• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.113-113
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• 2009

This paper describes the characteristics of a poly 3C-SiC micro heater which was fabricated on $AlN(0.1{\mu}m)/3C-SiC(1.0{\mu}m)$ suspended membranes by surface micro- machining technology. The 3C-SiC and AlN thin films which have wide energy bandgap and very low lattice mismatch were used sensors for high temperature and voltage environments. The 3C-SiC thin film was used as micro heaters and temperature sensor materials simultaneously. The implemented 3C-SiC RTD (resistance of temperature detector) and the power consumption of micro heaters were measured and calculated. The TCR (thermal coefficient of the resistance) of 3C-SiC RTD is about -5200 $ppm/^{\circ}C$ within a temperature range from $25^{\circ}C$ to $50^{\circ}C$ and -1040 $ppm/^{\circ}C$ at $500^{\circ}C$. The micro heater generates the heat about $500^{\circ}C$ at 10.3 mW. Moreover, durability of 3C-SiC micro heaters in high voltages is better than pt micro heaters. A thermal distribution measured and simulated by IR thermovision and COMSOL is uniform on the membrane surface.

• 센서학회지
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• 제20권5호
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• pp.311-316
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• 2011

Monitoring the carbon dioxide concentration in arterial blood is vital for the evaluation and prevention of pulmonary disease. Yet, domestic pure arterial blood carbon dioxide sensor technologies are not being developed, instead all sensors are imported. In this paper, we develop a real time monitoring system for arterial blood partial pressure of carbon dioxide($pCO_2$) gas from the wrist by using a carbon micro-heater. The micro-heater was fabricated with a thickness of 0.3 ${\mu}m$ in order to collect the carbon dioxide under the skin. The micro-heater has been designed to perform temperature compensation in order to prevent damage to the skin. Two clinical trials of the system were undertaken. As a result, we demonstrated that a portable, transcutaneous carbon dioxide analysis($TcpCO_2$) device produced domestically is possible. In addition, this system reduced the analysis time significantly. Carbon films could reduce the unit price of these sensors by replacing the gold film used in foreign models. Also, we developed a real time monitoring system which can be used with optical biosensors for medical diagnostics as well as gas sensors for environmental monitoring.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집B
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• pp.228-233
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• 2000

An experimental study has been performed regarding heat and mass transfer in a falling film absorber of domestic small-sized absorption chiller/heater. Components were concentrically arranged in cylindrical form : from the center, with a series of low temperature generator, absorber and evaporator. The arrangement of such helical-typed heat exchangers allows to make the system more compact as compared to conventional one. Experimental measurements were conducted with a helical absorber using $LiBr+LiI+LiNO_3+LiCl$ and LiBr solutions. As a result, the heat and mass flux performance of $LiBr+LiI+LiNO_3+LiCl$ solution shows the tendency of $2{\sim}5%$ increase. Therefore, $LiBr+LiI+LiNO_3+LiCl$ solution can be taken consideration into applying to small-sized absorption chiller/heater because of using without crystal through high concentration as 4wt% comparing with LiBr solution.

• 센서학회지
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• 제18권4호
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• pp.311-315
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• 2009

This paper describes the characteristics of a poly 3C-SiC micro heater which was fabricated on AlN(0.1 $\mu$m)/3C-SiC(1.0 $\mu$m) suspended membranes by surface micro-machining technology. The 3C-SiC and AlN thin films which have wide energy band gap and very low lattice mismatch were used sensors for high temperature and voltage environments. The 3C-SiC thin film was used as micro heaters and temperature sensor materials simultaneously. The implemented 3CSiC RTD(resistance of temperature detector) and the power consumption of micro heaters were measured and calculated. The TCR(thermal coefficient of the resistance) of 3C-SiC RTD is about -5200 ppm/$^{\circ}C$ within a temperature range from 25 $^{\circ}C$ to 50 $^{\circ}C$ and -1040 ppm/$^{\circ}C$ at 500 $^{\circ}C$. The micro heater generates the heat about 500 $^{\circ}C$ at 10.3 mW. Moreover, durability of 3C-SiC micro heaters in high voltages is better than Pt micro heaters. A thermal distribution measured and simulated by IR thermovision and COMSOL is uniform on the membrane surface.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계합동학술대회 논문집
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• pp.197-201
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• 2002

This paper presents optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro electro mechanical system) applications using SOI and trench structures. The micro-heaters are based on a thermal measurement principle and contains thermal isolation regions of 10 ${\mu}m$-thick Si membranes consisting of oxide-filled trenches in the SOI membrane rim. The micro-heaters were fabricated with Pt-RTD on the same substrate via MgO buff layer between Pt thin-film and $SiO_2$ layer. The thermal characteristics of micro-heater with trench-free SOI membrane structure was $280^{\circ}C$ at input power 0.9 W; in the presence of 10 trenches, it was $580^{\circ}C$ due to reduction of the external thermal loss. Therefore, a micro-heater with trenches in SOI membrane rim structure provides a powerful and versatile alternative technology for enhancing the performance of micro-thermal sensors and actuators.

