• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.08a
• /
• pp.178-178
• /
• 2010

With the scaling down of ULSI(Ultra Large Scale Integration) circuit of CMOS(Complementary Metal Oxide Semiconductor)based electronic devices, the electronic devices become more faster and smaller size that are promising field of semiconductor market. However, very narrow line width has some disadvantages. For example, because of narrow line width, deposition of conformal and thin barrier is difficult. Besides, proportion of barrier width is large, thus resistance is high. Conventional PVD(Physical Vapor Deposition) thin films are not able to gain a good quality and conformal layer. Hence, in order to get over these side effects, deposition of thin layer used of ALD(Atomic Layer Deposition) is important factor. Furthermore, it is essential that copper atomic diffusion into dielectric layer such as silicon oxide and hafnium oxide. If copper line is not surrounded by diffusion barrier, it cause the leakage current and devices degradation. There are some possible methods for improving the these secondary effects. In this study, TaNx, is used of Tertiarybutylimido tris (ethylamethlamino) tantalum (TBITEMAT), was deposited on the 24nm sized trench silicon oxide/silicon bi-layer substrate with good step coverage and high quality film using plasma enhanced atomic layer deposition (PEALD). And then copper was deposited on TaNx barrier using same deposition method. The thickness of TaNx was 4~5 nm. TaNx film was deposited the condition of under $300^{\circ}C$ and copper deposition temperature was under $120^{\circ}C$, and feeding time of TaNx and copper were 5 seconds and 5 seconds, relatively. Purge time of TaNx and copper films were 10 seconds and 6 seconds, relatively. XRD, TEM, AFM, I-V measurement(for testing leakage current and stability) were used to analyze this work. With this work, thin barrier layer(4~5nm) with deposited PEALD has good step coverage and good thermal stability. So the barrier properties of PEALD TaNx film are desirable for copper interconnection.

• Radiation Oncology Journal
• /
• v.30 no.1
• /
• pp.27-35
• /
• 2012

Purpose: To evaluate the effect of common three photon energies (6-MV, 10-MV, and 15-MV) on intensity-modulated radiation therapy (IMRT) plans to treat prostate cancer patients. Materials and Methods: Twenty patients with prostate cancer treated locally to 81.0 Gy were retrospectively studied. 6-MV, 10-MV, and 15-MV IMRT plans for each patient were generated using suitable planning objectives, dose constraints, and 8-field setting. The plans were analyzed in terms of dose-volume histogram for the target coverage, dose conformity, organs at risk (OAR) sparing, and normal tissue integral dose. Results: Regardless of the energies chosen at the plans, the target coverage, conformity, and homogeneity of the plans were similar. However, there was a significant dose increase in rectal wall and femoral heads for 6-MV compared to those for 10-MV and 15-MV. The $V_{20Gy}$ of rectal wall with 6-MV, 10-MV, and 15-MV were 95.6%, 88.4%, and 89.4% while the mean dose to femoral heads were 31.7, 25.9, and 26.3 Gy, respectively. Integral doses to the normal tissues in higher energy (10-MV and 15-MV) plans were reduced by about 7%. Overall, integral doses in mid and low dose regions in 6-MV plans were increased by up to 13%. Conclusion: In this study, 10-MV prostate IMRT plans showed better OAR sparing and less integral doses than the 6-MV. The biological and clinical significance of this finding remains to be determined afterward, considering neutron dose contribution.

• Journal of The Korean Society of Grassland and Forage Science
• /
• v.18 no.1
• /
• pp.55-60
• /
• 1998

This study was conducted to investigate the effects of the pasture types and the leveling methods of winding slope land for seedbed on the runoff, soil loss, botanical composition, dry matter yield of forage and economical value at the Experimental Field of Grassland and Forage Crops Division, National Livestock Research Institute, Suweon, from 1994 to 1995. The results obtained are summarized as follows: 1. Runoff of the improved land was higher than that of the unimproved land in the top grass and bottom grass. 2. Soil loss of the improved land was higher than that of the unimproved land in the top and bottom grasses in the first year. However, it was slightly higher in the unimproved land, and all of it were greatly decreased in the second year. 3. The percentage of grasses coverage was increased with the improved land in the first year, and it was not different between the improved land and unimproved land in the second year. Also, it was slightly increased in the bottom grasses. 4. Dry matter yield of grasses was increased with improved land at the top and bottom grasses. DM yield of grasses was increased in the top grasses in the first year and bottom grasses in the second year, respectively. 5. The establishment cost of grasses was decreased with wages decrement, and the management cost was saved about 1,116,000 won per ha with improved land. The results demonstrated that although soil loss was increased by leveling methods of improved land irrespective of pasture types in the first year, it was decreased with time little by little. Also, improved land was very good for grasses coverage, dry matter(DM) yield and economical value.

