amount of fuel-film in the cylinder. At first, PMAS was used to measure the spray characteristics such as size distributions, SMD, and spray angle. Secondly the amount and distribution of fuel-film which flow into through intake valve could be measured quantitatively using the fuel-film measuring device. And lastly, by optical fiber type spark plug used to detect the diffusion flame, the amount of unburned HC was measured. As the result of these experiments, the information of optimal spray characteristics and injection condition to minimize fuel-film could be built up.