• Title/Summary/Keyword: Film Form

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Effect of pH in Sodium Periodate based Slurry on Ru CMP (Sodium Periodate 기반 Slurry의 pH 변화가 Ru CMP에 미치는 영향)

  • Kim, In-Kwon;Cho, Byung-Gwun;Park, Jin-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.117-117
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    • 2008
  • In MIM capacitor, poly-Si bottom electrode is replaced with metal bottom electrode. Noble metals can be used as bottom electrodes of capacitors because they have high work function and remain conductive in highly oxidizing conditions. In addition, they are chemically very stable. Among novel metals, Ru (ruthenium) has been suggested as an alternative bottom electrode due to its excellent electrical performance, including a low leakage of current and compatibility to high dielectric constant materials. Chemical mechanical planarization (CMP) process has been suggested to planarize and isolate the bottom electrode. Even though there is a great need for development of Ru CMP slurry, few studies have been carried out due to noble properties of Ru against chemicals. In the organic chemistry literature, periodate ion ($IO_4^-$) is a well-known oxidant. It has been reported that sodium periodate ($NaIO_4$) can form $RuO_4$ from hydrated ruthenic oxide ($RuO_2{\cdot}nH_2O$). $NaIO_4$ exist as various species in an aqueous solution as a function of pH. Also, the removal mechanism of Ru depends on solution of pH. In this research, the static etch rate, passivation film thickness and wettability were measured as a function of slurry pH. The electrochemical analysis was investigated as a function of pH. To evaluate the effect of pH on polishing behavior, removal rate was investigated as a function of pH by using patterned and unpatterned wafers.

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A Study on the Electrical Characteristic of Organic Thin Film by Physical Vapor Deposition Method (진공증착법을 이용한 유기 박막의 전기적 특성에 관한 연구)

  • Park, Su-Hong
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.57 no.2
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    • pp.140-145
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    • 2008
  • The purpose of this paper is to discuss the fabrication of $\beta$-PVDF($\beta$-Polyvinylidene fluoride, ${\beta}-PVF_2$) organic thin films using the vapor deposition method. Vapor deposition was performed under the following conditions: the temperature of evaporator, the applied electric field, and the pressure of reaction chamber were $270^{\circ}C$, 142.4 kV/cm, and $2.0{\times}10^{-5}\;Torr$, respectively. The molecular structure of the evaporated organic thin films were evaluated by a FT-IR. The results showed that the characteristic absorption peaks of $\beta$-form crystal increase from 72% to 95.5% with an increase in the substrate temperature. In the analysis of the electric characteristics, the abnormal increases in the relative dielectric constant and the dielectric loss factor in the regions of low frequency and high temperature are known to be caused by inclusion of impurity carriers in the PVDF organic thin films. In order to analyze quantitatively the abnormalities in the conductivity mechanism caused by ionic impurities, the product of the ion density and the mobility that affect the electrical property in polymeric insulators is analyzed. In the case of a specimen produced by varying the substrate temperature from $30^{\circ}C$ to $105^{\circ}C$, the product of mobility and the ion density decreased from $4.626{\times}10^8$ to $8.47{\times}10^7/V{\cdot}cm{\cdot}s$. This result suggests that the higher the substrate temperature is maintained, the better excluded the impurities are, and the more electrically stable material can be obtained.

A Study on Shoe Bonding Mechanism Considering Recycling (재활용을 고려한 신발 접착 메커니즘에 관한 연구)

  • Song, Hyun-Su;Moon, Kwang-Sup;Mok, Hak-Soo
    • Resources Recycling
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    • v.27 no.2
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    • pp.3-10
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    • 2018
  • In this paper, Proposed bonding mechanism that can separate sole and upper for recycle and reuse of parts. It was confirmed that the PVC film with better physical properties than the existing parts was inserted between the sole and the upper. It was confirmed that the separation of the desired form can be induced. As a result of checking the performance of the proposed mechanism, it is confirmed that intentional separation is possible and the separated sole and upper can be recycled or reused.

A Study on the Costumes of Superhero in the Movie 'Watchmen' (영화 '왓치맨(Watchmen)'에 나타난 슈퍼히어로 의상 분석)

  • Kim, Seung-Ah;Ko, Hyun-Zin
    • Journal of the Korean Society of Costume
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    • v.63 no.5
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    • pp.151-166
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    • 2013
  • In order to create a national myth and be able to control international society, America with her short national history, used popular culture to accomplish these goals. The medium fit this purpose the best was the use of superhero characters based on comics. Born and developed from the 1930s through the 1960s, which could be seen as America's national crisis era, superhero characters were thorough advocates of American justice and was perfect for the role of spreading the legitimacy of American ideology. From the 1970s, superhero characters became part of movies and became even more influential through the Hollywood's massive film industry and the box office success. American ideology in superhero characters symbolically appeared in movie costumes. Starting with Superman and Batman, the very first and typical superhero characters' costumes work as metaphors for realization of American justice. After the 1980s, superheroes were newly developed through a genre called graphic novel and the most representative piece of this genre is Alan Moore's Watchmen. In the Watchmen, which was also turn into a movie in 2009, six changed superhero characters appear ranging from a non-human superhero, villain superhero, superhero with mental disorder and superhero with sexual impotency, the characters were never-seen-before superheroes with different aspects that connote introspection and philosophical ideology. The changed type of heroes and ideology became another form of heroes, and this brought changes to character costumes that were never considered before. The superhero costumes that used to symbolize America now express different types of superhero by borrowing exotic mythical elements, undressing, pastiche and daily life clothes. The superhero characters and their changes in costumes from Watchmen imply American popular culture's introspective tendency. Amongst these changes, we need to raise our critical vision towards popular culture.

