• 제목/요약/키워드: Field emission scanning electron microscope

검색결과 393건 처리시간 0.042초

다양한 방법에 의해 성장된 탄소 나노튜브의 전계방출 특성 (Field emission properties of carbon nanotubes grown by various methods)

  • 김부종;장한빛;김종필;박진석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2011년도 제42회 하계학술대회
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    • pp.1408-1409
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    • 2011
  • Carbon nanotubes (CNTs) were grown on conical tip substrates by using various methods such as electrophoretic deposition, dip-coating, and spray. The scanning electron microscope measurement showed that the spray method ascertained the most uniform deposition of CNTs. The CNT-emitter that was fabricated by the spray method revealed the lowest turn on voltage of electron emission and the highest emission current. In addition, the spray-produced CNT emitter showed the most stable long-term emission characteristics.

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Biological Applications of Helium Ion Microscopy

  • Kim, Ki Woo
    • Applied Microscopy
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    • 제43권1호
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    • pp.9-13
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    • 2013
  • The helium ion microscope (HIM) has recently emerged as a novel tool for imaging and analysis. Based on a bright ion source and small probe, the HIM offers advantages over the conventional field emission scanning electron microscope. The key features of the HIM include (1) high resolution (ca. 0.25 nm), (2) great surface sensitivity, (3) great contrast, (4) large depth-of-field, (5) efficient charge control, (6) reduced specimen damage, and (7) nanomachining capability. Due to the charge neutralization by flood electron beam, there is no need for conductive metal coating for the observation of insulating biological specimens by HIM. There is growing evidence that the HIM has substantial potential for high-resolution imaging of uncoated insulating biological specimens at the nanoscale.

Luminescence Study of Eu3+ Ions Doped BaMoO4 Nanoparticles

  • Bharat, L. Krishna;Lee, Soo Hyun;Yu, Jae Su
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.415.2-415.2
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    • 2014
  • Cost-effective, robust devices for solid-state lighting industry that converts electricity to light revolutionize the current lighting industry. Phosphor materials used in these devices should be synthesized in a low-cost and effective method for use in WLEDs. In this presentation, the synthesis of Eu3+ ions doped BaMoO4 phosphor samples by a facile synthesis process for red component of WLEDs will be shown. The tetragonal phase of the host lattice was substantiated by the X-ray diffraction patterns. The morphological studies were carried out by using a field-emission scanning electron microscope and transmission electron microscope. These confirmed the formation of a shuttle like particles with perpendicular protrusions in the middle of the particle. The photoluminescence (PL) properties exhibited good emission with a high asymmetry ratio when excited with ultraviolet B wavelengths (~ 280-315 nm). The cathodoluminescence (CL) spectra showed similar results to the PL spectra, indicating the rich red emission. The results suggest that this phosphor is a good material as red region component in the development of tri-band UV excitation based WLEDs.

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플라즈마 전해산화와 SiO2 졸-겔 코팅법을 이용한 마그네슘 합금의 내부식 표면처리 기술 (Corrosion Protection and Surface treatment of Mg alloy by Plasma Electrolytic Oxidation and SiO2 sol-gel coating method)

  • 박민주;박재영
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2015년도 추계학술대회 논문집
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    • pp.256-257
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    • 2015
  • 마그네슘 합금은 낮은 비중, 높은 비강도, 주조성 및 절삭가공성, 치수안정성, 내흠집성이 우수한 특성을 지니고 있는 경량금속으로써 우수한 주조성과 상온강도, 연신율을 나타낸다. 최근에는 마그네슘 합금을 사용한 IT 기기의 케이스 및 자동차 내, 외장 부품 등의 제품이 다양하게 출시되어지며 금속 질감의 감성 기능까지 적용시킨 전자 기기 제품에 대한 수요가 급증하고 있는 추세이다. 하지만 마그네슘 합금의 낮은 부식 저항성은 마그네슘 합금을 적용시킨 제품에 큰 단점으로 작용되고 있으며 이를 해결하기 위한 연구가 활발히 진행 중이다. 본 연구에서는 플라즈마 전해산화법과 실리카 졸-겔 코팅법을 이용하여 마그네슘 합금의 내부식성을 향상시킴과 동시에 금속질감의 감성 기능을 구현하고자 하였다. 플라즈마 전해산화 공정으로 형성된 산화피막층과 $SiO_2$ 코팅으로 형성된 코팅층의 표면과 단면에 대해서는 FE-SEM(Field emission Scanning Electron Microscope)과 FE-TEM(Field emission Transmission Electron Microscope)으로써 확인하였고 전기화학적 특성 분석을 통한 동전위(Potentiodynamic polarization)와 EIS(Eletrochemical Impedance Spectroscopy) 그리고 Salt spray등을 분석하였다.