• Journal of Environmental Science International
• /
• v.13 no.12
• /
• pp.1023-1032
• /
• 2004

Rapid progress in urbanization has resulted in a change of the micro climate, especially in the urban area. In order to investigate the phenomenon of the heat island in the residential micro climate, a field survey was carried out by 4 sets of the residential type in Jeonju under typical winter synoptic condition. As analytic methode, it is used the comparison on the relation of the Land-to-Coverage Rate to Heat Island and Oxygen Concentration. And as a key question it is asked how stable characteristics of the micro climate will result from the survey of the Heat Island and the Oxygen Concentration, used as indicator. To ensure the trustworthy result of research, it is calculated the critical influence of the wind velocity and the Land-to-Covearage Rate. As a result of comparative analysis, it could be confirmed that the local temperatures in all sets of the residential type were higher than the average temperature in Jeonju. But the housing type A 'exclusive use for housing zone' has relativly the most stable and best living condition. On the contrary the residential type B and D has the worst toward the oxygen concentration in the time zone 9-12 a.m., which didn't reach the minimum of the oxygen concentration $20.5{\%}.$ It means that the higer the development and population density is, the worse is the situation of the Quality of Life in the residential types in accordance with the heat island and oxygon con­centration.

• Journal of Digital Contents Society
• /
• v.18 no.5
• /
• pp.923-932
• /
• 2017

Based on the metadata of BIGkids, a news big data system, this study analyzed the trends of news coverage by the major fields and topics related to Deoksugung Doldam-gil in mass media. In addition, we tried to interpret the space discourse of Deoksugung Doldam-gil which has been formed in contemporary period through the analysis of data related to BIGKinds, the contents of related reports and context. As a result of the analysis, the coverage of Deoksugung Doldam-gil was mostly reported in the field of 'Culture', and the news related to 'Cooking_Travel', 'Exhibition_Performance' and 'Broadcasting Entertainment.' Deoksugung Doldam-gil was categorized as the pedestrian freindly street, the cultural and artistic street, and the historical street, and interpreted the spatial discourse with related news contents.

• Journal of the Korean Society of Environmental Restoration Technology
• /
• v.15 no.1
• /
• pp.133-140
• /
• 2012

The study of Arundinaria munsuensis Y. Lee to this day was limited to the field of morphological species classification since its first discovery at Jiri mountain in the late 1990s. This native plants, one of Korean endemic species found in Jiri Mt. necessitates further studies about its use as revegetation plants or groundcover plants in urban areas. This study was launched from this need followed by summaries of results below related to its usage. This targeted species is a native Korean species which its natural distribution on the subalpine zone has merit for the wide range of climatic adaptation. Also, the coverage rate reached 78.3% in three years mostly by rhizome growth with an expectation of full coverage in four years providing less maintenance needs after planting. The net price for the construction of pot seedling methods of this plants is relatively economical than other normal revegetation construction methods. For these reasons, drilling for the plants on cut and fill soil slopes driven from pot seedling adapts Arundinaria munsuensis Y. Lee as efficient revegetation plant. Total construction cost for pot seedling work($30cm{\times}30cm$) of Arundinaria munsuensis was approximately 21,000won which is in reasonable price range when compared to other revegetation construction methods of disturbed slopes. As a native Korean plant, Arundinaria munsuensis has wide range of climatic adaptation with less maintenance requirement after planting. This study may suggest a strong possibility of Arundinaria munsuensis as a pot planting material in sloped area.

• KIPS Transactions on Computer and Communication Systems
• /
• v.5 no.9
• /
• pp.275-284
• /
• 2016

The software used in the nuclear safety field has been ensured through the development, validation, safety analysis, and quality assurance activities throughout the entire process life cycle from the planning phase to the installation phase. However, this evaluation through the development and validation process needs a lot of time and money, and there are limitations to ensure that the quality is improved enough. Therefore, the effort to calculate the reliability of the software continues for a quantitative evaluation instead of a qualitative evaluation. In this paper, we propose a reliability evaluation method for the software to be used for a specific operation of the digital controller in a nuclear power plant. After injecting weighted faults in the internal space of a developed controller and calculating the ability to detect the injected faults using diagnostic software, we can evaluate the software reliability of a digital controller in a nuclear power plant.

