• 한국결정성장학회지
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• 제10권4호
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• pp.324-329
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• 2000

상온에서 $Cs^+$ ion sputtering에 의해 발생된 탄소 음이온 빔과 Kaufmann type ion source를 이용하여 발생된 수소 양이온 빔을 Si기판 위에 동시에 증착함으로써 얻어지는 DLC 박막의 특성을 분석하여 DLC 박막의 증착에 미치는 수소 이온의 영향을 관찰하였다. 수소 가스의 flow rate을 0 sccm부터 12 sccm까지 변화 시킴에 따라 박막 내에 포함되는 수소의 양이 증가하였으며, 수소의 증가에 따라 박막 내에 $sp^2$구조가 증가하는 것을 알 수 있었다. 수소에 의한 $sp^2$결합이 증가되는 현상은 증착시 박막 내에 주입되는 수소의 양이 CVD에 비해 매우 적은 양이지만, 상대적으로 높은 에너지를 지니고 기판에 충돌하기 때문에 물리적 에너지 전달 효과가 DLC 박막의 형성에 크게 작용하였음을 알 수 있었다.

• 한국인쇄학회지
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• 제14권1호
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• pp.1-15
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• 1996

In this paper, the preparation of lead zirconium titanate(PZT) thin film by sol-gel processing was descried. Thin film coated with thickness of 4${\mu}{\textrm}{m}$ on the stainless steel substrates using the multiple spin-coating process. The crystalline phases of PZT powder and film were investigated by X-ray diffraction pattern and PZT thin film has perovskite structure over 600 C annealing temperature. Corona charging characteristics of the ferroelectric PZT thin film at 600 C were investigated by electrophotographic measurement. A difference in the charging characteristics between positive and negative corona charging was found. The charge acceptance depended in the polarity of corona and the poling of film. According to the D-E hysteresis measurment, PZT thin film can be poled by corona charging without use of top electrode. The remnant polarization in the PZT thin film is generally in the order of 48$\mu$C/$\textrm{cm}^2$. From this results, the ferroelectric PZT thin film will be possible to apply for the add-on type imaging formation.

• 전자공학회논문지D
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• 제34D권5호
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• pp.45-51
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• 1997

Low temperature activation of dopants which were doped using ion mass doping system in amorphous silicon(a-Si) thin films was investigated. With a 20.angs.-thick Ni film on top of the a-Si thin film, the activation temperature of dopants lowered to 500.deg. C. When the doping was performaed after the deposition of Ni thin film on the a-Si thin films (post-doping), the activation time was shorter than that of dopants mass, the activation time of the dopants doped by pre-doping method increased. It turned NiSi2 formation, while the decrease of activation time was mainly due to the enhancement of the NiSi2 formation by mixing of Ni and a-Si at the interface of Ni and a -Si thin during the ion doping process.

• 한국정밀공학회지
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• 제12권2호
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• pp.87-96
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• 1995

The cutting force is the most important variable to understand the mechanics of ultra-precision machining. Most dynamometers, however, monitor the static cutting force only. But it is necessary to measure the dynamic cutting force to clarify the machinability of the material, the formation of the chip, chatter and the wear of the tool. In this research, measurement of the dynamic cutting force in order to clarify the machin-ability of the material, the formation of the chip, chatter and the wear of the tool has been conducted. A combined-type dynamometer which could measure the static cutting force and the dynamic cutting force by use of strain gauges and a piezo-film accelerometer has been developed. An analysis of the dynamometer also has been carried out.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2003년도 기술심포지움 논문집
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• pp.169-173
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• 2003

We demonstrated the applicability of dry film photoresist (DFR) in photolithography process for fine pitch solder bumping on the polytetrafluoroethylene (PTFE/Teflon) printed circuit board (PCB). The copper lines were formed with $100\;{\mu}m$ width and $18\;{\mu}m$ thickness on the PTFE test board, and varying the gaps between two copper lines in a range of $100-200\;{\mu}m$. The DFRs of $15\;{\mu}m$ thickness were laminated by hot roll laminator, by varying laminating temperature from $100^{\circ}C\;to\;150^{\circ}C$ and laminating speed. We found the optimum process of DFR lamination on PTFE PCB and accomplished the formation of indium solder bumps. The optimum lamination condition was temperature of $150^{\circ}C$ and speed of about 0.63 cm/s. And the smallest size of indium solder bump was diameter of $50\;{\mu}m$ with pitch of $100\;{\mu}m$.