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이온빔 조사된 저온 소성 인듐 아연 산화막을 이용한 액정의 고속 스위칭 특성 연구 (Fast liquid crystal switching performance on indium zinc oxide films with low curing temperature via ion-beam irradiation)

  • 오병윤
    • 전기전자학회논문지
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    • 제23권3호
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    • pp.904-909
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    • 2019
  • $100^{\circ}C$에 소성한 인듐 아연 산화막 (IZO)을 이온빔 처리하여, 균일할 수평 액정 배향을 구현하였다. 유리 기판 위에 코팅된 IZO 박막을 $100^{\circ}C$에 소성하고 액정 배향 기술로 이온빔을 사용하였다. 이것을 이용하여 얻어진 액정 배향의 특성을 분석하기 위해서, 편광 현미경과 결정 회전법을 사용하였다. 또한 이온빔 처리된 IZO 박막을 이용하여 만든 액정 셀이 높은 품질의 액정 소자에 충분한 열적 안정성을 가진다는 것을 확인할 수 있었다. 그리고 전계방출 주사 전자 현미경을 이용하여 이온빔의 IZO 박막의 표면에 미치는 영향을 분석하였다. 이것을 통하여 이온빔이 IZO 박막 표면의 거칠기를 변화시키고, 액정 배향에 영향을 준다는 것을 확인할 수 있었다. 마지막으로 IZO 박막으로 제작한 액정 셀의 전기-광학 특성을 측정하였다. 그리고 이것이 기존에 사용되는 러빙법 처리된 폴리이미드 박막으로 제작한 액정 셀보다 뛰어난 특성을 가진다는 것을 확인하였다. 또한 액정 고정 에너지를 측정하여 이것이 균일한 액정 배향을 구현하기 위한 적합한 특성을 가진다는 것을 확인하였다.

Facile Synthesis of SrWO4:Eu3+ Phosphors

  • Bharat, L. Krishna;Yu, Jae Su
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.643-643
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    • 2013
  • Recently, synthesis of low-dimensional nanostructures is gaining more importance due to their structural properties and growing potential applications. On the other hand, luminescent materials doped with rare earth ions have drawn immense attention. The commercial phosphors are based on many host materials. Among them, tungstates are being currently investigated by many research groups owing to a wide range of applications. Tungstates are formed by different metal cations (e.g., SrWO4, Na2WO4, NiWO4, Cr2WO6, and ZrW2O8) and their structure depends on the size of the metal cation. Tungstates with large bivalent cations (${\gg}0.1\;nm$) have the scheelite structure and the wolframite structure with smaller ions (<0.1 nm). Strontium tungstate has the scheelite structure which is tetragonal with space group I41/a. The luminescent properties of the tungstate have been extensively explored in application fields such as sensors, detectors, lasers, photoluminiscent devices, photo catalysts, etc. In this work, we synthesized SrWO4 phosphors with different Eu3+ concentrations by using a facile route. The morphology was analyzed by using a field-emission scanning electron microscope, which exhibits the spherical shape. Transmission electron microscope image revealed the spheres composed of nanoparticles. X-ray diffraction patterns confirmed their tetragonal shape. The photoluminescence excitation and emission spectra were analyzed by varying the Eu3+ concentration, which shows a dominant red emission.

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전계방사형 주사전자현미경에 의한 연속블록면 이미징 (Serial Block-Face Imaging by Field Emission Scanning Electron Microscopy)

  • 김기우
    • Applied Microscopy
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    • 제41권3호
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    • pp.147-154
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    • 2011
  • 후방산란전자(BSE)는 입사전자빔이 시료와 충돌하면서 발생한다. BSE 이미징은 시료의 화학적 특성을 구분할 수 있는 조성대비를 제공한다. 집속이온빔장치(FIB)는 전계방사형 주사전자현미경(FESEM)과 결합할 수 있으므로 이중빔 체계(FIB-FESEM)가 구현된다. 갈륨(Ga) 이온빔으로 10~100 nm 두께로 시료를 절삭할 수 있으므로 FIB-FESEM은 플라스틱으로 포매된 블록의 면을 z축 고해상도를 유지하며 연속적으로 이미징할 수 있다. BSE이미지의 대비를 반전시키면 투과전자현미경의 이미지와 유사하다. 연속블록면 이미징의 또 다른 방안으로써 특수한 초박절편기가 FESEM 내부에 장착된 것이 $3View^{(R)}$로 상용화되어 있다. 이로써 플라스틱으로 포매된 시료의 내부 구조를 넓은 면적을 연속적으로 이미징 할 수 있으므로 3차원 재구성도 용이하게 된다. 이러한 FESEM에 기반한 두 가지 방식은 복잡한 생물계의 총체적인 이해를 위하여 세포 및 세포 수준 이하의 구조물 간의 공간적 연관성을 규명하는 데 활용될 수 있다.