Wax Barrier Effect on Migration Behaviors of Antiozonants in NR Vulcanizates (천연고무 가류물에서 왁스막이 오존노화방지제의 이동에 미치는 영향)

  • Choi, Sung-Seen
    • Elastomers and Composites
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    • v.34 no.2
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    • pp.147-155
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    • 1999
  • Waxes compounded into rubber migrate to the surface and form a protection film on the rubber surface. In general, antiozonants were used with wax to protect ozonation of rubber. Influence of wax barrier formed on the surface of a rubber vulcanizate on migration of antiozonants was studied using natural rubber (NR) vulcanizates containing various type waxes. IPPD (N-isopropyl-N'-phenyl-p-phenylenediamine), HPPD (N-l,3-dimethylbutyl-N'-phenyl-p-phenylenediamine), SBPPD (N,N'-di(sec-butyl)-p-phenylenediamine), and DMPPD (N,N'-di(1,4-dimethylpentyl)-p-phenylenediamine) were employed as antiozonants. Migration experiments were performed at constant temperatures of 60 and $80^{\circ}C$ for 10, 20, 30 days using a convection oven. The migration rates of the antiozonants in the vulcanizate without wax are faster than those in the vulcanizates containing waxes. The antiozonants migrate slower in the vulcanizate containing wax with a high molecular weight distribution than in the vulcanizate with a low one. The migration rates of DMPPD and SBPPD are faster than those of HPPD and IPPD.

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Characterization of Antimicrobial Polymeric Films for Food Packaging Applications (식품 포장용 항균 기능성 고분자 필름의 특성 및 평가)

  • 이주원;홍석인;손석민;장윤희
    • Food Science and Preservation
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    • v.10 no.4
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    • pp.574-583
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    • 2003
  • There have been a lot of research efforts on development of active food packaging structures and materials in the form of plastic films and containers, along with investigating novel polymers and bioactive compounds for packaging purpose, in order to improve storage stability and safety of foods during distribution and sale. Recently, great interests focus on antimicrobial package films, as an active packaging system, made from synthetic plastic polymer% and natural biopolymers containing various antimicrobial substances for food packaging applications. In this active system, substances are slowly released onto the food surface. However, antimicrobial activity as well as physical properties of the films can be significantly influenced by several factors such as polymer matrix, antimicrobial compounds, and interactions between polymers and compounds. Thus, this study reviews present status of antimicrobial food packaging films in overall performance aspects including types of polymers and active substances, test for antimicrobial activity, and changes in mechanical and antimicrobial properties by preparation method.

Spin Wave Interference in Magnetic Nanostructures

  • Yang, Hyun-Soo;Kwon, Jae-Hyun;Mukherjee, Sankha Subhra;Jamali, Mahdi;Hayashi, Masamitsu
    • Proceedings of the Korean Magnestics Society Conference
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    • 2011.12a
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    • pp.7-8
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    • 2011
  • Although yttrium iron garnet (YIG) has provided a great vehicle for the study of spin waves in the past, associated difficulties in film deposition and device fabrication using YIG had limited the applicability of spin waves to practical devices. However, microfabrication techniques have made it possible to characterize both the resonant as well as the travelling characteristics of spin waves in permalloy (Py). A variety of methods have been used for measuring spin waves, including Brillouin light scattering (BLS), magneto-optic Kerr effect (MOKE), vector network analyzer ferromagnetic resonance (VNA-FMR), and pulse inductive microwave magnetometry (PIMM). PIMM is one of the most preferred methodologies of measuring travelling spin waves. In this method, an electrical impulse is applied at one of two coplanar waveguides patterned on top of oxide-insulated Py, producing a local disturbance in the magnetization of the Py. The resulting disturbance travels down the Py in the form of waves, and is inductively picked up by the other coplanar waveguide. We investigate the effect of the pulse width of excitation pulses on the generated spin wave packets using both experimental results and micromagnetic simulations. We show that spin wave packets generated from electrical pulses are a superposition of two separate spin wave packets, one generated from the rising edge and the other from the falling edge, which interfere either constructively or destructively with one another, depending upon the magnitude and direction of the field bias conditions. A method of spin wave amplitude modulation is also presented by the linear superposition of spin waves. We use interfering spin waves resulting from two closely spaced voltage impulses for the modulation of the magnitude of the resultant spin wave packets.