• 한국전기전자재료학회논문지
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• 제26권5호
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• pp.347-350
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• 2013

By inserting a very thin metal layer of Ag between two outer oxide layers of amorphous silicon indium zinc oxide (SIZO), we fabricated a highly transparent SIZO/Ag/SIZO multilayer on a glass substrate. In order to find the optimized thickness of Ag layers, we investigated the variation of optical properties depending on Ag thickness. It was found that the transition of Ag layer from island formation to a continuous film occurred at a critical thickness. Continuity of the Ag film is very important for optical properties in SIZO/Ag/SIZO multilayer. With about 15 nm thick Ag layer, the multilayer showed a high optical transmittance of 80% at 550 nm and low emissivity in IR.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 추계학술대회 논문집 - 한국공작기계학회
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• pp.197-203
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• 1999

Stainless steels in general has passive film having strong corrosion resistance on surface. Therefore it must be necessarily removed by etching in mixing solution of sulfuric and chloric acid before Nitriding treatment. But in the ion nitriding, nitride layer was easily formed because passive film was removed without difficult by sputtering effect. The removal extent of these passive films was greatly effected by gas mixing ratios and pressure and holding times of pre sputtering factors in pre sputtering stage. As a results of experiment it has been known that pre sputtering pressure and holding time was not nearly effective on the formation behavior of nitride layer. But when A/H2 gas mixing ratios was 1/2 (vol%) was the most effective of the all pre sputtering conditions. It was resulted from the combination of mechanical reaction byArgon bombardment and chemical reaction by reduction of hydrogen on the passive film.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 춘계학술대회 논문집
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• pp.94-97
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• 2005

Bismuth high Tc superconducting thin films are fabricated via a co-deposition process by an ion beam sputtering with an ultra low growth rate, and sticking processing of the respective elements are evaluated. The sticking processing of bismuth element in bismuth high Tc superconducting thin film formation was observed to show a unique temperature dependence; it was almost a constant value of 0.49 below about $730^{\circ}C$ and decreased linearly over about $730^{\circ}C$. This temperature dependence can be elucidated from the evaporation and sublimation rates of bismuth oxide, $Bi_2O_3$, from the film surface. It is considered that the liquid phase of the bismuth oxide plays an important role in the bismuth phase formation in the co-deposition process.

• Journal of Magnetics
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• 제16권4호
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• pp.403-407
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• 2011

Metal-insulator type, nano-granular soft magnetic films have been reviewed from the viewpoint of high frequency magnetic materials. The formation of nano-granular structure is related to the magnitude of heat of formation of intergranule materials. Variation of the ratio of granule phase to intergranule phase in the film is found to produce various characteristics in the magnetic properties of the film. The HRTEM observation reveals that neighboring granules in the film with above 60 at.% Co, contact at considerable points and the films show soft magnetic properties which are explainable in terms of the random anisotropy model for nano-crystalline materials. Addition of Ni group elements in Co-O based films enhances their anisotropy field up to 400 Oe and they exhibit excellent frequency response of permeability. Also, large electromagnetic noise suppression effect is demonstrated as one of their potential applications.

• 한국재료학회지
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• 제17권5호
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• pp.244-249
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• 2007

The properties of anodized films on aluminum 6061 alloy in single electrolyte of sulfuric acid and mixed electrolyte of sulfuric-boric acid and sulfuric-boric-nitric acid have been studied. Polarization tests in NaC solution were used to investigate the corrosion performance. Characteristics of film formation and surface morphology were examined by optical microscopy, FE-SEM and EDS. The results obtained have indicated that oxide films growth have been promoted by nitric acid and anodized films in mixed electrolyte have superior corrosion resistance. In case of anodic films formed in mixed electrolyte, some grooves and numerous crazings were also observed at the surface.