• Title/Summary/Keyword: Femtosecond Laser Ablation

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Patterning of ITO on Touch Screen Panels using a beam shaped femtosecond laser (빔 쉐이핑된 펨토초 레이저를 이용한 터치스크린 패널의 ITO 박막 패터닝)

  • Kim, Myung-Ju;Kim, Yong-Hyun;Yoon, Ji-Wook;Choi, Won-Seok;Cho, Sung-Hak;Choi, Jiyeon
    • Laser Solutions
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    • v.16 no.4
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    • pp.1-6
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    • 2013
  • Femtosecond laser patterning of ITO on a touch screen panel with a shaped fs laser beam was investigated. A quasi flat-top beam was formed using a variable mask and a planoconvex lens. The spatial profile of the original Gaussian beam and the shaped beam were monitored by a CCD beam profiler. The laser patterned ITO film was examined using an optical microscope, Scanning Electron Microscope (SEM) with Energy Dispersive X-ray Spectroscopy (EDS), and Atomic Force Microscope (AFM). It turned out that the quality of the ITO pattern fabricated by a shaped beam is superior to that of the pattern without beam shaping in terms of debris generation, height of the craters, and homogeneity of the bottom. Optimum processing window was determined at the laser irradiance exhibiting 100% removal of Sn. The removal rate of In was measured to be 83%.

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Time-resolved transient reflective image on silicon surface after single-shot fs-laser pulse irradiation (단일 펨토초 레이저펄스를 이용한 실리콘 표면에서의 시분해 반사율 측정 연구)

  • Moon, Heh-Young;Sidhu, Mehra Singh;Lee, Hyun-Kyu;Jeoung, Sae-Chae
    • Laser Solutions
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    • v.14 no.4
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    • pp.21-27
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    • 2011
  • In this work, we have studied on time-resolved transient reflective image of single crystalline Si surface after single-shot fs-laser irradiation with varying the laser fluence under two different laser spot sizes. The temporal profiles of transient reflectivity changes as well as its maximum values at the early delay time were found to be strongly dependent on both the laser beam spot size and laser fluence. We have interpreted the dependence of transient reflectivity changes on the laser spot size in terms of a relaxation of the generated free carriers to the bulk silicon, which should be interacted with the plasma.

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Laser Microfabrication for Silicon Restrictor

  • Kim, Kwang-Ryul;Jeong, Young-Keun
    • Journal of Powder Materials
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    • v.15 no.1
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    • pp.46-52
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    • 2008
  • The restrictor, which is a fluid channel from a reservoir to a chamber inside a thermal micro actuator, has been fabricated using ArF and KrF excimer lasers, Diode-Pumped Solid State Lasers (DPSSL) and femtosecond lasers for a feasibility study. A numerical model of fluid dynamics for the actuator chamber and restrictor is presented. The model includes bubble formation and growth, droplet ejection through nozzle, and dynamics of fluid refill through the restrictor from a reservoir. Since an optimized and well-fabricated restrictor is important for a high frequency actuator, some special beam delivery setups and post processing techniques have been researched and developed. The effects of variations of the restrictor length, diameter, and tapered shapes are simulated and the results are analyzed to determine the optimal design. The numerical results of droplet velocity and volume are compared with the experimental results of a cylindrical-shaped actuator. It is found that the micro actuators having tapered restrictors show better high frequency characteristics than those having a cylindrical shape without any notable decrease of droplet volume. The laser-fabricated restrictors demonstrate initial feasibility for the laser direct ablation technique although more development is required.

Revealing the Spatial Distribution of Inorganic Elements in Rice Grains

  • Jeon, Ji Suk;Choi, Sung Hwa;Lee, Ji Yeon;Kim, Ji A;Yang, Young Mi;Song, Eun Ji;Kim, Jae Sung;Yang, Jung Seok;Kim, Kyong Su;Yoo, Jong Hyun;Kim, Hai Dong;Park, Kyung Su
    • Bulletin of the Korean Chemical Society
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    • v.35 no.11
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    • pp.3289-3293
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    • 2014
  • Femtosecond laser ablation (fs LA) was used in this study to identify pollution by heavy metals and the distribution of elemental nutrients at different rice milling ratios. Polished rice (degrees of milling of 3, 5, 7, 9, and 11) was collected from major Korean supermarkets and one sample thereof was selected. An internal quality control experiment was conducted using a rice flour certified reference material from the Korea Research Institute of Standards and Science (KRISS CRM) for the evaluation of the efficacy. To assess the effectiveness of the analysis method, the reliability was validated using a food analysis performance assessment scheme (FAPAS), with chili powder serving as an external quality control. The results of the analysis of the inorganic elements Ti, Ca, Al, Fe and Mn in white and brown rice with degrees of milling of 3, 5, 7, 9 and 11 using ICP-MS, ICP-OES and AAS revealed contents of 0.40, 49.2, 2.43, 5.36 and 10.3 mg/kg in white rice and 0.59, 78.0, 7.52, 11.0 and 18.5 mg/kg in brown rice, respectively. Among the elements, there were remarkable differences in the measured contents. By comparing the contents of the elements at different degrees of milling, Ti, Co, As, Ca, Al, Cu, Fe, and Mn were determined to be distributed on the surface of the rice grains, whereas the contents of Cd and Pb increased toward the center of the rice grains, and Si was evenly distributed. After the quantitative analysis of rice samples polished to different degrees of milling, Ca and Al, which were contained in large amounts, and Si were analyzed with specificity by fs LA. The results show that Ca and Al were distributed in the rice husk (protective covering of rice) and Si was distributed in all parts of the rice.