• 한국세라믹학회지
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• 제32권12호
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• pp.1369-1376
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• 1995

The WO3 thin-film NOx sensor which is of practical use and includes the heater and the temperature sensor was fabricated. The WO3 thin films as a gas-sensing layer was deposited at ambient temperature in a high-vacuum resistance heated evaporator. The highest sensitivity of the WO3 thin-film sensor to NOx was obtained under the condition of the annealing temperature of 50$0^{\circ}C$ and the operating temperature of 30$0^{\circ}C$. The gas sensing characteristics of this sensor was excellent, i.e. high sensitivity (Rgas/Rair in 3 ppm NO2=53) and fast response time (4 seconds).

• 열처리공학회지
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• 제36권4호
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• pp.237-241
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• 2023

Recently, research on flexible sensors for personal health management has been gaining attention. In this study, we fabricated a crack-based flexible sensor in thin film form to measure the pulse on the wrist. We evaluated the characteristics of the sensor based on the curing conditions of the PDMS (Polydimethylsiloxane) film to optimize the sensor's gauge factor. The modulus of PDMS varies depending on the curing conditions. In this case, the modulus of PDMS has a significant influence on crack formation, leading to changes in the sensitivity of the sensor. This study examined the changes in the gauge factor associated with these variations.

• 한국정보전자통신기술학회논문지
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• 제3권3호
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• pp.14-21
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• 2010

유비쿼터스 헬스케어 환경을 위해서는 생체 정보를 실시간으로 정확하게 측정하는 것이 중요할 뿐만 아니라, 이러한 생체 정보 측정 장치는 저전력으로 설계되어져야 한다. 본 논문에서는 지금까지 사용되어 오던 손가락 프로브의 불편함을 없애기 위해 피에죠 필름 센서를 이용하여 손목의 요골 동맥으로부터 심장의 동기 신호인 맥파를 측정하였다. 본 논문에서는 두장의 피에죠 필름 센서를 이용하여 맥파신호와 동잡음 참조 신호를 추출하여 적응 잡음 제거기에 적용함으로써, 동잡음 제거된 맥파 신호를 얻을 수 있었다. 동잡음 제거된 맥파 신호를 이용하여 생체 정보를 얻을 수 있었다.

• 한국세라믹학회지
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• 제41권2호
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• pp.97-101
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• 2004

W $O_{x}$-based semiconductor type thin film gas sensor was fabricated for the detection of N $O_{x}$ by reactive d.c. sputtering method. The relative oxidation state of the deposited W $O_{x}$ films was approximately compared by the calculation of the difference of the binding energy between Ols to W4 $f_{7}$2/ core level XPS spectra in the standard W $O_3$ powder of known composition. As the annealing temperature increased from 500 to 80$0^{\circ}C$, relative oxygen contents and grain size of the sputtered films were gradually increased. As the results of sensitivity ( $R_{gas}$/ $R_{air}$) measurements for the 5 ppm N $O_2$ gas, the sensitivity was 110 and the sensor showed recovery time as fast as 200 s. The other sensor properties were examined in terms of surface microstructure, annealing temperature, and relative oxygen contents. These results indicated that the W $O_3$ thin film with well controlled structure is a good candidate for monitoring and controlling of automobile exhaust.haust.t.t.t.

• 센서학회지
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• 제26권6호
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• pp.414-419
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• 2017

The optical characteristics of cresol red, phenol red, and neutral red immobilized in the thin film were investigated with absorbance measurement in order to find a sensing part of a fiber-optic pH sensor. Sol-Gel method with tetramethyl orthosilicate as a precursor was used to immobilize the pH indicators in the thin film. The absorbance spectra were measured when pH indicators were immobilized in the film and were dissolved in the buffer solution. Experimental results showed that the absorbance spectra could be changed when the pH indicator is immobilized in the thin film. As compared with other pH indicators, the neutral red exhibited similar absorbance spectra regardless of physical conditions and was sensitive over whole pH range between 4 and 11. In addition, the absorbance ratio of base peak to acid peak tended to increase in proportion to the increase in pH. Experimental results indicate that the neutral red is a good pH indicator for fabrication of a sensing part of the fiber-optic pH sensor.

