• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.569-572
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• 2005

Technological feasibility of using recently-available femtosecond ultra short pulse lasers for advanced precision length metrology is investigated with emphasis on absolute distance measurements with $10{\mu}m$ ??resolution over extensive ranges. The idea of using femtosecond lasers for the measurement of absolute distances is based on the fact that a short pulse train is a mode-locked combination of discrete monochromatic light components spanning a wide spectral bandwidth. The synthetic wavelength is created from the repetition frequency, $f_r$ of the femtosecond laser and for more precise resolution, higher-order harmonics of the repetition frequency may be selected as the synthetic wavelength by using appropriate electronic filters.

• 한국레이저가공학회지
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• 제14권2호
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• pp.17-23
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• 2011

Active thin films are ubiquitous in the manufacture of all forms of flat panel display (FPD). One of the most widely employed thin films is indium tin oxide (ITO) and metal films used electrically conductive materials in display industries. ITO is widely used for fabrication of LCD, OLED device, and many kinds of optical applications because of transparency in visible range and its high conductivity and metal films are also widely employed as electrodes in various electric and display industries. It is important that removing specific area of layer, such as ITO or metal film on substrate, to fabricate and repair electrode in display industries. In this work, we demonstrate efficient selective ablation process to ITO and aluminum film on glass using a femtosecond laser (${\lambda}p=1025nm$) respectively. The femtosecond laser with wavelength of 1025nm, pulse duration of 400fs, and the repetition rate of 100kHz was used for selectively removing ITO and Al on glass in the air. We can successfully remove the ITO and Al films with various pulse energies using a femtosecond laser.

• 한국정밀공학회지
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• 제29권3호
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• pp.334-338
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• 2012

Electrical isolation of Ag nanowire, which is one of the candidates as electrode for display devices, on polymer with femtosecond pulse laser has been investigated. Line patterning to Ag nanowire with various pulse energy and scan speed were experimented. Duo to the results of the line patterning experiment, we fabricated the isolated squares and measured electrical resistance. The profile of the selectively ablated area was analyzed with AFM(Atomic Force Microscope). The width of the patterned line was $1.8\;{\mu}m$ and the depth was $1.6\;{\mu}m$. We demonstrated electrical isolation of the Ag nanowire using femtosecond laser by evaluating the electrical resistance of the sample between isolated and opened area.

• 한국레이저가공학회지
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• 제14권3호
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• pp.17-20
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• 2011

We fabricated a multi-layer diffraction grating inside fused silica glass by using a femtosecond laser direct writing method. The femtosecond laser with a wavelength of 515 nm, a pulse width of 250 fs, a repetition rate of 100 kHz, and an average output power of 6 W was used. Two layer diffraction grating with a grating period of $6{\mu}m$ was successfully fabricated with the layer gap of 0.5, 1, 2, 3, and $5{\mu}m$, respectively. Also, we investigated the diffraction pattern by illuminating a He-Ne laser beam. Finally, we demonstrated the diffraction grating with a grating period of $3{\mu}m$ by adjusting the gap of each layer with a grating period of $6{\mu}m$. Femtosecond laser direct writing technology of multi-layer has a potential to fabricate the diffraction grating with a grating period of below $1.5{\mu}m$.

• 한국레이저가공학회지
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• 제15권2호
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• pp.1-5
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• 2012

Gelatin is used as a model for soft biological tissues in studying laser interaction with the soft tissues. In this work, we analyze the interaction between gelatin and excimer and Ti:Sapphire femtosecond laser under various conditions, especially by varying the laser, laser fluence and pulse number. The results show that swelling of the surface and ablation depth can be controlled by adjusting the process parameters.