전기화학증착법으로 양극산화 알루미늄(AAO) 템플레이트를 이용한 Ni 나노와이어의 제조 및 성장에 관한 연구 (Fabrication and Growth of Ni Nanowires by using Anodic Aluminum Oxide(AAO) Template via Electrochemical Deposition)

  • 심성주;조권구;김유영
    • 한국분말재료학회지
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    • 제18권1호
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    • pp.49-55
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    • 2011
  • Ni nanowires were fabricated using anodic aluminum oxide (AAO) membrane as a template by electrochemical deposition. The nanowires were formed within the walls of AAO template with 200 nm in pore diameter. After researching proper voltage and temperature for electrochemical deposition, the length of Ni nanowires was controlled by deposition time and the supply of electrolyte. The morphology and microstructure of Ni nanowires were investigated by field emission scanning electron microscope (FE-SE), X-ray diffraction (XRD) and transmission electron microscope (TEM).

석면 분석방법에 대한 고찰 (Review on asbestos analysis)

  • 함승헌;황성호;윤충식;박동욱
    • 한국산업보건학회지
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    • 제19권3호
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    • pp.213-232
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    • 2009
  • This document was prepared to review and summarize the analytical methods for airborne and bulk asbestos. Basic principles, shortcomings and advantages for asbestos analytical instruments using phase contrast microscopy(PCM), polarized light microscopy(PLM), X-ray diffractometer (XRD), transmission electron microscopy(TEM), scanning electron microscopy(SEM) were reviewed. Both PCM and PLM are principal instrument for airborne and bulk asbestos analysis, respectively. If needed, analytical electron microscopy is employed to confirm asbestos identification. PCM is used originally for workplace airborne asbestos fiber and its application has been expanded to measure airborne fiber. Shortcoming of PCM is that it cannot differentiate true asbestos from non asbestos fiber form and its low resolution limit ($0.2{\sim}0.25{\mu}m$). The measurement of airborne asbestos fiber can be performed by EPA's Asbestos Hazard Emergency Response Act (AHERA) method, World Health Organization (WHO) method, International Standard Organization (ISO) 10312 method, Japan's Environmental Asbestos Monitoring method, and Standard method of Indoor Air Quality of Korea. The measurement of airborne asbestos fiber in workplace can be performed by National Institute for Occupational Safety and Health (NIOSH) 7400 method, NIOSH 7402 method, Occupational Safety and Health Administration (OSHA) ID-160 method, UK's Health and Safety Executive(HSE) Methods for the determination of hazardous substances (MDHS) 39/4 method and Korea Occupational Safety and Health Agency (KOSHA) CODE-A-1-2004 method of Korea. To analyze the bulk asbestos, stereo microscope (SM) and PLM is required by EPA -600/R-93/116 method. Most bulk asbestos can be identified by SM and PLM but one limitation of PLM is that it can not see very thin fiber (i.e., < $0.25{\mu}m$). Bulk asbestos analytical methods, including EPA-600/M4-82-020, EPA-600/R-93/116, OSHA ID-191, Laboratory approval program of New York were reviewed. Also, analytical methods for asbestos in soil, dust, water were briefly discussed. Analytical electron microscope, a transmission electron microscope equipped with selected area electron diffraction (SAED) and energy dispersive X-ray analyser(EDXA), has been known to be better to identify asbestiform than scanning electron microscope(SEM). Though there is no standard SEM procedures, SEM is known to be more suitable to analyze long, thin fiber and more cost-effective. Field emission scanning electron microscope (FE-SEM) imaging protocol was developed to identify asbestos fiber. Although many asbestos analytical methods are available, there is no method that can be applied to all type of samples. In order to detect asbestos with confidence, all advantages and disadvantages of each instrument and method for given sample should be considered.

폴리실리콘 기판 위에 형성된 코발트 니켈 복합실리사이드 박막의 열처리 온도에 따른 물성과 미세구조변화 (Characteristics and Microstructure of Co/Ni Composite Silicides on Polysilicon Substrates with Annealing Temperature)

  • 김상엽;송오성
    • 한국재료학회지
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    • 제16권9호
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    • pp.564-570
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    • 2006
  • Silicides have been required to be below 40 nm-thick and to have low contact resistance without agglomeration at high silicidation temperature. We fabricated composite silicide layers on the wafers from Ni(20 nm)/Co(20 nm)/poly-Si(70 nm) structure by rapid thermal annealing of $700{\sim}1100^{\circ}C$ for 40 seconds. The sheet resistance, surface composition, cross-sectional microstructure, and surface roughness were investigated by a four point probe, a X-ray diffractometer, an Auger electron spectroscopy, a field emission scanning electron microscope, and a scanning probe microscope, respectively. The sheet resistance increased abruptly while thickness decreased as silicidation temperature increased. We propose that the fast metal diffusion along the silicon grain boundary lead to the poly silicon mixing and inversion. Our results imply that we may consider the serious thermal instability in designing and process for the sub-0.1 um CMOS devices.