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Effect of Thermal Imidization and Curing on Fluorescence Behavior of a Phenylethynyl-Terminated Poly(amic acid)

  • Cho, Donghwan;Yang, Gyeongmo;Drzal, Lawrence T.
    • Macromolecular Research
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    • v.11 no.5
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    • pp.297-302
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    • 2003
  • The imidization and cure reaction of a thermosetting phenylethynyl-terminated amic acid (LaRC PETI-5) in film form have been monitored as a function of temperature by means of a steady-state fluorescence technique using a front-face illumination method. The variation of the fluorescence emission spectra of LaRC PETI-5 can be divided into four temperature regions; Region I: below 15$0^{\circ}C$, Region II: 150-25$0^{\circ}C$, Region III: 250-35$0^{\circ}C$, and Region IV: above 35$0^{\circ}C$. The fluorescence spectra in Region I are largely influenced by residual N-methyl-2pyrrolidinone in the polymer and also slightly by partial imidization of the polymer. There is a combined effect of imidization and solvent removal on the fluorescence behavior in Region II. The spectra in Regions III and IV are due significantly to the cure reaction of LaRC PETI-5 and to a post-cure effect of the polyimide, respectively. This spectroscopic evidence indicating the transformation of the amic acid imide oligomer into the corresponding polyimide via imidization and cure, agrees well with thermal analysis results obtained previously. The intermediate stage of cure in the range of 250-30$0^{\circ}C$ predominantly influences the change of the fluorescence intensity. The later stage above 30$0^{\circ}C$ significantly influences the position of the spectrum. This fluorescence study also supports the mechanism proposed in earlier work that the crosslinking reaction takes place at the reaction sites in the conjugated polyene and the phenylethynyl end group in the polyimide chain.

Optical Behavior and Electrical Properties of Functional Dendrimer Thin Films (기능성 덴드리머 박막의 광학적 거동 및 전기적 특성)

  • 박재철;정상범;권영수
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.52 no.5
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    • pp.201-205
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    • 2003
  • We synthesized dendrimers containing light switchable units, azobenzene group. And the dendrimer containing 48 pyridinepropanol functional end group, which could form a complex structure with metal ions was synthesized. To apply to the molecular level devices or data storage system using Langmuir-Blodgett(LB) film, we firstly investigated the monolayer behavior using the surface pressure-area($\pi$-A) isotherms at air-water interface. And then the surface pressure shift of monolayer by light irradiation was also measured to the dendrimer with azobezene group. As a result, the monolayer of dendrimer with azobenzene group showed the reversible photo-switching behavior by the isomerization of azobenzene group in their periphery. The samples for electrical measurement were fabricated to two types which were pure dendrimer with pyridinepropanol group and its complexes with $Pt^4+$ ions by LB method. We have studied the electrical properties of the ultra thin dendrimer LB films investigated by the current-voltage(I-V) characteristics of Metal/Dendrimer LB films/Metal(MIM) structure. And we have investigated different results in the surface activity at the air-water interface as well as the electrical properties for the monolayers of pure dendrimer with pyridinevopanol group and its complex with $Pt^4+$ ions. In conclusion, it is demonstrated that the metal ion around dendrimer with pyri야nepropanol group can contribute to make formation of network structure among dendrimers and it result from the change of electrical properties. This results suggest that the dendrimers with azobenzene group and pvridinedropanol group can be applied to high efficient nano-device of molecular level.

Eelctrical and Structural Properties of $CaF_2$Films ($CaF_2$ 박막의 전기적, 구조적 특성)

  • 김도영;최석원;이준신
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.12
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    • pp.1122-1127
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    • 1998
  • Group II-AF_2$films such as $CaF_2$, $SrF_2$, and $BaF_2$ have been commonly used many practical applications such as silicon on insulatro(SOI), three-dimensional integrated circuits, buffer layers, and gate dielectrics in filed effect transistor. This paper presents electrical and structural properties of fluoride films as a gate dielectric layer. Conventional gate dielectric materials of TFTs like oxide group exhibited problems on high interface trap charge density($D_it$), and interface state incorporation with O-H bond created by mobile hydrogen and oxygen atoms. To overcome such problems in conventional gate insulators, we have investigated $CaF_2$ films on Si substrates. Fluoride films were deposited using a high vacuum evaporation method on the Si and glass substrate. $CaF_2$ films were preferentially grown in (200) plane direction at room temperature. We were able to achieve a minimum lattice mismatch of 0.74% between Si and $CaF_2$ films. Average roughness of $CaF_2$ films was decreased from 54.1 ${\AA}$ to 8.40 ${\AA}$ as temperature increased form RT and $300^{\circ}C$. Well fabricated MIM device showed breakdown electric field of 1.27 MV/cm and low leakage current of $10^{-10}$ A/$cm^2$. Interface trap charge density between $CaF_2$ film and Si substrate was as low as $1.8{\times}10^{11}cm^{-2}eV^{-1}$.

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