• Journal of Ecology and Environment
• /
• v.45 no.1
• /
• pp.17-23
• /
• 2021

Background: Montane wetlands are unique wetland ecosystems with distinct physicochemical characteristics, and Molinia japonica often makes dominant communities in montane wetlands in South Korea. In order to figure out the environmental characteristics of M. japonica habitats and the major factors for the growth of M. japonica, field surveys were conducted in five wetlands from September to October 2019. Also, soil was collected at every quadrats installed in surveyed wetlands to analyze the physicochemical features. Results: The relative coverage of M. japonica was higher in low latitude wetlands than in high latitude. Redundancy analysis showed that soil water content had the strongest effect on the growth of M. japonica (F = 23.0, p < 0.001). Soil water content, loss on ignition, and relative light intensity showed a high correlation with the density (R = 0.568, 0.550, 0.547, respectively, p < 0.01) and the coverage of M. japonica (R = 0.495, 0.385, 0.514, respectively, p < 0.01). Soil water content, loss on ignition, and pH were highly correlated with each other. Conclusions: Molinia japonica lives in acidic wetlands at high altitude in temperate zone of low latitude, with peat layer placed on the floor. Also, M. japonica prefers open spaces to secure enough light for photosynthesis. High shoot production of M. japonica resulted in adding new peat material in every year, and this layer enforces the environmental characteristics of M. japonica habitats. This study may provide insights for further understanding of the method how wetlands maintain acidic condition by itself in montane wetlands in temperate zone.

• The Bulletin of The Korean Astronomical Society
• /
• v.46 no.2
• /
• pp.62.1-62.1
• /
• 2021

Interstellar objects originate from other stellar systems. Thus, they contain information about the stellar systems that cannot be directly explored; the information includes the formation and evolution of the stellar systems and the possibility of life. The examples observed so far are 1l/Oumuamua in 2017 and 2l/Borisov in 2019. In this talk, we present the possibility of detecting interstellar objects using the Heliospheric Imagers designed for space weather research and forecasting by observing solar wind in interplanetary space between the Sun and Earth. Because interstellar objects are unpredictable events, the detection requires observations with wide coverage in spatial and long duration in temporal. The near-real time data availability is essential for follow-up observations to study their detailed properties and future rendezvous missions. Heliospheric Imagers provide day-side observations, inaccessible by traditional astronomical observations. This will dramatically increase the temporal and spatial coverage of observations and also the probability of detecting interstellar objects visiting our solar system, together with traditional astronomical observations. We demonstrate that this is the case. We have used data taken from Solar TErrestrial RElation Observatory (STEREO)/Sun Earth Connection Coronal and Heliospheric Investigation (SECCHI) HI-1. HI-1 is off-pointed from the Sun direction by 14 degrees with 20 degrees of the field of view. Using images observed from 2007 to 2019, we have found a total of 223 small objects other than stars, galaxies, or planets, indicative of the potential capability to detect interstellar objects. The same method can be applied to the currently operating missions such as the Parker Solar Probe and Solar Orbiter and also future L5 and L4 missions. Since the data can be analyzed in near-real time due to the space weather purposes, more detailed properties can be analyzed by follow-up observations in ground and space, and also future rendezvous missions. We discuss future possible rendezvous missions at the end of this talk.

• Convergence Security Journal
• /
• v.24 no.2
• /
• pp.3-8
• /
• 2024

Recently, in order to build a cyber threats have increased in number and complexity. These threats increase the risk of using personally owned devices for work. This research addresses how to utilize an AI-enabled breach analysis tool. To this end, we developed and proposed the feasibility of using an AI-based breach analysis tool that reduces the workload of analysts and improves analysis efficiency through automated analysis processes. This allows analysts to focus on more important tasks. The purpose of this research is to propose the development and utilization of an AI-based breach analysis tool. We propose a new research direction in the field of breach analysis and suggest that automated tools should be improved in performance, coverage, and ease of use to enable organizations to respond to cyberattacks more effectively. As a research method, we developed a breach analysis tool using A.I. technology and studied various use cases. We also evaluated the performance, coverage, and ease of use of automated tools, and conducted research on predicting and preventing breaches and automatically responding to them. As a result, this research will serve as a foundation for the development and utilization of AI-based breach analysis tools, which can be used to respond to cyberattacks more effectively through experiments.