• 산업기술연구
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• 제33권A호
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• pp.67-72
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• 2013

CNT(carbon nanotube) humidity sensors with plasma treated electrodes exhibit a much faster response time and a higher sensitivity to humidity, compared to untreated CNT and porous Cr electrodes. These results may be partially due to their percolated pore structure being more accessible for water molecules and for expending the diffusion of moisture to the polyimide sensing film, and partially due to the oxygenated surface of CNT films. This paper shows a plasma process effect and selectivity characteristics of CNT film humidity sensor.

• 센서학회지
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• 제28권2호
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• pp.133-138
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• 2019

The a-InGaZnO (a-IGZO) thin film transistor (TFT) has the advantages of larger mobility than that of amorphous silicon TFTs, acceptable reliability and uniformity over a large area, and low process cost. A capacitive-type touch sensor was studied with an a-IGZO TFT that can be used on the front side of a display due to its transparency. A capacitive sensor detects changes of capacitance between the surface of the finger and the sensor electrode. The capacitance varies according to the distance between the sensor plate and the touching or non-touching of the sensing electrode. A capacitive touch sensor using only one a-IGZO TFT was developed with the reduction of two bus lines, which made it easy to reduce the pixel pitch. The proposed sensor circuit maintained the amplification performance, which was investigated for various drive conditions.

• 한국전기전자재료학회논문지
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• 제14권5호
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• pp.405-409
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• 2001

This paper describes fabrication and characteristics of metal thin-film pressure sensor for working at high temperature. The proposed pressure consists of a chrom thin-film, patterned on a Wheat stone bridge configuration, sputter-deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097∼1.21mV/V$.$kgf/$\textrm{cm}^2$ in the temperature range of 25∼200$^{\circ}C$ and the maximum non-linearity is 0.43%FS.

• 한국진공학회지
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• 제20권2호
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• pp.146-154
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• 2011

접착테이프 형태의 액체누설 감지 필름 센서와 이를 이용하고 경보 장치를 포함한 감지 시스템을 개발하였다. 액체누설 감지 필름형 테이프 센서는 베이스 필름층, 전도성 라인층, 보호 필름층으로 구성되며, 테이프의 두께 $300{\sim}500{\mu}m$, 폭 3.55 cm, 그리고 단위 테이프의 길이는 200 m이다. 전도성 라인층의 필름에는 3개의 전도선과 1개의 저항선이 있다. 이들은 도전성 은나노 잉크를 전자인쇄방식으로 설치한다. 이들 저항선과 전도선 사이에 액체가 누설되어 전기적으로 상호 통전되면, 두 선사이의 저항변화를 전압의 변화로 계측하여 누설 위치를 감지한다. 물을 포함한 전도성 액체에 대한 누설 위치 감지에서 길이 200 m에서 오차 범위는 ${\pm}1m$ 이내이다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 춘계학술대회 논문집 전자세라믹스 센서 및 박막재료 반도체재료 일렉트렛트 및 응용기술
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• pp.176-179
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• 2000

In the recognition of the gases using the quartz crystal microbalance (QCM) coated with the film materials, it is important to obtain the recognition ability of gases, and the stability of film coated above the QCM. Especially, the thickness of film coated above the QCM is decreased according with the using circumstance and time of QCM gas sensor. Therefore, the sensing chararcteristics of film is changed with these. In this paper, we coated the lipid PC (Phosphatidyl Choline) materials varing with the blended amount of PVC(Poly Vinyl Chloride) and solution (Tetra Hydrofan:THF) above QCM to obtain the stability of lipid PC film. QCM gas sensors coated with film materials were measured the frequency change in the chamber of stationary gas sensing system injected 1-hexane, ethyl acetate, ethanol and benzene of $20{\mu}{\ell}$, respectively. We obtained the principal component analysis (PCA) from the frequency change due to the absorption of gas. Also, we measured the degradation characteristics of QCM gas sensor to show the properties of stability.