• Current Optics and Photonics
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• 제7권6호
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• pp.708-713
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• 2023

A robust all-fiber nonlinear amplifying loop-mirror-based mode-locked femtosecond laser is demonstrated. Power-dependent nonlinear phase shift in a Sagnac loop enables stable and power-efficient mode-locking working as an artificial saturable absorber. The pump power is adjusted to achieve the lowest intensity noise for stable long-term operation. The minimum pump power for mode-locking is 180 mW, and the optimal pump power is 300 mW. The lowest integrated root-mean-square relative intensity noise of a free-running mode-locked laser is 0.009% [integration bandwidth: 1 Hz-10 MHz]. The long-term repetition-rate instability of a free-running mode-locked laser is 10^-7 over 1,000 s averaging time. The repetition-rate phase noise scaled at 10-GHz carrier is -122 dBc/Hz at 10 kHz Fourier frequency. The demonstrated method can be applied as a seed source in high-precision real-time mid-infrared molecular spectroscopy.

• 전기학회논문지
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• 제56권2호
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• pp.367-373
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• 2007

The present study investigates numerically nonequilibrium energy transfer between electrons and phonons in metal thin films irradiated by ultrashort pulse lasers and it also provides the temporal and spatial variations of electron and phonon temperatures using the well-established two-temperature model(TTM) on the basis of the Boltzmann transport equation(BTE). This article predicts the crater shapes in gold film structures, and compares the results by using two-dimensional energy transport equation. From the results, it is found that nonequilibrium energy transfer between electrons and phonons takes place, and the equilibrium time increases with the increase of laser fluence. On the other hand, above threshold fluence the ablation time doesn't change nearly with increasing fluences. Compared with one-dimensional TTM, it also reveals that the temporal distributions of electron and phonon temperatures at the top surface estimated by using two-dimensional TTM have a similar tendency. The results show that two-dimensional TTM can simulate the crater shape of metals during the irradiation of femtosecond pulse lasers and the absorbed energy is propagated to z-direction faster than to r-direction.

• 대한기계학회논문집A
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• 제28권9호
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• pp.1270-1275
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• 2004

Standard positive photoresist techniques were adapted to generate nano-scale patterns of gold substrate using self-assembled monolayers (SAMs) and femtosecond laser. SAMs formed by the adsorption of alkanethiols onto gold substrate are employed as very thin photoresists, Alkanethiolates formed by the adsorption of alkanethiols are oxidized on exposure to UV light in the presence of air to alkylsulfonates. Specifically, it is known that deep UV light of wavelength less than 200nm is necessary for oxidation to occur. In this study, ultrafast laser of wavelength 800nm and pulse width 200fs is applied for photolithography. Results show that ultrafast laser of visible range wavelength can replace deep UV laser source for photo patterning using thin organic films. Femtosecond laser coupled near-field scanning optical microscopy facilitates not only the patterning of surface chemical structure, but also the creation of three-dimensional nano-scale structures by combination with suitable etching methods.

• Journal of the Optical Society of Korea
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• 제7권3호
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• pp.139-144
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• 2003

We have characterized the optical parametric chirped-pulse amplification of femtosecond Ti:sapphire laser pulses by using a BBO crystal. It is numerically verified that a high gain and a broad gain bandwidth can be obtained with a 532-nm pump laser. The dependence of the gain profile of OPA on phase matching angles, pump intensity, and crystal length is numerically investigated. Experimental results shows that the temporal fluctuation of a pump laser causes the modulation of an amplified spectrum in OPCPA.

• International Journal of Precision Engineering and Manufacturing
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• 제8권4호
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• pp.22-26
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• 2007

We describe a new way of implementing absolute displacement measurements by exploiting the optical comb of a femtosecond pulse laser as a wavelength ruler, The optical comb is stabilized by locking both the repetition rate and the carrier offset frequency to an Rb clock of frequency standard. Multiwavelength interferometry is then performed using the quasi-monochromatic beams of well-defined generated wavelengths by tuning an external cavity laser diode consecutively to preselected light modes of the optical comb. This scheme of wavelength synthesizing allows the measurement of absolute distances with a high precision that is traceable to the definition of time. The achievable wavelength uncertainty is $1.9{\times}10^{-10}$, which allows the absolute heights of gauge blocks to be determined with an overall calibration uncertainty of 15 nm (k = 1). These results demonstrate a successful industrial application of an optical frequency synthesis employing a femtosecond laser, a technique that offers many possibilities for performing precision length metrology that is traceable to the well-defined international definition of time.