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http://dx.doi.org/10.4313/JKEM.2013.26.5.347

Effect of Ag Formation Mechanism on the Change of Optical Properties of SiInZnO/Ag/SiInZnO Multilayer Thin Films  

Lee, Young Seon (Electronic Engineering, Cheongju University)
Lee, Sang Yeol (Department of Semiconductor Engineering, Cheongju University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.26, no.5, 2013 , pp. 347-350 More about this Journal
Abstract
By inserting a very thin metal layer of Ag between two outer oxide layers of amorphous silicon indium zinc oxide (SIZO), we fabricated a highly transparent SIZO/Ag/SIZO multilayer on a glass substrate. In order to find the optimized thickness of Ag layers, we investigated the variation of optical properties depending on Ag thickness. It was found that the transition of Ag layer from island formation to a continuous film occurred at a critical thickness. Continuity of the Ag film is very important for optical properties in SIZO/Ag/SIZO multilayer. With about 15 nm thick Ag layer, the multilayer showed a high optical transmittance of 80% at 550 nm and low emissivity in IR.
Keywords
Multilayer; Thin film; Transparent conductive oxide; Low emissivity glass; SIZO;
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