• 전기학회논문지P
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• 제57권4호
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• pp.408-411
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• 2008

As to this research is new structure of the semiconductor substrate heating apparatus. The fast thermoresponsive according to the direct heating structure of the heating plate layer adhering closely to the floor side of a substrate and the fast heat loss minimization can be accomplished. Moreover, the contact area of the sheath heater, which is the heating plate layer built-in heating apparatus, is increased, so that it has more heating valid area. For this, it adheres closely to the substrate, in which the photosensitive film is coated and the heating plate layer, adhering closely to the floor side of a substrate the mica layer which adheres closely to the floor side of the upper heating plate layer in order to minimize an insulation and heat loss, and the lower part of the mica layer and it is comprised of the floor plate layer. The heating plate layer forms the continued groove portion over the floor side whole. The sheath heater for heating a substrate is inserted with the groove portion and the heating plate layer is comprised. It is confirmed that by using the new substrate heating structure, the temperature change of the heating plate against the time is observed. Then, there is the electric power saving effect of about 40% in comparison with the existing method.

• 마이크로전자및패키징학회지
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• 제24권4호
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• pp.39-46
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• 2017

본 연구는 평판형 히터용 금속방열판상의 세라믹 절연층 제조, 즉 절연성 금속기판에 관한 것이다. 반도체나 디스플레이의 열처리 공정 등에 사용되는 평판형 히터를 제조함에 있어서, 온도 균일도를 높이기 위해 금속 방열판으로서 열전도율이 높고, 비교적 가벼우며, 가공성 좋은 알루미늄 합금 기판이 선호된다. 이 알루미늄 기판에 발열 회로 패턴을 형성하기 위해서는 금속 기판에 절연층으로서 고온 안정성이 우수한 세라믹 유전체막을 코팅하여야 한다. 금속 기판상에 세라믹 절연층을 형성함에 있어서 가장 빈번히 발생하는 첫 번째 문제는 금속과 세라믹의 이종재료 간의 큰 열팽창계수 차이와 약한 결합력에 의한 층간박리 및 균열발생이다. 두 번째 문제는 절연층의 소재 및 구조적 결함에 따른 절연파괴이다. 본 연구에서는 이러한 문제점 해소를 위해 금속소재 기판과 세라믹 절연층 사이에 완충층을 도입하여 이들 간의 기계적 매칭과 접합력 개선을 도모하였고, 다중코팅 방법을 적용하여 절연막의 품질과 내전압 특성을 개선하고자 하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집E
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• pp.63-68
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• 2001

An experimental study was carried out to identify the various regimes of natural convective boiling and to determine the Critical Heat Flux(CHF) on a 70mm square surface which is inclined at $180^{\circ}$(upward), $90^{\circ}, \;45^{\circ}$. The heater block made of copper with cartridge heaters is submerged in a water tank with windows for visualization. As the heat flux increases from $100kW/m^2$ to $1.1MW/m^2$, the heat transfer regime migrates from the nucleate boiling to film boiling and results in a rapid heat up of the heater block. An explosive vapor generation on the heated surface, whose size and frequency are characterized by the heat flux, is visualized by using a digital camcorder with $512{\times}512$ pixel size at 30fps.

• 설비공학논문집
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• 제9권3호
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• pp.268-275
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• 1997

Using the film-based particle image velocimetry, natural convective flows have been measured quantitatively in a rectangular enclosure with a heater located on the bottom surface. The success rate of the present interrogation method has been obtained as a function of the number of particle pairs and the distance between the particle pairs. The influence of the diffraction halo at the center have been effectively eliminated by rotating-subtracting the original Fourier-transformed image. By utilizing the coded multiple pulsed illumination with two different time intervals, the minimum measurable velocity have been improved. The results of the velocity distributions and the heat transfer correlations have been obtained for different locations of heater in the enclosure.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2004년도 제22회 춘계학술대회논문집
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• pp.601-604
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• 2004

Precise position and attitude control of pico-satellite requires huge number of impulses of the order of 10$^{-6}$ Ns. MEMS solid rocket array is a promising propulsion system but the higher degree of miniaturization causes unreliable operation mainly due to quenching. In order to breakthrough this situation, a novel design of solid micro-rocket is proposed, which generates tiny impulses repetitively from a single rocket not from array. This unique micro-rocket is based on the utilization of quenching, which causes propellant reaction to sustain only in a small area. A test chip of a micro solid propellant tank and micro heater array is fabricated and ignition test is conducted. Obtained results show the feasibility of this concept and future direction of this quenching-based propulsion is discussed.